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YAMADA Isao
山田 公
Researcher Number
00026048
Affiliation
*help
2000 : Emeritus Prof., 名誉教授
1999 : 京大, 工学(系)研究科, 教授
1999 : 京都大学, 大学院・工学研究科, 教授
1998 – 1999 : Faculty of Engineering, Professor, 工学研究科, 教授
1996 – 1998 : 京大, 工学部, 教授
1989 – 1997 : 京都大学, 工学部, 教授
1986 – 1987 : 京都大学, 工学部, 教授
Research Field
Except Principal Investigator
Electronic materials/Electric materials
/
表面界面物性
/
Applied materials
/
広領域
/
Material processing/treatments
/
電子機器工学
/
電子材料工学
Keywords
Except Principal Investigator
クラスターイオン / スパッタリング / イオン注入 / 薄膜形成 / エッチング / 界面介在物 / X線望遠鏡 / 表面反応 / X線用CCD / コンタクト構造の安定性
…
More
/ 質量分析 / 撮像型蛍光比例計数管 / 速度論的安定性 / ショットキ-障壁高さ / 応力の影響 / イオンビーム / コンタクト抵抗率 / X線反射鏡 / ICB蒸着法 / 熱力学的安定性 / 化学スパッタリング / SiC / 反応生成物 / cluster ion / X線ボロメ-タ- / アルゴンクラスター / 非線形 / ion implantation / ガスクラスター / LSI / フラーレン / STM / 拡散障壁 / film formation / 多層膜反射鏡 / 多体衝突効果 / 走査トンネル顕微鏡 / InOx / エピタキシャル成長 / 超精密非球面加工 / クラスター / 高密度照射効果 / SIMS / ICB / 多体衝突 / Al / ラテラルスパッタ効果 / Argon cluster / 共鳴トンネルデバイス / ラバルノズル / interstitial / エピタキシ / カズソースクラスター / Silica glass / 結晶性制御 / Phosphorus / トンネル電流 / シリカガラス / Ar cluster / low energy ion beam / Clean Surface Formation / 癌 / ラザフォード後方散乱法 / ICB-マイクロ波イオン源併用方式 / フーリエ変換赤外スペクトル / resonant tunnel device / molecular dynamics / 超精密平面研削 / Arクラスター / epitaxial growth / 酸化反応 / Atomically Flat Surface / 反応性ICB法 / Ion implantation / 透過電子顕微鏡 / 低温成長 / 多原子イオンビーム / Ionized Cluster Beam / carbon film / surface cleaning / クラスタ / ビッカース硬度 / 炭素薄膜 / International Exchange / 導電性透明薄膜 / Joint Research / high density irradiation effect / 表面クリーニング / FILM FORMATION / InO_x / tunnel current / スパッタ / 超薄膜 / 原子配列制御 / non-linear / 損傷形成 / リン / enhaned reaction / 化学的耐久性 / secondary ion / TEM / 積層構造 / 励起反応 / Chemical durability / Al_2O_3 multilayr structure / 放射線療法 / トンネルデバイス / 共鳴トンネルダイオード / 超LSI / 多価イオン / lateral sputtering / Film Formation / ICB法 / shallow junction / クラスターイオンビーム / 非線形照射効果 / 国際交流 / 高機能デバイス / 共同研究 / 増速拡散 / quantum effect device / クラスターイオン注入 / 清浄表面 / ホウ素クラスター / multicollisions / gas cluster / 2次イオン / クラスターイオンビーム技術 / OXIDIZATION / 配列制御 / fullerene / SPUTTERING / X線ボロメーター / クラスタ-イオンビ-ム / Cancer / high density irradiation / 真空一貫プロセス / induced reaction / 超平坦表面 / フーリエ変換赤外反射分光 / エキシマレ-ザ- / イオンビームプロセス / 浅い接合 / FT-IR spectra / Gas Cluster / 粒界拡散 / 放射線治療 / 低温形成 / TOF / ETCHING / CLUSTER ION / クラスタ- / macroparticle / A1 / 膜形成 / 界面構造のダイナミクス / 超低速イオンビーム / 極浅接合形成 / 分子動力学 / 高密度照射 / multiple collision / マイグレーション効果 / エピタキシー / Rutherford backscattering / フリージェットノズル / ラテラルスパッタ / 多層膜 / Shallow Implantation / 高周波誘導結合プラズマ発光分析 / on-line vacuum process / 格子間原子 / 低エネルギーイオンビーム / A1_2O_3積層構造 / Radiotherapy / 反応性ガス / Al_2O_3積層構造 / 量子効果デバイス / TRANSPARENT CONDUCTING FILM
Less
Research Projects
(
19
results)
Co-Researchers
(
44
People)
Project Start Year(Newest)
Project Start Year(Oldest)
A STUDY ON ULTRA-HARD FILM FORMATION BY MACROPARTICLE ION BEAM WITH HIGH ENERGY
Principal Investigator
TAKOKA Gikan
Project Period (FY)
1998 – 2000
Research Category
Grant-in-Aid for Scientific Research (B).
Research Field
Electronic materials/Electric materials
Research Institution
KYOTO UNIVERSITY
ガスクラスターイオンビームと固体表面との反応素過程に関する研究
Principal Investigator
Principal Investigator
山田 公
Project Period (FY)
1997
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
Material Processing with Cluster Ion Beams
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1997 – 1998
Research Category
Grant-in-Aid for international Scientific Research
Research Field
Electronic materials/Electric materials
Research Institution
KYOTO UNIVERSITY
Nonlinear Phenomena in Cluster Ion impact on Solid Surfaces
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1997 – 1999
Research Category
Grant-in-Aid for Scientific Research (A)
Research Field
表面界面物性
Research Institution
KYOTO UNIVERSITY
SURFACE MODIFICATION BY HIGH INTENSITY ION BEAM IRRADIATION
Principal Investigator
MATSUO Jiro
Project Period (FY)
1996 – 1997
Research Category
Grant-in-Aid for Scientific Research (C)
Research Field
Material processing/treatments
Research Institution
KYOTO UNIVERSITY
ガスクラスターイオンビームと固体表面との反応素過程に関する研究
Principal Investigator
Principal Investigator
山田 公
Project Period (FY)
1996
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
ガスクラスターイオンビームと固体表面との反応素過程に関する研究
Principal Investigator
Principal Investigator
山田 公
Project Period (FY)
1995
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
反応性ガスのクラスター生成と原子配列制御への応用
Principal Investigator
高岡 義寛
Project Period (FY)
1992
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電子材料工学
Research Institution
Kyoto University
Study on epitaxial metal/insulator multilayr structure formation
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子機器工学
Research Institution
KYOTO UNIVERSITY
Study on development of cluster ion implantation system for LSI
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
Applied materials
Research Institution
KYOTO UNIVERSITY
Properties of Glass Implanted with Phosphorus for Radiotherapy
Principal Investigator
KOKUBO Tadashi
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
広領域
Research Institution
KYOTO UNIVERSITY
界面反応の物理・化学
Principal Investigator
大泊 巌
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Waseda University
X線望遠鏡光学
Principal Investigator
山下 広順
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
宇宙科学研究所
Fundamental Research on Ionized Cluster Beam Processes
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1991 – 1992
Research Category
Grant-in-Aid for international Scientific Research
Research Institution
Kyoto University
X線望遠鏡光学
Principal Investigator
山下 廣順
, 山下 広順
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
宇宙科学研究所
界面反応の物理・化学
Principal Investigator
大泊 巌
Project Period (FY)
1989 – 1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Waseda University
X線望遠鏡光学
Principal Investigator
山下 広順
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Osaka University
界面反応の物理・化学
Principal Investigator
大泊 巌
Project Period (FY)
1989 – 1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Waseda University
クラスターイオンビーム技術(蒸着と結晶性制御)に関する研究
Principal Investigator
高木 俊宜
, 高木 俊宣
Project Period (FY)
1983 – 1987
Research Category
Grant-in-Aid for Specially Promoted Research
Research Institution
Kyoto University
# of Projects (Dsc)
# of Projects (Asc)
1.
TAKAOKA Gikan
(90135525)
# of Collaborated Projects :
12results
# of Collaborated Products :
0results
2.
MATSUO Jirou
(40263123)
# of Collaborated Projects :
9results
# of Collaborated Products :
0results
3.
山下 広順
(80022622)
# of Collaborated Projects :
4results
# of Collaborated Products :
0results
4.
大泊 巌
(30063720)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
5.
津田 穣
(90009506)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
6.
原 史朗
(60218617)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
7.
大橋 隆哉
(70183027)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
8.
国枝 秀世
(00126856)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
9.
難波 義治
(40029129)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
10.
越後谷 淳一
(00005539)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
11.
北原 和夫
(20107692)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
12.
常深 博
(90116062)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
13.
KOKUBO Tadashi
(30027049)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
14.
HIRAOKA Masahiro
(70173218)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
15.
MIYAJI Fumiaki
(80219782)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
16.
松岡 勝
(30013668)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
17.
大坂 敏明
(50112991)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
18.
川原田 洋
(90161380)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
19.
高木 俊宜
(10025801)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
20.
臼井 博明
(60176667)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
21.
八尾 健
(50115953)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
22.
MAREK Sosnowski
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
23.
MATSUDA Kouji
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
24.
YAMANISHI Kenichirou
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
25.
TOMODA Toshimasa
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
26.
EBISAWA Yukihiro
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
27.
CLAYTON C.R.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
28.
GOLOVCHENKO J.A.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
29.
KIMMERING L.C.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
30.
高木 俊宣
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
31.
J. Nothby
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
32.
Y. Kuk
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
33.
W.L. Brown
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
34.
WALTER L. Brown
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
35.
USUI Hiroaki
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
36.
YOUNG Kuk
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
37.
JAN Northby
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
38.
NORTHBY J.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
39.
KUK Y.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
40.
SOSNOWSKI M.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
41.
BROWN W.L.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
42.
松永 幸二
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
43.
海老沢 幸弘
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
44.
GOLOVCHENKO ジェイ エー
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
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