KAKUNAI Satoshi 格内敏

… Alternative Names

格内敏カクナイサトシ

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Researcher Number	10101130
External Links
Affiliation (based on the past Project Information) *help	2005: 兵庫県立大学, 大学院・工学研究科, 助教授 2005: University of Hyogo, Engineering Dep., Professor 2004: 兵庫県立大学, 工学研究科, 助教授 2003: 姫路工業大学, 工学研究科, 助教授 1999 – 2000: 姫路工業大学, 工学部, 助教授 1991 – 1992: 姫路工業大学, 工学部, 助教授 1989: 姫路工業大学, 工学部, 講師
Review Section/Research Field	Principal Investigator Applied optics/Quantum optical engineering Except Principal Investigator 機械工作 / Applied optics/Quantum optical engineering
Keywords	Principal Investigator Optical fiber / Phase shifting / Absolute measurement / Spherical wave / Point diffraction interferometry / 超精密形状計測 / 絶対測定 / 光ファイバー / 縞走査 / 球面波 / 点回折干渉系 … More Except Principal Investigator … More Multilayer coating / Mirau Interferometer / Phase defect / Defect Inspection / EUV Lithography / Extreme Ultraviolet / X-ray microscope / ミラウ干渉計 / EUVリソグラフィー / 軟X線位相差顕微鏡 / 多層膜 / ミラウ干渉 / 位相欠陥 / 欠陥検査 / EUVリソグラフィ / X線顕微鏡 / Critical Current Density / Critical Temperature / CO_2 Laser Irradiation / Bi-Sr-Ca-Cu-O / Y-Ba-Cu-O / Superconductor / 高性改質 / CO_2レ-ザ加工 / YーBaーCuーO / 高温超電導体 / CO_2レーザ照射 / 臨界電流密度 / 臨界温度 / Bi系超伝導材料 / Y系超伝導材 / 視覚評価 / ピ-ク数 / サミット数 / 突起の平均傾斜 / 突起の平均曲率 / 等方性判別指標 / スペクトルモ-メント / 自己回帰過程 Less

Observation of surface nano- structure using EUV phase shift microscope
- Principal Investigator
  
  KINOSHITA Hiroo
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Laboratory of Advanced Science and Technology for Industry, University of Hyougo
  Himeji Institute of Technology
Point diffraction interference system for the optical element evaluation of the extreme wavelength in the next generationPrincipal Investigator
- Principal Investigator
  
  KAKUNAI Satoshi
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Himeji Institute of Technology
Study on the Improvement of Superconductor by CO_2 Laser Irradiation
- Principal Investigator
  
  HASEGAWA Motoyoshi
- Project Period (FY)
  1991 – 1992
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Himeji Institute of Technology
3次元粗さ形状の機能特性に関する研究
- Principal Investigator
  
  HASEGAWA Motoyoshi
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械工作
- Research Institution
  Himeji Institute of Technology

All 2005 2004 2003

All Journal Article

[Journal Article] 光ファイバーを用いた点回折干渉計に関する研究2005
- Author(s)
  格内敏, 木下博雄, 渡邊健夫, 坂本亨
- Journal Title
  
  精密工学会誌 71-8
  
  Pages: 1031-1035
- NAID
  110001373589
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206010
[Journal Article] 光ファイバーを用いた点回折干渉計に関する研究(第2報) コヒーレント長が測定精度に及ぼす影響2005
- Author(s)
  格内敏, 木下博雄, 渡邊健夫, 坂本亨
- Journal Title
  
  精密工学会誌第71巻第8号
  
  Pages: 1031-1035
- NAID
  10016679113
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206010
[Journal Article] Actinic mask metrology for extreme ultraviolet lithography2004
- Author(s)
  H.Kinoshita, T.Haga, K.Hamamoto, S.Takada, N.Kazui, S.Kakunai, H.Tsubakino, T.Shoki, M.Endo, T.Watanabe
- Journal Title
  
  J.Vac.Sci.Technol. B22(1)
  
  Pages: 264-267
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206010
[Journal Article] Actinic Mask Inspection Using EUV Microscope2004
- Author(s)
  H.Kinoshita, T.Haga, K.Hamamoto, S.Takada, N.Kazui, S.Kakunai, H.Tsubakino, T.Shoki, M.Endo, T.Watanabe
- Journal Title
  
  J.Vac.Sci.Technol. B22
  
  Pages: 264-267
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206010
[Journal Article] Evaluation of Finished EUVL Mask using a Mirau Intergerometric Microscope2003
- Author(s)
  T.Haga, H.Kinoshita, K.Hamamoto, S.Takada, N.Kazui, S.Kakunai, H.Tsubakino, T.Watanabe
- Journal Title
  
  Jpn.J.Appl.Phys. 42
  
  Pages: 3771-3775
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206010
[Journal Article] 光ファイバーを用いた点回折干渉計に関する研究2003
- Author(s)
  格内敏, 木下博雄, 渡邊健夫, 坂本亨
- Journal Title
  
  精密工学会誌第69巻第8号
  
  Pages: 1170-1175
- NAID
  110001373589
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206010
[Journal Article] Pattern Inspection of EUV Mask using a EUV Microscope2003
- Author(s)
  T.Watanabe, T.Haga, T.Shoki, K.Hamamoto, S.Takada, N.Kazui, S.Kakunai, H.Tsubakino, H.Kinoshita
- Journal Title
  
  Proc.SPIE 5130
  
  Pages: 1005-1013
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206010
[Journal Article] 光ファイバーを用いた点回折干渉計に関する研究2003
- Author(s)
  格内敏, 木下博雄, 渡邊健夫, 坂本亨
- Journal Title
  
  精密工学会誌 69,8
  
  Pages: 1170-1175
- NAID
  110001373589
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206010
[Journal Article] Evaluation of Finished EUVL Mask using a Mirau Intergerometric Microscope2003
- Author(s)
  T.Haga, H.Kinoshita, K.Hamamoto, S.Takada, N.Kazui, S.Kakunai, H.Tsubakino, T.Watanabe
- Journal Title
  
  Jpn.J.Appl.Phys 42、6
  
  Pages: 3771-3775
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206010
[Journal Article] Pattern Inspection of EUV Mask Using a EUV Microscope2003
- Author(s)
  T.Watanabe, T.Haga, T.Shoki, K.Hamamoto, S.Takada, N.Kazui, S.Kakunai, H.Tsubakino, H.Kinoshita
- Journal Title
  
  Proc.SPIE 5130
  
  Pages: 1005-1013
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206010

1. HASEGAWA Motoyoshi (80180868)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
2. KONISHI Yasuo (40215299)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
3. KINOSHITA Hiroo (50285334)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
4. WATANABE Takeo (70285336)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
5. 新部正人 (10271199)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

KAKUNAI Satoshi 格内 敏

格内 敏 カクナイ サトシ

Research Projects

Research Products

Co-Researchers

Observation of surface nano- structure using EUV phase shift microscope

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Point diffraction interference system for the optical element evaluation of the extreme wavelength in the next generationPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Study on the Improvement of Superconductor by CO_2 Laser Irradiation

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

3次元粗さ形状の機能特性に関する研究

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] 光ファイバーを用いた点回折干渉計に関する研究2005

Author(s)

Journal Title

NAID

Description

Data Source

[Journal Article] 光ファイバーを用いた点回折干渉計に関する研究(第2報) コヒーレント長が測定精度に及ぼす影響2005

Author(s)

Journal Title

NAID

Description

Data Source

[Journal Article] Actinic mask metrology for extreme ultraviolet lithography2004

Author(s)

Journal Title

Description

Data Source

[Journal Article] Actinic Mask Inspection Using EUV Microscope2004

Author(s)

Journal Title

Description

Data Source

[Journal Article] Evaluation of Finished EUVL Mask using a Mirau Intergerometric Microscope2003

Author(s)

Journal Title

Description

Data Source

[Journal Article] 光ファイバーを用いた点回折干渉計に関する研究2003

Author(s)

Journal Title

NAID

Description

Data Source

[Journal Article] Pattern Inspection of EUV Mask using a EUV Microscope2003

Author(s)

Journal Title

Description

Data Source

[Journal Article] 光ファイバーを用いた点回折干渉計に関する研究2003

Author(s)

Journal Title

NAID

Description

Data Source

[Journal Article] Evaluation of Finished EUVL Mask using a Mirau Intergerometric Microscope2003

Author(s)

Journal Title

Description

Data Source

[Journal Article] Pattern Inspection of EUV Mask Using a EUV Microscope2003

Author(s)

KAKUNAI Satoshi 格内敏

格内敏カクナイサトシ