Hayashi Yusuke 林侑介

Researcher Number	00800484
Other IDs	https://orcid.org/0000-0001-5672-1497
Affiliation (Current)	2026: 国立研究開発法人物質・材料研究機構, 電子・光機能材料研究センター, 主任研究員
Affiliation (based on the past Project Information) *help	2026: 国立研究開発法人物質・材料研究機構, 電子・光機能材料研究センター, 主任研究員 2024: 国立研究開発法人物質・材料研究機構, 電子・光機能材料研究センター, 主任研究員 2022 – 2023: 大阪大学, 大学院基礎工学研究科, 助教 2019 – 2021: 大阪大学, 基礎工学研究科, 助教 2017 – 2018: 三重大学, 地域イノベーション学研究科, 助教
Review Section/Research Field	Principal Investigator Basic Section 21050:Electric and electronic materials-related / Medium-sized Section 21:Electrical and electronic engineering and related fields / Basic Section 21060:Electron device and electronic equipment-related / Electron device/Electronic equipment Except Principal Investigator Medium-sized Section 21:Electrical and electronic engineering and related fields
Keywords	Principal Investigator 極性反転 / AlN / 半導体デバイス / 断層解析 / ナノビームX線回折 / 歪 / 半導体 / オペランド計測 / 放射光 / 極性制御 … More / CMOS / GaN / 窒化アルミニウム / ワイドギャップ半導体 / 2次元正孔ガス / 2次元電子ガス / 窒化ガリウム / 波長変換 / 表面活性化接合 / ウェハ接合 / 深紫外 / AlGaN / ダイヤモンド … More Except Principal Investigator LD / AlGaN / 深紫外 / 半導体レーザー Less

Development of Underdeveloped Wavelength Regions in Deep Ultraviolet Semiconductor Lasers
- Principal Investigator
  
  久志本真希
- Project Period (FY)
  2026 – 2029
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 21:Electrical and electronic engineering and related fields
- Research Institution
  Nagoya University
ナノビームX線回折による半導体デバイスの4次元断層解析Principal Investigator
- Principal Investigator
  
  林侑介
- Project Period (FY)
  2024 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21050:Electric and electronic materials-related
- Research Institution
  National Institute for Materials Science
  Osaka University
Development of GaN CMOS Monolithic Integrated Circuits Technology Using Crystal Hetero-Polarity ControlPrincipal Investigator
- Principal Investigator
  
  林侑介
- Project Period (FY)
  2022 – 2025
- Research Category
  
  Fund for the Promotion of Joint International Research (Fostering Joint International Research (B))
- Review Section
  
  Medium-sized Section 21:Electrical and electronic engineering and related fields
- Research Institution
  National Institute for Materials Science
  Osaka University
Development of AlN Wavelength Conversion Devices Using Vertical Polarity InversionPrincipal Investigator
- Principal Investigator
  
  Hayashi Yusuke
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Osaka University
AlGaN/Diamond DUV Light Sources Fabricated by Direct Wafer BondingPrincipal Investigator
- Principal Investigator
  
  Hayashi Yusuke
- Project Period (FY)
  2017 – 2018
- Research Category
  
  Grant-in-Aid for Research Activity Start-up
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Mie University

All 2025 2024 2023 2022 2021 2020 2019 2018 2017

All Journal Article Presentation Patent

[Journal Article] Analyses of oxygen precipitates in CZ-Si by X-ray diffuse scattering using parallel X-ray beam2025
- Author(s)
  Horikawa Tomoyuki、Tsusaka Yoshiyuki、Matsui Junji、Tohei Tetsuya、Hayashi Yusuke、Sakai Akira
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 64 Issue: 4 Pages: 045502-045502
- DOI
  10.35848/1347-4065/adc0d3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K26141, KAKENHI-PROJECT-22KK0055
[Journal Article] Local strain distribution analysis in strained SiGe spintronics devices2024
- Author(s)
  Onabe Tomoki、Wu Zhendong、Tohei Tetsuya、Hayashi Yusuke、Sumitani Kazushi、Imai Yasuhiko、Kimura Shigeru、Naito Takahiro、Hamaya Kohei、Sakai Akira
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 63 Issue: 2 Pages: 02SP61-02SP61
- DOI
  10.35848/1347-4065/ad18ce
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H05616, KAKENHI-PROJECT-23K26141
[Journal Article] Micro-and Nanostructure Analysis of Vapor-Phase-Grown AlN on Face-to-Face Annealed Sputtered AlN/Nanopatterned Sapphire Substrate Templates2023
- Author(s)
  Nakanishi Yudai、Hayashi Yusuke、Hamachi Takeaki、Tohei Tetsuya、Nakajima Yoshikata、Xiao Shiyu、Shojiki Kanako、Miyake Hideto、Sakai Akira
- Journal Title
  
  Journal of Electronic Materials
  
  Volume: - Issue: 8 Pages: 5099-5108
- DOI
  10.1007/s11664-023-10348-3
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22K14612, KAKENHI-PROJECT-22KK0055, KAKENHI-PROJECT-21K04194, KAKENHI-PROJECT-23K23238
[Journal Article] Conduction mechanism of Schottky contacts fabricated on etch pits originating from single threading dislocation in a highly Si-doped HVPE GaN substrate2023
- Author(s)
  Sato Toshikazu、Hamachi Takeaki、Tohei Tetsuya、Hayashi Yusuke、Imanishi Masayuki、Usami Shigeyoshi、Mori Yusuke、Sakai Akira
- Journal Title
  
  Materials Science in Semiconductor Processing
  
  Volume: 167 Pages: 107778-107778
- DOI
  10.1016/j.mssp.2023.107778
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K26141, KAKENHI-PROJECT-23K26380
[Journal Article] Thermal strain analysis considering in-plane anisotropy for sputtered AlN on c- and a-plane sapphire under high-temperature annealing2021
- Author(s)
  Yusuke Hayashi,Kenjiro Uesugi,Kanako Shojiki,Tetsuya Tohei,Akira Sakai,Hideto Miyake
- Journal Title
  
  AIP Advances
  
  Volume: 11 Issue: 9 Pages: 095012-095012
- DOI
  10.1063/5.0059723
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K15025, KAKENHI-PROJECT-19K15045, KAKENHI-PROJECT-21K14545
[Journal Article] Polarity Inversion of Nitride Semiconductors and Application to Deep-Ultraviolet Photonic Devices2020
- Author(s)
  林侑介
- Journal Title
  
  Journal of the Japanese Association for Crystal Growth
  
  Volume: 47 Issue: 3 Pages: n/a
- DOI
  10.19009/jjacg.47-3-06
- NAID
  130007930973
- ISSN
  0385-6275, 2187-8366
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K15045, KAKENHI-PLANNED-16H06423
[Journal Article] Suppression of dislocation-induced spiral hillocks in MOVPE-grown AlGaN on face-to-face annealed sputter-deposited AlN template2020
- Author(s)
  Uesugi Kenjiro、Shojiki Kanako、Tezen Yuta、Hayashi Yusuke、Miyake Hideto
- Journal Title
  
  Applied Physics Letters
  
  Volume: 116 Issue: 6 Pages: 062101-062101
- DOI
  10.1063/1.5141825
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K15045, KAKENHI-PLANNED-16H06415, KAKENHI-PROJECT-19K15025
[Journal Article] Curvature-Controllable and Crack-Free AlN/Sapphire Templates Fabricated by Sputtering and High-Temperature Annealing2019
- Author(s)
  Y. Hayashi, K. Tanigawa, K. Uesugi, K. Shojiki, and H. Miyake
- Journal Title
  
  J. Cryst. Growth
  
  Volume: 512 Pages: 131-135
- DOI
  10.1016/j.jcrysgro.2019.02.026
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H06762
[Journal Article] High‐Temperature Annealing of Sputter‐Deposited AlN on (001) Diamond Substrate2019
- Author(s)
  Shirato Tatsuya、Hayashi Yusuke、Uesugi Kenjiro、Shojiki Kanako、Miyake Hideto
- Journal Title
  
  physica status solidi (b)
  
  Volume: 257 Issue: 2 Pages: 1900447-1900447
- DOI
  10.1002/pssb.201900447
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K15045, KAKENHI-PLANNED-16H06415, KAKENHI-PROJECT-19K15025
[Journal Article] Polarity inversion of aluminum nitride by direct wafer bonding2018
- Author(s)
  Hayashi, Y; Katayama, R; Akiyama, T; Ito, T; Miyake, H
- Journal Title
  
  APPLIED PHYSICS EXPRESS
  
  Volume: 11 Issue: 3 Pages: 31003-31003
- DOI
  10.7567/apex.11.031003
- NAID
  210000136117
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PLANNED-16H06415, KAKENHI-PROJECT-17H01063, KAKENHI-PROJECT-17K19078, KAKENHI-PUBLICLY-17H05335, KAKENHI-PROJECT-17H06762
[Journal Article] Analysis of Ultra Compact Plasmonic Modulator with Metal-Taper Structure Embedded in Furan-Thiophene Chromatophore Electro-Optic Polymer2017
- Author(s)
  Naoya Hojo, Tomohiro Amemiya, Kazuto Itou, Zhichen Gu, Chiyumi Yamada, Toshiki Yamada, Junichi Suzuki, Yuusuke Hayashi, Nobuhiko Nishiyama, Akira Otomo, Shigehisa Arai
- Journal Title
  
  Applied Optics
  
  Volume: vol.56 Issue: 8 Pages: 2053-2059
- DOI
  10.1364/ao.56.002053
- NAID
  40020992145
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H06292, KAKENHI-PROJECT-15H05763, KAKENHI-PROJECT-16H06082, KAKENHI-PROJECT-17H06762
[Journal Article] Introduction of AlInAs-oxide Current Confinement Structure into GaInAsP/SOI Hybrid Fabry-Perot Laser2017
- Author(s)
  Junichi Suzuki, Yusuke Hayashi, Satoshi Inoue, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 6 Pages: 62103-62103
- DOI
  10.7567/jjap.56.062103
- NAID
  210000147827
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H06292, KAKENHI-PROJECT-15H05763, KAKENHI-PROJECT-17H03247, KAKENHI-PROJECT-16H06082, KAKENHI-PROJECT-17H06762
[Patent] 窒化物半導体基板及び光半導体デバイス2019
- Inventor(s)
  林侑介, 三宅秀人
- Industrial Property Rights Holder
  林侑介, 三宅秀人
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2019-037838
- Filing Date
  2019
- Data Source
  KAKENHI-PROJECT-17H06762
[Patent] 窒化物半導体基板の製造方法および窒化物半導体基板2018
- Inventor(s)
  林侑介, 三宅秀人
- Industrial Property Rights Holder
  林侑介, 三宅秀人
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2018-164953
- Filing Date
  2018
- Data Source
  KAKENHI-PROJECT-17H06762
[Patent] 窒化物半導体基板、窒化物半導体基板の製造方法、窒化物半導体基板の製造装置及び窒化物半導体デバイス2017
- Inventor(s)
  林侑介、三宅秀人、片山竜二
- Industrial Property Rights Holder
  三重大学
- Industrial Property Rights Type
  特許
- Filing Date
  2017
- Data Source
  KAKENHI-PROJECT-17H06762
[Patent] 基板および基板の製造方法2017
- Inventor(s)
  林侑介、三宅秀人
- Industrial Property Rights Holder
  三重大学
- Industrial Property Rights Type
  特許
- Filing Date
  2017
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] pコンタクト層の無い2DHG GaN 構造のFET動作2025
- Author(s)
  林正桓、成澤功喜、Risco Jimy Encomendero、Grace Xing、Debdeep Jena、林侑介、三宅秀人、宮本恭幸
- Organizer
  2025年第72回応用物理学会春季学術講演会
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22KK0055
[Presentation] In situ nanobeam X-ray diffraction of vertical power devices grown on OVPE-GaN substrates2024
- Author(s)
  Y. Hayashi, T. Tohei, K. Sumitani, Y. Imai, S. Kimura, S. Usami, M. Imanishi, Y. Mori, A. Wakejima, H. Watanabe, S. Nitta, Y. Honda, H. Amano, A. Sakai
- Organizer
  12th International Workshop on Nitride Semiconductors (IWN2024)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] OVPE-GaN基板上縦型パワーデバイスのその場ナノビームX線回折2024
- Author(s)
  林侑介、藤平哲也、隅谷和嗣、今井康彦、木村滋、宇佐美茂佳、今西正幸、森勇介、分島彰男、渡邉浩崇、新田州吾、本田善央、天野浩、酒井朗
- Organizer
  2024年第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] In situ nanobeam X-ray diffraction of vertical power devices grown on OVPE-GaN substrates2024
- Author(s)
  Y. Hayashi, T. Tohei, K. Sumitani, Y. Imai, S. Kimura, S. Usami, M. Imanishi, Y. Mori, A. Wakejima, H. Watanabe, S. Nitta, Y. Honda, H. Amano, A. Sakai
- Organizer
  12th International Workshop on Nitride Semiconductors (IWN2024)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22KK0055
[Presentation] AlGaN系UV-B波長レーザダイオードの深さ分解ナノビームX線回折2023
- Author(s)
  谷口翔太、林侑介、藤平哲也、隅谷和嗣、今井康彦、木村滋、岩谷素顕、三宅秀人、酒井朗
- Organizer
  2023年第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] スパッタアニールAlN上MBEホモエピタキシャル層の成長条件探索と微細構造解析2023
- Author(s)
  2.西村海音、林侑介、藤平哲也、Cho Yongjin、Encomendero Jimy、Xing Huili (Grace)、Jena Debdeep
- Organizer
  2024年第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-22KK0055
[Presentation] Local strain distribution analysis in strained SiGe spintronics devices2023
- Author(s)
  T. Onabe, Z. D. Wu, T. Tohei, Y. Hayashi, K. Sumitani, Y. Imai, S. Kimura, T. Naito, K. Hamaya, and A. Sakai
- Organizer
  2023 International Conference on Solid State Devices and Materials (SSDM 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] Three-dimensional tomographic analysis of AlGaN-based UV-B wavelength laser diodes2023
- Author(s)
  S. Taniguchi, Y. Hayashi, T. Tohei, K. Sumitani, Y. Imai, S. Kimura, M. Iwaya, H. Miyake, and A. Sakai
- Organizer
  The 14th International Conference on Nitride Semiconductors (ICNS-14)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] Machine Learning Assisting NanoXRD Based Analysis on HVPE GaN Structure2023
- Author(s)
  Z. D. Wu, Y. Hayashi, T. Tohei, K. Sumitani, Y. Imai, S. Kimura, and A. Sakai
- Organizer
  The 14th International Conference on Nitride Semiconductors (ICNS-14)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] 歪みSiGeスピントロニクスデバイスにおける局所歪み分布解析2023
- Author(s)
  尾鍋友毅、武振東、藤平哲也、林侑介、隅谷和嗣、今井康彦、木村滋、内藤貴大、浜屋宏平、酒井朗
- Organizer
  2023年第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] Molecular Beam Homoepitaxy of N-polar AlN: an Enabling Role of Aluminum-Assisted Surface Cleaning2022
- Author(s)
  Z. Zhang, Y. Hayashi, V. Protasenko, J. Singhal, H. Miyake, H. G. Xing, D. Jena, and Y. Cho
- Organizer
  2022 MRS Spring Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] TEM Analysis of MBE-Grown AlN on N-polar Sputtered and Annealed AlN templates2022
- Author(s)
  Y. Hayashi, T. Tohei, Z. Zhang, H. G. Xing, D. Jena, Y. Cho, H. Miyake, and A. Sakai
- Organizer
  International Workshop on Nitride Semiconductors (IWN 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22KK0055
[Presentation] 平面TEMによるNPSS上AlN厚膜の微細構造解析2022
- Author(s)
  中西悠太、濱地威明、中島義賢、林侑介、藤平哲也、肖世玉、正直花奈子、三宅秀人、酒井朗
- Organizer
  2022年第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] 高品質AlNテンプレートの歪制御と電子デバイス応用2022
- Author(s)
  林侑介, 藤平哲也, Yongjin Cho, Huili Grace Xing, Debdeep Jena, 三宅秀人, 酒井朗
- Organizer
  電気学会「高機能化合物半導体エレクトロニクス技術と将来システムへの応用調査専門委員会(第2期)」
- Invited
- Data Source
  KAKENHI-PROJECT-22KK0055
[Presentation] スパッタアニール法で作製したAlN極性反転構造における酸素プラズマ照射効果2022
- Author(s)
  林侑介、Li Jiaying、中西悠太、藤平哲也、上杉謙次郎、正直花奈子、三宅秀人、五十嵐信行、酒井朗
- Organizer
  2022年第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] Crack Formation Mechanism of Sputtered and Annealed AlN on c- and a-Plane Sapphire2022
- Author(s)
  Y. Hayashi, T. Tohei, K. Uesugi, K. Shojiki, H. Miyake, and A. Sakai
- Organizer
  International Workshop on Nitride Semiconductors (IWN 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22KK0055
[Presentation] スパッタアニールAlN上GaN/AlN 2次元正孔ガス構造の電気特性評価と微細構造解析2022
- Author(s)
  西村海音、中西悠太、林侑介、藤平哲也、Chaudhuri Reet、Cho Yongjin、Xing Huili (Grace)、Debdeep Jena、上杉謙次郎、三宅秀人、酒井朗
- Organizer
  2022年第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] 多層極性反転AlNの傾斜面KOHエッチングによる極性判定2022
- Author(s)
  林侑介、中西悠太、藤平哲也、上杉謙次郎、正直花奈子、三宅秀人、酒井朗
- Organizer
  2022年第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] 深さ分解ナノビームX線回折法によるコーン型NPSS上AlN厚膜の高空間分解能3次元トモグラフィック解析2022
- Author(s)
  中西悠太、林侑介、藤平哲也、隅谷和嗣、今井康彦、木村滋、肖世玉、三宅秀人、酒井朗
- Organizer
  2022年第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] 高温熱処理したスパッタAlN膜のクラック発生条件2021
- Author(s)
  林侑介、上杉謙次郎、正直花奈子、三宅秀人、藤平哲也、酒井朗
- Organizer
  2021年第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] X-ray Tomographic Analysis Using Differential Aperture Technique for AlN Grown on Nano-Patterned Sapphire Substrates2021
- Author(s)
  Y. Hayashi, Y. Imai, N. Yamamoto, T. Tohei, K. Sumitani, S. Kimura, K. Shojiki, H. Miyake, and A. Sakai
- Organizer
  Materials Research Meeting 2021 (MRM2021)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] Sputtered and annealed AlN templates for photonic and electronic device2021
- Author(s)
  Y. Hayashi, R. Chaudhuri, Y. Cho, H. G. Xing, D. Jena, H. Miyake, T. Tohei, A. Sakai
- Organizer
  Virtual Workshop on Materials Science and Advanced Electronics Created by Singularity
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] コーン型NPSS 上 AlN テンプレートに成長させた AlN 厚膜の微細構造解析2021
- Author(s)
  16.中西悠太、山本望、濱地威明、林侑介、藤平哲也、隅谷和嗣、今井康彦、木村滋、肖世玉、三宅秀人、酒井朗
- Organizer
  2021年第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] High-Resolution Tomographic Analysis on AlN films Grown on NPSSs Using Nanobeam X-Ray Diffraction2021
- Author(s)
  Y. Hayashi, N. Yamamoto, Y. Nakanishi, T. Hamachi, T. Tohei, K. Sumitani, Y. Imai, S. Kimura, K. Shojiki, H. Miyake, and A. Sakai,
- Organizer
  2021 International Conference on Solid State Devices and Materials (SSDM2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] スパッタ法と高温アニールで作製した－c/+c AlN薄膜の電子線回折による極性判定2020
- Author(s)
  林侑介、野本健斗、濱地威明、藤平哲也、三宅秀人、五十嵐信行、酒井朗
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] Fabrication of c-AlN/a-Sapphire Templates by Sputtering and High-Temperature Annealing2019
- Author(s)
  Y. Hayashi, K. Fujikawa, K. Uesugi, K. Shojiki, and H. Miyake
- Organizer
  Compound Semiconductor Week 2019 (CSW 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Fabrication of +c/-c AlN Structure toward IR Wavelength Conversion2019
- Author(s)
  Y. Hayashi, K. Uesugi, K. Shojiki, R. Katayama, and A. Sakai
- Organizer
  8th International Symposium on Control of Semiconductor Interfaces (ISCSI-VIII)
- Data Source
  KAKENHI-PROJECT-19K15045
[Presentation] High-Temperature Annealing of Sputter-Deposited AlN on Diamond Substrate2019
- Author(s)
  T. Shirato, Y. Hayashi, K. Uesugi, K. Shojiki, and H. Miyake,
- Organizer
  Compound Semiconductor Week 2019 (CSW 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] 原子的に平坦なステップテラス構造を有するAlNホモエピタキシャル成長2018
- Author(s)
  正直花奈子、河合祥也、林侑介、三宅秀人
- Organizer
  第65回秋季応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] 表面活性化接合と Si 基板剥離による GaN 極性反転構造の作製2018
- Author(s)
  小野寺卓也、上向井正裕、髙橋一矢、岩谷素顕、赤﨑勇、林侑介、三宅秀人、久志本真希、鄭惠貞、本田善央、天野浩、片山竜二
- Organizer
  第65回秋季応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] 高温アニールで生じるスパッタAlNの反り制御2018
- Author(s)
  林侑介、谷川健太朗、正直花奈子、三宅秀人
- Organizer
  第65回秋季応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] ZrO2/ AlN 積層導波路を用いた深紫外第二高調発生デバイスの設計2018
- Author(s)
  山口修平、上向井正裕、髙橋一矢、岩谷素顕、赤﨑勇、林侑介、三宅秀人、山田智也、藤原康文、片山竜二
- Organizer
  第65回秋季応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Bowing Control of Sputtered AlN Caused by High Temperature Annealing2018
- Author(s)
  Y. Hayashi, K. Tanigawa, K. Shojiki, and H. Miyake
- Organizer
  19th International Conference on Metalorganic Vapor Phase Epitaxy (ICMOVPE XIX)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Development of Surface-Activated Wafer Bonding Method of AlN, GaN and LiNbO32017
- Author(s)
  T. Onodera, M. Uemukai, K. Takahashi, M. Iwaya, I. Akasaki, Y. Hayashi, H. Miyake, and R. Katayama
- Organizer
  2017 International Workshop on UV Materials and Devices (IWUMD2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] High-Quality AlN films via Face-to-Face annealing and Its Applications for Second Harmonic Generation2017
- Author(s)
  Y. Hayashi, and H. Miyake
- Organizer
  The 4th International Conference on Advanced Electromaterials (ICAE 2017)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Fabrication of high-quality AlN template by high temperature annealing for UV devices2017
- Author(s)
  H. Miyake, Y. Hayashi, S. Xiao, and K. Hiramatsu
- Organizer
  The 8th Asia-Pacific Workshop on Widegap Semiconductors (APWS2017)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] 極性反転積層AlN光導波路を用いた波長変換デバイスの設計2017
- Author(s)
  山口修平、上向井正裕、髙橋一矢、岩谷素顕、赤﨑勇、林侑介、三宅秀人、山田智也、藤原康文、片山竜二
- Organizer
  第78回秋季応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] High-temperature annealing of AlN on sapphire using face-to-face method2017
- Author(s)
  H. Miyake, Y. Hayashi, S. Xiao, and K. Hiramatsu
- Organizer
  SPIE OPTO Gallium Nitride Materials and Devices XIII
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Compositional modulation for high AlN mole fraction AlxGa1-xN multiple quantum wells to enhance overlap integral of carrier wavefunctions2017
- Author(s)
  K. Kojima, Y. Hayashi, K. Hiramatsu, H. Miyake, and S. F. Chichibu
- Organizer
  2017 International Workshop on UV Materials and Devices (IWUMD2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] 疑似位相整合SHGに向けたFace to FaceアニールによるAlN分極反転構造の作製2017
- Author(s)
  林侑介、三宅秀人、平松和政、片山竜二
- Organizer
  第78回秋季応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Novel Optical-mode Converter between III-V/SOI Hybrid Devices2017
- Author(s)
  J. Suzuki, K. Ito, Y. Hayashi, S. Inoue, K. Nagasaka, N. Nishiyama, and S. Arai
- Organizer
  Int. Conf. on Indium Phosphide and Related Materials (IPRM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Polarity inversion of AlN fabricated by wafer bonding and its atomic arrangement models2017
- Author(s)
  Y. Hayashi, H. Miyake, K. Hiramatsu, T. Akiyama, T. Ito, R. Katayama
- Organizer
  36th Electronic Materials Symposium (EMS-36)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] AlN・GaN・LiNbO3の表面活性化ウエハ接合技術の開発2017
- Author(s)
  小野寺卓也、上向井正裕、髙橋一矢、岩谷素顕、赤﨑勇、林侑介、三宅秀人、片山竜二
- Organizer
  第78回秋季応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] 二次組成変調によって電子・正孔波動関数の重なり積分を増強させたc面AlGaN多重量子井戸の発光特性評価2017
- Author(s)
  小島一信、林侑介、三宅秀人、平松和政、秩父重英
- Organizer
  第78回秋季応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] 多層光回路に向けた曲線テーパ型層間結合器の設計2017
- Author(s)
  伊東憲人、西山伸彦、林侑介、鈴木純一、雨宮智宏、荒井滋久
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Development of Surface-Activated Wafer Bonding Method of AlN, GaN and LiNbO32017
- Author(s)
  T. Onodera, M. Uemukai, K. Takahashi, M. Iwaya, I. Akasaki, Y. Hayashi, H. Miyake, and R. Katayama
- Organizer
  36th Electronic Materials Symposium (EMS-36)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Abrupt Polarity Inversion of AlN for Second Harmonics Generation in DUV Region2017
- Author(s)
  Y. Hayashi, H. Miyake, K. Hiramatsu, T. Akiyama, T. Ito, R. Katayama
- Organizer
  2017 International Workshop on UV Materials and Devices (IWUMD2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Design of polarity-inverted multilayer AlN waveguide for deep UV second harmonic generation2017
- Author(s)
  S. Yamaguchi, M. Uemukai, K. Takahashi, M. Iwaya, I. Akasaki, Y. Hayashi, H. Miyake, T. Yamada, Y. Fujiwara, and R. Katayama
- Organizer
  36th Electronic Materials Symposium (EMS-36)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Fabrication of high-quality AlN template by high-temperature annealing for deep-ultraviolet optical devices2017
- Author(s)
  H. Miyake, S. Xiao, Y. Hayashi, and K. Hiramatsu
- Organizer
  2017 International Workshop on UV Materials and Devices (IWUMD2017)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] High temperature face-to-face annealing of AlN films grown by MOVPE2017
- Author(s)
  S. Okada, S. Tanaka, Y. Hayashi, H. Miyake, and K. Hiramatsu
- Organizer
  The 9th International Workshop on Regional Innovation Studies (IWRIS2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Face to Face法アニールによる AlN極性反転構造の作製と疑似位相整合 SHGへの応用2017
- Author(s)
  林侑介、三宅秀人、平松和政、秋山亨、伊藤智徳、片山竜二
- Organizer
  レーザ・量子エレクトロニクス研究会(LQE)
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] スパッタ法AlN基板へのMOVPE法によるホモ成長2017
- Author(s)
  吉澤涼、林侑介、三宅秀人、平松和政
- Organizer
  レーザ・量子エレクトロニクス研究会(LQE)
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] サファイア基板上AlNテンプレートの高温アニール2017
- Author(s)
  三宅秀人、林侑介、肖世玉
- Organizer
  第46回日本結晶成長学会
- Invited
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Double Taper-type Mode Convertor for Direct Bonded III-V/SOI Hybrid Photonic Devices2017
- Author(s)
  S. Inoue, Y. Hayashi, J. Suzuki, K. Ito, K. Nagasaka, N. Nishiyama, and S. Arai
- Organizer
  The 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] reparation of high-quality a-plane AlN on r-plane sapphire using sputtering and annealing method2017
- Author(s)
  R. Fukuta, Y. Yamaki, Y. Hayashi, H. Miyake, and K. Hiramatsu
- Organizer
  The 9th International Workshop on Regional Innovation Studies (IWRIS2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Face to Face 高温アニールで生じるAlN膜内歪みの定量的評価2017
- Author(s)
  谷川健太朗、鈴木涼矢、岩山章、林侑介、三宅秀人、平松和政
- Organizer
  第46回日本結晶成長学会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] N2-Plasma Activated Bonding for GaInAsP/SOI Hybrid Lasers2017
- Author(s)
  N. Nishiyama, Y. Hayashi, J. Suzuki, and S. Arai
- Organizer
  The 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2017)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] III-V/Si Low Temperature Direct Bonding Technology for Photonic Device Integration on SOI2017
- Author(s)
  N. Nishiyama, Y. Hayashi, J. Suzuki, and S. Arai
- Organizer
  Electron Devices Technology and Manufacturing Conference (EDTM2017)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] MOVPE法によるAlN膜のface-to-faceアニール2017
- Author(s)
  田中襲一、岡田俊祐、林侑介、三宅秀人、平松和政
- Organizer
  第78回秋季応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] スパッタ法で成膜したr面サファイア基板上a面AlNの高品質化2017
- Author(s)
  福田涼、山木佑太、林侑介、三宅秀人、平松和政
- Organizer
  第78回秋季応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-17H06762
[Presentation] Face to Face アニールによるAlN分極反転構造の作製と評価2017
- Author(s)
  林侑介、三宅秀人、平松和政、片山竜二
- Organizer
  第9回ナノ構造・エピタキシャル成長講演会
- Data Source
  KAKENHI-PROJECT-17H06762

1. 上杉謙次郎 (40867305)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
2. 宮本恭幸 (40209953)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
3. 佐々木拓生 (90586190)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. 三宅秀人 (70209881)

# of Collaborated Projects: 1 results

# of Collaborated Products: 5 results
5. 今井康彦 (30416375)

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
6. 久志本真希 (50779551)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 市川修平 (50803673)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. NISHIYAMA Nobuhiko

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results
9. SUZUKI Safumi

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results
10. HAMAYA Kohei

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
11. 正直花奈子

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results

Hayashi Yusuke 林 侑介

Research Projects

Research Products

Co-Researchers

Development of Underdeveloped Wavelength Regions in Deep Ultraviolet Semiconductor Lasers

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ナノビームX線回折による半導体デバイスの4次元断層解析Principal Investigator

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Development of GaN CMOS Monolithic Integrated Circuits Technology Using Crystal Hetero-Polarity ControlPrincipal Investigator

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Development of AlN Wavelength Conversion Devices Using Vertical Polarity InversionPrincipal Investigator

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AlGaN/Diamond DUV Light Sources Fabricated by Direct Wafer BondingPrincipal Investigator

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[Journal Article] Analyses of oxygen precipitates in CZ-Si by X-ray diffuse scattering using parallel X-ray beam2025

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[Journal Article] Local strain distribution analysis in strained SiGe spintronics devices2024

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[Journal Article] Micro-and Nanostructure Analysis of Vapor-Phase-Grown AlN on Face-to-Face Annealed Sputtered AlN/Nanopatterned Sapphire Substrate Templates2023

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[Journal Article] Conduction mechanism of Schottky contacts fabricated on etch pits originating from single threading dislocation in a highly Si-doped HVPE GaN substrate2023

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[Journal Article] Thermal strain analysis considering in-plane anisotropy for sputtered AlN on c- and a-plane sapphire under high-temperature annealing2021

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[Journal Article] Polarity Inversion of Nitride Semiconductors and Application to Deep-Ultraviolet Photonic Devices2020

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[Journal Article] Suppression of dislocation-induced spiral hillocks in MOVPE-grown AlGaN on face-to-face annealed sputter-deposited AlN template2020

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[Journal Article] Curvature-Controllable and Crack-Free AlN/Sapphire Templates Fabricated by Sputtering and High-Temperature Annealing2019

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[Journal Article] High‐Temperature Annealing of Sputter‐Deposited AlN on (001) Diamond Substrate2019

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Hayashi Yusuke 林侑介