Ikehara Tsuyoshi 池原毅

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TSUYOSHI Ikehara 池原毅

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Researcher Number	10344102
Affiliation (Current)	2025: 国立研究開発法人産業技術総合研究所, その他部局等, 研究員
Affiliation (based on the past Project Information) *help	2011: (独)産業技術総合研究所, 主任研究員
Review Section/Research Field	Except Principal Investigator Materials/Mechanics of materials
Keywords	Except Principal Investigator 高温試験 / 酸素析出欠陥 / 信頼化 / 共振振動 / 力学特性 / 顕微ラマン分光 / 寿命予測 / 腐食疲労 / 二酸化シリコン / 単結晶シリコン … More / 信頼性 / 酸化 / 疲労試験 / 引張試験 / MEMS / シリコン Less

Explanation of reaction layer fatigue in silicon microstructure for development of highly-reliable MEMS devices
- Principal Investigator
  
  TSUCHIYA Toshiyuki
- Project Period (FY)
  2007 – 2011
- Research Category
  
  Grant-in-Aid for Young Scientists (S)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Kyoto University

All 2012 2011 2010 2009 2008 2007

All Journal Article Presentation

[Journal Article] Low-cycle to Ultra-High-cycle Fatigue Lifetime Measurement of Single Crystal Silicon Specimens using a Microresonator Test Deyice2012
- Author(s)
  T.Ikehara
- Journal Title
  
  Journal of Microelectromechanical Systems
  
  Volume: Vol.21(掲載決定)(未決定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19676002
[Journal Article] Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens2010
- Author(s)
  T.Ikehara
- Journal Title
  
  Micro & Nano Letters 5
  
  Pages: 49-52
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19676002
[Journal Article] Measure ment of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens2010
- Author(s)
  T. Ikehara, T. Tsuchiya
- Journal Title
  
  Micro & Nano Letters
  
  Volume: Vol.5, No.1 Issue: 1 Pages: 49-52
- DOI
  10.1049/mnl.2009.0073
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19676002
[Journal Article] Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens2010
- Author(s)
  T. Ikehara, T. Tsuchiya
- Journal Title
  
  Micro & Nano Letters Vol. 5 No. 1
  
  Pages: 49-52
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19676002
[Journal Article] Development of Amplitude-Controlled, Parallel Fatigue-Test System for Micro-Electro- Mechanical Resonators2010
- Author(s)
  T.Ikehara
- Journal Title
  
  Sensors and Materials 22
  
  Pages: 39-50
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19676002
[Journal Article] Effects of anisotropic elasticity on stress concentration in micromechanical structures fabricated on (001) single-crystal silicon films2009
- Author(s)
  T.Ikehara
- Journal Title
  
  Journal of Applied Physics 105
  
  Pages: 93524-93524
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19676002
[Journal Article] High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens2008
- Author(s)
  T. Ikehara, T. Tsuchiva
- Journal Title
  
  Journal of Micromechanics and Microengineering Vol. 18, No.7
  
  Pages: 75004-75004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19676002
[Journal Article] High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned2008
- Author(s)
  T. Ikehara
- Journal Title
  
  Journal of Micromechanics and Microengineering 18
  
  Pages: 75004-75004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19676002
[Journal Article] High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens2008
- Author(s)
  T. Ikehara, T. Tsuchiya
- Journal Title
  
  Journal of Microme chanics and Microen gineering
  
  Volume: Vol.18, No.7 Issue: 7 Pages: 75004-75004
- DOI
  10.1088/0960-1317/18/7/075004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19676002
[Journal Article] High-cycle fatigue of micromachined single crystal silicon measured,using a parallel fatigue test system2007
- Author(s)
  T. Ikehara
- Journal Title
  
  IEICE Electronic Express 4
  
  Pages: 288-293
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19676002
[Presentation] Measurement of high-cycle fatigue lives of micrometer-sized single-crystal silicon specimens2011
- Author(s)
  T.Ikehara
- Organizer
  International Symposium on Plasticity and Its Current Applications
- Place of Presentation
  Puerto Vallarta, Mexico
- Data Source
  KAKENHI-PROJECT-19676002
[Presentation] MEMS共振デバイスの低サイクル破壊試験2009
- Author(s)
  池原毅
- Organizer
  The 9th Society of Exploration Geophysicist of Japan International Symposium
- Place of Presentation
  盛岡、岩手大学
- Year and Date
  2009-10-13
- Data Source
  KAKENHI-PROJECT-19676002
[Presentation] Abusitripic analysis of stress concentration in a single-crystal-silicon MEMS structure2008
- Author(s)
  T. Ikehara
- Organizer
  21th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  福岡
- Data Source
  KAKENHI-PROJECT-19676002
[Presentation] Crystal orientation dependence of fatigue caracteristics in single crystal silicon measured using a rotating micro resonator2008
- Author(s)
  T. Ikehara
- Organizer
  The 21st IEEE International Conference on Micro Electro Mechanical Systems
- Place of Presentation
  Tucson, AZ, USA
- Data Source
  KAKENHI-PROJECT-19676002
[Presentation] 単結晶シリコンの曲げ試験における結晶異方性の効果2008
- Author(s)
  池原毅
- Organizer
  日本機械学会2008年度年次大会
- Place of Presentation
  横浜国立大学
- Data Source
  KAKENHI-PROJECT-19676002

1. TSUCHIYA Toshiyuki (60378792)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results

Ikehara Tsuyoshi 池原 毅

TSUYOSHI Ikehara 池原 毅

Research Projects

Research Products

Co-Researchers

Explanation of reaction layer fatigue in silicon microstructure for development of highly-reliable MEMS devices

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Low-cycle to Ultra-High-cycle Fatigue Lifetime Measurement of Single Crystal Silicon Specimens using a Microresonator Test Deyice2012

Author(s)

Journal Title

Data Source

[Journal Article] Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens2010

Author(s)

Journal Title

Data Source

[Journal Article] Measure ment of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens2010

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens2010

Author(s)

Journal Title

Data Source

[Journal Article] Development of Amplitude-Controlled, Parallel Fatigue-Test System for Micro-Electro- Mechanical Resonators2010

Author(s)

Journal Title

Data Source

[Journal Article] Effects of anisotropic elasticity on stress concentration in micromechanical structures fabricated on (001) single-crystal silicon films2009

Author(s)

Journal Title

Data Source

[Journal Article] High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens2008

Author(s)

Journal Title

Data Source

[Journal Article] High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned2008

Author(s)

Journal Title

Data Source

[Journal Article] High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens2008

Author(s)

Journal Title

DOI

Data Source

[Journal Article] High-cycle fatigue of micromachined single crystal silicon measured,using a parallel fatigue test system2007

Author(s)

Journal Title

Data Source

[Presentation] Measurement of high-cycle fatigue lives of micrometer-sized single-crystal silicon specimens2011

Author(s)

Organizer

Place of Presentation

Data Source

[Presentation] MEMS共振デバイスの低サイクル破壊試験2009

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] Abusitripic analysis of stress concentration in a single-crystal-silicon MEMS structure2008

Author(s)

Organizer

Place of Presentation

Data Source

[Presentation] Crystal orientation dependence of fatigue caracteristics in single crystal silicon measured using a rotating micro resonator2008

Author(s)

Organizer

Place of Presentation

Data Source

[Presentation] 単結晶シリコンの曲げ試験における結晶異方性の効果2008

Author(s)

Organizer

Place of Presentation

Data Source

Ikehara Tsuyoshi 池原毅

TSUYOSHI Ikehara 池原毅