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GOSALVEZ Miguel  ゴサルベス ミゲル

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GOSALVEZ Miguel A.  ゴサルベス ミゲル A

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Researcher Number 10377814
Affiliation (based on the past Project Information) *help 2009: 名古屋大学, 大学院・工学研究科, COE研究員
Review Section/Research Field
Except Principal Investigator
Microdevices/Nanodevices
Keywords
Except Principal Investigator
FTIR / 固液界面 / 界面活性剤 / 不純物イオン / 異方性エッチング / 結晶 / シリコン
  • Research Projects

    (1 results)
  • Research Products

    (62 results)
  • Co-Researchers

    (6 People)
  •  Modeling of orientation-dependent etching of silicon and effects of ions in the solution

    • Principal Investigator
      SATO Kazuo
    • Project Period (FY)
      2007 – 2009
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Nagoya University

All 2010 2009 2008 2007

All Journal Article Presentation Book

  • [Book] Handbook of Silicon Based MEMS Materials and Technologies2010

    • Author(s)
      M. A. Gosalvez(分担執筆)
    • Publisher
      Elsevier
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Octree-Search Kinetic Monte Carlo2010

    • Author(s)
      M.A. Gosalvez, Y. Xing, K. Sato, R.M. Nieminen
    • Journal Title

      Sensors and Actuators A (Physical in press, accepted Feb.)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton2010

    • Author(s)
      Y. Xing, M.A. Gosalvez, K. Sato, H. Yi
    • Journal Title

      J. Micromechanics and Microengineering 20

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010

    • Author(s)
      M.A.Gosalvez, Prem.Pal, B.Tang, K.Sato
    • Journal Title

      Sensors and Actuators A, Physical 157

      Pages: 91-95

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton2010

    • Author(s)
      Y.Xing, M.A.Gosalvez, K.Sato, H.Yi
    • Journal Title

      Journal of Micromechanics and Microengineering 20

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Octree-Search Kinetic Monte Carlo2010

    • Author(s)
      M.A.Gosalvez, Y.Xing, K.Sato, R.M.Nieminen
    • Journal Title

      Sensors and Actuators A, Physical, accepted Feb. '10 (in press)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide : Etching mechanism and advanced application2010

    • Author(s)
      Prem Pal, M.A.Gosalvez, K.Sato
    • Journal Title

      Japanese Journal of Applied Physics, accepted Feb. '10 (in press)

    • NAID

      40017116129

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide: Etching mechanism and advanced application2010

    • Author(s)
      Prem Pal, M.A. Gosalvez, K. Sato
    • Journal Title

      Japanese Journal of Applied Physics (in press, accepted Feb.)

    • NAID

      40017116129

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article]2010

    • Author(s)
      M.A.Gosalvez(分担執筆)
    • Journal Title

      Handbook of Silicon Based MEMS Materials and Technologies(Elsevier)

    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010

    • Author(s)
      M.A. Gosalvez, Prem. Pal, B. Tang, K. Sato
    • Journal Title

      Sensors and Actuators A, Physical 157

      Pages: 91-95

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009

    • Author(s)
      B. Tang, Prem Pal, M.A. Gosalvez, M. Shikida, K. Sato, et. al.
    • Journal Title

      Sensors and Actuators A 156-2(Physical)

      Pages: 334-341

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009

    • Author(s)
      Prem Pal, K.Sato, M.Shikida, M.A.Gosalvez
    • Journal Title

      Sensors and Actuators A, Physical 154-2

      Pages: 192-203

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009

    • Author(s)
      B.Tang, Prem Pal, M.A.Gosalvez, M.Shikida, K.Sato, et al.
    • Journal Title

      Sensors and Actuators A, Physical 156-2

      Pages: 334-341

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Surfactant adsorption on single crystal silicon surfaces in TMAH solution : Orientation-dependent adsorption detected by in-situ infra-red spectroscopy2009

    • Author(s)
      Prem Pal, K.Sato, M.A. Gosalvez, Y. Kimura, K.Ishibashi, et al.
    • Journal Title

      Journal of Microelectromechanical Systems 18-6

      Pages: 1345-1356

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009

    • Author(s)
      Prem Pal, K. Sato, M. Shikida, M.A. Gosalvez
    • Journal Title

      Sensors and Actuators A 154-2(Physical)

      Pages: 192-203

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions: Explaining the changes in the etch rate, roughness and undercutting for MEMS applications2009

    • Author(s)
      M.A. Gosalvez, B. Tang, Prem Pal, K. Sato, Y. Kimura, K. Ishibashi
    • Journal Title

      J. Micromechanics and Microengineering 40896

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Nieminen, Discrete and continuous cellular automata for the simulation of propagating surfaces2009

    • Author(s)
      M.A. Gosalvez, Y. Xing, K. Sato, R.M. Nieminen
    • Journal Title

      Sensors and Actuators A 155(Physical)

      Pages: 98-112

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Discrete and continuous cellular automata for the simulation of propagating surfaces2009

    • Author(s)
      M.A.Gosalvez, Y.Xing, K.Sato, R.M.Nieminen
    • Journal Title

      Sensors and Actuators A, Physical 155

      Pages: 98-112

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions : Explaining the changes in the etch rate, roughness and undercutting for MEMS applications2009

    • Author(s)
      M.A.Gosalvez, B.Tang, Prem Pal, K.Sato, Y.Kimura, K.Ishibashi
    • Journal Title

      Journal of Micromechanics and Microengineering 19-12

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Surfactant adsorption on single crystal silicon surfaces in TMAH solution: Orientation-dependent adsorption detected by in-situ infra-red spectroscopy2009

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, Y. Kimura, K. Ishibashi, et al.
    • Journal Title

      J. Microelectromechanical Systems 40712

      Pages: 1345-1356

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Effect of Cu impurities on wet etching of Si (110): formation of trapezoidal hillocks2008

    • Author(s)
      T. Hynninen, M.A. Gosalvez, A.S. Foster, H. Tanaka, K. Sato
    • Journal Title

      New Journal of Physics 10

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Analytical solution of the Continuous Cellular Automaton for anisotropic etching2008

    • Author(s)
      M.A. Gosalvez, Y, Xing, K. Sato
    • Journal Title

      J. Microelectromechanical Systems 40591

      Pages: 410-431

    • NAID

      120001101515

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Analytical solution of the Continuous Cellular Automaton for anisotropic etching2008

    • Author(s)
      M. A. Gosalvez, Y, Xing, and K. Sato
    • Journal Title

      Journal of Microelectromechanical Systems (印刷中)

    • NAID

      120001101515

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si2008

    • Author(s)
      T.Hynninen, A.S.Foster, M.A.Gosalvez, K.Sato, et al.
    • Journal Title

      Journal of Physics : Condensed Matter 20

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Atomistic methods for the simulation of evolving surface2008

    • Author(s)
      M.A. Gosalvez, Y. Xing, K. Sato, R.M. Nieminen
    • Journal Title

      J. Micromechanics and Microengineering 40681

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Atomistic methods for the simulation of evolving surface2008

    • Author(s)
      M.A.Gosalvez, Y.Xing, K.Sato, R.M.Nieminen
    • Journal Title

      Journal of Micromechanics and Microengineering 18-5

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si2008

    • Author(s)
      Hynninen, A.S. Foster, M.A. Gosalvez, K. Sato, et. al.
    • Journal Title

      J. Physics: Condensed Matter 20

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Effect of Cu impurities on wet etching of Si(110):formation of trapezoidal hillocks2008

    • Author(s)
      T. Hynninen, M. A. Gosalvez, A. S. Foster, H. Tanaka, and K. Sato
    • Journal Title

      New Journal of Physics vol.10電子ジャーナル#13033

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures2007

    • Author(s)
      Y. Xing, M.A. Gosalvez, K. Sato
    • Journal Title

      New Journal of Physics 9

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] First-principles calculations of Cu adsorption on an H-terminated Si surface2007

    • Author(s)
      A.S. Foster, M.A. Gosalvez, T. Hynninen, R.M. Nieminen, K. Sato
    • Journal Title

      Physical Review B 27942

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si (110)2007

    • Author(s)
      M.A. Gosalvez, Y. Xing, T. Hynninen, M. Uwaha, A. Foster, R. Nieminen, K. Sato
    • Journal Title

      J. Micromechanics and Microengineering 40650

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants2007

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Journal Title

      Journal of Micromechanics and Microengineering vol.17

      Pages: 2299-2307

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] An atomistic introduction to anisotropic etching2007

    • Author(s)
      M. A. Gosalvez, K. Sato, A. Fostee, et. al.
    • Journal Title

      Journal of Micromechanics and Microengineering vol.17,no.4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures2007

    • Author(s)
      Y. Xing, M. A. Gosalvez and K. Sato
    • Journal Title

      New Journal of Physics vol.9電子ジャーナル#436

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] First-principles calculations of Cu adsorption on an H-terminated Si surface2007

    • Author(s)
      A. S. Foster, M. A. Gosalvez, T. Hynninen, R. M. Nieminen, and K. Sato
    • Journal Title

      Physical Review B vol.76,no.7論文#075315

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Faster simulations of step bunching during anisotropic etching:formation of zigzag structures on Si(110)2007

    • Author(s)
      M. A. Gosalvez, Y. Xing, T. Hynninen, M. Uwaha, A. Foster, R. Nieminen and K. Sato
    • Journal Title

      Journal of Micromechanics and Microengineering vol.17,no.4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants2007

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Journal Title

      J. Micromechanics and Microengineering 40864

      Pages: 2299-2307

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] An atomistic introduction to anisotropic etching2007

    • Author(s)
      M.A. Gosalvez, K. Sato, A. Foster, et. al
    • Journal Title

      J. Micromechanics and Microengineering 40650

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Advanced MEMS applications using orientation dependent adsorption of surfactant molecules in TMAH solution2010

    • Author(s)
      Pram Pal, K.Sato, M.A.Gosalvez, B.Tang, H.Hida
    • Organizer
      5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), accepted Feb. '10
    • Place of Presentation
      Perth, Australia
    • Year and Date
      2010-06-09
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Advanced MEMS applications using orientation dependent adsorption of surfactant molecules in TMAH solution2010

    • Author(s)
      Pram Pal, K. Sato, M.A. Gosalvez, B. Tang, H. Hida
    • Organizer
      5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT)
    • Place of Presentation
      Perth, Australia(accepted Feb)
    • Year and Date
      2010-06-09
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures(invited)2009

    • Author(s)
      K.Sato, M.Shikida, M.A.Gosalvez, Prem Pal
    • Organizer
      Intl.Conf.on Materials for Advanced Technologies
    • Place of Presentation
      Singapore
    • Year and Date
      2009-06-28
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Surfactant in TMAH for new shapes of silicon MEMS components ; its orientation dependent adsorption detected by infrared spectroscopy2009

    • Author(s)
      Prem.Pal, K.Sato, H.Hida, M.A.Gosalvez, Y.Kimura, et al.
    • Organizer
      15th Intl.Conf.on Solid-State Sensors, Actuator and Microsystems(Transducers '09)
    • Place of Presentation
      Denver, USA
    • Year and Date
      2009-06-21
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Anisotropic nature of Si surface during wet alkaline etching ; Effects of cations and surfactants2009

    • Author(s)
      K.Sato, M.Shikida, M.A.Gosalvez, Prem Pal, Y.Kimura
    • Organizer
      The 5th International Colloquium, Micro-Tribology
    • Place of Presentation
      Milowka, Poland
    • Year and Date
      2009-09-20
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution2009

    • Author(s)
      B. Tang, M.A. Gosalvez, Prem Pal, S. Itoh, H. Hida, M. Shikida, K. Sato
    • Organizer
      ntl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋市
    • Year and Date
      2009-11-08
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Continuous Cellular Automaton for the propagation of advancing fronts featuring surface morphologies: Realistic simulation of wet etching for MEMS applications2009

    • Author(s)
      M.A. Gosalvez, Y. Xing, K. Sato
    • Organizer
      Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋市
    • Year and Date
      2009-11-08
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Experimental verification and theoretical explanation of the effect of surfactant addition to TMAH based etchants for advanced applications in MEMS2009

    • Author(s)
      Prem Pal, K.Sato, M.A.Gosalvez, H.Hida, B.Tang, S.Ito, Y.Kimura, K.Ishibashi, M.Niwano
    • Organizer
      第26回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      東京 タワーホール船堀
    • Year and Date
      2009-10-15
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Continuous Cellular Automaton for the propagation of advancing fronts featuring surface morphologies : Realistic simulation of wet etching for MEMS applications2009

    • Author(s)
      M.A.Gosalvez, Y.Xing, K.Sato
    • Organizer
      Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-08
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Experimental verification and theoretical explanation of the effect of surfactant addition to TMAH based etchants for advanced applications in MEMS2009

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, H. Hida, B. Tang, S. Ito, Y. Kimura, K. Ishibashi, M. Niwano
    • Organizer
      第26回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      東京
    • Year and Date
      2009-10-15
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Continuous cellular automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching2009

    • Author(s)
      Y.Xing, M.A.Gosalvez, K.Sato
    • Organizer
      15th Intl.Conf.on Solid-State Sensors, Actuator and Microsystems(Transducers '09)
    • Place of Presentation
      Denver, USA
    • Year and Date
      2009-06-21
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution2009

    • Author(s)
      B.Tang, M.A.Gosalvez, Prem Pal, S.Itoh, H.Hida, M.Shikida, K.Sato
    • Organizer
      Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-08
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures2009

    • Author(s)
      K. Sato, M. Shikida, M.A. Gosalvez, Prem Pal
    • Organizer
      Intl. Conf. on Materials for Advanced Technologies
    • Place of Presentation
      Singapore
    • Year and Date
      2009-06-28
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Surfactant in TMAH for new shapes of silicon MEMS components; its orientation dependent adsorption detected by infrared spectroscopy2009

    • Author(s)
      Prem. Pal, K. Sato, H. Hida, M.A. Gosalvez, Y. Kimura, et. al.
    • Organizer
      15th Intl. Conf. on Solid-State Sensors, Actuator and Microsystems
    • Place of Presentation
      Denver, USA(Transducers)
    • Year and Date
      2009-06-21
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Anisotropic nature of Si surface during wet alkaline etching; Effects of cations and surfactants2009

    • Author(s)
      K. Sato, M. Shikida, M.A. Gosalvez, Prem Pal, Y. Kimura
    • Organizer
      The 5th International Colloquium, Micro-Tribology
    • Place of Presentation
      Milowka, Poland
    • Year and Date
      2009-09-20
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Continuous cellular automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching2009

    • Author(s)
      Y. Xing, M.A. Gosalvez, K. Sato
    • Organizer
      15th Intl. Conf. on Solid-State Sensors, Actuator and Microsystems
    • Place of Presentation
      Denver, USA(Transducers)
    • Year and Date
      2009-06-21
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] An improved anisotropic wet etching progress for the fabrication of silicon MEMS structures using a single etching mask2008

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Organizer
      IEEE Intl. Conf. MEMS08, p327-330
    • Place of Presentation
      Tucson, USA
    • Year and Date
      2008-01-14
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Octree-search kinetic Monte Carlo algorithm for the simulation of complex 3D MEMS structures2008

    • Author(s)
      Y. Xing, M.A. Gosalvez, K. Sato
    • Organizer
      IEEE Intl. Conf. MEMS08
    • Place of Presentation
      Tucson, USA
    • Year and Date
      2008-01-14
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] An improved anisotropic wet etching progress for the fabrication of silicon MEMS structures using a single etching mask2008

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Organizer
      IEEE Intl. Conf. MEMS08
    • Place of Presentation
      Tucson, USA
    • Year and Date
      2008-01-14
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Gosalvez and M. Shikida, Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching2008

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Organizer
      SPIE MOEMS-MEMS (Proc. SPIE Vol. 6882)
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2008-01-19
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Octree-search kinetic Monte Carlo algorithm for the simulation of complex 3D MEMS structures2008

    • Author(s)
      Y. Xing, M. A. Gosalvez and K. Sato
    • Organizer
      IEEE Intl. Conf. MEMS08, p323-326
    • Place of Presentation
      Tucson, USA
    • Year and Date
      2008-01-14
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching2008

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Organizer
      SPIE MOEMS-MEMS(Proc. SPIE Vol.6882)
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2008-01-19
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Novel wet anisotropic etching process for the realization of new shapesof silicon MEMS structures2007

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Organizer
      IEEE Intl. Conf. MHS07 & Micro-Nano COE, p499-504
    • Place of Presentation
      Nagoya
    • Year and Date
      2007-11-13
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Novel wet anisotropic etching process for the realization of new shapes of silicon MEMS structures2007

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Organizer
      IEEE Intl. Conf. MHS07 & Micro-Nano COE
    • Place of Presentation
      Nagoya
    • Year and Date
      2007-11-13
    • Data Source
      KAKENHI-PROJECT-19201026
  • 1.  SATO Kazuo (30262851)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 60 results
  • 2.  SHIKIDA Mitsuhiro (80273291)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 18 results
  • 3.  PREM Pal (20444416)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 30 results
  • 4.  KIMURA Yasuo (40312673)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 10 results
  • 5.  HYNNINEN Teemu
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 8 results
  • 6.  FERRANDO Nestor
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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