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Tabaru Tatsuo  田原 竜夫

ORCIDConnect your ORCID iD *help
Researcher Number 10357478
Other IDs
Affiliation (Current) 2025: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究チーム長
Affiliation (based on the past Project Information) *help 2022 – 2024: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究チーム長
Review Section/Research Field
Except Principal Investigator
Basic Section 14010:Fundamental plasma-related
Keywords
Except Principal Investigator
レーザ光脱離法 / 高周波ハイブリッドプラズマ / 高出力負イオン源 / 新規ホロー磁化放電 / 高密度水素プラズマ / ホロー磁化放電 / ハイブリッドプラズマCVD / 誘導結合型プラズマ / 容量結合型プラズマ / ホロー放電 … More / 負イオン源 / 電子放出 / ナノウォール / 高周波磁化ホロー放電 / ナノ構造体 / 負イオン Less
  • Research Projects

    (1 results)
  • Research Products

    (3 results)
  • Co-Researchers

    (1 People)
  •  Production of high-density hydrogen plasma by novel hollow magnetized discharge for performing high-power negative ion source

    • Principal Investigator
      大津 康徳
    • Project Period (FY)
      2022 – 2025
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 14010:Fundamental plasma-related
    • Research Institution
      Saga University

All 2024 2023

All Presentation

  • [Presentation] Characteristics of RF hybrid-plasma using hydrogen gas2024

    • Author(s)
      Yasunori Ohtsu, Tatsuo Tabaru and Julian Schulze
    • Organizer
      Proc. ISPlasma2024//IC-PLANTS2024/APSPT-13
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22467
  • [Presentation] Production of radio-frequency hybrid-discharge plasma using hydrogen gas for thin film preparation2023

    • Author(s)
      Yasunori Otsu and Tatsuo Tabaru
    • Organizer
      Bulletin of the American Physical Society, 76th Annual Gaseous Electronics Conference
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22467
  • [Presentation] 高周波ハイブリッド放電による高密度水素プラズマ生成2023

    • Author(s)
      大津康徳、田原竜夫
    • Organizer
      2022年度第70回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K22467
  • 1.  大津 康徳 (50233169)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results

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