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ITO Tomoko  伊藤 智子

ORCIDConnect your ORCID iD *help
Researcher Number 10724784
Other IDs
Affiliation (based on the past Project Information) *help 2022 – 2024: 大阪大学, 大学院工学研究科, 助教
2019 – 2021: 大阪大学, 工学研究科, 助教
2016 – 2018: 大阪大学, 工学研究科, 特任研究員
2015: 大阪大学, 工学(系)研究科(研究院), 研究員
Review Section/Research Field
Principal Investigator
Basic Section 14030:Applied plasma science-related / Basic Section 29020:Thin film/surface and interfacial physical properties-related / Plasma electronics
Keywords
Principal Investigator
プラズマエッチング / Ga2O3 / 酸化ガリウム / 次世代パワーデバイス / 反応性イオンエッチング / 次世代半導体材料 / ガリウムオキサイド / イオンビーム / 半導体プロセス / 反応性プラズマエッチング … More / 磁性材料 / 遷移金属材料 / 遷移金属 / アトミックレイヤーエッチング / 大気汚染防止・浄化 / 大気圧プラズマ / イオン風 Less
  • Research Projects

    (4 results)
  • Research Products

    (16 results)
  •  超音速分子線照射による遷移金属材料に対する原子層エッチング表面反応機構の解明Principal Investigator

    • Principal Investigator
      伊藤 智子
    • Project Period (FY)
      2024 – 2026
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 29020:Thin film/surface and interfacial physical properties-related
    • Research Institution
      Osaka University
  •  Analysis of reactive ion etching surface reactions of Ga2O3 for the development of next-generation semiconductor devicesPrincipal Investigator

    • Principal Investigator
      Ito Tomoko
    • Project Period (FY)
      2021 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 14030:Applied plasma science-related
    • Research Institution
      Osaka University
  •  Surface reaction mechanisms for plasma enhanced atomic layer etching process by organic compoundsPrincipal Investigator

    • Principal Investigator
      Ito Tomoko
    • Project Period (FY)
      2018 – 2020
    • Research Category
      Grant-in-Aid for Early-Career Scientists
    • Review Section
      Basic Section 14030:Applied plasma science-related
    • Research Institution
      Osaka University
  •  Aerosol ionization mechanisms by ionic wind generatorPrincipal Investigator

    • Principal Investigator
      ITO Tomoko
    • Project Period (FY)
      2015 – 2017
    • Research Category
      Grant-in-Aid for Young Scientists (B)
    • Research Field
      Plasma electronics
    • Research Institution
      Osaka University

All 2022 2021 2020 2019 2018 2016 2015

All Journal Article Presentation

  • [Journal Article] Formation and desorption of nickel hexafluoroacetylacetonate Ni(hfac)2 on a nickel oxide surface in atomic layer etching processes2020

    • Author(s)
      Basher Abdulrahman H.、Krstic Marjan、Fink Karin、Ito Tomoko、Karahashi Kazuhiro、Wenzel Wolfgang、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science & Technology A

      Volume: 38 Issue: 5 Pages: 052602-052602

    • DOI

      10.1116/6.0000293

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K13532, KAKENHI-PROJECT-20J10393
  • [Presentation] ffects of Low-Energy Ion Injection in Atomic Layer Processes2022

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi
    • Organizer
      14th International Symposium on Atomic Level Characterizations for New Materials and Devices '22
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21K03522
  • [Presentation] βジケトンを用いた遷移金属原子層エッチング(ALE) の脱離生成物計測と反応機構解明2021

    • Author(s)
      伊藤智子、唐橋一浩、浜口智志
    • Organizer
      第68回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] 原子層プロセスにおける低エネルギーイオン照射誘起表面反応2021

    • Author(s)
      伊藤智子, 唐橋一 浩, 浜口智志
    • Organizer
      第 82 回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-21K03522
  • [Presentation] 遷移金属におけるβジケトンによるサーマルエッチング表面反応解析2020

    • Author(s)
      伊藤智子、唐橋一浩、浜口智志
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] XPS Study of Hexafluoroacetylacetone(hHfac) Adsorbed on Cobalt Surfaces for Atomic layer etching (ALE)2019

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi,
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] 原子層エッチングプロセスにおける表面反応解析2019

    • Author(s)
      伊藤智子, 唐橋一浩, 浜口智志
    • Organizer
      The 4th Atomic Layer Process (ALP) Workshop
    • Invited
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] Analyses of Hexafluoroacetylacetone (Hfac) Adsorbed on Transition Metal Surfaces2019

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi
    • Organizer
      AVS 18th International Conference on Atomic Layer Deposition (ALD 2019) and the 5th International Atomic Layer Etching Workshop (ALE 2019)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] アセチルアセトンによる遷移金属表面におけるサーマルエッチング反応解析2019

    • Author(s)
      伊藤智子, 唐橋一浩, 浜口智志
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] ヘキサフルオロアセチルアセトンによる遷移金属(Ni, Co)におけるサーマルエッチング反応解析2019

    • Author(s)
      伊藤智子、唐橋一浩、浜口智志
    • Organizer
      第66回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] (19)“Mechanisms for Atomic Layer Etching of Metal Films by the Formation of Beta-diketonate Metal Complexes2018

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi
    • Organizer
      AVS 65th International Symposium & Exhibition
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] Reactions of Hexafluoroacetylacetone (hfac) and Metal Surfaces under Low-energy Ion Irradiation2018

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi
    • Organizer
      AVS 18th International Conference on Atomic Layer Deposition (ALD 2018) and the 5th International Atomic Layer Etching Workshop (ALE 2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] Etching reactions by polyatomic ion containing fluorine atoms2018

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Takuya Hirohash, Junichi Hashimoto, Mitsuhiro Omura, Hisataka Hayashi, Satoshi Hamaguchi
    • Organizer
      The 40th international symposium on dry process DPS2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] 金属原子層エッチングプロセスにおける錯体形成表面反応解析2018

    • Author(s)
      伊藤智子、唐橋一浩、浜口智志
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-18K13532
  • [Presentation] イオン風を利用した大気浮遊粒子の捕集機構解析2016

    • Author(s)
      伊藤智子, Longwei Chen, 浜口智志
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都)
    • Year and Date
      2016-03-21
    • Data Source
      KAKENHI-PROJECT-15K17481
  • [Presentation] 液中放電によるオゾン水生成2015

    • Author(s)
      伊藤智子, 村上栄造, 松谷輝雄, 浜口智志
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県)
    • Year and Date
      2015-09-15
    • Data Source
      KAKENHI-PROJECT-15K17481

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