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AYA Nobuhiro  綾 信博

ORCIDConnect your ORCID iD *help
Researcher Number 20356380
Other IDs
Affiliation (based on the past Project Information) *help 2004: National Institute of Advanced Industrial Science and Technology, Advanced Manufacturing Research Institute, Group Leader, 先進製造プロセス研究部門, グループ長
2003: 独立行政法人産業技術総合研究所, マイクロ・ナノ機能広域発現研究センター, 副センター長
Review Section/Research Field
Except Principal Investigator
Thermal engineering
Keywords
Except Principal Investigator
Stagnation Flow / Cleaning of Semiconductor Wafer / Gas Over Saturated Water / Minute Particle Contamination / Ultrasonic Cavitation / Surface Tension Effect / Cleaning Effect / Nano-Bubbles / 高気泡内圧力 / 純水 … More / 超音波付与 / 溶存空気量 / 微小空気泡 / 衣類洗浄 / 衝突噴流 / ウエハ洗浄 / 過飽和溶存気体 / 微粒子汚れ / 超音波キャビテーション / 表面張力効果 / 洗浄効果 / ナノバブル Less
  • Research Projects

    (1 results)
  • Co-Researchers

    (2 People)
  •  Influence of Temperature Field on Generation Characteristics of Nano-Bubbles and Their Application to the Environmental Friendly Cleaning Technology

    • Principal Investigator
      YABE Akira
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Thermal engineering
    • Research Institution
      NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
  • 1.  YABE Akira (40358221)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  TAKEMURA Fumio (20313041)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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