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YAMADA Isao
山田 公
Connect your ORCID iD
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Researcher Number
00026048
Affiliation
*help
2016 – 2018 : 兵庫県立大学, 工学研究科, 客員教授
2000 : Emeritus Prof., 名誉教授
1999 : 京都大学, 大学院・工学研究科, 教授
1998 – 1999 : Faculty of Engineering, Professor, 工学研究科, 教授
1989 – 1997 : 京都大学, 工学部, 教授
1986 – 1987 : 京都大学, 工学部, 教授
Review Section/Research Field
Principal Investigator
Electronic materials/Electric materials
/
電子機器工学
/
Applied materials
/
表面界面物性
Except Principal Investigator
Electronic materials/Electric materials
/
Material processing/treatments
/
電子材料工学
/
広領域
Keywords
Principal Investigator
クラスターイオン / スパッタリング / 表面反応 / 質量分析 / イオン注入 / エッチング / 反応生成物 / cluster ion / 薄膜形成 / 化学スパッタリング
…
More
/ 非線形 / ion implantation / LSI / STM / 走査トンネル顕微鏡 / エピタキシャル成長 / SIMS / ICB / 多体衝突 / Al / ラテラルスパッタ効果 / ラバルノズル / 共鳴トンネルデバイス / interstitial / カズソースクラスター / 高密度照射効果 / トンネル電流 / Ar cluster / low energy ion beam / Clean Surface Formation / resonant tunnel device / molecular dynamics / secondary ion / epitaxial growth / Atomically Flat Surface / 反応性ICB法 / 透過電子顕微鏡 / 低温成長 / Ionized Cluster Beam / surface cleaning / International Exchange / アルゴンクラスター / high density irradiation effect / 表面クリーニング / ガスクラスター / tunnel current / フラーレン / スパッタ / 超薄膜 / non-linear / 損傷形成 / enhaned reaction / 国際交流 / 積層構造 / 励起反応 / Al_2O_3 multilayr structure / トンネルデバイス / 共鳴トンネルダイオード / 多価イオン / lateral sputtering / Film Formation / ICB法 / shallow junction / クラスターイオンビーム / TEM / 共同研究 / 増速拡散 / quantum effect device / クラスターイオン注入 / 多体衝突効果 / 超平坦表面 / ホウ素クラスター / gas cluster / 2次イオン / クラスターイオンビーム技術 / film formation / 配列制御 / イオンビーム / クラスタ-イオンビ-ム / 真空一貫プロセス / induced reaction / 清浄表面 / 格子間原子 / エキシマレ-ザ- / 浅い接合 / Gas Cluster / TOF / クラスタ- / Joint Research / A1 / 膜形成 / 極浅接合形成 / 分子動力学 / 高密度照射 / multiple collision / エピタキシー / フリージェットノズル / ラテラルスパッタ / Shallow Implantation / on-line vacuum process / 低エネルギーイオンビーム / A1_2O_3積層構造 / Al_2O_3積層構造 / 量子効果デバイス
…
More
Except Principal Investigator
界面介在物 / X線望遠鏡 / X線用CCD / コンタクト構造の安定性 / 撮像型蛍光比例計数管 / 速度論的安定性 / ショットキ-障壁高さ / 応力の影響 / コンタクト抵抗率 / X線反射鏡 / ICB蒸着法 / 熱力学的安定性 / X線ボロメ-タ- / 薄膜形成 / クラスターイオン / 拡散障壁 / 多層膜反射鏡 / 超精密非球面加工 / イオンビーム / クラスター / InOx / SiC / Argon cluster / エピタキシ / Silica glass / 結晶性制御 / Phosphorus / 高密度照射効果 / ETCHING / シリカガラス / 癌 / ラザフォード後方散乱法 / ICB-マイクロ波イオン源併用方式 / フーリエ変換赤外スペクトル / 放射線治療 / 超精密平面研削 / Arクラスター / macroparticle / 多原子イオンビーム / 原子配列制御 / クラスタ / ビッカース硬度 / 炭素薄膜 / film formation / 導電性透明薄膜 / アルゴンクラスター / 高周波誘導結合プラズマ発光分析 / ガスクラスター / FILM FORMATION / InO_x / フラーレン / carbon film / リン / 化学的耐久性 / Chemical durability / 放射線療法 / 超LSI / 非線形照射効果 / 高機能デバイス / 多体衝突効果 / multicollisions / OXIDIZATION / fullerene / SPUTTERING / X線ボロメーター / Cancer / スパッタリング / フーリエ変換赤外反射分光 / イオンビームプロセス / FT-IR spectra / Ion implantation / イオン注入 / 粒界拡散 / 低温形成 / CLUSTER ION / 界面構造のダイナミクス / 超低速イオンビーム / 酸化反応 / 反応性ガス / マイグレーション効果 / Rutherford backscattering / エッチング / 多層膜 / Radiotherapy / high density irradiation / TRANSPARENT CONDUCTING FILM
Less
Research Projects
(
19
results)
Co-Researchers
(
44
People)
Project Start Year(Newest)
Project Start Year(Oldest)
A STUDY ON ULTRA-HARD FILM FORMATION BY MACROPARTICLE ION BEAM WITH HIGH ENERGY
Principal Investigator
TAKOKA Gikan
Project Period (FY)
1998 – 2000
Research Category
Grant-in-Aid for Scientific Research (B).
Research Field
Electronic materials/Electric materials
Research Institution
KYOTO UNIVERSITY
ガスクラスターイオンビームと固体表面との反応素過程に関する研究
Principal Investigator
Principal Investigator
山田 公
Project Period (FY)
1997
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
Material Processing with Cluster Ion Beams
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1997 – 1998
Research Category
Grant-in-Aid for international Scientific Research
Research Field
Electronic materials/Electric materials
Research Institution
KYOTO UNIVERSITY
Nonlinear Phenomena in Cluster Ion impact on Solid Surfaces
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1997 – 1999
Research Category
Grant-in-Aid for Scientific Research (A)
Research Field
表面界面物性
Research Institution
KYOTO UNIVERSITY
ガスクラスターイオンビームと固体表面との反応素過程に関する研究
Principal Investigator
Principal Investigator
山田 公
Project Period (FY)
1996
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
SURFACE MODIFICATION BY HIGH INTENSITY ION BEAM IRRADIATION
Principal Investigator
MATSUO Jiro
Project Period (FY)
1996 – 1997
Research Category
Grant-in-Aid for Scientific Research (C)
Research Field
Material processing/treatments
Research Institution
KYOTO UNIVERSITY
ガスクラスターイオンビームと固体表面との反応素過程に関する研究
Principal Investigator
Principal Investigator
山田 公
Project Period (FY)
1995
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Kyoto University
反応性ガスのクラスター生成と原子配列制御への応用
Principal Investigator
TAKAOKA Gikan
Project Period (FY)
1992
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
電子材料工学
Research Institution
Kyoto University
Study on epitaxial metal/insulator multilayr structure formation
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for General Scientific Research (B)
Research Field
電子機器工学
Research Institution
KYOTO UNIVERSITY
Study on development of cluster ion implantation system for LSI
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
Applied materials
Research Institution
KYOTO UNIVERSITY
Properties of Glass Implanted with Phosphorus for Radiotherapy
Principal Investigator
KOKUBO Tadashi
Project Period (FY)
1992 – 1994
Research Category
Grant-in-Aid for Developmental Scientific Research (B)
Research Field
広領域
Research Institution
KYOTO UNIVERSITY
界面反応の物理・化学
Principal Investigator
大泊 巌
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Waseda University
X線望遠鏡光学
Principal Investigator
山下 広順
Project Period (FY)
1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
宇宙科学研究所
Fundamental Research on Ionized Cluster Beam Processes
Principal Investigator
Principal Investigator
YAMADA Isao
Project Period (FY)
1991 – 1992
Research Category
Grant-in-Aid for international Scientific Research
Research Institution
Kyoto University
X線望遠鏡光学
Principal Investigator
山下 廣順
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
宇宙科学研究所
界面反応の物理・化学
Principal Investigator
大泊 巌
Project Period (FY)
1989 – 1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Waseda University
X線望遠鏡光学
Principal Investigator
山下 広順
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Osaka University
界面反応の物理・化学
Principal Investigator
大泊 巌
Project Period (FY)
1989 – 1991
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Waseda University
クラスターイオンビーム技術(蒸着と結晶性制御)に関する研究
Principal Investigator
高木 俊宜
, 高木 俊宣
Project Period (FY)
1983 – 1987
Research Category
Grant-in-Aid for Specially Promoted Research
Research Institution
Kyoto University
# of Projects (Dsc)
# of Projects (Asc)
1.
TAKAOKA Gikan
(90135525)
# of Collaborated Projects :
12results
# of Collaborated Products :
0results
2.
MATSUO Jirou
(40263123)
# of Collaborated Projects :
9results
# of Collaborated Products :
0results
3.
山下 広順
(80022622)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
4.
大泊 巌
(30063720)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
5.
津田 穣
(90009506)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
6.
原 史朗
(60218617)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
7.
大橋 隆哉
(70183027)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
8.
国枝 秀世
(00126856)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
9.
難波 義治
(40029129)
# of Collaborated Projects :
3results
# of Collaborated Products :
0results
10.
越後谷 淳一
(00005539)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
11.
北原 和夫
(20107692)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
12.
常深 博
(90116062)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
13.
KOKUBO Tadashi
(30027049)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
14.
HIRAOKA Masahiro
(70173218)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
15.
MIYAJI Fumiaki
(80219782)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
16.
松岡 勝
(30013668)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
17.
大坂 敏明
(50112991)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
18.
川原田 洋
(90161380)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
19.
高木 俊宜
(10025801)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
20.
臼井 博明
(60176667)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
21.
八尾 健
(50115953)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
22.
MAREK Sosnowski
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
23.
MATSUDA Kouji
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
24.
YAMANISHI Kenichirou
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
25.
TOMODA Toshimasa
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
26.
EBISAWA Yukihiro
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
27.
CLAYTON C.R.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
28.
GOLOVCHENKO J.A.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
29.
KIMMERING L.C.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
30.
高木 俊宣
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
31.
J. Nothby
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
32.
Y. Kuk
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
33.
W.L. Brown
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
34.
WALTER L. Brown
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
35.
USUI Hiroaki
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
36.
YOUNG Kuk
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
37.
JAN Northby
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
38.
NORTHBY J.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
39.
KUK Y.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
40.
SOSNOWSKI M.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
41.
BROWN W.L.
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
42.
松永 幸二
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
43.
海老沢 幸弘
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
44.
GOLOVCHENKO ジェイ エー
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
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