松前貴司マツマエタカシ

Researcher Number	10807431
Other IDs
Affiliation (Current)	2022: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究員
Affiliation (based on the past Project Information) *help	2020 – 2022: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究員
Review Section/Research Field	Principal Investigator Basic Section 26030:Composite materials and interfaces-related / Basic Section 18020:Manufacturing and production engineering-related Except Principal Investigator Basic Section 18020:Manufacturing and production engineering-related
Keywords	Principal Investigator ダイヤモンド / Ga2O3 / 酸化ガリウム / パワー半導体 / ウルトラワイドギャップ / 放熱基板 / 直接接合 / 低温接合 / ニッケル / 微細加工 / インプリント … More Except Principal Investigator … More マイクロデバイス / ゲッター / 気密封止 / 接合 / 量子干渉効果 Less

オールダイヤモンド冷却構造のための微細加工法および最適構造の探索Principal Investigator
- Principal Investigator
  
  松前貴司
- Project Period (FY)
  2022 – 2023
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
Low-temperature direct bonding of beta-Ga2O3/diamond for advanced power electronicsPrincipal Investigator
- Principal Investigator
  
  松前貴司
- Project Period (FY)
  2020 – 2021
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 26030:Composite materials and interfaces-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
Research about ultra-high hermetic seal bonding for microcavity by quantum sensing
- Principal Investigator
  
  倉島優一
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology

All 2020

All Presentation

[Presentation] Au/Ti薄膜の低温接合及びゲッター材への適応性評価2020
- Author(s)
  倉島優一、楠井貴晶、松前貴司、日暮栄治、髙木秀樹、渡邉満洋
- Organizer
  精密工学会春季大会講演会
- Data Source
  KAKENHI-PROJECT-19H02045
[Presentation] β-Ga2O3薄膜とダイヤモンド基板の低温直接接合2020
- Author(s)
  松前貴司, 倉島優一, 高木秀樹, 梅沢仁, 田中孝治, 伊藤利充, 渡邊幸志, 日暮栄治
- Organizer
  ２０２０年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K15044
[Presentation] 脱ガス処理後の真空封止と内部残留ガスゲッタリングが可能な MEMS 封止用金属接合膜の開発2020
- Author(s)
  狩谷真悟、松前貴司、倉島優一、日暮栄治、早瀬仁則、高木秀樹
- Organizer
  精密工学会春季大会講演会
- Data Source
  KAKENHI-PROJECT-19H02045
[Presentation] キャビティ内部にて残留ガスを吸収させたTi/Pt/Au封止接合膜の構造観察2020
- Author(s)
  狩谷真悟, 松前貴司, 倉島優一, 髙木秀樹, 早瀬仁則, 日暮栄治
- Organizer
  2020年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19H02045

1. 倉島優一 (70408730)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
2. 柳町真也 (70358216)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

松前貴司マツマエタカシ

Research Projects

Research Products

Co-Researchers

オールダイヤモンド冷却構造のための微細加工法および最適構造の探索Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Low-temperature direct bonding of beta-Ga2O3/diamond for advanced power electronicsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Research about ultra-high hermetic seal bonding for microcavity by quantum sensing

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Presentation] Au/Ti薄膜の低温接合及びゲッター材への適応性評価2020

Author(s)

Organizer

Data Source

[Presentation] β-Ga2O3薄膜とダイヤモンド基板の低温直接接合2020

Author(s)

Organizer

Data Source

[Presentation] 脱ガス処理後の真空封止と内部残留ガスゲッタリングが可能な MEMS 封止用金属接合膜の開発2020

Author(s)

Organizer

Data Source

[Presentation] キャビティ内部にて残留ガスを吸収させたTi/Pt/Au封止接合膜の構造観察2020

Author(s)

Organizer

Data Source

松前 貴司 マツマエ タカシ

Research Projects

Research Products

Co-Researchers

オールダイヤモンド冷却構造のための微細加工法および最適構造の探索Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Low-temperature direct bonding of beta-Ga2O3/diamond for advanced power electronicsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Research about ultra-high hermetic seal bonding for microcavity by quantum sensing

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Presentation] Au/Ti薄膜の低温接合及びゲッター材への適応性評価2020

Author(s)

Organizer

Data Source

[Presentation] β-Ga2O3薄膜とダイヤモンド基板の低温直接接合2020

Author(s)

Organizer

Data Source

[Presentation] 脱ガス処理後の真空 封止と内部残留ガス ゲッタリングが可能 な MEMS 封止用金属接合膜の開発2020

Author(s)

Organizer

Data Source

[Presentation] キャビティ内部にて残留ガスを吸収させたTi/Pt/Au封止接合膜の構造観察2020

Author(s)

Organizer

Data Source

松前貴司マツマエタカシ

[Presentation] 脱ガス処理後の真空封止と内部残留ガスゲッタリングが可能な MEMS 封止用金属接合膜の開発2020