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YAMADA Isao
山田 公
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Alternative Names
山田 公
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Researcher Number
00026048
Affiliation (based on the past Project Information)
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2000: Emeritus Prof., 名誉教授
1999: 京都大学, 大学院・工学研究科, 教授
1998 – 1999: Faculty of Engineering, Professor, 工学研究科, 教授
1989 – 1997: 京都大学, 工学部, 教授
1986 – 1987: 京都大学, 工学部, 教授
Review Section/Research Field
Principal Investigator
電子機器工学
/
Applied materials
/
Electronic materials/Electric materials
/
表面界面物性
Except Principal Investigator
電子材料工学
/
広領域
/
Material processing/treatments
/
Electronic materials/Electric materials
Keywords
Principal Investigator
クラスターイオン / スパッタリング / 表面反応 / エッチング / 質量分析 / イオン注入 / 非線形 / 反応生成物 / 化学スパッタリング / 薄膜形成
…
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/ エピタキシャル成長 / 走査トンネル顕微鏡 / ICB / Al / LSI / ion implantation / 多体衝突 / STM / cluster ion / SIMS / 国際交流 / 共同研究 / クラスターイオンビーム / カズソースクラスター / 膜形成 / 清浄表面 / 超平坦表面 / クラスタ- / クラスタ-イオンビ-ム / エキシマレ-ザ- / 配列制御 / International Exchange / Joint Research / Ionized Cluster Beam / Gas Cluster / Film Formation / Shallow Implantation / Clean Surface Formation / Atomically Flat Surface / 真空一貫プロセス / A1 / A1_2O_3積層構造 / 量子効果デバイス / 共鳴トンネルデバイス / トンネル電流 / Al_2O_3積層構造 / エピタキシー / 積層構造 / 共鳴トンネルダイオード / 超薄膜 / 低温成長 / ICB法 / 反応性ICB法 / トンネルデバイス / epitaxial growth / on-line vacuum process / Al_2O_3 multilayr structure / quantum effect device / resonant tunnel device / tunnel current / ガスクラスター / 高密度照射効果 / 低エネルギーイオンビーム / ラテラルスパッタ / 表面クリーニング / イオンビーム / ラテラルスパッタ効果 / 多体衝突効果 / クラスターイオン注入 / クラスターイオンビーム技術 / ラバルノズル / フリージェットノズル / スパッタ / 高密度照射 / 極浅接合形成 / gas cluster / high density irradiation effect / low energy ion beam / lateral sputtering / surface cleaning / film formation / 透過電子顕微鏡 / 増速拡散 / 励起反応 / 格子間原子 / TEM / enhaned reaction / multiple collision / induced reaction / interstitial / 2次イオン / アルゴンクラスター / 分子動力学 / 浅い接合 / フラーレン / ホウ素クラスター / 損傷形成 / TOF / 多価イオン / secondary ion / non-linear / Ar cluster / molecular dynamics / shallow junction
…
More
Except Principal Investigator
コンタクト抵抗率 / コンタクト構造の安定性 / ショットキ-障壁高さ / 界面介在物 / 熱力学的安定性 / 速度論的安定性 / 応力の影響 / X線望遠鏡 / X線反射鏡 / ICB蒸着法 / 撮像型蛍光比例計数管 / X線用CCD / 拡散障壁 / 多層膜反射鏡 / 超精密非球面加工 / X線ボロメ-タ- / クラスターイオン / クラスター / イオンビーム / SiC / 薄膜形成 / InOx / 多層膜 / 超精密平面研削 / X線ボロメーター / 界面構造のダイナミクス / ガスクラスター / 反応性ガス / 原子配列制御 / マイグレーション効果 / イオンビームプロセス / 超低速イオンビーム / ICB-マイクロ波イオン源併用方式 / 粒界拡散 / 低温形成 / 高機能デバイス / 結晶性制御 / エピタキシ / クラスタ / 超LSI / 放射線療法 / イオン注入 / リン / シリカガラス / 癌 / 化学的耐久性 / ラザフォード後方散乱法 / フーリエ変換赤外スペクトル / 放射線治療 / 高周波誘導結合プラズマ発光分析 / フーリエ変換赤外反射分光 / Radiotherapy / Ion implantation / Phosphorus / Silica glass / Cancer / Chemical durability / Rutherford backscattering / FT-IR spectra / 酸化反応 / エッチング / スパッタリング / InO_x / 導電性透明薄膜 / CLUSTER ION / OXIDIZATION / ETCHING / SPUTTERING / FILM FORMATION / TRANSPARENT CONDUCTING FILM / 多原子イオンビーム / フラーレン / アルゴンクラスター / 多体衝突効果 / 高密度照射効果 / 炭素薄膜 / Arクラスター / 非線形照射効果 / ビッカース硬度 / macroparticle / fullerene / Argon cluster / multicollisions / high density irradiation / film formation / carbon film
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Research Projects
(
19
results)
Co-Researchers
(
44
People)
Project Start Year (Newest)
Project Start Year (Oldest)
A STUDY ON ULTRA-HARD FILM FORMATION BY MACROPARTICLE ION BEAM WITH HIGH ENERGY
Principal Investigator
TAKOKA Gikan
Project Period (FY)
1998 – 2000
Research Category
Grant-in-Aid for Scientific Research (B).
Research Field
Electronic materials/Electric materials
Research Institution
KYOTO UNIVERSITY
ガスクラスターイオンビームと固体表面との反応素過程に関する研究
Principal Investigator
Principal Investigator
山田 公
Project Period (FY)
1997
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
Material Processing with Cluster Ion Beams
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1997 – 1998
Research Category
Grant-in-Aid for international Scientific Research
Research Field
Electronic materials/Electric materials
Research Institution
KYOTO UNIVERSITY
Nonlinear Phenomena in Cluster Ion impact on Solid Surfaces
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1997 – 1999
Research Category
Grant-in-Aid for Scientific Research (A)
Research Field
表面界面物性
Research Institution
KYOTO UNIVERSITY
ガスクラスターイオンビームと固体表面との反応素過程に関する研究
Principal Investigator
Principal Investigator
山田 公
Project Period (FY)
1996
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
SURFACE MODIFICATION BY HIGH INTENSITY ION BEAM IRRADIATION
Principal Investigator
MATSUO Jiro
Project Period (FY)
1996 – 1997
Research Category
Grant-in-Aid for Scientific Research (C)
Research Field
Material processing/treatments
Research Institution
KYOTO UNIVERSITY
ガスクラスターイオンビームと固体表面との反応素過程に関する研究
Principal Investigator
Principal Investigator
山田 公
Project Period (FY)
1995
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
反応性ガスのクラスター生成と原子配列制御への応用
Principal Investigator
TAKAOKA Gikan
Project Period (FY)
1992
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電子材料工学
Research Institution
Kyoto University
Study on epitaxial metal/insulator multilayr structure formation
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子機器工学
Research Institution
KYOTO UNIVERSITY
Study on development of cluster ion implantation system for LSI
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
Applied materials
Research Institution
KYOTO UNIVERSITY
Properties of Glass Implanted with Phosphorus for Radiotherapy
Principal Investigator
KOKUBO Tadashi
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
広領域
Research Institution
KYOTO UNIVERSITY
界面反応の物理・化学
Principal Investigator
大泊 巌
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Waseda University
X線望遠鏡光学
Principal Investigator
山下 広順
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
宇宙科学研究所
Fundamental Research on Ionized Cluster Beam Processes
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1991 – 1992
Research Category
Grant-in-Aid for international Scientific Research
Research Institution
Kyoto University
X線望遠鏡光学
Principal Investigator
山下 廣順
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
宇宙科学研究所
界面反応の物理・化学
Principal Investigator
大泊 巌
Project Period (FY)
1989 – 1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Waseda University
X線望遠鏡光学
Principal Investigator
山下 広順
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Osaka University
界面反応の物理・化学
Principal Investigator
大泊 巌
Project Period (FY)
1989 – 1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Waseda University
クラスターイオンビーム技術(蒸着と結晶性制御)に関する研究
Principal Investigator
高木 俊宜
, 高木 俊宣
Project Period (FY)
1983 – 1987
Research Category
Grant-in-Aid for Specially Promoted Research
Research Institution
Kyoto University
# of Projects (Dsc)
# of Projects (Asc)
1.
TAKAOKA Gikan
(90135525)
# of Collaborated Projects:
12 results
# of Collaborated Products:
0 results
2.
MATSUO Jirou
(40263123)
# of Collaborated Projects:
9 results
# of Collaborated Products:
0 results
3.
山下 広順
(80022622)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
4.
大泊 巌
(30063720)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
5.
津田 穣
(90009506)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
6.
原 史朗
(60218617)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
7.
大橋 隆哉
(70183027)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
8.
国枝 秀世
(00126856)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
9.
難波 義治
(40029129)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
10.
越後谷 淳一
(00005539)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
11.
北原 和夫
(20107692)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
12.
常深 博
(90116062)
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
13.
KOKUBO Tadashi
(30027049)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
14.
HIRAOKA Masahiro
(70173218)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
15.
MIYAJI Fumiaki
(80219782)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
16.
松岡 勝
(30013668)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
17.
大坂 敏明
(50112991)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
18.
川原田 洋
(90161380)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
19.
高木 俊宜
(10025801)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
20.
臼井 博明
(60176667)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
21.
八尾 健
(50115953)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
22.
MAREK Sosnowski
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
23.
MATSUDA Kouji
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
24.
YAMANISHI Kenichirou
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
25.
TOMODA Toshimasa
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
26.
EBISAWA Yukihiro
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
27.
CLAYTON C.R.
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
28.
GOLOVCHENKO J.A.
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
29.
KIMMERING L.C.
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
30.
高木 俊宣
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
31.
J. Nothby
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
32.
Y. Kuk
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
33.
W.L. Brown
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
34.
WALTER L. Brown
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
35.
USUI Hiroaki
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
36.
YOUNG Kuk
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
37.
JAN Northby
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
38.
NORTHBY J.
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
39.
KUK Y.
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
40.
SOSNOWSKI M.
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
41.
BROWN W.L.
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
42.
松永 幸二
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
43.
海老沢 幸弘
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
44.
GOLOVCHENKO ジェイ エー
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
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