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YAMADA Isao  山田 公

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… Alternative Names

山田 公

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Researcher Number 00026048
Affiliation (based on the past Project Information) *help 2000: Emeritus Prof., 名誉教授
1999: 京都大学, 大学院・工学研究科, 教授
1998 – 1999: Faculty of Engineering, Professor, 工学研究科, 教授
1989 – 1997: 京都大学, 工学部, 教授
1986 – 1987: 京都大学, 工学部, 教授
Review Section/Research Field
Principal Investigator
表面界面物性 / Electronic materials/Electric materials / Applied materials / 電子機器工学
Except Principal Investigator
Electronic materials/Electric materials / Material processing/treatments / 広領域 / 電子材料工学
Keywords
Principal Investigator
クラスターイオン / スパッタリング / イオン注入 / 質量分析 / エッチング / 表面反応 / SIMS / cluster ion / STM / 多体衝突 … More / ion implantation / LSI / Al / ICB / 走査トンネル顕微鏡 / エピタキシャル成長 / 薄膜形成 / 化学スパッタリング / 反応生成物 / 非線形 / shallow junction / molecular dynamics / Ar cluster / non-linear / secondary ion / 多価イオン / TOF / 損傷形成 / ホウ素クラスター / フラーレン / 浅い接合 / 分子動力学 / アルゴンクラスター / 2次イオン / interstitial / induced reaction / multiple collision / enhaned reaction / TEM / 格子間原子 / 励起反応 / 増速拡散 / 透過電子顕微鏡 / film formation / surface cleaning / lateral sputtering / low energy ion beam / high density irradiation effect / gas cluster / 極浅接合形成 / 高密度照射 / スパッタ / フリージェットノズル / ラバルノズル / クラスターイオンビーム技術 / クラスターイオン注入 / 多体衝突効果 / ラテラルスパッタ効果 / イオンビーム / 表面クリーニング / ラテラルスパッタ / 低エネルギーイオンビーム / 高密度照射効果 / ガスクラスター / tunnel current / resonant tunnel device / quantum effect device / Al_2O_3 multilayr structure / on-line vacuum process / epitaxial growth / トンネルデバイス / 反応性ICB法 / ICB法 / 低温成長 / 超薄膜 / 共鳴トンネルダイオード / 積層構造 / エピタキシー / Al_2O_3積層構造 / トンネル電流 / 共鳴トンネルデバイス / 量子効果デバイス / A1_2O_3積層構造 / A1 / 真空一貫プロセス / Atomically Flat Surface / Clean Surface Formation / Shallow Implantation / Film Formation / Gas Cluster / Ionized Cluster Beam / Joint Research / International Exchange / 配列制御 / エキシマレ-ザ- / クラスタ-イオンビ-ム / クラスタ- / 超平坦表面 / 清浄表面 / 膜形成 / カズソースクラスター / クラスターイオンビーム / 共同研究 / 国際交流 … More
Except Principal Investigator
X線用CCD / 撮像型蛍光比例計数管 / ICB蒸着法 / X線反射鏡 / X線望遠鏡 / 応力の影響 / 速度論的安定性 / 熱力学的安定性 / 界面介在物 / ショットキ-障壁高さ / コンタクト構造の安定性 / コンタクト抵抗率 / InOx / 薄膜形成 / SiC / イオンビーム / クラスター / クラスターイオン / X線ボロメ-タ- / 超精密非球面加工 / 多層膜反射鏡 / 拡散障壁 / carbon film / film formation / high density irradiation / multicollisions / Argon cluster / fullerene / macroparticle / ビッカース硬度 / 非線形照射効果 / Arクラスター / 炭素薄膜 / 高密度照射効果 / 多体衝突効果 / アルゴンクラスター / フラーレン / 多原子イオンビーム / TRANSPARENT CONDUCTING FILM / FILM FORMATION / SPUTTERING / ETCHING / OXIDIZATION / CLUSTER ION / 導電性透明薄膜 / InO_x / スパッタリング / エッチング / 酸化反応 / FT-IR spectra / Rutherford backscattering / Chemical durability / Cancer / Silica glass / Phosphorus / Ion implantation / Radiotherapy / フーリエ変換赤外反射分光 / 高周波誘導結合プラズマ発光分析 / 放射線治療 / フーリエ変換赤外スペクトル / ラザフォード後方散乱法 / 化学的耐久性 / 癌 / シリカガラス / リン / イオン注入 / 放射線療法 / 超LSI / クラスタ / エピタキシ / 結晶性制御 / 高機能デバイス / 低温形成 / 粒界拡散 / ICB-マイクロ波イオン源併用方式 / 超低速イオンビーム / イオンビームプロセス / マイグレーション効果 / 原子配列制御 / 反応性ガス / ガスクラスター / 界面構造のダイナミクス / X線ボロメーター / 超精密平面研削 / 多層膜 Less
  • Research Projects

    (19 results)
  • Co-Researchers

    (44 People)
  •  A STUDY ON ULTRA-HARD FILM FORMATION BY MACROPARTICLE ION BEAM WITH HIGH ENERGY

    • Principal Investigator
      TAKOKA Gikan
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      KYOTO UNIVERSITY
  •  ガスクラスターイオンビームと固体表面との反応素過程に関する研究Principal Investigator

    • Principal Investigator
      山田 公
    • Project Period (FY)
      1997
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  Material Processing with Cluster Ion BeamsPrincipal Investigator

    • Principal Investigator
      YAMADA Isao
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for international Scientific Research
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      KYOTO UNIVERSITY
  •  Nonlinear Phenomena in Cluster Ion impact on Solid SurfacesPrincipal Investigator

    • Principal Investigator
      YAMADA Isao
    • Project Period (FY)
      1997 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      表面界面物性
    • Research Institution
      KYOTO UNIVERSITY
  •  ガスクラスターイオンビームと固体表面との反応素過程に関する研究Principal Investigator

    • Principal Investigator
      山田 公
    • Project Period (FY)
      1996
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  SURFACE MODIFICATION BY HIGH INTENSITY ION BEAM IRRADIATION

    • Principal Investigator
      MATSUO Jiro
    • Project Period (FY)
      1996 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Material processing/treatments
    • Research Institution
      KYOTO UNIVERSITY
  •  ガスクラスターイオンビームと固体表面との反応素過程に関する研究Principal Investigator

    • Principal Investigator
      山田 公
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  反応性ガスのクラスター生成と原子配列制御への応用

    • Principal Investigator
      TAKAOKA Gikan
    • Project Period (FY)
      1992
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      電子材料工学
    • Research Institution
      Kyoto University
  •  Study on epitaxial metal/insulator multilayr structure formationPrincipal Investigator

    • Principal Investigator
      YAMADA Isao
    • Project Period (FY)
      1992 – 1994
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子機器工学
    • Research Institution
      KYOTO UNIVERSITY
  •  Study on development of cluster ion implantation system for LSIPrincipal Investigator

    • Principal Investigator
      YAMADA Isao
    • Project Period (FY)
      1992 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      Applied materials
    • Research Institution
      KYOTO UNIVERSITY
  •  Properties of Glass Implanted with Phosphorus for Radiotherapy

    • Principal Investigator
      KOKUBO Tadashi
    • Project Period (FY)
      1992 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      広領域
    • Research Institution
      KYOTO UNIVERSITY
  •  界面反応の物理・化学

    • Principal Investigator
      大泊 巌
    • Project Period (FY)
      1991
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Waseda University
  •  X線望遠鏡光学

    • Principal Investigator
      山下 広順
    • Project Period (FY)
      1991
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      宇宙科学研究所
  •  Fundamental Research on Ionized Cluster Beam ProcessesPrincipal Investigator

    • Principal Investigator
      YAMADA Isao
    • Project Period (FY)
      1991 – 1992
    • Research Category
      Grant-in-Aid for international Scientific Research
    • Research Institution
      Kyoto University
  •  X線望遠鏡光学

    • Principal Investigator
      山下 廣順
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      宇宙科学研究所
  •  界面反応の物理・化学

    • Principal Investigator
      大泊 巌
    • Project Period (FY)
      1989 – 1991
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Waseda University
  •  X線望遠鏡光学

    • Principal Investigator
      山下 広順
    • Project Period (FY)
      1989
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Osaka University
  •  界面反応の物理・化学

    • Principal Investigator
      大泊 巌
    • Project Period (FY)
      1989 – 1991
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Waseda University
  •  クラスターイオンビーム技術(蒸着と結晶性制御)に関する研究

    • Principal Investigator
      高木 俊宜, 高木 俊宣
    • Project Period (FY)
      1983 – 1987
    • Research Category
      Grant-in-Aid for Specially Promoted Research
    • Research Institution
      Kyoto University
  • 1.  TAKAOKA Gikan (90135525)
    # of Collaborated Projects: 12 results
    # of Collaborated Products: 0 results
  • 2.  MATSUO Jirou (40263123)
    # of Collaborated Projects: 9 results
    # of Collaborated Products: 0 results
  • 3.  山下 広順 (80022622)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 4.  大泊 巌 (30063720)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 5.  津田 穣 (90009506)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 6.  原 史朗 (60218617)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 7.  大橋 隆哉 (70183027)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 8.  国枝 秀世 (00126856)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 9.  難波 義治 (40029129)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 10.  越後谷 淳一 (00005539)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 11.  北原 和夫 (20107692)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 12.  常深 博 (90116062)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 13.  KOKUBO Tadashi (30027049)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  HIRAOKA Masahiro (70173218)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  MIYAJI Fumiaki (80219782)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  松岡 勝 (30013668)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  大坂 敏明 (50112991)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 18.  川原田 洋 (90161380)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 19.  高木 俊宜 (10025801)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 20.  臼井 博明 (60176667)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 21.  八尾 健 (50115953)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 22.  MAREK Sosnowski
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 23.  MATSUDA Kouji
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 24.  YAMANISHI Kenichirou
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 25.  TOMODA Toshimasa
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 26.  EBISAWA Yukihiro
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 27.  CLAYTON C.R.
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 28.  GOLOVCHENKO J.A.
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 29.  KIMMERING L.C.
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 30.  高木 俊宣
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 31.  J. Nothby
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 32.  Y. Kuk
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 33.  W.L. Brown
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 34.  WALTER L. Brown
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 35.  USUI Hiroaki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 36.  YOUNG Kuk
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 37.  JAN Northby
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 38.  NORTHBY J.
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 39.  KUK Y.
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 40.  SOSNOWSKI M.
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 41.  BROWN W.L.
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 42.  松永 幸二
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 43.  海老沢 幸弘
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 44.  GOLOVCHENKO ジェイ エー
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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