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Kawashima Natsumi  川嶋 なつみ

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KAWASHIMA Natsumi  川嶋 なつみ

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Researcher Number 10908635
Other IDs
Affiliation (Current) 2025: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員
Affiliation (based on the past Project Information) *help 2024: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員
2021 – 2022: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員
Review Section/Research Field
Principal Investigator
Basic Section 18020:Manufacturing and production engineering-related / 0301:Mechanics of materials, production engineering, design engineering, fluid engineering, thermal engineering, mechanical dynamics, robotics, aerospace engineering, marine and maritime engineering, and related fields
Keywords
Principal Investigator
光計測 / 干渉計測 / 厚さ計測 / 温度依存性 / 屈折率 / レーザー計測 / 広帯域光干渉 / 分散
  • Research Projects

    (2 results)
  •  半導体基板の絶対厚さ及び厚さむらの高精度測定を目指したハイブリッド干渉計の開発Principal Investigator

    • Principal Investigator
      川嶋 なつみ
    • Project Period (FY)
      2024 – 2025
    • Research Category
      Grant-in-Aid for Early-Career Scientists
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      National Institute of Advanced Industrial Science and Technology
  •  Development of hybrid system of double-sided- and tandem- interferometer for precise measurement of refractive index and its temperature dependence of siliconPrincipal Investigator

    • Principal Investigator
      KAWASHIMA Natsumi
    • Project Period (FY)
      2021 – 2022
    • Research Category
      Grant-in-Aid for Research Activity Start-up
    • Review Section
      0301:Mechanics of materials, production engineering, design engineering, fluid engineering, thermal engineering, mechanical dynamics, robotics, aerospace engineering, marine and maritime engineering, and related fields
    • Research Institution
      National Institute of Advanced Industrial Science and Technology

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