KAMIYA Shoji 神谷庄司

Researcher Number	00204628
Affiliation *help	2011 – 2018 : 名古屋工業大学, 工学(系)研究科(研究院), 教授 2012 : 名古屋工業大学, 工学研究科, 教授 2009 – 2011 : Nagoya Institute of Technology, 大学院・工学研究科, 教授 2008 : Nagoya Institute of Technology, 工学研究科, 教授 2006 : 名古屋工大, 工学(系)研究科(研究院), 教授 … More
Review Section/Research Field	Principal Investigator Materials/Mechanics of materials / Materials/Mechanics of materials / Nano/Microsystems / Nanomaterials/Nanobioscience / Microdevices/Nanodevices Except Principal Investigator Materials/Mechanics of materials / Aerospace engineering / Composite materials/Physical properties
Keywords	Principal Investigator シリコン / ポリシリコン / 付着強度 / その場観察 / 薄膜 / マイクロマシン / 損傷 / Thin Films / 界面破壊じん性 / 準位 … More Except Principal Investigator Ultrasonics / 逆問題 / Numerical Simulation / 電子パッケージ / 数値シミュレーション / Inverse Problem / 斜角探傷 / 斜角深傷 / 超音波 / 損傷拡大抑制システム / 材料 / Nondestructive Evaluation / Bamboo Line / Polycrystalline Line / 金属薄膜配線 / き裂深さ / 圧電セラミックス / Damage / Microwave / Electromigration / Identification / Closed Crack / Crack / Governing Parameter / 横波 / Electronic Package / Small Angle of Incidence / 超音速 / Nondestructive Testing / 支配パラメータ / Crack Closure / Delamination / Ultrasonic Angle Beam Technique / Materials / エレクトロマイグレーション / 微小入射角 / Composite Laminate / 断線予測 / き裂閉口圧 / Crack Depth / 多結晶配線 / 集束センサ / 理論モデル / Imaging / マイクロ波 / 損傷 / き裂閉口 / バンブー配線 / 感度 / Crack Closing Stress / Failure Prediction / 積層複合材構造 / Active Control System / IC Package / Micromechanics / 耐熱材料 / Focusing Sensor / 非破壊評価 / き裂 / 空間分解能 / 同定 / 非破壊検査 / はく離 / Ultrasonic Angle-Beam Technique / イメージング / Theoretical Model / 繊維 / Metal Line / Spatial Resolution / 閉口き裂 / Piezoelectric Ceramics / Shear Wave / Sensitivity / マイクロメカニックス / ゲル Less

応力発光を利用したポリマーＭＥＭＳの構造信頼性新規評価体系構築への挑戦Principal InvestigatorOngoing
- Principal Investigator
  
  神谷庄司
- Project Period (FY)
  2016 – 2017
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Nano/Microsystems
- Research Institution
  Nagoya Institute of Technology
A challenge to seek for the effect of hydrogen causing embrittlement and fatigue fracture in siliconPrincipal Investigator
- Principal Investigator
  
  Kamiya Shoji
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Nagoya Institute of Technology
In-situ TEM observation of silicon fatigue process using resonance compressive fatigue testPrincipal Investigator
- Principal Investigator
  
  KAMIYA Shoji
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Nagoya Institute of Technology
Mechanical fatigue test under liquid water toward bio-implantable MEMS structures with infinite lifetimePrincipal Investigator
- Principal Investigator
  
  KAMIYA Shoji
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Nagoya Institute of Technology
表面の局所電子プローブイメージングによるシリコンの機械的疲労損傷機構描像への挑戦Principal Investigator
- Principal Investigator
  
  神谷庄司
- Project Period (FY)
  2009 – 2010
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Nagoya Institute of Technology
Establishment of an reliability evaluation scheme based on statistical analysis and electronic defect sensing for the reliability of silicon against fatigue failurePrincipal Investigator
- Principal Investigator
  
  KAMIYA Shoji
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Nagoya Institute of Technology
粒界ディープレベルと疲労損傷との関連によるポリシリコンの新しい信頼性評価Principal Investigator
- Principal Investigator
  
  神谷庄司
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Nagoya Institute of Technology
多結晶半導体材料の準位に基づくエレクトロナノメカニクスへの期待Principal Investigator
- Principal Investigator
  
  神谷庄司
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Nanomaterials/Nanobioscience
- Research Institution
  Nagoya Institute of Technology
  Tohoku University
In-Situセンサによるダイヤモンド薄膜の応力計測と超耐久コーティングの設計Principal Investigator
- Principal Investigator
  
  神谷庄司
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Tohoku University
Responses of Angle-Beam Ultrasonic Shear Waves to Closed Cracks and Highly Sensitive Quantitative Nondestructive Evaluation of Crack Sizes Together With Closure Stresses
- Principal Investigator
  
  SAKA Masumi
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Tohoku University
Development of Prediction Method for Metal Line Failure Induced by High Current Density
- Principal Investigator
  
  SASAGAWA Kazuhiko
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Hirosaki University
Development of a Microwave Focusing Sensor and a High Resolution Imaging System for Nondestructive Evaluation of Materials
- Principal Investigator
  
  SAKA Masumi
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Tohoku University
Toughening of chemically-vapor deposited diamond by means of active incorporation of carbon allotropesPrincipal Investigator
- Principal Investigator
  
  KAMIYA Shoji
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Tohoku University
Development of Ultrasonic Angle Beam Technique of Quantitative Nondestructive Evaluation of Small Closed Cracks
- Principal Investigator
  
  SAKA Masumi
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  TOHOKU UNIVERSITY
Establishment of a new method of evaluation for the adhesive strength of thin films by micro-indentation wit two degrees of freedomPrincipal Investigator
- Principal Investigator
  
  KAMIYA Shoji
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  TOHOKU UNIVERSITY
微視付着力の直接計測とダイヤモンド薄膜付着の新しい強度評価基準の創成Principal Investigator
- Principal Investigator
  
  神谷庄司
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Tohoku University
有機-無機複合均一ゲル繊維を前駆体とする超耐熱性無機繊維合成
- Principal Investigator
  
  黒川洋一
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Composite materials/Physical properties
- Research Institution
  Tohoku University
Real-Time Active Control Systems of Damage Extension in Composite Laminate Aircraft Structures
- Principal Investigator
  
  SEKINE Hideki
- Project Period (FY)
  1995 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Aerospace engineering
- Research Institution
  Tohoku University
マルチレイヤーFEMによる連続繊維強化複合材料積層板のはく離進展と破壊挙動の解析Principal Investigator
- Principal Investigator
  
  神谷庄司
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Tohoku University

All 2016 2015 2014 2013 2012 2011 2010 2006 2005 Other

All Journal Article Presentation

[Journal Article] Sehar stress enhanced fatigue damage accumulation in single crystalline silicon under cyclic mechanical loading2016
- Author(s)
  Shoji Kamiya, Arasu Udhayakumar, Hayato Izumi, Kozo Koiwa
- Journal Title
  
  Sensors and Actuators A
  
  Volume : still unknown
- Acknowledgement Compliant / Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25630008
[Journal Article] Hydrogen enhanced mechanical fatigue in single crystal silicon2015
- Author(s)
  Hayato Izumi, Arasu Udhayakumar, Shoji Kamiya
- Journal Title
  
  Materials Letters
  
  Volume : 142 Pages : 130132-130132
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25630008
[Journal Article] Defect accumulation and strength reduction in single crystalline silicon induced by cyclic compressive stress2014
- Author(s)
  Shoji Kamiya, Toshifumi Kita, Hayato Izumi
- Journal Title
  
  Sensors and Actuators A
  
  Volume : 208 Pages : 3036-3036
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360054
[Journal Article] Effect of hydrogen at room temperature on electronic and mechanical properties of dislocations in silicon2014
- Author(s)
  Masatoshi Ogawa, Shoji Kamiya, Hayato Izumi, Yutaka Tokuda
- Journal Title
  
  Materials Letters
  
  Volume : 120 Pages : 236238-236238
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25630008
[Journal Article] Defect accumulation and strength reduction in single crystalline silicon induced by cyclic compressive stress2014
- Author(s)
  S.Kamiya, T.Kita, H.Izumi
- Journal Title
  
  Sensors and Actuators A
  
  Volume : 208 Pages : 30-36
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360054
[Journal Article] Effect of hydrogen on mechanical properties of single crystal surface2013
- Author(s)
  H. Izumi, R. Mukaiyama, N. Shishido, S. Kamiya
- Journal Title
  
  ASME InterPACK 2013
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23651137
[Journal Article] Effect of hydrogen on the mechanical properties of silicon crystal surface2013
- Author(s)
  Hayato Izumi, Ryota Mukaiyama, Nobuyuki Shishido, Shoji Kamiya
- Journal Title
  
  Proceedings　of　the　ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems
  
  Pages : 73324-73324
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25630008
[Journal Article] A prediction scheme of the static fracture strength of MEMS structures based on the characterization of damage distribution on a processed surface2013
- Author(s)
  Vu Le Huy, Shoji, Kamiya, Kei Nagayoshi, Hayato Izumi, Joao Gaspar, Oliver Paul
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume : 23 Pages : 45008-45008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360054
[Journal Article] A prediction scheme of the static fracture strength of MEMS structures based on the characterization of damage distribution on a processed surface2013
- Author(s)
  V.L.Huy, S.Kamiya, K.Nagayoshi, H.Izumi, J.Gaspar, O.Paul
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume : 23
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360054
[Journal Article] Electronic properties of dislocations infroduced mechanically at room temperature on a single crystal silicon substrate2012
- Author(s)
  Masatoshi Ogawa, Shoji Kamiya, Hayato Izumi, Yutaka Tokuda
- Journal Title
  
  Physica B
  
  Volume : 407
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23651137
[Journal Article] Electronic properties of dislocations introduced mechanically at room temperature on single crystal silicon surface2012
- Author(s)
  M. Ogawa, S. Kamiya, H. Izumi, Y. Tokuda
- Journal Title
  
  Physica B
  
  Volume : 407 Pages : 3034-4037
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23651137
[Journal Article] Statistical characterization of fatigue lifetime of polysilicon thin films2012
- Author(s)
  Vu Le Huy, Joao Gaspar, Oliver Paul, Shoji Kamiya
- Journal Title
  
  Sensors and Actuators A
  
  Volume : 179 Pages : 251-262
- DOI
  10.1016/j.sna.2012.03.011
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360054
[Journal Article] Statistical characterization of fracture strength and fatigue lifetime of polysilicon thin films with different stress concentration fields2012
- Author(s)
  Vu Le Huy, Shoji, Kamiya, Joao Gaspar, Oliver Paul
- Journal Title
  
  Journal of Solid Mechanics and Materials Engineering
  
  Volume : 6 Pages : 10131029-10131029
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360054
[Journal Article] Statistical characterization of fracture strength and fatigue lifetime of polysilicon thin films with different stress concentration fields2012
- Author(s)
  V.L.Huy, S.Kamiya, J.Gaspar, O.Paul
- Journal Title
  
  Journal of Solid Mechanics and Materials Engineering
  
  Volume : 6 Pages : 1013-1029
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360054
[Journal Article] Statistical characterization of fatigue lifetime of polysiliocn thin films2012
- Author(s)
  V.L.Huy, J.Gaspar, O.Paul, S.Kamiya
- Journal Title
  
  Sensors and Actuators A
  
  Volume : 179 Pages : 251-262
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360054
[Journal Article] 切断加工による損傷に基づくシリコンチップの機械的信頼性評価2006
- Author(s)
  神谷庄司、井上大喜郎、神藤弘章
- Journal Title
  
  日本機械学会東海支部第55期総会講演会講演論文集 063-1
  
  Pages : 217-218
- Data Source
  KAKENHI-PROJECT-16360047
[Journal Article] 切断加工による損傷に基づくシリコンチップの機械的信頼性評価2006
- Author(s)
  神谷庄司, 井上大喜郎, 神藤弘章
- Journal Title
  
  日本機械学会東海支部第55期総会講演会講演論文集 063-1
  
  Pages : 217-218
- Data Source
  KAKENHI-PROJECT-16651054
[Journal Article] 多結晶シリコン薄膜の機械的信頼性評価に関する新しい試み2005
- Author(s)
  神谷庄司、本田直子、ポールオリバー、ルターパトリック、坂真澄
- Journal Title
  
  日本機械学会2005年度年次大会講演論文集 Vol.6
  
  Pages : 261-262
- Data Source
  KAKENHI-PROJECT-16360047
[Journal Article] 半導体材料の高サイクル疲労特性に関する研究2005
- Author(s)
  神谷庄司、井上大喜郎、坂真澄、市村正也
- Journal Title
  
  日本機械学会2005年度年次大会講演論文集 Vol.6
  
  Pages : 263-264
- Data Source
  KAKENHI-PROJECT-16360047
[Journal Article] 多結晶シリコン薄膜の機械的信頼性評価に関する新しい試み2005
- Author(s)
  神谷庄司, 本田直子, ポールオリバー, ルターパトリック, 坂真澄
- Journal Title
  
  日本機械学会2005年度年次大会講演論文集 Vol.6
  
  Pages : 261-262
- Data Source
  KAKENHI-PROJECT-16651054
[Journal Article] 半導体材料の高サイクル疲労特性に関する研究2005
- Author(s)
  神谷庄司, 井上大喜郎, 坂真澄, 市村正也
- Journal Title
  
  日本機械学会2005年度年次大会講演論文集 Vol.6
  
  Pages : 263-264
- Data Source
  KAKENHI-PROJECT-16651054
[Presentation] 曲げ試験による有機薄膜トランジスタの信頼性評価2016
- Author(s)
  宍戸信之、末松祐一、神谷庄司
- Organizer
  日本機械学会2016年度年次大会
- Place of Presentation
  九州大学伊都キャンパス、福岡
- Year and Date
  2016-09-11
- Data Source
  KAKENHI-PROJECT-16K13651
[Presentation] Shear stress with hydrogen, not oxygen, matters to the fatigue lifetime of silicon2015
- Author(s)
  S. Kamiya, A. Udhayakumar, H. Izumi, K. Koiwa
- Organizer
  18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
- Place of Presentation
  Anchorage, Alaska, USA
- Year and Date
  2015-06-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25630008
[Presentation] 繰り返し荷重によるシリコンの疲労損傷集積の観察2014
- Author(s)
  泉隼人、喜多俊文、田中健太郎、神谷庄司
- Organizer
  日本機械学会東海支部第63期総会
- Place of Presentation
  大同大学、愛知県
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 繰り返し荷重によるシリコンの疲労損傷集積の観察2014
- Author(s)
  泉隼人、喜多俊文、田中健太郎、神谷庄司
- Organizer
  日本機械学会東海支部第63会総会講演会
- Place of Presentation
  名古屋市
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 単結晶シリコンの塑性特性における吸蔵水素の影響2013
- Author(s)
  向山諒太、泉隼人、宍戸信之、神谷庄司
- Organizer
  日本機械学会東海支部第６２期総会講演会
- Place of Presentation
  Tsu, Japan
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] 電子線誘起電流を用いた圧縮応力下におけるシリコンの疲労損傷の観察2013
- Author(s)
  喜多俊文、神谷庄司、泉隼人、梅原徳次、野老山貴行、Vu Le Huy、小川将史
- Organizer
  日本機械学会東海支部第６２期総会講演会
- Place of Presentation
  Tsu, Japan
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] Direct observation of damage accumulation process inside silicon under mechanical fatigue loading2013
- Author(s)
  Shoji Kamiya, Ryutaro Hirai, Hayato Izumi, Noritsugu Umehara, Takayuki Tokoroyama
- Organizer
  Technical Digest of the 17th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers2013&Eurosensors XXVII)
- Place of Presentation
  Barcelona, Spain
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] EBIC observation of the defects in single crystalline silicon induced by mechanical compressive stress2013
- Author(s)
  Kita Toshifumi, Shoji Kamiya, Hayato Izumi
- Organizer
  The 27th International Conference on Defects in Semiconductors 2013 (ICDS2013)
- Place of Presentation
  Bologna, Italy
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] Direct observation of damage accumulation process inside silicon under mechanical fatigue loading2013
- Author(s)
  S.Kamiya, R.Hirai, H.Izumi, N.Umehara, T.Tokoroyama
- Organizer
  The 17th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers2013&EurosensorsXXXVII)
- Place of Presentation
  Barcelona, Spain
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 繰り返し圧縮応力によるシリコン単結晶中の欠陥形成と残存引張強度2013
- Author(s)
  喜多俊文、神谷庄司、泉隼人
- Organizer
  日本機械学会2013年度年次大会
- Place of Presentation
  岡山大学、岡山県
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 繰り返し圧縮応力によるシリコン単結晶中の欠陥形成と残存引張強度2013
- Author(s)
  喜多俊文、神谷庄司、泉隼人
- Organizer
  日本機械学会2013年度年次大会
- Place of Presentation
  岡山市
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] EBIC observation of the defects in single crystalline silicon induced by mechanical compressive stress2013
- Author(s)
  T.Kita, S.Kamiya, H.Izumi
- Organizer
  The 27th International Conference on Defects in Semiconductors 2013 (ICDS2013)
- Place of Presentation
  Bologna, Italy
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 電子線誘起電流を用いた圧縮応力下におけるシリコン疲労損傷の観察2013
- Author(s)
  喜多俊文、神谷庄司、泉隼人、梅原徳次、野老山貴行、Vu Le Huy、小川将史
- Organizer
  日本機械学会東海支部第62会総会講演会
- Place of Presentation
  津市
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 単結晶シリコンの塑性特性における吸蔵水素の影響2013
- Author(s)
  向山諒太、泉隼人、宍戸信之、神谷庄司
- Organizer
  日本機械学会東海支部第62会総会講演会
- Place of Presentation
  津市
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] Effect of hydrogen on the mechanical properties of silicon crystal surface2013
- Author(s)
  Hayato Izumi, Ryota Mukaiyama, Nobuyuki Shishido, Shoji Kamiya
- Organizer
  ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013)
- Place of Presentation
  San Francisco
- Data Source
  KAKENHI-PROJECT-25630008
[Presentation] Fatigue behavior of silicon wafer under bending load in different environment2013
- Author(s)
  Arasu Udhayakumar, Hayato Izumi, Shoji Kamiya
- Organizer
  JSME Materials and Mechanics Division 2013
- Place of Presentation
  Gifu University,Japan
- Data Source
  KAKENHI-PROJECT-25630008
[Presentation] Direct observation of damage accumulation process inside silicon under mechanical fatigue loading2013
- Author(s)
  S. Kamiya, R. Hirai, H. Izumi, N. Umehara, T. Tokoroyama
- Organizer
  The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013)
- Place of Presentation
  Barcelona, Spain
- Year and Date
  2013-06-20
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] Effect of hydrogen on mechanical properties of single crystal surface2013
- Author(s)
  H. Izumi, R. Mukaiyama, N. Shishido, S. Kamiya
- Organizer
  ASME International Technical Conference & Exhibition Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013)
- Place of Presentation
  Burlingame, USA
- Year and Date
  2013-07-20
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] 電子線誘起電流を用いた圧縮応力下におけるシリコンの疲労損傷の観察2013
- Author(s)
  喜多俊文、神谷庄司、泉隼人、梅原徳次、野老山貴行、Ve Le Huy、小川将史
- Organizer
  日本機械学会東海支部第62期総会講演会
- Place of Presentation
  津市
- Year and Date
  2013-03-19
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] 単結晶シリコンの塑性特性における吸蔵水素の影響2013
- Author(s)
  向山諒太、泉隼人、宍戸信之、神谷庄司
- Organizer
  日本機械学会東海支部第62期総会
- Place of Presentation
  三重大学
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 電子線誘起電流を用いた圧縮応力下におけるシリコンの疲労損傷の観察2013
- Author(s)
  喜多俊文、神谷庄司、泉隼人、梅原徳次、野老山貴行、Vu Le Huy、小川将史
- Organizer
  日本機械学会東海支部第62期総会
- Place of Presentation
  三重大学
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 単結晶シリコンの塑性特性における吸蔵水素の影響2012
- Author(s)
  向山諒太、泉隼人、宍戸信之、神谷庄司
- Organizer
  日本機械学会東海支部第62期総会講演会
- Place of Presentation
  津市
- Year and Date
  2012-03-19
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] 電子線誘起電流によるシリコンの疲労過程の微視観察2012
- Author(s)
  平井隆太郎，神谷庄司，泉隼人，梅原徳次
- Organizer
  日本機械学会東海支部第61期総会講演会
- Place of Presentation
  名古屋工業大学（愛知県）
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] 異なる疲労機構に基づくシリコン微小構造物の寿命評価モデルの比較2012
- Author(s)
  平川　創、泉隼人、生津資大、神谷庄司
- Organizer
  日本機械学会M&M2012カンファレンス
- Place of Presentation
  Matsuyama, Japan
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] 単結晶シリコン薄膜の破壊挙動に及ぼす水と温度の影響の評価2012
- Author(s)
  イスラムエムディワヘドゥル、泉隼人、小川将史、神谷庄司
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  Kanazawa, Japan
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] Mysteries in fracture behavior of silicon and polysilicon micro-scale structures in various environments and under repeated loading2012
- Author(s)
  Shoji Kamiya
- Organizer
  OKMETIC-Nagoya seminar 2012
- Place of Presentation
  Nagoya, Japan(招待講演)
- Year and Date
  2012-03-02
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 繰返し応力に対するシリコンMEMS構造体の疲労寿命と長期信頼性評価2012
- Author(s)
  神谷庄司
- Organizer
  平成23年度第10回九州地区ナノテクノロジー拠点ネットワーク講演会
- Place of Presentation
  北九州産業学術研究都市早稲田大学講義室(招待講演)
- Year and Date
  2012-01-26
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] IDENTIFICATION OF FATIGUE CRACK EXTENSION PROCESS INZERO-TENSION CYCLIC STRESS TEST OF POLYSILICON FILMS2012
- Author(s)
  Vu Le Huy, Shoji Kamiya, Joao Gaspar, Oliver Paul
- Organizer
  25th IEEE International Conference on Micro Electro Mechanical Systems
- Place of Presentation
  Paris, France
- Year and Date
  2012-01-30
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] TEM 内疲労試験その場観察を目的としたMEMS 共振デバイスの開発2012
- Author(s)
  Lam Hoanson、泉隼人、神谷庄司
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  金沢市
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 異なる疲労機構に基づくシリコン微小構造物の寿命評価モデルの比較2012
- Author(s)
  平川創、泉隼人、生津資大、神谷庄司
- Organizer
  日本機械学会M&M2012材料力学カンファレンス
- Place of Presentation
  松山市
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 単結晶シリコン薄膜の破壊挙動に及ぼす水と温度の影響の評価2012
- Author(s)
  Isram Md. Wahedul、泉隼人、小川将史、神谷庄司
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  金沢市
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 電子線誘起電流によるシリコンの疲労過程の微視観察2012
- Author(s)
  平井隆太郎、神谷庄司、泉隼人、梅原徳次
- Organizer
  日本機械学会年東海支部第61期総会講演会
- Place of Presentation
  名古屋市
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] 単結晶シリコン薄膜の破壊挙動に及ぼす水と温度の影響の評価2012
- Author(s)
  イスラムエムデイワヘドウル、泉隼人、小川将史、神谷庄司
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  金沢市
- Year and Date
  2012-09-10
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] 異なる疲労機構に基づくシリコン微小構造物の寿命評価モデルの比較2012
- Author(s)
  平川創、泉隼人、生津資大、神谷庄司
- Organizer
  日本機械学会M&M2012カンファレンス
- Place of Presentation
  松山市
- Year and Date
  2012-09-22
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] Mysteries in fracture behavior of silicon and polysilicon micro-scale structures in various environments and under repeated loading2012
- Author(s)
  S.Kamiya
- Organizer
  OKMETIC-Nagoya seminar 2012
- Place of Presentation
  Nagoya
- Year and Date
  2012-03-02
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 繰返し応力に対するシリコンMEMS 構造体の疲労寿命と信頼性評価2012
- Author(s)
  神谷庄司
- Organizer
  平成13年度第10回九州地区ナノテクノロジー拠点ネットワーク講演会
- Place of Presentation
  北九州市
- Year and Date
  2012-01-16
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 単結晶シリコン薄膜の破壊挙動に及ぼす水と温度の影響の評価2012
- Author(s)
  Isram Md. Wahedul、泉隼人、小川将史、神谷庄司
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  金沢大学
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 異なる疲労機構に基づくシリコン微小構造物の寿命評価モデルの比較2012
- Author(s)
  平川創、泉隼人、生津資大、神谷庄司
- Organizer
  日本機械学会M&M2012材料力学カンファレンス
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] TEM内疲労試験その場観察を目的としたMEMS共振デバイスの開発2012
- Author(s)
  Lam Hoanson、泉隼人、神谷庄司
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  金沢大学
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] Identification of fatigue crack extension process inzero-tension cyclic stress test of polysilicon films2012
- Author(s)
  V.L.Huy, S.Kamiya, J.Gaspar, O.Paul
- Organizer
  25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2012)
- Place of Presentation
  Paris, France
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] Electronic properties of dislocations introduced mechanically at room temperature on single crystal silicon surface2011
- Author(s)
  M. Ogawa, S. Kamiya, H. Izumi, Y. Tokuda
- Organizer
  26th International Conference on Defects in Semiconductor (ICDS)
- Place of Presentation
  New Zealand
- Year and Date
  2011-07-21
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] Electronic properties of dislocations introduced mechanically at room temperature on single crystal silicon surface2011
- Author(s)
  M. Ogawa, S. Kamiya, H. Izumi, Y. Tokuda
- Organizer
  26th International Conference on Defects in Semiconductors
- Place of Presentation
  Rutherford Hotel(ﾆｭｰｼﾞｰﾗﾝﾄﾞ)
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] Evaluation and comparison of fracture behavior of silicon thin films under various environmental conditions2011
- Author(s)
  H. Izumi, Y-C. Cheng, M. Ishikawa, S. Kamiya, M-T. Lin
- Organizer
  日本実験力学学会2011年度年次講演会
- Place of Presentation
  奈良県文化会館（奈良県）
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] Fracture behavior of silicon thin film under liquid water2011
- Author(s)
  H. Izumi, Y-C. Cheng, M. Ishikawa, S. Kamiya, M-T. Lin
- Organizer
  The 13th International Conference on Electronics Materials and Pachaging (EMAP2011)
- Place of Presentation
  京都ガーデンパレス（京都府）
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] Electronic sensing of mechanical damage on a single crystal silicon surface2011
- Author(s)
  M. Ogawa, S. Kamiya, H. Izumi, Y. Tokuda
- Organizer
  マイクロ・ナノ工学国際ワークショップ
- Place of Presentation
  京都大学桂ｷｬﾝﾊﾟｽ（京都府）
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] Fracture Behavior of Silicon Thin Film under Liquid Water2011
- Author(s)
  Hayato Izumi, Ya-Chi Cheng, Masayoshi Ishikawa, Shoji Kamiya, Ming-Tzer Lin
- Organizer
  13th International Conference on Electronics Materials and Packaging
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2011-12-14
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] Estimation of the parameters determining strength and fatigue behaviors of arbitrarily-shaped polysilicon thin films2011
- Author(s)
  V.L.Huy, J.Gaspar, O.Paul, S.Kamiya
- Organizer
  ASME2011 Pacific Rim Technical Conference & Exposition on Packaging and Integration of Electronic and Photonic Systems (InterPACK2011)
- Place of Presentation
  Portland, USA
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 異なる試験手法により得られたシリコンの疲労挙動の相互比較2011
- Author(s)
  神谷庄司、土屋智由、池原毅、佐藤一雄、安藤妙子、生津資大、高島和希
- Organizer
  第3回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  船堀、東京
- Year and Date
  2011-09-27
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] Evaluation and comparison of fracture behavior of silicon thin films under various environmental conditions2011
- Author(s)
  Y-C. Cheng, H. Izumi, M. Ishikawa, S. Kamiya, M-T. Lin
- Organizer
  The Japanese Society for Experimental Mechanics
- Place of Presentation
  Nara
- Year and Date
  2011-08-30
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] Fracture behavior of silicon thin film under liquid water2011
- Author(s)
  H. Izumi, Y-C. Cheng, M. Ishikawa, S. Kamiya, M-T. Lin
- Organizer
  International Conference on Electronics Materials and Packaging (EMAP)
- Place of Presentation
  Kyoto
- Year and Date
  2011-12-14
- Data Source
  KAKENHI-PROJECT-23651137
[Presentation] 単結晶シリコンの疲労挙動とその環境依存性2011
- Author(s)
  石川正芳、神谷庄司、泉隼人、宍戸信之
- Organizer
  日本機械学会M&M2011材料力学カンファレンス
- Place of Presentation
  北九州市
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 異なる試験手法により得られたシリコンの疲労挙動の相互比較2011
- Author(s)
  神谷庄司、土屋智由、池原毅、佐藤一雄、安藤妙子、生津資大、高島和希
- Organizer
  第3回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  船掘
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] ESTIMATION OF THE PARAMETERS DETERMINING STRENGTH AND FATIGUE BEHAVIORS OF ARBITRARILY-SHAPED POLYSILICON THIN FILMS2011
- Author(s)
  Vu Le Huy, Joao Gaspar, Oliver Paul, Shoji Kamiya
- Organizer
  ASME 2011 Pacific Rim Technical Conference & Exposition on Packaging and Integration of Electronic and Photonic Systems
- Place of Presentation
  Portland, OR, USA
- Year and Date
  2011-07-07
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 単結晶シリコンの疲労挙動とその環境依存性2011
- Author(s)
  石川正芳、神谷庄司、泉隼人、宍戸信之
- Organizer
  日本機械学会M&M 2011
- Place of Presentation
  北九州、福岡
- Year and Date
  2011-07-16
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] Fracture behavior of silicon thin film under liquid water2011
- Author(s)
  H.Izumi, Y.Cheng, M.Ishikawa, S.Kamiya, M-T.Lin
- Organizer
  13th International Conference on Electronics Materials and Packaging (EMAP2011)
- Place of Presentation
  Kyoto
- Data Source
  KAKENHI-PROJECT-23360054
[Presentation] 単結晶シリコンの機械的損傷の電子的性質に関する研究2010
- Author(s)
  小川将史、神谷庄司、泉隼人、徳田豊
- Organizer
  第27回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  くにびきメッセ(松江市)
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-21656030
[Presentation] シリコンの疲労メカニズムの描像を目的とした電子顕微鏡内疲労試験の試み2010
- Author(s)
  平井隆太郎、泉隼人、神谷庄司、梅原徳次、巨陽
- Organizer
  日本機械学会2010年度年次大会
- Place of Presentation
  名古屋工業大学(名古屋市)
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-21656030
[Presentation] シリコン単結晶における疲労損傷の集積過程に及ぼす応力比の効果
- Author(s)
  喜多俊文，泉隼人，神谷庄司，Vu Le Huy
- Organizer
  2014年度日本機械学会年次大会
- Place of Presentation
  東京電機大学　北千住
- Year and Date
  2014-09-07 – 2014-09-10
- Data Source
  KAKENHI-PROJECT-25630008
[Presentation] Fatigue failure and fracture surface analysis of single crystal silicon exposed to oxygen, hydrogen and humidity air environment
- Author(s)
  Arasu Udhayakumar, Shoji Kamiya, Hayato Izumi, Nobuyuki Shishido
- Organizer
  41th International Conference on Metallurgical Coating and Thin Films
- Place of Presentation
  San Diego, US
- Year and Date
  2014-04-28 – 2014-05-02
- Data Source
  KAKENHI-PROJECT-25630008
[Presentation] Mechanical fatigue damage accumulation in silicon visualized by electronic defect analysis technique
- Author(s)
  Shoji Kamiya
- Organizer
  IEC standard SC47F/WG1, MEMS Standardization Workshop
- Place of Presentation
  Geneve, Switzerland
- Year and Date
  2014-06-24 – 2014-06-25
- Invited
- Data Source
  KAKENHI-PROJECT-25630008
[Presentation] Effect of hydrogen on fatigue lifetime of silicon with the aid of shear and compressive stress
- Author(s)
  Arasu Udhayakumar, Hayato Izumi, Kozo Koiwa, Shoji Kamiya
- Organizer
  日本機械学会東海支部第64期総会
- Place of Presentation
  中部大学　愛知
- Year and Date
  2015-03-13 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-25630008
[Presentation] Effect of crystal orientation and environment on fatigue lifetime of single crystal silicon
- Author(s)
  Arasu Udhayakumar, Hayato Izumi, Kozo Koiwa, Shoji Kamiya
- Organizer
  第6回マイクロナノ工学シンポジウム
- Place of Presentation
  くにびきメッセ　松江
- Year and Date
  2014-10-20 – 2014-10-22
- Data Source
  KAKENHI-PROJECT-25630008

1. SAKA Masumi (20158918)

# of Collaborated Projects : 9results

# of Collaborated Products : 4results
2. SOYAMA Hitoshi (90211995)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
3. SASAGAWA Kazuhiko (50250676)

# of Collaborated Projects : 3results

# of Collaborated Products : 0results
4. IZUMI Hayato (90578337)

# of Collaborated Projects : 2results

# of Collaborated Products : 48results
5. MIHARA Tsuyoshi (20174112)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
6. UMEHARA Noritsugu (70203586)

# of Collaborated Projects : 2results

# of Collaborated Products : 0results
7. HAYASHI Takahiro (30324479)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
8. TOKUDA Yutaka (30078927)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
9. SATO Kazuo (30262851)

# of Collaborated Projects : 1results

# of Collaborated Products : 2results
10. NAKAJIMA Masahiro (80377837)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
11. MORITANI Tomokazu (50362322)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
12. SEKINE Hideki (20005359)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
13. FUKUNAGA Hisao (50134664)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
14. MIYATA Hiroshi (80312479)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
15. YANG Ju (60312609)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
16. 黒川洋一 (80005298)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
17. 鈴木光政 (40091706)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
18. 小野崇人 (90282095)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
19. 胡寧 (60250685)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
20. 鈴木寛 (90179242)

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
21. TAKEUCHI Masahiro

# of Collaborated Projects : 1results

# of Collaborated Products : 0results
22. 羽生博之

# of Collaborated Projects : 1results

# of Collaborated Products : 0results

KAMIYA Shoji 神谷 庄司

Research Projects

Research Products

Co-Researchers

応力発光を利用したポリマーＭＥＭＳの構造信頼性新規評価体系構築への挑戦Principal InvestigatorOngoing

Principal Investigator

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A challenge to seek for the effect of hydrogen causing embrittlement and fatigue fracture in siliconPrincipal Investigator

Principal Investigator

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In-situ TEM observation of silicon fatigue process using resonance compressive fatigue testPrincipal Investigator

Principal Investigator

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Mechanical fatigue test under liquid water toward bio-implantable MEMS structures with infinite lifetimePrincipal Investigator

Principal Investigator

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表面の局所電子プローブイメージングによるシリコンの機械的疲労損傷機構描像への挑戦Principal Investigator

Principal Investigator

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Establishment of an reliability evaluation scheme based on statistical analysis and electronic defect sensing for the reliability of silicon against fatigue failurePrincipal Investigator

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粒界ディープレベルと疲労損傷との関連によるポリシリコンの新しい信頼性評価Principal Investigator

Principal Investigator

Project Period (FY)

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多結晶半導体材料の準位に基づくエレクトロナノメカニクスへの期待Principal Investigator

Principal Investigator

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In-Situセンサによるダイヤモンド薄膜の応力計測と超耐久コーティングの設計Principal Investigator

Principal Investigator

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Responses of Angle-Beam Ultrasonic Shear Waves to Closed Cracks and Highly Sensitive Quantitative Nondestructive Evaluation of Crack Sizes Together With Closure Stresses

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Development of Prediction Method for Metal Line Failure Induced by High Current Density

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Development of a Microwave Focusing Sensor and a High Resolution Imaging System for Nondestructive Evaluation of Materials

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Toughening of chemically-vapor deposited diamond by means of active incorporation of carbon allotropesPrincipal Investigator

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KAMIYA Shoji 神谷庄司