GOSALVEZ Miguel ゴサルベスミゲル

… Alternative Names

GOSALVEZ Miguel A. ゴサルベスミゲル A

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Researcher Number	10377814
Affiliation (based on the past Project Information) *help	2009: 名古屋大学, 大学院・工学研究科, COE研究員
Review Section/Research Field	Except Principal Investigator Microdevices/Nanodevices
Keywords	Except Principal Investigator FTIR / 固液界面 / 界面活性剤 / 不純物イオン / 異方性エッチング / 結晶 / シリコン

Modeling of orientation-dependent etching of silicon and effects of ions in the solution
- Principal Investigator
  
  SATO Kazuo
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Nagoya University

All 2010 2009 2008 2007

All Journal Article Presentation Book

[Book] Handbook of Silicon Based MEMS Materials and Technologies2010
- Author(s)
  M. A. Gosalvez(分担執筆)
- Publisher
  Elsevier
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Octree-Search Kinetic Monte Carlo2010
- Author(s)
  M.A. Gosalvez, Y. Xing, K. Sato, R.M. Nieminen
- Journal Title
  
  Sensors and Actuators A (Physical in press, accepted Feb.)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton2010
- Author(s)
  Y. Xing, M.A. Gosalvez, K. Sato, H. Yi
- Journal Title
  
  J. Micromechanics and Microengineering 20
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010
- Author(s)
  M.A.Gosalvez, Prem.Pal, B.Tang, K.Sato
- Journal Title
  
  Sensors and Actuators A, Physical 157
  
  Pages: 91-95
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton2010
- Author(s)
  Y.Xing, M.A.Gosalvez, K.Sato, H.Yi
- Journal Title
  
  Journal of Micromechanics and Microengineering 20
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Octree-Search Kinetic Monte Carlo2010
- Author(s)
  M.A.Gosalvez, Y.Xing, K.Sato, R.M.Nieminen
- Journal Title
  
  Sensors and Actuators A, Physical, accepted Feb. '10 (in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide : Etching mechanism and advanced application2010
- Author(s)
  Prem Pal, M.A.Gosalvez, K.Sato
- Journal Title
  
  Japanese Journal of Applied Physics, accepted Feb. '10 (in press)
- NAID
  40017116129
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide: Etching mechanism and advanced application2010
- Author(s)
  Prem Pal, M.A. Gosalvez, K. Sato
- Journal Title
  
  Japanese Journal of Applied Physics (in press, accepted Feb.)
- NAID
  40017116129
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article]2010
- Author(s)
  M.A.Gosalvez(分担執筆)
- Journal Title
  
  Handbook of Silicon Based MEMS Materials and Technologies(Elsevier)
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010
- Author(s)
  M.A. Gosalvez, Prem. Pal, B. Tang, K. Sato
- Journal Title
  
  Sensors and Actuators A, Physical 157
  
  Pages: 91-95
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009
- Author(s)
  B. Tang, Prem Pal, M.A. Gosalvez, M. Shikida, K. Sato, et. al.
- Journal Title
  
  Sensors and Actuators A 156-2(Physical)
  
  Pages: 334-341
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009
- Author(s)
  Prem Pal, K.Sato, M.Shikida, M.A.Gosalvez
- Journal Title
  
  Sensors and Actuators A, Physical 154-2
  
  Pages: 192-203
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009
- Author(s)
  B.Tang, Prem Pal, M.A.Gosalvez, M.Shikida, K.Sato, et al.
- Journal Title
  
  Sensors and Actuators A, Physical 156-2
  
  Pages: 334-341
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Surfactant adsorption on single crystal silicon surfaces in TMAH solution : Orientation-dependent adsorption detected by in-situ infra-red spectroscopy2009
- Author(s)
  Prem Pal, K.Sato, M.A. Gosalvez, Y. Kimura, K.Ishibashi, et al.
- Journal Title
  
  Journal of Microelectromechanical Systems 18-6
  
  Pages: 1345-1356
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009
- Author(s)
  Prem Pal, K. Sato, M. Shikida, M.A. Gosalvez
- Journal Title
  
  Sensors and Actuators A 154-2(Physical)
  
  Pages: 192-203
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions: Explaining the changes in the etch rate, roughness and undercutting for MEMS applications2009
- Author(s)
  M.A. Gosalvez, B. Tang, Prem Pal, K. Sato, Y. Kimura, K. Ishibashi
- Journal Title
  
  J. Micromechanics and Microengineering 40896
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Nieminen, Discrete and continuous cellular automata for the simulation of propagating surfaces2009
- Author(s)
  M.A. Gosalvez, Y. Xing, K. Sato, R.M. Nieminen
- Journal Title
  
  Sensors and Actuators A 155(Physical)
  
  Pages: 98-112
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Discrete and continuous cellular automata for the simulation of propagating surfaces2009
- Author(s)
  M.A.Gosalvez, Y.Xing, K.Sato, R.M.Nieminen
- Journal Title
  
  Sensors and Actuators A, Physical 155
  
  Pages: 98-112
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions : Explaining the changes in the etch rate, roughness and undercutting for MEMS applications2009
- Author(s)
  M.A.Gosalvez, B.Tang, Prem Pal, K.Sato, Y.Kimura, K.Ishibashi
- Journal Title
  
  Journal of Micromechanics and Microengineering 19-12
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Surfactant adsorption on single crystal silicon surfaces in TMAH solution: Orientation-dependent adsorption detected by in-situ infra-red spectroscopy2009
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, Y. Kimura, K. Ishibashi, et al.
- Journal Title
  
  J. Microelectromechanical Systems 40712
  
  Pages: 1345-1356
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Effect of Cu impurities on wet etching of Si (110): formation of trapezoidal hillocks2008
- Author(s)
  T. Hynninen, M.A. Gosalvez, A.S. Foster, H. Tanaka, K. Sato
- Journal Title
  
  New Journal of Physics 10
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Analytical solution of the Continuous Cellular Automaton for anisotropic etching2008
- Author(s)
  M.A. Gosalvez, Y, Xing, K. Sato
- Journal Title
  
  J. Microelectromechanical Systems 40591
  
  Pages: 410-431
- NAID
  120001101515
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Analytical solution of the Continuous Cellular Automaton for anisotropic etching2008
- Author(s)
  M. A. Gosalvez, Y, Xing, and K. Sato
- Journal Title
  
  Journal of Microelectromechanical Systems (印刷中)
- NAID
  120001101515
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si2008
- Author(s)
  T.Hynninen, A.S.Foster, M.A.Gosalvez, K.Sato, et al.
- Journal Title
  
  Journal of Physics : Condensed Matter 20
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Atomistic methods for the simulation of evolving surface2008
- Author(s)
  M.A. Gosalvez, Y. Xing, K. Sato, R.M. Nieminen
- Journal Title
  
  J. Micromechanics and Microengineering 40681
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Atomistic methods for the simulation of evolving surface2008
- Author(s)
  M.A.Gosalvez, Y.Xing, K.Sato, R.M.Nieminen
- Journal Title
  
  Journal of Micromechanics and Microengineering 18-5
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si2008
- Author(s)
  Hynninen, A.S. Foster, M.A. Gosalvez, K. Sato, et. al.
- Journal Title
  
  J. Physics: Condensed Matter 20
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Effect of Cu impurities on wet etching of Si(110):formation of trapezoidal hillocks2008
- Author(s)
  T. Hynninen, M. A. Gosalvez, A. S. Foster, H. Tanaka, and K. Sato
- Journal Title
  
  New Journal of Physics vol.10電子ジャーナル#13033
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures2007
- Author(s)
  Y. Xing, M.A. Gosalvez, K. Sato
- Journal Title
  
  New Journal of Physics 9
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] First-principles calculations of Cu adsorption on an H-terminated Si surface2007
- Author(s)
  A.S. Foster, M.A. Gosalvez, T. Hynninen, R.M. Nieminen, K. Sato
- Journal Title
  
  Physical Review B 27942
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si (110)2007
- Author(s)
  M.A. Gosalvez, Y. Xing, T. Hynninen, M. Uwaha, A. Foster, R. Nieminen, K. Sato
- Journal Title
  
  J. Micromechanics and Microengineering 40650
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants2007
- Author(s)
  Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
- Journal Title
  
  Journal of Micromechanics and Microengineering vol.17
  
  Pages: 2299-2307
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] An atomistic introduction to anisotropic etching2007
- Author(s)
  M. A. Gosalvez, K. Sato, A. Fostee, et. al.
- Journal Title
  
  Journal of Micromechanics and Microengineering vol.17,no.4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures2007
- Author(s)
  Y. Xing, M. A. Gosalvez and K. Sato
- Journal Title
  
  New Journal of Physics vol.9電子ジャーナル#436
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] First-principles calculations of Cu adsorption on an H-terminated Si surface2007
- Author(s)
  A. S. Foster, M. A. Gosalvez, T. Hynninen, R. M. Nieminen, and K. Sato
- Journal Title
  
  Physical Review B vol.76,no.7論文#075315
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Faster simulations of step bunching during anisotropic etching:formation of zigzag structures on Si(110)2007
- Author(s)
  M. A. Gosalvez, Y. Xing, T. Hynninen, M. Uwaha, A. Foster, R. Nieminen and K. Sato
- Journal Title
  
  Journal of Micromechanics and Microengineering vol.17,no.4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants2007
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
- Journal Title
  
  J. Micromechanics and Microengineering 40864
  
  Pages: 2299-2307
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] An atomistic introduction to anisotropic etching2007
- Author(s)
  M.A. Gosalvez, K. Sato, A. Foster, et. al
- Journal Title
  
  J. Micromechanics and Microengineering 40650
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Advanced MEMS applications using orientation dependent adsorption of surfactant molecules in TMAH solution2010
- Author(s)
  Pram Pal, K.Sato, M.A.Gosalvez, B.Tang, H.Hida
- Organizer
  5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), accepted Feb. '10
- Place of Presentation
  Perth, Australia
- Year and Date
  2010-06-09
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Advanced MEMS applications using orientation dependent adsorption of surfactant molecules in TMAH solution2010
- Author(s)
  Pram Pal, K. Sato, M.A. Gosalvez, B. Tang, H. Hida
- Organizer
  5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT)
- Place of Presentation
  Perth, Australia(accepted Feb)
- Year and Date
  2010-06-09
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures(invited)2009
- Author(s)
  K.Sato, M.Shikida, M.A.Gosalvez, Prem Pal
- Organizer
  Intl.Conf.on Materials for Advanced Technologies
- Place of Presentation
  Singapore
- Year and Date
  2009-06-28
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Surfactant in TMAH for new shapes of silicon MEMS components ; its orientation dependent adsorption detected by infrared spectroscopy2009
- Author(s)
  Prem.Pal, K.Sato, H.Hida, M.A.Gosalvez, Y.Kimura, et al.
- Organizer
  15th Intl.Conf.on Solid-State Sensors, Actuator and Microsystems(Transducers '09)
- Place of Presentation
  Denver, USA
- Year and Date
  2009-06-21
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Anisotropic nature of Si surface during wet alkaline etching ; Effects of cations and surfactants2009
- Author(s)
  K.Sato, M.Shikida, M.A.Gosalvez, Prem Pal, Y.Kimura
- Organizer
  The 5th International Colloquium, Micro-Tribology
- Place of Presentation
  Milowka, Poland
- Year and Date
  2009-09-20
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution2009
- Author(s)
  B. Tang, M.A. Gosalvez, Prem Pal, S. Itoh, H. Hida, M. Shikida, K. Sato
- Organizer
  ntl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
- Place of Presentation
  名古屋市
- Year and Date
  2009-11-08
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Continuous Cellular Automaton for the propagation of advancing fronts featuring surface morphologies: Realistic simulation of wet etching for MEMS applications2009
- Author(s)
  M.A. Gosalvez, Y. Xing, K. Sato
- Organizer
  Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
- Place of Presentation
  名古屋市
- Year and Date
  2009-11-08
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Experimental verification and theoretical explanation of the effect of surfactant addition to TMAH based etchants for advanced applications in MEMS2009
- Author(s)
  Prem Pal, K.Sato, M.A.Gosalvez, H.Hida, B.Tang, S.Ito, Y.Kimura, K.Ishibashi, M.Niwano
- Organizer
  第26回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  東京タワーホール船堀
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Continuous Cellular Automaton for the propagation of advancing fronts featuring surface morphologies : Realistic simulation of wet etching for MEMS applications2009
- Author(s)
  M.A.Gosalvez, Y.Xing, K.Sato
- Organizer
  Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
- Place of Presentation
  名古屋大学
- Year and Date
  2009-11-08
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Experimental verification and theoretical explanation of the effect of surfactant addition to TMAH based etchants for advanced applications in MEMS2009
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, H. Hida, B. Tang, S. Ito, Y. Kimura, K. Ishibashi, M. Niwano
- Organizer
  第26回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  東京
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Continuous cellular automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching2009
- Author(s)
  Y.Xing, M.A.Gosalvez, K.Sato
- Organizer
  15th Intl.Conf.on Solid-State Sensors, Actuator and Microsystems(Transducers '09)
- Place of Presentation
  Denver, USA
- Year and Date
  2009-06-21
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution2009
- Author(s)
  B.Tang, M.A.Gosalvez, Prem Pal, S.Itoh, H.Hida, M.Shikida, K.Sato
- Organizer
  Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
- Place of Presentation
  名古屋大学
- Year and Date
  2009-11-08
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures2009
- Author(s)
  K. Sato, M. Shikida, M.A. Gosalvez, Prem Pal
- Organizer
  Intl. Conf. on Materials for Advanced Technologies
- Place of Presentation
  Singapore
- Year and Date
  2009-06-28
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Surfactant in TMAH for new shapes of silicon MEMS components; its orientation dependent adsorption detected by infrared spectroscopy2009
- Author(s)
  Prem. Pal, K. Sato, H. Hida, M.A. Gosalvez, Y. Kimura, et. al.
- Organizer
  15th Intl. Conf. on Solid-State Sensors, Actuator and Microsystems
- Place of Presentation
  Denver, USA(Transducers)
- Year and Date
  2009-06-21
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Anisotropic nature of Si surface during wet alkaline etching; Effects of cations and surfactants2009
- Author(s)
  K. Sato, M. Shikida, M.A. Gosalvez, Prem Pal, Y. Kimura
- Organizer
  The 5th International Colloquium, Micro-Tribology
- Place of Presentation
  Milowka, Poland
- Year and Date
  2009-09-20
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Continuous cellular automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching2009
- Author(s)
  Y. Xing, M.A. Gosalvez, K. Sato
- Organizer
  15th Intl. Conf. on Solid-State Sensors, Actuator and Microsystems
- Place of Presentation
  Denver, USA(Transducers)
- Year and Date
  2009-06-21
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] An improved anisotropic wet etching progress for the fabrication of silicon MEMS structures using a single etching mask2008
- Author(s)
  Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
- Organizer
  IEEE Intl. Conf. MEMS08, p327-330
- Place of Presentation
  Tucson, USA
- Year and Date
  2008-01-14
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Octree-search kinetic Monte Carlo algorithm for the simulation of complex 3D MEMS structures2008
- Author(s)
  Y. Xing, M.A. Gosalvez, K. Sato
- Organizer
  IEEE Intl. Conf. MEMS08
- Place of Presentation
  Tucson, USA
- Year and Date
  2008-01-14
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] An improved anisotropic wet etching progress for the fabrication of silicon MEMS structures using a single etching mask2008
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
- Organizer
  IEEE Intl. Conf. MEMS08
- Place of Presentation
  Tucson, USA
- Year and Date
  2008-01-14
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Gosalvez and M. Shikida, Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching2008
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
- Organizer
  SPIE MOEMS-MEMS (Proc. SPIE Vol. 6882)
- Place of Presentation
  San Jose, USA
- Year and Date
  2008-01-19
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Octree-search kinetic Monte Carlo algorithm for the simulation of complex 3D MEMS structures2008
- Author(s)
  Y. Xing, M. A. Gosalvez and K. Sato
- Organizer
  IEEE Intl. Conf. MEMS08, p323-326
- Place of Presentation
  Tucson, USA
- Year and Date
  2008-01-14
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching2008
- Author(s)
  Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
- Organizer
  SPIE MOEMS-MEMS(Proc. SPIE Vol.6882)
- Place of Presentation
  San Jose, USA
- Year and Date
  2008-01-19
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Novel wet anisotropic etching process for the realization of new shapesof silicon MEMS structures2007
- Author(s)
  Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
- Organizer
  IEEE Intl. Conf. MHS07 & Micro-Nano COE, p499-504
- Place of Presentation
  Nagoya
- Year and Date
  2007-11-13
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Novel wet anisotropic etching process for the realization of new shapes of silicon MEMS structures2007
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
- Organizer
  IEEE Intl. Conf. MHS07 & Micro-Nano COE
- Place of Presentation
  Nagoya
- Year and Date
  2007-11-13
- Data Source
  KAKENHI-PROJECT-19201026

1. SATO Kazuo (30262851)

# of Collaborated Projects: 1 results

# of Collaborated Products: 60 results
2. SHIKIDA Mitsuhiro (80273291)

# of Collaborated Projects: 1 results

# of Collaborated Products: 18 results
3. PREM Pal (20444416)

# of Collaborated Projects: 1 results

# of Collaborated Products: 30 results
4. KIMURA Yasuo (40312673)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
5. HYNNINEN Teemu

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
6. FERRANDO Nestor

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

GOSALVEZ Miguel ゴサルベス ミゲル

GOSALVEZ Miguel A. ゴサルベス ミゲル A

Research Projects

Research Products

Co-Researchers

Modeling of orientation-dependent etching of silicon and effects of ions in the solution

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Book] Handbook of Silicon Based MEMS Materials and Technologies2010

Author(s)

Publisher

Data Source

[Journal Article] Octree-Search Kinetic Monte Carlo2010

Author(s)

Journal Title

Data Source

[Journal Article] Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton2010

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[Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010

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[Journal Article] Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton2010

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[Journal Article] Octree-Search Kinetic Monte Carlo2010

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[Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide : Etching mechanism and advanced application2010

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NAID

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[Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide: Etching mechanism and advanced application2010

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NAID

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[Journal Article]2010

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[Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010

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[Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009

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[Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009

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[Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009

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[Journal Article] Surfactant adsorption on single crystal silicon surfaces in TMAH solution : Orientation-dependent adsorption detected by in-situ infra-red spectroscopy2009

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[Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009

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[Journal Article] Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions: Explaining the changes in the etch rate, roughness and undercutting for MEMS applications2009

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[Journal Article] Nieminen, Discrete and continuous cellular automata for the simulation of propagating surfaces2009

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GOSALVEZ Miguel ゴサルベスミゲル

GOSALVEZ Miguel A. ゴサルベスミゲル A