Kusano Eiji 草野英二

… Alternative Names

KUSANO Eiji 草野英二

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Researcher Number	00278095
Other IDs	https://orcid.org/0000-0002-6782-1300
Affiliation (Current)	2025: 金沢工業大学, バイオ・化学部, 教授
Affiliation (based on the past Project Information) *help	2012 – 2017: 金沢工業大学, バイオ・化学部, 教授 2006: Kanazawa Institute of Technology, College of Environmental Engineering and Architecture, Professor, 環境建築学部, 教授 2004 – 2005: 金沢工業大学, 環境・建築学部, 教授 2001 – 2002: 金沢工業大学, 工学部, 教授 1995 – 2000: 金沢工業大学, 工学部, 助教授
Review Section/Research Field	Principal Investigator 表面界面物性 / Material processing/Microstructural control engineering / Material processing/treatments Except Principal Investigator Applied physics, general / Measurement engineering / 表面界面物性 / Applied physics, general
Keywords	Principal Investigator スパッタリング / 薄膜 / Titanium / Sputtering / Thin Films / アルミニウム / チタニウム / スパタリング / 阻止電位 / 負イオン … More / 負イオン入射 / フッ化マグネシウム / 負イオン阻止 / CZTS薄膜 / フッ化マグネシウム薄膜 / アニオン欠陥 / Polytetrafluoroethylene / Titanium nitride / Aluminium / Multilayerm / nanoindentation / 多層膜 / 窒化バナジウム / Al / ナノインデンテーション / ポリテトラフルオルエチレン / 窒化チタニウム / 多層構造 / 超微小押し込み硬さ試験 / Network Structure / Island structure / Fractal / Aluminum / フラクタル / 網目状構造 / 島状構造 / フラクタル性 / CZTS太陽電池光吸収層 / ホットウォール / 熱反射壁 / CZTS … More Except Principal Investigator 分子認識膜 / 薄膜 / プラズマCVD / 分子認識機能 / においセンサ / 表面プラズモン共鳴 / Kansei / plasma CVD / gas concentrator / molecular recognition / odor sensing system / 味センサ / 感性 / 濃縮管 / 匂いセンサシステム / kansei measurement / molecular recognition membrane / plasma-polymerized thin film / electronic nose / surface plasmon resonance / quartz crystal microbalance / 悪臭検知 / プラズマ重合 / エレクトロニックノーズ / 有機薄膜 / 水晶振動子においセンサ / 酢の種類判別 / プラズマ重合法 / 半導体においセンサ / 感性計測 / プラズマ有機薄膜 / エレクトロニックノース / 表面プラズモン共鳴味センサ / 水晶振動子式匂いセンサ / Oxide semiconductors / Gas sensor / Chemical sensor / Thin films / Sputtering method / Intelligent sensor / インテリジェントセンサ / 酸化物半導体 / ガスセンサ / 感性化学センサ / スパッタリング / インテリジェントセンサ / Microhardness / Multilayr Structure / Compositional Gradient / Titanium Nitride / Titanium Oxide / Reactive Sputtering / Thin Films / 微小硬さ / 窒化チタン / 多層構造 / 組成変調 / 酸化チタン / 反応性スパッタリング / 鮮度センサ / アクリル酸 / アンモニア / 匂いセンサ / 表面ブラズモン共鳴 / 多変量解析 / プラズマ技術 / 化学センサ / 感性センサ Less

Mechanisms involved in anion defect formation in reactive sputte-deposition of fluoride and sulfide thin films and the surpression of the fformationPrincipal Investigator
- Principal Investigator
  
  Kusano Eiji
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Material processing/Microstructural control engineering
- Research Institution
  Kanazawa Institute of Technology
Sputter deposition of sulfide solar-cell absorber thin films by using a hot-wall reflector toward low-temperature low-cost fabrication processPrincipal Investigator
- Principal Investigator
  
  KUSANO Eiji
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Material processing/treatments
- Research Institution
  Kanazawa Institute of Technology
表面プラズモン共鳴現象を用いたエレクトロニックノーズシステムの機能設計と構築
- Principal Investigator
  
  南戸秀仁
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied physics, general
- Research Institution
  Kanazawa Institute of Technology
Intelligent Odor and Taste Sensor System with Molecular Recognition Ability and Its Application
- Principal Investigator
  
  NANTO Hidehito
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Measurement engineering
- Research Institution
  Kanazawa Institute of Technology
Functional Design of Plasma-Polymerized Organic Thin Films and Its Application to an Electronic Nose
- Principal Investigator
  
  NANTO Hidehito
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied physics, general
- Research Institution
  Kanazawa Institute of Technology
金属/誘電体薄膜界面の表面プラズモン共鳴現象の感性化学センサへの応用
- Principal Investigator
  
  NANTO Hidehito
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied physics, general
- Research Institution
  Kanazawa Institute of Technology
Elastic and plastic energy analysis for multilayered thin films by nanoindentationPrincipal Investigator
- Principal Investigator
  
  KUSANO Eiji
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  表面界面物性
- Research Institution
  Kanazawa Institute of Technology
Functional Design of Semiconductin Thin Films Prepared by Modulation Sputtering Method and Its Application to Chemical Sensor for Odor and Taste
- Principal Investigator
  
  NANTO Hidehito
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied physics, general
- Research Institution
  Kanazawa Institute of Technology
Fractal analysis of inorganic thin solid films with network structuresPrincipal Investigator
- Principal Investigator
  
  KUSANO Eiji
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  表面界面物性
- Research Institution
  Kanazawa Institute of Technology
Development of modulation reactive sputtering and its application for films with multilayr structures
- Principal Investigator
  
  KINBARA Akira
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  表面界面物性
- Research Institution
  Kanazawa Institute of Technology

All 2018 2017 2016 2015 2014 2013 2004 Other

All Journal Article Presentation Book Patent

[Book] スパッタリング法により堆積した薄膜におけるボイドあるいはピンホール発生要因とその対策，「気泡･ボイドの発生メカニズムと未然防止･除去技術」，6章6節[5}2014
- Author(s)
  草野　英二
- Total Pages
  4
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-24656450
[Book] ドライプロセスによる表面処理・薄膜形成の基礎　表面技術協会編2013
- Author(s)
  草野　英二（共著）
- Total Pages
  17
- Publisher
  コロナ社
- Data Source
  KAKENHI-PROJECT-24656450
[Journal Article] 誤解してしまう水の三態と状態変化-開放系と閉鎖系-2018
- Author(s)
  草野　英二
- Journal Title
  
  化学と教育
  
  Volume: 66 Pages: 184-185
- NAID
  130007621816
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K06513
[Journal Article] Radio frequency sputter deposition of Cu 2 ZnSnS 4 thin films with a temperature-controlled reflector wall: Effects of H 2 addition to the sputtering gas2018
- Author(s)
  Kusano Eiji、Kondo Yu
- Journal Title
  
  Thin Solid Films
  
  Volume: 646 Pages: 75-82
- DOI
  10.1016/j.tsf.2017.11.033
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K06513
[Journal Article] Mechanisms of the structural modification of Ti films by pulsed direct current and inductively coupled plasma-assisted pulsed direct current sputtering2017
- Author(s)
  Kusano Eiji、Kikuchi Naoto
- Journal Title
  
  Thin Solid Films
  
  Volume: 634 Pages: 73-84
- DOI
  10.1016/j.tsf.2017.05.014
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K06513
[Journal Article] Kagayuzen Glass Panel Fabricated by Using Glass Laminating Technology2017
- Author(s)
  草野英二
- Journal Title
  
  Hyomen Kagaku
  
  Volume: 38 Issue: 8 Pages: 425-426
- DOI
  10.1380/jsssj.38.425
- NAID
  130005997148
- ISSN
  0388-5321, 1881-4743
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K06513
[Journal Article] 乾燥および高湿環境におけるファインセラミックス薄膜摩擦摩耗試験方法の標準化への取り組み2016
- Author(s)
  草野英二他5名
- Journal Title
  
  Mechanical Surface Tech
  
  Volume: 33 Pages: 22-26
- Data Source
  KAKENHI-PROJECT-15K06513
[Journal Article] Control of composition and properties by the use of reflector wall in RF sputter deposition of Cu2ZnSnS4 thin films2015
- Author(s)
  Eiji Kusano, Muneaki sakamoto
- Journal Title
  
  Thin Solid Films
  
  Volume: 589 Pages: 433-440
- DOI
  10.1016/j.tsf.2015.06.015
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K06513
[Journal Article] パルス放電の基礎とパルススパッタリング法の工業展開-日本真空学会スパッタリング及びプラズマプロセス技術部会勉強会の内容から-2015
- Author(s)
  草野　英二
- Journal Title
  
  真空ジャーナル
  
  Volume: 153 Pages: 11-16
- Data Source
  KAKENHI-PROJECT-15K06513
[Journal Article] Revisit to zone structure model by observing the relationship between normalized deposition temperature and film structure and properties in sputter deposition of the group 4 metals2015
- Author(s)
  Yuta Bohya, Keisuke Akinaga, Eiji Kusano
- Journal Title
  
  The Proceedings of the 13th Intl. Symp. Sputtering and Plasma Processes
  
  Volume: 13 Pages: 186-189
- Data Source
  KAKENHI-PROJECT-15K06513
[Journal Article] Model calculation of time-dependent changes in getter-pump pumping speed in reactive sputtering2015
- Author(s)
  Eiji Kusano
- Journal Title
  
  The Proceedings of the 13th Intl. Symp. Sputtering and Plasma Processes
  
  Volume: 13 Pages: 174-177
- Data Source
  KAKENHI-PROJECT-15K06513
[Journal Article] Structure modification of titanium oxide thin films by rf-plasma assistance in TiO2 reactive dc and pulsed dc sputtering2013
- Author(s)
  Mune-aki Sakamoto, Eiji Kusano, Hiroaki Matsuda
- Journal Title
  
  Thin Solid Films
  
  Volume: 531 Pages: 49-55
- DOI
  10.1016/j.tsf.2012.12.034
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656450
[Journal Article] Model calculation of dynamic mass-balance changes in reactive sputtering2013
- Author(s)
  Eiji Kusano
- Journal Title
  
  The proceedings of the 12nd International Symposium on Sputtering and Plasma Processes, Kyoto, Japan, July 10-12, 2013
  
  Volume: 12 Pages: 10-13
- Data Source
  KAKENHI-PROJECT-24656450
[Journal Article] One-step deposition of Cu2ZnSnS4 thin films by hot-wall sputtering2013
- Author(s)
  Mune-aki Sakamoto, Eiji Kusano
- Journal Title
  
  The proceedings of the 12nd International Symposium on Sputtering and Plasma Processes, Kyoto, Japan, July 10-12, 2013
  
  Volume: 12 Pages: 288-290
- Data Source
  KAKENHI-PROJECT-24656450
[Journal Article] Odor sensor utilizing surface plasmon resonance for environmental monitoring2004
- Author(s)
  H.Nanto, Y.Kitade, Y.Sekikawa, Y.Takei, E.Kusano, A.Kinbara
- Journal Title
  
  SPIE Proceedins 5270
  
  Pages: 174-181
- Data Source
  KAKENHI-PROJECT-16360208
[Journal Article] Odor sensor utilizing surface plasmon resonance for environmental monitoring2004
- Author(s)
  H.Nanto, Y.Kitade, Y.Sekikawa, Y.Takei, E.Kusano, A.Kinbara
- Journal Title
  
  SPIE Proceedings-Advanced Enviromental, Chemical and Biological Sensing Technology 5270
  
  Pages: 174-181
- Data Source
  KAKENHI-PROJECT-16656031
[Journal Article] Odor sensor utilizing surface Plasmon resonance for environmental monitoring2004
- Author(s)
  H.Nanto, Y.Kitade, Y.Sekikawa, Y.Takei, N.Kubota, E.Kusano, A.Kinbara
- Journal Title
  
  Proceedings of SPIE-Advanced Environmental, Chemical and Bilogical Sensing Technology- 5270
  
  Pages: 174-181
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360208
[Journal Article] Odor sensor utilizing surface Plasmon resonance for environmental monitoring2004
- Author(s)
  H.Nanto, Y.Kitade, Y.Sekikawa, Y.Takei, N.Kubota, E.Kusano, A.Kinbara
- Journal Title
  
  Proceedings of SPIE-Advanced Environmental, Chemical and Biological Sensing Technology- Vol.5272
  
  Pages: 174-181
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360208
[Patent] 試料保持台2017
- Inventor(s)
  草野　英二
- Industrial Property Rights Holder
  草野　英二
- Industrial Property Rights Type
  特許
- Filing Date
  2017
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] 反応性スパッタリング法によるMgF2薄膜堆積における負イオン入射阻止の薄膜堆積速度および光学物性への影響2017
- Author(s)
  草野英二，松永大輝
- Organizer
  一般社団法人日本真空学会第58回真空に関する連合講演会
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Band gap and film structure control by H2 addition to Ar discharge gas in Cu2ZnSnS4 thin film deposition by reflector-wall sputtering2017
- Author(s)
  Eiji Kusano, Yu Kondo
- Organizer
  Iberian Vacuum Conference, RIVA-X 8th and European Topical Conference on Hard Coatings
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] 中部から世界へ発信する表面技術2017
- Author(s)
  草野　英二
- Organizer
  一般社団法人表面技術協会第136回講演大会
- Invited
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Model calculation and visualization of time-dependent reactive gas mass balance change in Ti-O2 reactive sputtering2017
- Author(s)
  Eiji Kusano
- Organizer
  16th International Conference on Reactive Sputtering
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Reactive sputter deposition of transparent and low refractive-index MgF2 thin films using a double-grid negative-ion retarding electrode2017
- Author(s)
  Eiji Kusano, Daiki Matsunaga
- Organizer
  16th International Conference on Reactive Sputtering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] 反応性スパッタリングにおける反応性ガス消費の時間変化2017
- Author(s)
  草野　英二
- Organizer
  一般社団法人日本真空学会スパッタリングおよびプラズマプロセス技術部会平成28年度技術交流会
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] ～数100eVのエネルギーを持った入射粒子とターゲットあるいは基板・薄膜との相互作用を理解する2016
- Author(s)
  草野　英二
- Organizer
  日本真空学会スパッタリングおよびプラズマプロセス技術部会平成28年度第1回勉強会
- Place of Presentation
  金沢工業大学東京事務所会議室，東京
- Year and Date
  2016-11-11
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] 熱反射壁を用いたスパッタリング法によるCu2ZnSnS4薄膜太陽電池光吸収層堆積における放電ガスへの水素添加の影響2016
- Author(s)
  草野　英二
- Organizer
  日本真空学会スパッタリングおよびプラズマプロセス技術部会第13回技術交流会
- Place of Presentation
  機械振興会館，東京
- Year and Date
  2016-12-08
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] 負イオン阻止電極をもちいた高周波スパッタリング法によるフッ化マグネシウム薄膜の堆積2016
- Author(s)
  松永大輝, 草野英二
- Organizer
  第57回真空に関する連合講演会
- Place of Presentation
  名古屋国際会議場，名古屋
- Year and Date
  2016-11-30
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Deposition of Cu2ZnSnS4 thin film solar absorber by reflector-wall sputtering from a quaternary target: effects of H2 addition to discharge gas2016
- Author(s)
  Eiji Kusano, Yu Kondo
- Organizer
  The 20th Intl. Vacuum Congress
- Place of Presentation
  BEXCO, Busan, Korea
- Year and Date
  2016-08-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Deposition of Cu2ZnSnS4 thin film solar absorber by reflector-wall sputtering from a quaternary target: effects of H2 addition to discharge gas2016
- Author(s)
  Eiji KUSANO, Yu KONDO
- Organizer
  20th International Vacuum Congress
- Place of Presentation
  Busan, Korea
- Year and Date
  2016-08-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] 熱反射壁を用いたスパッタリング法によるCZTS 薄膜太陽電池光吸収層の堆積における放電ガスへの水素添加の影響2016
- Author(s)
  草野英二，近藤優，保屋勇太
- Organizer
  表面技術協会第133講演大会
- Place of Presentation
  早稲田大学，東京
- Year and Date
  2016-03-23
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Suppression of F- ion incidence to growing film surface by using a double-grid retarding electrode in sputter deposition of MgF2 thin films", preliminary abstract code2016
- Author(s)
  Eiji Kusano, Satoshi Jinbo
- Organizer
  15th International Conference on Plasma Surface Engineering - Conference and Exhibition
- Place of Presentation
  Congress Center, Garmisch-Partenkirchen, Germany
- Year and Date
  2016-09-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Suppression of F- ion incidence to growing film surface by using a double-grid retarding electrode in sputter deposition of MgF2 thin films2016
- Author(s)
  Eiji Kusano, Satoshi Jinbo
- Organizer
  15th International Conference on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2016-09-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Revisit to zone structure model by observing the relationship between normalized deposition temperature and film structure and properties in sputter deposition of the group 4 metals2015
- Author(s)
  Yuta Bohya, Keisuke Akinaga, Eiji Kusano
- Organizer
  13th Intl. Symp. Sputtering and Plasma Processes
- Place of Presentation
  Kyoto Research Park, Kyoto, Japan
- Year and Date
  2015-07-09
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Model calculation of time-dependent changes in getter-pump pumping speed in reactive sputtering2015
- Author(s)
  Eiji Kusano
- Organizer
  13th Intl.Symp.Sputtering and Plasma Processes
- Place of Presentation
  京都リサーチパーク，京都市
- Year and Date
  2015-07-09
- Data Source
  KAKENHI-PROJECT-24656450
[Presentation] Model calculation of time-dependent changes in getter-pump pumping speed in reactive sputtering2015
- Author(s)
  Eiji Kusano
- Organizer
  13th Intl. Symp. Sputtering and Plasma Processes
- Place of Presentation
  Kyoto Research Park, Kyoto, Japan
- Year and Date
  2015-07-09
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] 直流および直流パルススパッタリング法による4族金属薄膜堆積における高周波プラズマ支援の薄膜構造および物性への影響2015
- Author(s)
  保屋勇太，田中さおり，草野英二
- Organizer
  日本真空学会第56回真空に関する連合講演会
- Place of Presentation
  つくば国際会議場，つくば
- Year and Date
  2015-12-01
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Mechanisms involved in modification of film structure and properties in ICP assisted dc and pulsed dc sputtering2015
- Author(s)
  Eiji Kusano
- Organizer
  International symposium on Surface Engineering based Convergence Science & Technology (SECST2015)and the 49th Korean Vacuum Society
- Place of Presentation
  Changwon Convention Center, Changwon, Korea
- Year and Date
  2015-08-25
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06513
[Presentation] Revisit to zone structure model by observing the relationship between normalized deposition temperature and film structure and properties in sputter deposition of the group 4 metals2015
- Author(s)
  Yuta Bohya, Keisuke Akinaga, Eiji Kusano
- Organizer
  13th Intl.Symp.Sputtering and Plasma Processes
- Place of Presentation
  京都リサーチパーク，京都市
- Year and Date
  2015-07-09
- Data Source
  KAKENHI-PROJECT-24656450
[Presentation] ホットウォールスパッタリング法により堆積したCZTS薄膜太陽電池光吸収層の組成および物性制御2014
- Author(s)
  草野　英二，坂本　宗明
- Organizer
  一般社団法人表面技術協会第129回講演大会
- Place of Presentation
  東京理科大学
- Data Source
  KAKENHI-PROJECT-24656450
[Presentation] Evaluation of time-dependent compound layer formation and removal at target surface by model calculation of mass balance change in reactive sputtering2013
- Author(s)
  Eiji Kusano., Mune-aki Sakamoto
- Organizer
  19th International Vacuum Congress IVC-19
- Place of Presentation
  Palais des Congress, Paris
- Data Source
  KAKENHI-PROJECT-24656450
[Presentation] ホットウォール高周波スパッタリング法によるCu2ZnSnS4薄膜堆積におけるホットウォール温度および放電圧力の薄膜組成、構造および物性への影響
- Author(s)
  坂上拓哉，坂本宗明，草野英二
- Organizer
  日本真空協会　第53回真空に関する連合講演会
- Place of Presentation
  甲南大学, 神戸
- Data Source
  KAKENHI-PROJECT-24656450
[Presentation] 高周波スパッタリング法によるCu2ZnSnS4薄膜堆積におけるホットウォール温度および放電圧力の薄膜組成，構造および物性への影響
- Author(s)
  坂上拓哉，中村一貴，稲葉駿介，坂本宗明，草野英二
- Organizer
  日本化学会　第93春季年会
- Place of Presentation
  立命館大学，草津
- Data Source
  KAKENHI-PROJECT-24656450
[Presentation] One-step deposition of Cu2ZnSnS4 thin films by hot-wall sputtering,
- Author(s)
  M. Sakamoto, E. Kusano
- Organizer
  12th International Symposium on Sputtering and Plasma Processes (ISSP)
- Place of Presentation
  Kyoto Research Park, Kyoto
- Data Source
  KAKENHI-PROJECT-24656450
[Presentation] Refractive index enhancement by rf-plasma assistance in reactive dc and pulsed dc sputter deposition of Ta2O5 and TiO2 films
- Author(s)
  Eiji Kusano
- Organizer
  Reactive Sputter Deposition 2012
- Place of Presentation
  Ghent University, Belgium
- Invited
- Data Source
  KAKENHI-PROJECT-24656450

1. KINBARA Akira (90010719)

# of Collaborated Projects: 6 results

# of Collaborated Products: 0 results
2. NANTO Hidehito (30133466)

# of Collaborated Projects: 6 results

# of Collaborated Products: 4 results
3. TAKEI Yoshinori (30350755)

# of Collaborated Projects: 3 results

# of Collaborated Products: 4 results
4. 山ノ口崇 (30410286)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. 参沢匡将

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results

Kusano Eiji 草野 英二

KUSANO Eiji 草野 英二

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Co-Researchers

Mechanisms involved in anion defect formation in reactive sputte-deposition of fluoride and sulfide thin films and the surpression of the fformationPrincipal Investigator

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Sputter deposition of sulfide solar-cell absorber thin films by using a hot-wall reflector toward low-temperature low-cost fabrication processPrincipal Investigator

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表面プラズモン共鳴現象を用いたエレクトロニックノーズシステムの機能設計と構築

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Intelligent Odor and Taste Sensor System with Molecular Recognition Ability and Its Application

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Functional Design of Plasma-Polymerized Organic Thin Films and Its Application to an Electronic Nose

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金属/誘電体薄膜界面の表面プラズモン共鳴現象の感性化学センサへの応用

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Elastic and plastic energy analysis for multilayered thin films by nanoindentationPrincipal Investigator

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Functional Design of Semiconductin Thin Films Prepared by Modulation Sputtering Method and Its Application to Chemical Sensor for Odor and Taste

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Fractal analysis of inorganic thin solid films with network structuresPrincipal Investigator

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Development of modulation reactive sputtering and its application for films with multilayr structures

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[Book] スパッタリング法により堆積した薄膜におけるボイドあるいはピンホール発生要因とその対策，「気泡･ボイドの発生メカニズムと未然防止･除去技術」，6章6節[5}2014

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[Book] ドライプロセスによる表面処理・薄膜形成の基礎 表面技術協会編2013

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[Journal Article] 誤解してしまう水の三態と状態変化-開放系と閉鎖系-2018

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Kusano Eiji 草野英二

KUSANO Eiji 草野英二

[Book] ドライプロセスによる表面処理・薄膜形成の基礎　表面技術協会編2013