MURAKAMI Kouichi 村上浩一

… Alternative Names

MURAKAMI Kouich 村上浩一

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Researcher Number	10116113
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Affiliation (based on the past Project Information) *help	2011: 筑波大学, 数理物質系, 教授 2009 – 2010: University of Tsukuba, 大学院・数理物質科学研究科, 教授 2007: University of Tsukuba, Graduate School of Pure and Applied Sciences, Professor 2006: 筑波大学, 大学院数理物質科学研究科, 教授 2006: 筑波大学, 数理物質科学研究科, 教授 … More 2004 – 2005: 筑波大学, 大学院・数理物質科学研究科, 教授 2003: 筑波大学, 物理工学系, 教授 1999 – 2001: 筑波大学, 物理工学系, 教授 1998: 筑波大学, 物資工学系, 教授 1995 – 1998: 筑波大学, 物質工学系, 教授 1986 – 1994: University of Tsukuba, 物質工学系, 助教授 Less
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / 電子材料工学 / Applied materials science/Crystal engineering / Nanomaterials/Nanobioscience Except Principal Investigator Material processing/treatments / Applied materials / Applied materials science/Crystal engineering / Science and Engineering
Keywords	Principal Investigator レーザーアブレーション / 可視発光 / レーザープラズマ軟X線吸収分光 / シリコン / Silicon / ラマン散乱 / 多原子空孔 / 水素分子 / 光ルミネッセンス / 時間分解構造測定 … More / シリコン超微粒子 / 時間分解分光測定 / 動的機構 / Si超微粒子 / 単発測定 / 超微粒子 / Temperature Dependent Linewidth / Interface-Barrier-Controled ESR / Electron Spin Resonance / Impurity / off-center substitutional Nitrogen / Process-induced Defects / 微小領域プロセス誘起欠陥 / 欠陥準位 / 線幅 / 超微細分離幅 / シリコン表面層 / 置換位置N / 界面バリヤ制御電子スピン共鳴法 / 欠陥評価手法 / 線幅温度依存性 / 電子準位 / 電子準位決定法 / 線幅温度変化 / 界面バリヤ制御 / 電子スピン共鳴 / 不純物 / off-center置換位置N / プロセス誘起欠陥 / Si-H-B Complexes / Multivacancies / Raman Scattering / Hydrogen Molecule / Hydrogen Passivation / Poly-silicon / Amorphous Si / 水素複合体中心 / ポリシリコン化 / レーザーアニール / ポリシリコン / Si-H結合 / ドーパントのパッシベーション / 水素 / Si-H-B複合体 / 水素パッシベーション / ポリ化シリコン / アモルファスシリコン / Photo luminescence / Oxidation / Time-resolued measurements / Si Ge EL Device / Si nanoparticles / Visible Hight Emission / Si Nano particles / Laser Ablation / Z-コントラストEELS・電顕 / 時間分解光ルミネッセンス測定 / レーザープラズマ軟X線分光 / シリコンナノ構造 / 時間分解レーザー分解発光分析 / SiGeEL素子 / 時間分解レーザー分解分析 / 時間分解構造測定手法 / SiGe EL素子 / SiO_2中Siナノ結晶 / 可視発光薄膜 / シリコン・ナノ微粒子 / Visible Photoluminescence / Si Nanoclusters / Time-resolved Photon-emission Measurements / Time-resolved Laser Plasma Soft X-ray Absorption Spectroscopy / Dynamics / Laser Ablation of Si, C and SiC / 時間分解測定 / 二次元発光分布測定 / 時間分解発光測定 / Siクラスター / 動的形成機構 / レーザープラズマ軟X線 / Si,グラファイト / クラスター / 水素原子処理効果 / 常磁性の偶奇性 / フォトルミネッセンス / イオン注入効果 / ドナー / 機能性不純物ドーピング / スピンメモリー効果 / 水素原子処 / イオン注入 / 動径方向濃度分布測定 / 酸化に伴う不純物偏析出 / CVD作成法 / 新物性 / 酸化と偏析挙動 / 最大固溶度 / 不純物ドーピング / 界面水素パッシベーション / Siナノ結晶 / Siナノワイヤ / プレートレット水素分子 / 四面体格子間位置水素分子 / 多原子空孔内水素分子 / 状態制御 / アニール効果 / 水素分子の消滅過程 / 水素分子の生成過程 / シリコンクラスター / Siナノクラスター表面反応 / Siナノクラスター / クラスター化 / 酸化反応 / ナノクラスター / パルスHeガス吹き付け / レーザープラズマ軟X線源 / 時間分解軟X線吸収分光 / Si,C超微粒子 / クラスター化の機構 / C超微粒子 / 時間・空間合解測定 / 軟X線吸収分光 / レーザープラズマ / ガラスレ-ザ- / Nd:YAG / レ-ザ-アブレ-ション / レ-ザ-プラズマ軟X線分光 / レ-ザ-プラズマ / スピン緩和変化 / ドナ-・伝導電子のESR / Y_1Ba_2Cu_3O_y / アモルファスGaAs / GaAs / 結晶 / シリコン界面 / 金属 / 界面でのトンネリング / スピン緩和 / ドナ-@伝導電子のESR / GaAs@シリコン界面 / 金属@シリコン界面 … More Except Principal Investigator シリカガラス / 光直接加工 / レーザープラズマ軟X線 / 無機材料 / 透明材料 / ナノ加工 / 超伝導発現機構 / <Hg_(1-x)> <Cd_x> Te / <Hg_(1-x)> <Mn_x> Te / Liquid phase epitaxy / Alloy semiconductor / Infrared sensor / 非輻射再結合プロセス / 【Hg_(1-x)】CdxTe / 【Hg_(1-x)】MnxTe / 液相エピタキシャル成長 / 混晶半導体 / 赤外センサー / X-ray optics / silica glass / optical direct machining / nanomachining / inorganic materials / transparent materials / lader plasma soft X-ray / 精密部品加工 / 光源技術 / レーザープラズマ / 軟X線 / 軟X線光学系 / 軟 X 線光学系 / ホール濃度補償効果 / ホール係数 / ホール濃度と超伝導 / Ln-Ba-Cu-O系超伝導体 / 原子分子操作 / 構造相転移 / フェムト秒レーザー / 放射線・X線 / 量子ビーム / 非平衡プロセス / 半導体超微細化 / ナノ材料 / 光加工 / エキシトン / レーザー加工 / 微細加工 / ポテンシャルスパッタリング / ガリウム砒素 / 欠陥 / 水素 / シリコン / ドライエッチング / 塩素 / ナノ構造 / 電子状態制御 / ダイヤモンド / グラファイト / 多価イオン / ホ-ル係数 / ホ-ル濃度と超伝導 / 高圧酸素下アニ-ル / ク-パ-対破壊効果 / 電子ド-ピング / 正孔ド-ピング / Y系高温超伝導体 Less

Doping of Functional Impurities in Silicon Nanocrystals and Nanowires for Novel PropertiesPrincipal Investigator
- Principal Investigator
  
  MURAKAMI Kouichi
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nanomaterials/Nanobioscience
- Research Institution
  University of Tsukuba
励起ナノプロセスの基盤形成
- Principal Investigator
  
  篠塚雄三
- Project Period (FY)
  2006
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Wakayama University
Nanomachining and Nano-Synthesis of Transparent Materials using Laser Plasma Soft X-Rays
- Principal Investigator
  
  MAKIMURA Tetsuya
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  University of Tsukuba
無機透明材料のナノ加工のためのX線エキシトン空間閉じ込め
- Principal Investigator
  
  牧村哲也
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Material processing/treatments
- Research Institution
  University of Tsukuba
低速多価イオンビームによる原子操作
- Principal Investigator
  
  目黒多加志
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (B)
- Review Section
  
  Science and Engineering
- Research Institution
  The Institute of Physical and Chemical Research
Control of Hydrogen in Si and its Application to Thin Film TransistorPrincipal Investigator
- Principal Investigator
  
  MURAKAMI Kouichi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  University of Tsukuba
半導体結晶中の水素分子の制御と分子メモリーPrincipal Investigator
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  University of Tsukuba
時間分解測定によるシリコンクラスターの表面反応と光ルミネッセンスPrincipal Investigator
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1997
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
Laser-Ablation Fabrication and TR Structure MeasurementsPrincipal Investigator
- Principal Investigator
  
  MURAKAMI K.
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for international Scientific Research
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  University of Tsukuba
時間分解分光測定によるIV族元素クラスターの表面反応と相転移の研究Principal Investigator
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1996
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
時間分解分光測定によるIV族元素クラスターの表面反応と相転移の研究Principal Investigator
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
Formation of IV-Element Nano-Clusters by Laser Ablation and Time-resolved Spectroscopy Measurements of Its DynamicsPrincipal Investigator
- Principal Investigator
  
  MURAKAMI Kouich
- Project Period (FY)
  1994 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  University of Tsukuba
レーザーアブレーション超微粒子の時間分解レーザープラズマ軟X線分光Principal Investigator
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
レーザーアブレーション超微粒子のレーザープラズマ軟X線分光Principal Investigator
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
レ-ザ-アブレ-ション超微粒子のレ-ザ-プラズマ軟X線分光Principal Investigator
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
金属/シリコン界面の伝導電子プロ-ブによるシリコン内部からのESR評価Principal Investigator
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
酸素及び電荷ド-ピングによる高温超伝導発現機構の探索
- Principal Investigator
  
  TAKITA Koki
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
金属/シリコン界面の伝導電子プロ-ブによるシリコン内部からのESR評価Principal Investigator
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
Ln-Ba-Cu-O(Ln=Nd,Pr及びLa)系における超伝導発現機構の探索
- Principal Investigator
  
  滝田宏樹
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
Measurement and Evaluation of Defects induced by Processing of Small Regions by means of Interface-Barrier-Controlled Electron Spin ResonancePrincipal Investigator
- Principal Investigator
  
  MURAKAMI Kouichi
- Project Period (FY)
  1987 – 1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  電子材料工学
- Research Institution
  Institute of Materials Science, University of Tsukuba
Liquid Phase Epitaxial Growth and Characterization of New Semiconductor Alloys for Infrared Sensors
- Principal Investigator
  
  TAKITA Koki
- Project Period (FY)
  1985 – 1986
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Applied materials
- Research Institution
  University of Tsukuba

All 2011 2010 2009 2008 2007 2006 2005 Other

All Journal Article Presentation Patent

[Journal Article] Segregation Behaviors and Radial Distribution of Dopant Atoms in Silicon Nanowires2011
- Author(s)
  N. Fukata, S. Ishida, S. Yokono, R.Takiguichi, J. Chen, T. Sekiguchi, andK. Murakami
- Journal Title
  
  Nano Lett
  
  Volume: 11 Pages: 651-656
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21510112
[Journal Article] Si結晶における水素の侵入過程と状態2010
- Author(s)
  村上浩一
- Journal Title
  
  真空
  
  Volume: vol.53 Pages: 265-270
- NAID
  10026292914
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21510112
[Journal Article] Si結晶における水素の侵入過程と状態2010
- Author(s)
  村上浩一
- Journal Title
  
  真空(J,Vac.Soc,Jpn)
  
  Volume: 53 Pages: 1-6
- NAID
  10026292914
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21510112
[Journal Article] Isotope Effect of Penetration of Hydrogen and Deuterium into Silicon through Si/SiO2 Interface2009
- Author(s)
  K. Murakami, N. Fukata, K. Ishioka, M.Kitajima, N. Uchida, K. Morisawa, H.Morihiro, R. Shirakawa, and M.Tsujimura
- Journal Title
  
  Jpn. J. Appl. Phys
  
  Volume: 48
- NAID
  40016742995
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21510112
[Journal Article] Electronic States of P Donors in Si Nanocrystals embedded in amorphous SiO_2 layer studied by Electron Spin Resonance -Hydrogen Passivation Effects-2009
- Author(s)
  Kouichi Murakami, et al.
- Journal Title
  
  Jpn.J.Appl.Phys. 48
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21510112
[Journal Article] Phosphorus Ion Implantation in Silicon Nanocrystals embedded in SiO_22009
- Author(s)
  Kouichi Murakami, et al.
- Journal Title
  
  J.Appl.Phys. 105
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21510112
[Journal Article] Isotope Effect of Penetration of Hydrogen and Deuterium into Silicon through Si/SiO_2 Interface2009
- Author(s)
  Kouichi Murakami, et al.
- Journal Title
  
  Jpn.J.Appl.Phys. 48
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21510112
[Journal Article] Phosphorus Ion Implantation in Silicon Nanocrystals embedded in SiO22009
- Author(s)
  Kouichi Murakami, Ryota Shirakawa, Masatoshi Tsujimura, Noriyuki Uchida, Naoki Fukata, and Shun-ichi Hishita
- Journal Title
  
  J. Appl. Phys
  
  Volume: 105
- NAID
  120007131288
- Data Source
  KAKENHI-PROJECT-21510112
[Journal Article] Electronic States of P Donors in SiNanocrystals embedded in amorphous SiO2 layer studied by Electron Spin Resonance-Hydrogen Passivation Effects ?2009
- Author(s)
  Kouichi Murakami, Masatoshi Tsujimura, Ryota Shirakawa, Noriyuki Uchida, and Naoki Fukata
- Journal Title
  
  Jpn. J. Appl. Phys
  
  Volume: 48
- NAID
  40016704634
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21510112
[Journal Article] Micromachining of lnorganic Materials using Laser Plasma Soft X-Rays2008
- Author(s)
  Tetsuya, Makimura・Satoshi, Uchida・Takashige, Fujimori・Hiroyuki, Niino・Kouichi, Murakami,
- Journal Title
  
  Electrical Engineering in Japan (印刷中)
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of inorganic materials using laser plasma Soft X-rays2007
- Author(s)
  Tetsuya, Makimura・Takashige, Fujimori・Satoshi, Uchida・Kouichi, Murakami・Hiroyuki, Niino
- Journal Title
  
  Proceedings of SPIE 6586
  
  Pages: 6586091-15
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] 1.5μm Light Emission of Er3+ Ions Doped in SiO2 Films Including Si Nanocrystallites and in SiOx Films2007
- Author(s)
  T. Makimura, H. Uematsu, Y. Okada, K. Murakami
- Journal Title
  
  Journal of Physics 59
  
  Pages: 466-469
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] 1・5μm light emission of Er3+ions doped in SiO2 films including Sinanocrystallites and in SiOxfilms,2007
- Author(s)
  Tetsuya, Makimura・Hiroshi, Uematsu・Yuuki, Okada・Kouichi, Murakami
- Journal Title
  
  Journal of Physics: Conference Series 59
  
  Pages: 466-469
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Micromachining of inorganic transparent materilas by ablation using laser plasma soft X-rays2007
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takeshige Fujimori, Hiroyuki Ni-ino, Kouichi Murakami
- Journal Title
  
  The transactions of the Institute of Electrical Engineers of Japan 127
  
  Pages: 179-184
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays,2007
- Author(s)
  Tetsuya, Makimura・Hisao, Miyamoto・Satoshi, Uchida・Hiroyuki, Niino・ Kouichi, Murakami,
- Journal Title
  
  Journal of Physics: Conference Series 59
  
  Pages: 279-284
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線による無機透明材料の微細加工2007
- Author(s)
  牧村哲也・村上浩一
- Journal Title
  
  セラミックス 42
  
  Pages: 64-64
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of inorganic materials using laser plasma soft X-rays2007
- Author(s)
  T. Manicure, T. Fujimori, S. Uchida, K. Murakami, H. Niino
- Journal Title
  
  Proceedings of SPIE 6886
  
  Pages: 658609-658624
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線による無機透明材料のアブレーション加工2007
- Author(s)
  牧村哲也・内田智・藤森隆成・新納弘之・村上浩一
- Journal Title
  
  電気学会論文誌 127
  
  Pages: 179-184
- NAID
  10018480450
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays,2007
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Hiroyuki Niino and Kouichi Murakami
- Journal Title
  
  Journal of Physics : Conference Series, refreed 59
  
  Pages: 279-284
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線によるシリカガラスのアブレーションとそのメカニズムの検討2007
- Author(s)
  藤森隆成・牧村哲也・井上毅彦・村上浩一・新納弘之
- Journal Title
  
  電気学会量子・電子デバイス研究会 OQD-07
  
  Pages: 41-44
- NAID
  10018897616
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays2007
- Author(s)
  T. Makimura, H. Miyamoto, S. Uchida, H. Niino, K. Murakami
- Journal Title
  
  Journal of Physics 59
  
  Pages: 279-284
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Micromachining of inorganic transparent materials using laser plasma soft X-rays2007
- Author(s)
  Tetsuya Makimura, Kouichi Murakami
- Journal Title
  
  Ceramics, unrefreed 42
  
  Pages: 64-64
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Silica nanomachining using laser plasma soft x rays,2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Kouichi Murakami, and Hiroyuki Niino
- Journal Title
  
  Applied Physics Letters, refreed 89
- NAID
  120007131283
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ultra-fine micromachining of silica glass using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takeshige Fujimori, Hiroyuki Ni-ino, Kouichi Murakami
- Journal Title
  
  Report on the Laser Society of Japan Meeting #352, unrefreed RTM-06
  
  Pages: 21-25
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザーブラズマ軟X線によるガス中での無機透明材料のアブレーション2006
- Author(s)
  牧村哲也・内田智・藤森隆成・新納弘之・村上浩一
- Journal Title
  
  電気学会量子・電子デバイス研究会 OQD-06
  
  Pages: 53-56
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線によるシリカガラスの極微細加工2006
- Author(s)
  牧村哲也・内田智・藤森隆成・新納弘之・村上浩一
- Journal Title
  
  レーザー学会第 352回研究会報告 RTM-06
  
  Pages: 21-25
- NAID
  10020611506
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nano-Ablation of Inorganic Materials Using Laser Plasma Soft X-Rays at around 10 nm,2006
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Takashige Fuji-mori, Hiroyuki Niino and Kouichi Murakami
- Journal Title
  
  Japan Journal of Applied Physics, refreed 45
  
  Pages: 5545-5547
- NAID
  10017998993
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Silica nanomachjning using laser plasma soft x rays2006
- Author(s)
  Tetsuya, Makimura・Satoshi, Uchida・Kouichi, Murakami・Hiroyuki, Niino,
- Journal Title
  
  Applied Physics Letters 89
  
  Pages: 1011181-3
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nano-Ablation of lnorganic Materials Using Laser Plasma Soft X-Rays at around 10 nm2006
- Author(s)
  Tetsuya, Makimura・Hisao, Miyamoto・Satoshi, Uchida・Takashige, Fujimori・ Hiroyuki, Niino・Kouichi, Murakami
- Journal Title
  
  Japanese Journal of Applied Physics 45
  
  Pages: 5545-5547
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct Micromachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays2006
- Author(s)
  Tetsuya, Makimura・Hisao, Miyamoto・Satoshi, Uchida・Hiroyuki, Niino・Kouichi, Murakami,
- Journal Title
  
  Conference Series of The Institute of Pure and Applied Physic 7
  
  Pages: 137-139
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線による石英ガラスのナノ加工2006
- Author(s)
  内田智・藤森隆成・牧村哲也・村上浩一・新納弘之
- Journal Title
  
  電気学会量子・電子デバイス研究会 OQD-06
  
  Pages: 49-52
- NAID
  10019203795
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of silica glass using pulsed plasma soft X rays2006
- Author(s)
  Tdsuya, Makimura・Youichi, Kenmotsu・Hisao, Miyamoto・Hiroyuki, Niino・Koujchi, Murakami,
- Journal Title
  
  Surface Science 53
  
  Pages: 248-251
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nanomachining of Quartz Glass Plates Using Pulsed Laser Plasma Soft X-Rays2005
- Author(s)
  S., Uchida・T., Makimura・H., Miyamoto・K., Murakami,
- Journal Title
  
  Materials Processing for Properties and Performance 4
  
  Pages: 261-263
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Micromachining of inorganic transparent materials using pulsed laser plasma soft x-rays at 10 nm,2005
- Author(s)
  Tetsuya Makimura, Youichi Kenmotsu, Hisao Miyamoto, Satoshi Uchida, Niroyuki Niino, and Kouichi Murakami
- Journal Title
  
  Proceedings of SPIE Lasers and Applica-tions in Science and Engineering, unrefreed 5713
  
  Pages: 9-20
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nanomachining of Quartz Glass Plates Using Pulsed Laser Plasma Soft X-Rays,2005
- Author(s)
  S. Uchida, T. Makimura, H. Miyamoto, K. Murakami
- Journal Title
  
  Materials Processing for Properties and Per-formance, unrefreed 4
  
  Pages: 261-263
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Micromachining of lnorganic transparent materials using laser plasma soft x-Rays at 10 nm2005
- Author(s)
  Tetsuya, Makimura・Youichi, Kenmotsu・Hisao, Miyamoto・Satoshi, Uchida・Niroyuki, Niino・Kouichi, Murakami
- Journal Title
  
  Proceedings of SPIE 5713
  
  Pages: 9-20
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] "Hydrogen Passivation of Er and Si Nanocrystallites in Er-doped SiO2-Increase in Photoluminescence-2005
- Author(s)
  N., Fukata・C., Li・H., Uematsu・T., Arai・T., Makimura・K., Murakami,
- Journal Title
  
  Materials Research Society Symposium Proceeding 832
  
  Pages: 379-384
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of Silica Glass Using Laser Plasma Soft X-Rays at around 10nm and Ablation Dynamics2005
- Author(s)
  Tetsuya, Makimura・Hisao, Miyamoto・Satoshi, Uchida・Kouichi, Murakami,
- Journal Title
  
  Materials Processing for Properties and Performance 4
  
  Pages: 267-269
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザーとナノ物性ーレーザーアブレーションで創製したSi ナノ構造の物性-2005
- Author(s)
  村上浩一・牧村哲也・深田直樹
- Journal Title
  
  レーザー研究 33
  
  Pages: 5-11
- NAID
  10014278760
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of silica glass using pulsed laser plasma soft X rays,2005
- Author(s)
  Tetsuya Makimura, Youichi Kenmotsu, Hisao Miyamoto, Hiroyuki Ni-ino, and Kouichi Murakami
- Journal Title
  
  Surface Science, redreed 593
  
  Pages: 248-251
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Laser and nano-properties -Properties of nano-structured Si fabricated by laser ablation-2005
- Author(s)
  Kouichi Murakami, Tetsuya Makimura, Naoki Fukata
- Journal Title
  
  The Review of Laser Engineering, refreed 33
  
  Pages: 5-11
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays2005
- Author(s)
  Tetsuya, Makjmura・Hisao, Miyamoto・Youichi, Kenmotsu・Kouichi, Murakami・Hiroyuki, Niino,
- Journal Title
  
  Applied Physics Letters 86
  
  Pages: 1031111-3
- NAID
  120007131276
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Micromachining of Inorganic Materials using Laser Plasma Soft X-Rays
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Hiroyuki Ni-ino, Kouichi Murakami
- Journal Title
  
  Electrical Engineering in Japan, refreed, to be published
- NAID
  10018480450
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Patent] 軟X線加工装置及び軟X線加工法2005
- Inventor(s)
  牧村哲也, 村上浩一
- Industrial Property Rights Holder
  独立行政法人科学技術辰興機構
- Industrial Property Number
  2004-034343
- Filing Date
  2005
- Data Source
  KAKENHI-PROJECT-15656183
[Presentation] Segregation behaviors and radialdistribution of dopant atoms in siliconnanowires2011
- Author(s)
  N. Fukata, S. Ishida, S.Yokono, R. Takiguchi, T. Sekiguchi1, and K. Murakami
- Organizer
  2011 MRS FALL Meeting
- Place of Presentation
  Boston(USA)
- Year and Date
  2011-02-01
- Data Source
  KAKENHI-PROJECT-21510112
[Presentation] Siナノワイヤ中のBアクセプタ濃度分布の定量評価2010
- Author(s)
  滝口亮, 石田慎哉, 横野茂輝, 深田直樹, 陣君, 関口隆史, 村上浩一
- Organizer
  秋季応用物理学会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-21510112
[Presentation] Doping and radial distribution of boron atoms in silicon nanowires2010
- Author(s)
  R.Takiguchi, S.Ishida, S.Yokono, N.Fukata, S.Hishita, J.Chen, T.Sekiguchi, K.Murakami
- Organizer
  第6回シリコン材料の科学と技術フォーラム(2010岡山会議)
- Place of Presentation
  岡山大学
- Data Source
  KAKENHI-PROJECT-21510112
[Presentation] Siナノワイヤにイオン注入したBの電気の活性化2009
- Author(s)
  齋藤直之, 石田慎哉, 横野茂輝, 深田直樹, 陣君, 関口隆史, 菱田俊一, 村上浩一
- Organizer
  応用物理学会
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-21510112
[Presentation] EUV材料プロセス2008
- Author(s)
  牧村哲也, 藤森隆成, 新納弘之, 村上浩一
- Organizer
  2008年春季第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学船橋キャンパス
- Year and Date
  2008-03-28
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Materials Processing using EUV light2008
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  Symposium in The Japan Society of Applied Physics2008 Spring Meeting
- Place of Presentation
  Nihon Unviersity
- Year and Date
  2008-05-28
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] EUVアブレーション2008
- Author(s)
  牧村哲也, 藤森隆成, 新納弘之, 村上浩一
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工業大学
- Year and Date
  2008-03-21
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] EUV ablation2008
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  Symposium in the Insitute of Electrical Engineers of Japan 2008
- Place of Presentation
  Fukuoka Kogyo University
- Year and Date
  2008-03-21
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of transparent materials using laser plasma soft X-rays2007
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  Special Meeting of Kyushu Devision of The Japan Society of Applied Physics
- Place of Presentation
  Kyushu Uvniversity
- Year and Date
  2007-11-11
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic ma-terials using laser plasma soft X-rays2007
- Author(s)
  (Invited Paper) Tetsuya Makimura, Takashige Fujimori, Satoshi Uchida, Kouichi Murakami, Hiroyuki Niino
- Organizer
  Optics and Optoelectronics 2007 Prague Czech Republic
- Year and Date
  2007-04-18
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Silica Nanomachining Using Laser Plasma Soft X-Rays2007
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Niroyuki Niino, and Kouichi Murakami
- Organizer
  The 8th International ternational Conference on Laser Precision Microfabrication, Vienna, Austria
- Year and Date
  2007-04-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation process of silica glass using laser plasma soft X-rays2007
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2007 Fall Meeting
- Place of Presentation
  Hokkaido Kogyou University
- Year and Date
  2007-09-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] レーザープラズマ軟X線によるシリカガラスのアブレーションプロセス2007
- Author(s)
  藤森隆成, 牧村哲也, 新納弘之, 村上浩一
- Organizer
  2007年(平成19年)秋季第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学
- Year and Date
  2007-09-05
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of silica glass using laser plasma soft X-rays and discussion on mechanism2007
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Takehiko Inoue, Kouichi Murakami, Hiroyuki Niino
- Organizer
  The Institute of Electrical Engineers of Japan Meeting
- Place of Presentation
  Hirosaki University
- Year and Date
  2007-03-02
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Silica nanomachining using laser plasma soft X-rays2007
- Author(s)
  T. Makimura, S. Uchida, T. Fujimori, H. Niino, K. Murakami
- Organizer
  The 8th International Conference on Laser Precision Microfabrication
- Place of Presentation
  ウィーン
- Year and Date
  2007-04-28
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of SiO_2 and Si using laser plasma soft X-rays2007
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2007 Fall Meeting
- Place of Presentation
  Hokkaido Kogyou University
- Year and Date
  2007-09-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Process of silica nano-ablation using laser plasma soft X-rays2007
- Author(s)
  T. Makimura, T. Fujimori, S. Uchida, K. Murakami, H. Niino
- Organizer
  9th Conference on Laser Ablation 2007
- Place of Presentation
  テネリフェ,スペイン
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] レーザープラズマ軟X線による透明材料のアブレーション2007
- Author(s)
  牧村哲也, 藤森隆成, 新納弘之, 村上浩一
- Organizer
  応用物理学会九州支部特別講演会
- Place of Presentation
  九州大学伊都キャンパス
- Year and Date
  2007-11-22
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Process of Silica Nano-Ablation Using Laser Plasma Soft X-Rays2007
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Satoshi Uchida, Kouichi Murakami, Hiroyuki Niino
- Organizer
  9th International Conference on Laser lation Tenerife, Spain
- Year and Date
  2007-09-25
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nano-ablation of quartz glass by laser plasma soft X-ray technique2007
- Author(s)
  Satoshi Uchida, Kengo Yofu, Takashige Fujimori, Takehiko Inoue, Tetsuya Makimura, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2007 Spring Meeting
- Place of Presentation
  Aoyama Gakuin University
- Year and Date
  2007-03-29
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Silica Nanomachining Using Laser Plasma Soft X-Rays2007
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Niroyuki Niino, and Kouichi Murakami
- Organizer
  International Conference on Nanoelectronics, Nanostructures on Interactions, NTT Atsugi R&D Center
- Year and Date
  2007-02-22
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] レーザープラズマ軟X線によるSiO2およびSiのアブレーション2007
- Author(s)
  牧村哲也, 藤森隆成, 新納弘之, 村上浩一
- Organizer
  2007年(平成19年)秋季第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学
- Year and Date
  2007-09-05
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablated species generated by irradiation of silica glass with laser plasma soft X-rays2007
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Takehiko Inoue, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  2007 Spring Meeting
- Place of Presentation
  Aoyama Gakuin University
- Year and Date
  2007-03-29
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic materials using laser plasma soft X-rays(招待講演)2007
- Author(s)
  T. Makimura, T. Fujimori, S. Uchida, K. Murakami, H. Niino
- Organizer
  Optics and Optoelectronics 2007
- Place of Presentation
  プラハ,チェコ
- Year and Date
  2007-04-18
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Design and development of synchrotron beam line for rapid etching using XeF_2 gas2006
- Author(s)
  N. Nakai, H. Uno, S. Cho, R. Teruo, M. Suzui, Y. Teraoka, A. Yoshikoshi, Tetsuya Makimura, Kouichi Murakami, T. Urisu
- Organizer
  Joint Symposium of The 19th The Japan Society of Synchrotron Radiation Research and Synchrotron Radiation Science
- Place of Presentation
  Nagoya University
- Year and Date
  2006-01-09
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Silica Nanomachining Using Pulsed Laser Plasma Soft X-Rays2006
- Author(s)
  Satoshi Uchida, Tetsuya Makimura, Hisao Miyamoto, Hiroyuki Niino, and Kouichi Murakami
- Organizer
  The 7th AIST International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba
- Year and Date
  2006-01-17
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of quartz glass using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Institute of Electrical Engineers of JapanC Devision Annual Meeting 2006
- Place of Presentation
  KantoGakuin University
- Year and Date
  2006-09-06
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining dynamics of synthesized quartz glass using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2006 Spring Meeting
- Place of Presentation
  Musashino Kougyou University
- Year and Date
  2006-03-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Micromachining of optical materials by ablation using High-energy laser plasma soft X-rays2006
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2006 Spring Meeting
- Place of Presentation
  Musashino Kougyou University
- Year and Date
  2006-03-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Dynamics of silica glass nano-ablation using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2006 Spring Meeting
- Place of Presentation
  Musashino Kougyou University
- Year and Date
  2006-03-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ultra-fine micromachining of silica glass using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Laser_Society of Japan #352 Meeting
- Place of Presentation
  Miyazaki University
- Year and Date
  2006-09-28
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Silica Ablation Using Pulsed Laser Plasma Soft X-Rays in Various Gases2006
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Satoshi Uchida, Hisao Miyamoto, Hiroyuki Niino, and Kouichi Murakami
- Organizer
  The 7th AIST International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba
- Year and Date
  2006-01-17
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Design and development of synchrotron beam line for rapid etching using XeF_2 gas2006
- Author(s)
  Naofumi Nakai, S. Zheng, H. Uno, R. Teruo, K. Suzui, Y. Teraoka, A. Yoshikoshi, Tetsuya Makimura, Kouichi Murakami, T. Urisu
- Organizer
  The Japan Society of Applied Physics2006 Fall Meeting
- Place of Presentation
  Ritsumeikan University
- Year and Date
  2006-08-29
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of Inorganic Materials Using Laser Plasma Soft X-Rays2006
- Author(s)
  Hisao Miyamoto, Tetsuya Makimura, Satoshi Uchida, Hiroyuki Niino, and Kouichi Murakami
- Organizer
  The 7th AIST International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba
- Year and Date
  2006-01-17
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic transparent materials in gases using laser plasma soft X-rays2006
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Satoshi Uchida, Kouichi Murakami, Hiroyuki Niino
- Organizer
  The Institute of Electrical Engineers of JapanMeeting
- Place of Presentation
  Nagasaki University
- Year and Date
  2006-03-03
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Composition of silica glass after ablation using laser plasma soft X-rays2006
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2006 Fall Meeting
- Place of Presentation
  Ritsumeikan University
- Year and Date
  2006-08-29
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of quartz glass using laser plasma soft X-rays2006
- Author(s)
  Satoshi Uchida, Takashige Fujimori, Tetsuya Makimura, Kouichi Murakami, Hiroyuki Niino
- Organizer
  The Institute of Electrical Engineers of JapanMeeting
- Place of Presentation
  Nagasaki University
- Year and Date
  2006-03-03
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic materials in gases using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Laser Society of JapanAnnual Meeting 2006
- Place of Presentation
  Ohmiya Sonic City
- Year and Date
  2006-02-10
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Direct nanomachining of inorganic transparent materials using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Takashige Fujimori, Kouichi Murakami, and Hiroyuki Niino
- Organizer
  The 4th International Conference on Laser Advanced Materials Processing Kyoto Research Park, Kyoto
- Year and Date
  2006-05-16
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of Silica Glass Using Laser Plasma Soft X-Rays at around 10 nm and Ablation Dynamics2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, and Kouichi Murakami
- Organizer
  4th International Conference on Materials Processing for Properties and Performance
- Place of Presentation
  Tsukuba Science City
- Year and Date
  2005-11-30
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of inorganic transparent materials using laserr plsma soft X-rays2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The 8th Synposium on X-ray Microscopy
- Place of Presentation
  Kobe
- Year and Date
  2005-12-13
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Development of a technique for nanomachining of inorganic transparent materials by X-ray exciton method2005
- Author(s)
  Tetsuya Makimura, Kouichi Murakami
- Organizer
  Inovation Japan 2005
- Place of Presentation
  Tokyo International Forum
- Year and Date
  2005-09-27
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic materials using laser plasma soft X-rays2005
- Author(s)
  Hisao Miyamoto, Tetsuya Makimura, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2005 Fall Meeting
- Place of Presentation
  Tokushima University
- Year and Date
  2005-09-08
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nano-Ablation of Inorganic Materials Using Laser Plasma Soft X-Rays at around 10 nm2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino and Kouichi Murakami
- Organizer
  International Microprocesses and Nanotechnology Conference 2005,
- Place of Presentation
  Tokyo
- Year and Date
  2005-10-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ultra-fine micromachining of inorganic materials using laser plasma soft X-rays2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The 65th Annual Meeting of Japan Laser Processing Society
- Place of Presentation
  Sophia University
- Year and Date
  2005-12-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of Quartz Glass Plates Using Pulsed Laser Plasma Soft X-Rays2005
- Author(s)
  S. Uchida, T. Makimura, H. Miyamoto, K. Murakami
- Organizer
  4th International Conference on Materials Processing for Properties and Performance
- Place of Presentation
  Tsukuba Science City
- Year and Date
  2005-11-30
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic materials using laser plasma soft X-rays2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Plasma Science and Nuclear Fusion Reserch Meeting
- Place of Presentation
  Kyushu University
- Year and Date
  2005-12-19
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of quartz glass using laser plasma soft X-rays2005
- Author(s)
  Satoshi Uchida, Hisao Miyamoto, Tetsuya Makimura, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2005 Fall Meeting
- Place of Presentation
  Tokushima University
- Year and Date
  2005-09-08
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation process of quartz glass using laser plasma sfot X-rays2005
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Hosao Miyamoto, Hiroyuki Miino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2005 Fall Meeting
- Place of Presentation
  Tokyshima University
- Year and Date
  2005-09-11
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] 1.5〓 light emission of E〓 ions doped in SiO_2 films including Si nanocrystallites and in SiO_x films2005
- Author(s)
  Tetsuya Makimura, Hiroshi Uematsu, Yuuki Okada and Kouichi Murakami
- Organizer
  The 8th Conference on Laser Ablation
- Place of Presentation
  Banff, Canada
- Year and Date
  2005-09-11
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays2005
- Author(s)
  (Invited Paser) Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Hiroyuki Niino and Kouichi Murakami
- Organizer
  The 8th Conference on Laser Ablation
- Place of Presentation
  Banff, Canada
- Year and Date
  2005-09-13
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of Inorganic Materials Using Laser Plasma Soft X-Rays2005
- Author(s)
  Hisao Miyamoto, Tetsuya Makimura, Satoshi Uchida, Kouichi Murakami, and Hiroyuki Niino
- Organizer
  4th International Conference on Materials Processing for Properties and Performance
- Place of Presentation
  Tsukuba Science City
- Year and Date
  2005-11-30
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Direct Micromachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Hiroyuki Niino, and Kouichi Murakami
- Organizer
  The 8th International Conference on X-ray Microscopy
- Place of Presentation
  Egret Himeji
- Year and Date
  2005-07-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348

1. MASUDA Kohzoh (90029405)

# of Collaborated Projects: 6 results

# of Collaborated Products: 0 results
2. MAKIMURA Tetsuya (80261783)

# of Collaborated Projects: 6 results

# of Collaborated Products: 81 results
3. TAKITA Koki (00011213)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
4. 北島正弘 (00343830)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. FUKADA Naoki (90302207)

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
6. 目黒多加志 (20182149)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 一色秀夫 (60260212)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 尾笹一成 (10231234)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 青柳克信 (70087469)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. 篠塚雄三 (30144918)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 前田康二 (10107443)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 小森文夫 (60170388)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 萱沼洋輔 (80124569)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. YODA Osamu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. AZIZ M.J.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. LOWNDES D.H.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. SUZUKI Kenkichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. 吉田岳人

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. GEDREGAN D.B

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. YOSHIDA T.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. GEOHEGON D.B.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. GEOHEGAN D.B

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

MURAKAMI Kouichi 村上 浩一

MURAKAMI Kouich 村上 浩一

Research Projects

Research Products

Co-Researchers

Doping of Functional Impurities in Silicon Nanocrystals and Nanowires for Novel PropertiesPrincipal Investigator

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励起ナノプロセスの基盤形成

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Nanomachining and Nano-Synthesis of Transparent Materials using Laser Plasma Soft X-Rays

Principal Investigator

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無機透明材料のナノ加工のためのX線エキシトン空間閉じ込め

Principal Investigator

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低速多価イオンビームによる原子操作

Principal Investigator

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Review Section

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Control of Hydrogen in Si and its Application to Thin Film TransistorPrincipal Investigator

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半導体結晶中の水素分子の制御と分子メモリーPrincipal Investigator

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時間分解測定によるシリコンクラスターの表面反応と光ルミネッセンスPrincipal Investigator

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Laser-Ablation Fabrication and TR Structure MeasurementsPrincipal Investigator

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時間分解分光測定によるIV族元素クラスターの表面反応と相転移の研究Principal Investigator

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Research Institution

時間分解分光測定によるIV族元素クラスターの表面反応と相転移の研究Principal Investigator

Principal Investigator

Project Period (FY)

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Research Institution

Formation of IV-Element Nano-Clusters by Laser Ablation and Time-resolved Spectroscopy Measurements of Its DynamicsPrincipal Investigator

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Research Institution

レーザーアブレーション超微粒子の時間分解レーザープラズマ軟X線分光Principal Investigator

Principal Investigator

Project Period (FY)

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Research Institution

レーザーアブレーション超微粒子のレーザープラズマ軟X線分光Principal Investigator

MURAKAMI Kouichi 村上浩一

MURAKAMI Kouich 村上浩一