Niibe Masahito 新部正人

… Alternative Names

新部正人ニイベマサヒト

NIIBE Masahito 新部正人

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Researcher Number	10271199
Other IDs
External Links
Affiliation (Current)	2025: 兵庫県立大学, 高度産業科学技術研究所, 客員研究員(研究員)
Affiliation (based on the past Project Information) *help	2022 – 2023: 兵庫県立大学, 高度産業科学技術研究所, 客員研究員(研究員) 2014 – 2017: 兵庫県立大学, 高度産業科学技術研究所, 准教授 2003: 姫路工業大学, 高度産業科学技術研究所, 助教授 2001: 姫路工業大学, 高度産業化学技術研究所, 助教授 1999 – 2001: 姫路工業大学, 高度産業科学技術研究所, 助教授
Review Section/Research Field	Principal Investigator Applied optics/Quantum optical engineering / Thin film/Surface and interfacial physical properties Except Principal Investigator Basic Section 29020:Thin film/surface and interfacial physical properties-related / Basic Section 28030:Nanomaterials-related / Applied optics/Quantum optical engineering
Keywords	Principal Investigator Wavefront error / Point Diffraction Interferometer / Lithography / Multilayer / Thin Film / Aspherical / Optical Element / Soft X-Rays / 表面粗さ / 内部応力 … More / X線 / 波面収差 / 点回折干渉法 / リソグラフィ / 多層膜 / 薄膜 / 非球面 / 光学素子 / 軟X線 / イオンビーム / プラズマ / ドライエッチング / 軟Ｘ線吸収 / 欠陥 / 化合物半導体 / ＵＶ照射 / TiO2 / GaN / UV / ワイドギャップ半導体 / 紫外線照射 / プラズマエッチング … More Except Principal Investigator 中性子照射高配向性熱分解黒鉛 / 放射光X線回折測定法によるその場観察技術の開発 / 中性子照射高配向性熱分解グラファイト(HOPG) / 放射光X線回折法によるその場観察技術の開発 / 高温領域における構造相転移 / スピンデバイス / 原子状水素 / グラフェンナノリボン / 加熱触媒体 / 水素 / 2次元芳香族化合物 / Multilayer coating / Mirau Interferometer / Phase defect / Defect Inspection / EUV Lithography / Extreme Ultraviolet / X-ray microscope / ミラウ干渉計 / EUVリソグラフィー / 軟X線位相差顕微鏡 / 多層膜 / ミラウ干渉 / 位相欠陥 / 欠陥検査 / EUVリソグラフィ / X線顕微鏡 Less

高温領域における構造相転移のその場観察技術の開発と中性子照射HOPGへの適用
- Principal Investigator
  
  本多信一
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 29020:Thin film/surface and interfacial physical properties-related
- Research Institution
  University of Hyogo
Synthesis of two-dimensional aromatic compounds using hydrogen and heated catalysts and their spin device applications
- Principal Investigator
  
  部家彰
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 28030:Nanomaterials-related
- Research Institution
  University of Hyogo
Elucidation of UV irradiation effect in plasma etching process of wide gap semiconductorsPrincipal Investigator
- Principal Investigator
  
  Niibe Masahito
- Project Period (FY)
  2014 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  University of Hyogo
Observation of surface nano- structure using EUV phase shift microscope
- Principal Investigator
  
  KINOSHITA Hiroo
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Laboratory of Advanced Science and Technology for Industry, University of Hyougo
  Himeji Institute of Technology
Fabrication of aspherical surfaces for soft X-Ray optical elements by means of Deposition techniquesPrincipal Investigator
- Principal Investigator
  
  NIIBE Masahito
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Himeji Institute of Technology

All 2024 2023 2018 2017 2016 2015 2014 Other

All Journal Article Presentation Book

[Book] 演習・基礎から学ぶ大学の化学2018
- Author(s)
  伊藤省吾・植田一正・梅本宏信・神田一浩・新部正人・原田茂治・平川和貴・藤本忠蔵・宮林恵子・盛谷浩右
- Total Pages
  144
- Publisher
  倍風館
- ISBN
  9784563046309
- Data Source
  KAKENHI-PROJECT-26390066
[Journal Article] Characteristics of TiO 2 thin films surfaces treated by O 2 plasma in dielectric barrier discharge with the assistance of external heating2018
- Author(s)
  Kawakami Retsuo、Niibe Masahito、Nakano Yoshitaka、Araki Yuma、Yoshitani Yuki、Azuma Chisato、Mukai Takashi
- Journal Title
  
  Vacuum
  
  Volume: 152 Pages: 265-271
- DOI
  10.1016/j.vacuum.2018.03.051
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390066
[Journal Article] Soft X-ray irradiation effect on the fluorinated DLC film2017
- Author(s)
  Takamatsu Hiroki、Niibe Masahito、Zhou XiaoLong、Komatsu Keiji、Saitoh Hidetoshi、Akasaka Hiroki、Saiga Akihiro、Tamada Koji、Tagawa Masahito、Yokota Kumiko、Furuyama Yuichi、Kanda Kazuhiro
- Journal Title
  
  Diamond & Related Materials
  
  Volume: 79 Pages: 14-20
- DOI
  10.1016/j.diamond.2017.08.004
- NAID
  120006394590
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17K06799, KAKENHI-PROJECT-26390066
[Journal Article] Soft X-ray absorption spectroscopy study of chemical states, orientation, and oxygen content of ion-irradiated vertically aligned multiwalled carbon nanotubes2017
- Author(s)
  Honda Shin-ichi、Ideno Fumiya、Muramatsu Yasuji、Niibe Masahito、Terasawa Mititaka、Gullikson Eric M.、Lee Kuei-Yi
- Journal Title
  
  J. Electron Spectrosc. Relat. Phenom.
  
  Volume: 220 Pages: 91-95
- DOI
  10.1016/j.elspec.2016.12.013
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390066
[Journal Article] Generation of electrical damage in n-GaN films following treatment in a CF4 plasma2017
- Author(s)
  Nakano Yoshitaka, Kawakami Retsuo, Niibe Masahito
- Journal Title
  
  Applied Physics Express
  
  Volume: 10 Issue: 11 Pages: 116201-116201
- DOI
  10.7567/apex.10.116201
- NAID
  210000136023
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K06276, KAKENHI-PROJECT-26390066
[Journal Article] AlGaN surfaces etched by CF4 plasma with and without the assistance of near-ultraviolet irradiation2017
- Author(s)
  Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano, Takashi Mukai
- Journal Title
  
  Vacuum
  
  Volume: 136 Pages: 28-35
- DOI
  10.1016/j.vacuum.2016.11.016
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06276, KAKENHI-PROJECT-26390066
[Journal Article] Large take-off angle dependence of C-K emission spectra observed in highly oriented pyrolytic graphite2017
- Author(s)
  Niibe Masahito、Tokushima Takashi、Takehira Noritaka、Araki Yuma
- Journal Title
  
  J. Electron Spectrosc. Relat. Phenom.
  
  Volume: 220 Pages: 118-120
- DOI
  10.1016/j.elspec.2017.02.001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390066
[Journal Article] Characteristics of N2 and O2 Plasma-Induced Damages on AlGaN Thin Film Surfaces2017
- Author(s)
  Kawakami Retsuo、Niibe Masahito、Nakano Yoshitaka、Tanaka Ryo、Azuma Chisato、Mukai Takashi
- Journal Title
  
  physica status solidi (a)
  
  Volume: 214 Issue: 11 Pages: 1700393-1700393
- DOI
  10.1002/pssa.201700393
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K06276, KAKENHI-PROJECT-26390066
[Journal Article] Low Energy Soft X-ray Emission Spectrometer at BL-09A in NewSUBARU2016
- Author(s)
  Masahito Niibe and Takashi Tokushima
- Journal Title
  
  Proc. SRI2015, AIP Conf. Proc.
  
  Volume: 1741 Pages: 030042-030042
- DOI
  10.1063/1.4952865
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26390066
[Journal Article] Development of the Surface-sensitive Soft X-ray Absorption Fine Structure Measurement Technique for the Bulk Insulator2016
- Author(s)
  T. Yonemura, J. Iihara, S. Uemura, K. Yamaguchi, M. Niibe
- Journal Title
  
  Proc. SRI2015, AIP Conf. Proc.
  
  Volume: 1741 Pages: 050025-050025
- DOI
  10.1063/1.4952945
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390066
[Journal Article] Damage Characteristics of n-GaN Crystal Etched with N2 Plasma by Soft X-Ray Absorption Spectroscopy2016
- Author(s)
 M. Niibe, T. Kotaka, R. Kawakami, Y. Nakano, T. Mukai
- Journal Title
 
 e-J. Surf. Sci. Nanotechnol.
 
 Volume: 14 Issue: 0 Pages: 9-13
- DOI
 10.1380/ejssnt.2016.9
- NAID
 130005120933
- ISSN
 1348-0391
- Language
 English
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
 KAKENHI-PROJECT-26390066
[Journal Article] Fabrication and characterization of fine-grained 316L steel with 2.0 mass% TiC2016
- Author(s)
  M. Terasawa, H. Kurishita, T. Sakamoto, M. Niibe, H. Takahashi, S. Nishikawa, A. Yamamoto, M. Yamashita, T. Mitamura, T. Yamasaki, M. Kawai
- Journal Title
  
  J. Nuclear Sci. Technol.
  
  Volume: 印刷中 Issue: 12 Pages: 1951-1959
- DOI
  10.1080/00223131.2016.1175390
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390066
[Journal Article] Fabrication of Hydrogenated Amorphous Silicon Carbide Films from Decomposition of Hexamethyldisilane with Microwave Discharge Flow of Ar2016
- Author(s)
  H. Ito, M. Kumakura, T. Suzuki, M. Niibe, K. Kanda, and H. Saitoh
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 6S2 Pages: 06HC01-06HC01
- DOI
  10.7567/jjap.55.06hc01
- NAID
  210000146710
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16K04958, KAKENHI-PROJECT-26390066
[Journal Article] Comparison between AiGaN surfaces etchtched bycarbon tetrafluoride and argon plasmas: Effect of the fluorine impurities incorporated in the surface2015
- Author(s)
  R. Kawakami, M. Niibe, Y. Nakano, T. Shirahama, S. Hirai, T. Mukai
- Journal Title
  
  Vacuum
  
  Volume: 119 Pages: 264-269
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390066
[Journal Article] Resistance of Hydrogenated Titanium-Doped Diamond-Like Carbon Film to Hyperthermal Atomic Oxygen2015
- Author(s)
  K. Kidena, M. Endo, H. Takamatsu, M. Niibe, M. Tagawa, K. Yokota, Y. Furuyama, K. Komatsu, H. Saitoh, K. Kanda
- Journal Title
  
  Metals
  
  Volume: 5 Issue: 4 Pages: 1957-1970
- DOI
  10.3390/met5041957
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390066, KAKENHI-PROJECT-15K14252, KAKENHI-PROJECT-15K14253, KAKENHI-PROJECT-25289307, KAKENHI-PROJECT-26289322
[Journal Article] Electrical Investigation of Deep-Level Defects Induced in AlGaN/GaN Heterostrucutures by CF4 Plasma Treatments2015
- Author(s)
  2)R. Kawakami, Y. Nakano, M. Niibe, T. Shirahama, and T. Mukai
- Journal Title
  
  ECS Solid State Letters
  
  Volume: 4 Pages: 36-38
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390066
[Journal Article] Surface Analysis of AlGaN Treated with CF4 and Ar Plasma Etching2015
- Author(s)
 S. Hirai, M. Niibe, R. Kawakami, T. Shirahama, Y. Nakano, T. Mukai
- Journal Title
 
 e-J. Surf. Sci. Nanotechnol.
 
 Volume: 13 Issue: 0 Pages: 481-487
- DOI
 10.1380/ejssnt.2015.481
- NAID
 130005114535
- ISSN
 1348-0391
- Language
 English
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
 KAKENHI-PROJECT-26390066
[Journal Article] Recovery of x-ray absorption spectral profile in etched TiO2 thin films2015
- Author(s)
  1)Keiji Sano, Masahito Niibe, Retsuo Kawakami and Yoshitaka Nakano
- Journal Title
  
  J. Vac. Sci. Technol.
  
  Volume: A33 Pages: 031403-031403
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26390066
[Journal Article] Ar+-irradiation-induced damage in hydride vapor-phase epitaxy GaN films2015
- Author(s)
  Y. Nakano, D. Ogawa, K. Nakamura, R. Kawakami, M. Niibe
- Journal Title
  
  J. Vac. Sci. Technol. A
  
  Volume: 33 Issue: 4 Pages: 0314031-5
- DOI
  10.1116/1.4922593
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390066, KAKENHI-PROJECT-25420300
[Journal Article] Optical and electrical investigation of Ar+-irradiated GaN2014
- Author(s)
  Miao-Gen Chen, Keiji Nakamura, Yan-Qing Qiu, Daisuke Ogawa, Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano
- Journal Title
  
  Applied Physics Express
  
  Volume: 7 Issue: 11 Pages: 111003-111003
- DOI
  10.7567/apex.7.111003
- NAID
  210000137269
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25420300, KAKENHI-PROJECT-26390066
[Journal Article] Damage Characteristics of n-GaN Thin Film Surfaces Etched by Ultraviolet Light-Assisted Helium Plasmas2014
- Author(s)
  5)R. Kawakami, M. Niibe, Y. Nakano, T. Shirahama, K. Aoki, K. Oba, M. Takabatake, T. Mukai
- Journal Title
  
  Thin Solid Films
  
  Volume: 570 Pages: 81-86
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] 中性子照射黒鉛から生成された圧縮黒鉛のTEM-EELSによる分析2024
- Author(s)
  庭瀬敬右，大澤優太，斎藤興也，佐藤庸平，寺内正己，北詰崇，徳永匠，肥後祐司，新部正人，本多信一
- Organizer
  日本金属学会2024年春期講演大会
- Data Source
  KAKENHI-PROJECT-23K04586
[Presentation] Compressed graphite and its electronic structure investigated by TEM-EELS2023
- Author(s)
  Keisuke Niwase, Y. Ohsawa, Y. K. Sato, T. Saito, M. Terauchi, T. Kitazume, T. Tokunaga, Y. Higo, M. Niibe, S. Honda
- Organizer
  33nd International Conference on Diamond and Carbon Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K04586
[Presentation] 中性子照射した高配向熱分解黒鉛の高温高圧処理による圧縮黒鉛の合成とその構造・電子特性の評価2023
- Author(s)
  北詰崇，徳永匠，肥後祐司，佐藤庸平，庭瀬敬右，新部正人，本多信一
- Organizer
  2023年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K04586
[Presentation] TEM-EELSを用いた圧縮グラファイトの電子構造の研究2023
- Author(s)
  大澤優太，佐藤庸平，斎藤興也，寺内正己，北詰崇，徳永匠，藤井俊治郎，肥後祐司，庭瀬敬右，新部正人，本多信一
- Organizer
  日本顕微鏡学会第79回学術講演会
- Data Source
  KAKENHI-PROJECT-23K04586
[Presentation] 大気圧Heパスを用いた軟Ｘ線吸収分光測定技術の開発2018
- Author(s)
  横内翔，新部正人
- Organizer
  先端技術セミナー2018
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] 原子状水素を用いたNiコートミラーの炭素汚染の除去2018
- Author(s)
  新部正人、原田哲男、部家彰、渡邊健夫、松尾直人
- Organizer
  第31回日本放射光学会シンポジウム
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Construction and Performance of the Compact Soft X-ray Emission Spectrometer at BL-09A in NewBUBARU SR Facility2017
- Author(s)
  Masahito Niibe, Noritaka Takehira, and Tahashi Tokushima
- Organizer
  5th Annual Congress of AnalytiX-2017
- Place of Presentation
  ヒルトン福岡シーホーク、（福岡県福岡市）
- Year and Date
  2017-03-22
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] TiO2 Thin Film Surfaces Treated by O2 Plasma in Dielectric Barrier Discharge with Assistance of Heat Treatment2017
- Author(s)
  Retsuo Kawakami, Kengo Fujimoto, Masahito Niibe, Yuma Araki, Yoshitaka Nakano and Takashi Mukai
- Organizer
  14th International Symp. Sputtering & Plasma Processes
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Surface Structure Analysis of AlGaN Thin Films Damaged by Oxygen and Nitrogen Plasmas2017
- Author(s)
  Masahito Niibe, Ryo Tanaka, Retsuo Kawakami, Yoshitaka Nakano and Takashi Muka
- Organizer
  The 8th International Symposium on Surface Science (ISSS-8)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] TiO2 薄膜のプラズマ処理試料のXPS法による組成と触媒活性の相関2017
- Author(s)
  荒木佑馬、新部正人、川上烈生、竹平徳崇、中野由崇
- Organizer
  第30回日本放射光学会シンポジウム
- Place of Presentation
  神戸芸術センター（兵庫県神戸市）
- Year and Date
  2017-01-07
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] 光触媒TiO2薄膜への加熱を伴うO2 DBDプラズマ処理効果2017
- Author(s)
  川上烈生, 新部正人, 中野由崇, 芳谷勇樹, 東知里, 向井孝志
- Organizer
  平成29年度電気関係学会四国支部連合大会
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Generation Behavior of Electrical Damage Introduced into n-GaN Films by CF4 Plasma Treatments2017
- Author(s)
  Yoshitaka Nakano, Retsuo Kawakami and Masahito Niibe
- Organizer
  29th International Conf. on Defects in Semiconductors (ICDS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] 原子状水素を用いたNiコートミラーの炭素汚染の除去2017
- Author(s)
  新部正人、原田哲男、部家彰、渡邊健夫、松尾直人
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] 酸素および窒素プラズマ処理したAlGaN膜の表面分析2017
- Author(s)
  田中良、新部正人、川上烈生、中野由崇、向井孝志
- Organizer
  第30回日本放射光学会シンポジウム
- Place of Presentation
  神戸芸術センター（兵庫県神戸市）
- Year and Date
  2017-01-07
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Observation of B-K Emission and Absorption Spectra of Trace Boron Doped in HOPG2017
- Author(s)
  Masahito Niibe, Noritaka Takehira and Takashi Tokushima
- Organizer
  The 8th International Symposium on Surface Science (ISSS-8)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] CF4プラズマ処理したn-GaN膜の電気的評価2016
- Author(s)
  6) 中野由崇, 坂井佑輔, 新部正人, 川上烈生
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス（東京都目黒区）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Electrical damage in n-GaN films treated by CF4 plasma2016
- Author(s)
  Yoshitaka Nakano, Masahito Niibe and Retsuo Kawakami
- Organizer
  International Symposium of Dry Process 2016
- Place of Presentation
  北海道大学（北海道札幌市）
- Year and Date
  2016-11-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Effect of Ultraviolet Light-Assisted CF4 Plasma Irradiation on AlGaN Thin Film Surface2016
- Author(s)
  Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano and Takashi Mukai
- Organizer
  43rd International Symposium on Compound Semiconductors (ISCS2016)
- Place of Presentation
  富山国際会議場（富山県富山市）
- Year and Date
  2016-06-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Soft X-ray Absorption Spectroscopy of Orientation, Oxygen Content, Chemical States of Ion-irradiated Vertically Aligned Multiwalled Carbon Nanotubes2016
- Author(s)
  S. Honda, F. Ideno, Y. Muramatsu, M, Niibe, M. Terasawa, E.M. Gullikson and K.-Y. Lee
- Organizer
  39th inter’l Conf. on Vacuum Ultraviolet and X-ray Physics (VUVX2016)
- Place of Presentation
  Zurich, Switzerland
- Year and Date
  2016-07-03
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] CF4とArプラズマ処理したAlGaN膜の表面分析2016
- Author(s)
  8) 平井翔大，新部正人，川上烈生，竹平徳崇，中野由崇，向井孝志
- Organizer
  第29回日本放射光学会シンポジウム
- Place of Presentation
  東京大学柏の葉キャンパス（千葉県柏市）
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Electrical Damage Investigation of n-GaN Films Treated by CF4 Plasma2016
- Author(s)
  Yoshitaka Nakano, Masahito Niibe and Retsuo Kawakami
- Organizer
  43rd International Symposium on Compound Semiconductors (ISCS2016)
- Place of Presentation
  富山国際会議場（富山県富山市）
- Year and Date
  2016-06-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] AlGaN表面特性への酸素プラズマ照射効果2016
- Author(s)
  新部正人, 川上烈生，中野由崇、田中良、荒木佑馬、東知里、向井孝志
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ、（新潟県新潟市）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] TiO2薄膜のプラズマ処理試料のXPS法による組成と触媒活性の相関2016
- Author(s)
  荒木佑馬、竹平徳崇、新部正人、川上烈生、中野由崇
- Organizer
  第52回X線分析討論会
- Place of Presentation
  筑波大学東京キャンパス（東京都文京区）
- Year and Date
  2016-10-26
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] TiO2薄膜のプラズマ処理試料のXPS 法による組成と触媒活性の相関2016
- Author(s)
  7)　荒木佑馬，新部正人，川上烈生，竹平徳崇，中野由崇
- Organizer
  第29回日本放射光学会シンポジウム
- Place of Presentation
  東京大学柏の葉キャンパス（千葉県柏市）
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] CF4プラズマ処理したn-GaN膜の電気的ダメージ2016
- Author(s)
  中野由崇、新部正人、川上烈生
- Organizer
  2016年真空・表面科学合同講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市）
- Year and Date
  2016-11-29
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] A large take-off angle dependence of C-K emission spectra observed in highly oriented pyrolytic graphite2016
- Author(s)
  Masahito Niibe, Takashi Tokushima, Niritaka Takehira, Yuma Araki
- Organizer
  39th inter’l Conf. on Vacuum Ultraviolet and X-ray Physics (VUVX2016)
- Place of Presentation
  Zurich, Switzerland
- Year and Date
  2016-07-03
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] 紫外光アシストCF4プラズマでエッチンングされたAlGaN表面分析2015
- Author(s)
  10)新部正人，川上烈生，中野由崇，竹平徳崇，平井翔大，荒木佑馬，東知里，向井孝志
- Organizer
  第76回秋季応用物理学会学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市）
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Anatase TiO2 Thin Films Grown by Facing-Target Reactive Sputtering and Its Impact on Photocatalytic Activity2015
- Author(s)
  1) R. Kawakami, M. Niibe, Y. Nakano, C. Azuma and T. Mukai
- Organizer
  International Symposium of Dry Process 2015
- Place of Presentation
  Awaji-Yumebutai International Conference Center, （兵庫県淡路島）
- Year and Date
  2015-11-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Development of the Surface-sensitive Soft X-ray Absorption Fine Structure Measurement Technique for the Bulk Insulator2015
- Author(s)
  4) T. Yonemura, J. Iihara, S. Uemura, K. Yamaguchi, M. Niibe
- Organizer
  The 12th inter’l conf. on Synchrotron Radiation Instrumentation (SRI2015)
- Place of Presentation
  New York, USA
- Year and Date
  2015-07-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] TiO2薄膜のプラズマ処理試料のXPS 法による組成と触媒活性の相関2015
- Author(s)
  9) 荒木佑馬，新部正人，川上烈生，竹平徳崇，中野由崇
- Organizer
  第51回Ｘ線分析討論会
- Place of Presentation
  姫路・西はりま地場産業センター（兵庫県姫路市）
- Year and Date
  2015-10-29
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] 酸化チタン薄膜表面への酸素プラズマ照射効果2015
- Author(s)
  11)新部正人，荒木佑馬，竹平徳崇，川上烈生，中野由崇，東知里
- Organizer
  第76回秋季応用物理学会学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市）
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] A Relation between Pinch-Off Voltages and Deep-Level Defects in AlGaN/GaN Hetero-Structures Treated by CF4 Plasma2015
- Author(s)
  2) Y. Nakano, R. Kawakami, M. Niibe, T. Shirahama and T. Mukai
- Organizer
  11th International Conference on Nitride Semiconductors (ICNS-11)
- Place of Presentation
  Beijing, China
- Year and Date
  2015-08-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Low energy soft X-ray Emission Spectrometer at BL-09A in NewSUBARU2015
- Author(s)
  3)Masahito Niibe and Takashi Tokushima
- Organizer
  The 12th inter’l conf. on Synchrotron Radiation Instrumentation (SRI2015)
- Place of Presentation
  New York, USA
- Year and Date
  2015-07-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Comparison between Surface Characteristics of Titanium Oxide Thin Films Treated with N2 Dielectric Barrier Discharge Plasma and Annealed in N2 Gas2015
- Author(s)
  5) R. Kawakami, M. Niibe, Y. Nakano and T. Mukai
- Organizer
  13th International Symposium on Sputtering & Plasma Processes (ISSP)
- Place of Presentation
  京都リサーチパーク, （京都府京都市）
- Year and Date
  2015-07-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] ArとCF4プラズマで処理したAlGaN膜の表面分析2014
- Author(s)
  平井翔大，新部正人，白濱達夫，川上烈生，中野由崇，向井孝志
- Organizer
  兵庫県立大学知の交流シンポジウム
- Place of Presentation
  姫路商工会議所（兵庫県姫路市）
- Year and Date
  2014-09-24
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Damage Characteristics of n-GaNCrystal Etched with N2 Plasma by Soft X-ray Absorption Spectroscopy
- Author(s)
  Masahito Niibe, Takuya Kotaka, Retsuo Kawakami, Yoshitaka Nakano and Takashi Mukai
- Organizer
  7th International Symposium on Surface Science (ISSS-7)
- Place of Presentation
  Kunibikki Messe, Matsue, Japan
- Year and Date
  2014-11-02 – 2014-11-06
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Si含有DLC 膜の原子状酸素照射効果
- Author(s)
  貴傳名健吾，新部正人，横田久美子，田川雅人，古山雄一，小松啓記，斎藤秀俊，神田一浩
- Organizer
  第75回秋季応用物理学会学術講演会
- Place of Presentation
  北海道大学札幌キャンパス（北海道札幌市）
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] CF4とArプラズマでエッチングしたAlGaN表面ダメージ
- Author(s)
  新部正人，川上烈生，中野由崇，向井孝志，白濱達夫，平井翔大
- Organizer
  第75回秋季応用物理学会学術講演会
- Place of Presentation
  北海道大学札幌キャンパス（北海道札幌市）
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Ｘ線吸収分光法を用いたTiO2薄膜のプラズマダメージ評価
- Author(s)
  佐野桂治，新部正人，川上烈生，中野由崇
- Organizer
  第28回日本放射光学会シンポジウム
- Place of Presentation
  立命館大学びわこ・くさつキャンパス（滋賀県草津市）
- Year and Date
  2015-01-10 – 2015-01-12
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Morphological and Compositional Changes in AlGaN Surfaces etched by RF Capacitively Coupled Carbon Tetrafluoride and Argon Plasmas
- Author(s)
  R. Kawakami, M. Niibe, Y. Nakano, T. Shirahama, S. Hirai and T. Mukai
- Organizer
  36th International Symposium on Dry Process (DSP2014)
- Place of Presentation
  PACIFICO Convention Plaza, Yokohama, Japan
- Year and Date
  2014-11-27 – 2014-11-28
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] ArとCF4プラズマで処理したAlGaN膜の表面分析
- Author(s)
  平井翔大，新部正人，川上烈生，白濱達夫，中野由崇，向井孝志
- Organizer
  第28回日本放射光学会シンポジウム
- Place of Presentation
  立命館大学びわこ・くさつキャンパス（滋賀県草津市）
- Year and Date
  2015-01-10 – 2015-01-12
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Surface analysis of AlGaN treated by Ar and CF4 plasma etching
- Author(s)
  Shodai Hirai, Masahito Niibe, Retsuo Kawakami, Yoshitaka Nakano
- Organizer
  7th International Symposium on Surface Science (ISSS-7)
- Place of Presentation
  Kunibiki Messe, Matsue, Japan
- Year and Date
  2014-11-02 – 2014-11-06
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Etching damage analysis of n-GaN crystals etched with N2-plasma using soft X-ray absorption spectroscopy
- Author(s)
  Masahito Niibe, Takuya Kotaka, Retsuo Kawakami, Yoshitaka Nakano and Takashi Mukai
- Organizer
  36th International Symposium on Dry Process (DSP2014)
- Place of Presentation
  PACIFICO Convention Plaza, Yokohama, Japan
- Year and Date
  2014-11-27 – 2014-11-28
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Spectral Recovery of Etching Damage of TiO2 thin film Observed in XAS Spectra
- Author(s)
  Keiji Sano, Masahito Niibe, Retsuo Kawakami, Yoshitaka Nakano
- Organizer
  7th International Symposium on Surface Science (ISSS-7)
- Place of Presentation
  Kunibiki Messe, Matsue, Japan
- Year and Date
  2014-11-02 – 2014-11-06
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] 軽元素領域の軟Ｘ線発光分光器の開発
- Author(s)
  新部正人，徳島高
- Organizer
  第28回日本放射光学会シンポジウム
- Place of Presentation
  立命館大学びわこ・くさつキャンパス（滋賀県草津市）
- Year and Date
  2015-01-10 – 2015-01-12
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Ar+イオン照射したHVPE-GaN膜の電気的評価
- Author(s)
  中野由崇，中村圭二，新部正人，川上烈生
- Organizer
  第75回秋季応用物理学会学術講演会
- Place of Presentation
  北海道大学札幌キャンパス（北海道札幌市）
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] TiO2超微粒子の軟Ｘ線照射によるNEXAFSスペクトル形状の回復
- Author(s)
  新部正人，佐野桂治，川上烈生，中野由崇
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス（神奈川県平塚市）
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] Ar＋イオン照射したMOCVD-GaN:Si膜の電気的評価
- Author(s)
  中野由崇，高木健司，小川大輔，中村圭二，新部正人，川上烈生
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス（神奈川県平塚市）
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] CF4プラズマ処理したAlGaN/GaNヘテロ構造の電気的評価
- Author(s)
  中野由崇，川上烈生，新部正人，高木健司，白濱達夫，向井孝志
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス（神奈川県平塚市）
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-26390066
[Presentation] 軽元素領域の軟Ｘ線発光分光器の開発
- Author(s)
  新部正人，徳島高
- Organizer
  第55回真空に関する合同講演会
- Place of Presentation
  大阪府立大学I-siteなんば（大阪市浪速区）
- Year and Date
  2014-11-18 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-26390066

1. WATANABE Takeo (70285336)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
2. KINOSHITA Hiroo (50285334)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
3. KAWAKAMI Retsuo (30314842)

# of Collaborated Projects: 1 results

# of Collaborated Products: 43 results
4. NAKANO Yoshitaka (60394722)

# of Collaborated Projects: 1 results

# of Collaborated Products: 44 results
5. KAKUNAI Satoshi (10101130)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 部家彰 (80418871)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 住友弘二 (30393747)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 神田一浩 (20201452)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
9. 本多信一 (90324821)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
10. 肥後祐司 (10423435)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
11. 庭瀬敬右 (50198545)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
12. 佐藤庸平 (70455856)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
13. KOTAKA Takuya

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
14. SANO Keiji

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
15. HIRAI Shodai

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
16. ARAKI Yuma

# of Collaborated Projects: 1 results

# of Collaborated Products: 11 results
17. TANAKA Ryo

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
18. Saitoh Hidetoshi

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
19. Kumakura Motoki

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
20. 伊藤治彦

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Niibe Masahito 新部 正人

新部 正人 ニイベ マサヒト

NIIBE Masahito 新部 正人

Research Projects

Research Products

Co-Researchers

高温領域における構造相転移のその場観察技術の開発と中性子照射HOPGへの適用

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Synthesis of two-dimensional aromatic compounds using hydrogen and heated catalysts and their spin device applications

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Elucidation of UV irradiation effect in plasma etching process of wide gap semiconductorsPrincipal Investigator

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Observation of surface nano- structure using EUV phase shift microscope

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Fabrication of aspherical surfaces for soft X-Ray optical elements by means of Deposition techniquesPrincipal Investigator

Principal Investigator

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[Book] 演習・基礎から学ぶ大学の化学2018

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[Journal Article] Characteristics of TiO 2 thin films surfaces treated by O 2 plasma in dielectric barrier discharge with the assistance of external heating2018

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[Journal Article] Soft X-ray irradiation effect on the fluorinated DLC film2017

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[Journal Article] Soft X-ray absorption spectroscopy study of chemical states, orientation, and oxygen content of ion-irradiated vertically aligned multiwalled carbon nanotubes2017

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[Journal Article] Generation of electrical damage in n-GaN films following treatment in a CF4 plasma2017

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NAID

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[Journal Article] AlGaN surfaces etched by CF4 plasma with and without the assistance of near-ultraviolet irradiation2017

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[Journal Article] Large take-off angle dependence of C-K emission spectra observed in highly oriented pyrolytic graphite2017

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[Journal Article] Characteristics of N2 and O2 Plasma-Induced Damages on AlGaN Thin Film Surfaces2017

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[Journal Article] Low Energy Soft X-ray Emission Spectrometer at BL-09A in NewSUBARU2016

Niibe Masahito 新部正人

新部正人ニイベマサヒト

NIIBE Masahito 新部正人