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大竹 浩人  オオタケ ヒロト

ORCIDConnect your ORCID iD *help
Researcher Number 00436156
Affiliation (based on the past Project Information) *help 2009 – 2011: Tohoku University, 流体科学研究所, 准教授
Review Section/Research Field
Principal Investigator
Thin film/Surface and interfacial physical properties
Keywords
Principal Investigator
チャージアップ / イオン軌道 / モニタリング / オンウエハセンサ / プラズマ加工
  • Research Projects

    (1 results)
  • Research Products

    (3 results)
  • Co-Researchers

    (1 People)
  •  オンウエハセンサ技術による基板電荷蓄積量とイオンエネルギー分布計測技術の開発Principal Investigator

    • Principal Investigator
      大竹 浩人
    • Project Period (FY)
      2009 – 2011
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Thin film/Surface and interfacial physical properties
    • Research Institution
      Tohoku University

All 2009

All Presentation

  • [Presentation] Ion Trajectory Prediction at High-Aspect-Ratio Hole Etching by the Combination of On-Water Monitoring and Sheath Modeling2009

    • Author(s)
      大竹浩人, 福田誠一, 陣内佛霖, 辰巳知彦, 寒川誠二
    • Organizer
      AVS 56th International Symposium & Exhibition
    • Place of Presentation
      アメリカ合衆国・カリフォルニア州・サンノゼ
    • Year and Date
      2009-11-11
    • Data Source
      KAKENHI-PROJECT-21560026
  • [Presentation] オンウエハモニタリング技術による異常形状発生予測2009

    • Author(s)
      大竹浩人、福田誠一、陣内佛霖、辰巳知彦、寒川誠二
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山県・富山市
    • Year and Date
      2009-09-09
    • Data Source
      KAKENHI-PROJECT-21560026
  • [Presentation] Prediction of Abnormal Etching Profile in High-Aspect-Ratio Via/Hole Etching Using On-Water Monitoring System2009

    • Author(s)
      大竹浩人, 福田誠一, 陣内佛霖, 辰巳知彦, 寒川誠二
    • Organizer
      International meeting on solid state device and materials
    • Place of Presentation
      宮城県・仙台市
    • Year and Date
      2009-10-09
    • Data Source
      KAKENHI-PROJECT-21560026
  • 1.  寒川 誠二 (30323108)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results

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