DINH THANH HUNG ヂンタンフン

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Researcher Number	20744808
Affiliation (Current)	2025: 国立研究開発法人量子科学技術研究開発機構, 関西光量子科学研究所量子応用光学研究部, 主任研究員
Affiliation (based on the past Project Information) *help	2023 – 2024: 国立研究開発法人量子科学技術研究開発機構, 関西光量子科学研究所量子応用光学研究部, 主任研究員 2021 – 2022: 国立研究開発法人量子科学技術研究開発機構, 関西光科学研究所光量子科学研究部, 主任研究員 2019 – 2020: 国立研究開発法人量子科学技術研究開発機構, 関西光科学研究所光量子科学研究部, 主任研究員(定常) 2015: 宇都宮大学, オプティクス教育研究センター, 研究員
Review Section/Research Field	Principal Investigator Basic Section 80040:Quantum beam science-related / Basic Section 28030:Nanomaterials-related / Electron device/Electronic equipment Except Principal Investigator Basic Section 30020:Optical engineering and photon science-related
Keywords	Principal Investigator EUV高次高調波発生 / X線・EUV超微細加工 / 高強度レーザー駆動X線光源 / ナノ微細加工造形 / プラズマX線レーザー / 高強度レーザー / レーザー加工 / プラズマ軟X線レーザー / 超短パルスX線レーザー / 超微細加工 … More / リソグラフィー / 多価イオン / 重元素 / 炭酸ガスレーザー / 極端紫外光 … More Except Principal Investigator 構造観察 / アブレーション / レーザー干渉計 / 軟X線顕微鏡 / 軟X線レーザー Less

軟X線レーザー干渉顕微鏡の開発とアブレーションによる損傷形成過程の解明
- Principal Investigator
  
  石野雅彦
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 30020:Optical engineering and photon science-related
- Research Institution
  National Institutes for Quantum Science and Technology
Development of advanced plasma soft x-ray laser and next generation nano-processing technologyPrincipal Investigator
- Principal Investigator
  
  DINH THANH HUNG
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 80040:Quantum beam science-related
- Research Institution
  National Institutes for Quantum Science and Technology
Study on Next Generation of High Precision Processing Using Ultrashort Pulse X-ray LaserPrincipal Investigator
- Principal Investigator
  
  DINH THANH HUNG
- Project Period (FY)
  2019 – 2020
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 28030:Nanomaterials-related
- Research Institution
  National Institutes for Quantum and Radiological Science and Technology
次世代の半導体リソグラフィー露光用極端紫外光源のスペクトル制御と高効率化Principal Investigator
- Principal Investigator
  
  ヂンタンフン
- Project Period (FY)
  2015
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Utsunomiya University

All 2024 2023 2022 2021 2020 2019 2016 2015

All Journal Article Presentation Patent

[Journal Article] Ablation study using soft x-ray laser2024
- Author(s)
  Masahiko Ishino、Katsuhiro Mikami、Thanh-Hung Dinh、Masaharu Nishikino
- Journal Title
  
  Photonics Review
  
  Volume: 2024 Issue: 0 Pages: n/a
- DOI
  10.11470/photo.240202
- ISSN
  2758-0059
- Language
  English
- Open Access
- Data Source
  KAKENHI-PROJECT-21H03750
[Journal Article] Damage threshold of LiF crystal irradiated by femtosecond hard XFEL pulse sequence2023
- Author(s)
  S. Makarov, S.Grigoryev, N.Inogamov, E. Filippov, T. Pikuz, N.Ozaki, M.Ishino, M. Nishikino, Thanh-Hung Dinh, T. Kawachi, M. Zanaveskin, M. Makita, M. Nakatsutsumi, T. R. Preston, K. Appel, Z.Konopkova,
- Journal Title
  
  Optics Express
  
  Volume: 31 Issue: 16 Pages: 26383-26383
- DOI
  10.1364/oe.486868
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K18702, KAKENHI-PROJECT-21K03499, KAKENHI-PROJECT-22KF0243, KAKENHI-PROJECT-20H00139, KAKENHI-PROJECT-21H03750, KAKENHI-PROJECT-23K26577
[Journal Article] Spectral Shift and Split of Harmonic Lines in Propagation Affected High Harmonic Generation in a Long-Interaction Gas Tube2023
- Author(s)
  Seres Jozsef、Seres Enikoe、Serrat Carles、Dinh Thanh-Hung、Hasegawa Noboru、Ishino Masahiko、Nishikino Masaharu、Namba Shinichi
- Journal Title
  
  Atoms
  
  Volume: 11 Issue: 12 Pages: 150-150
- DOI
  10.3390/atoms11120150
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00141, KAKENHI-PROJECT-21H03750
[Journal Article] Induction heating for desorption of surface contamination for high-repetition laser-driven carbon-ion acceleration2023
- Author(s)
  Sadaoki Kojima, Tatsuhiko Miyatake, Hironao Sakaki, Hiroyoshi Kuroki, Yusuke Shimizu, Hisanori Harada, Norihiro Inoue, Thanh Hung Dinh, Masayasu Hata, Noboru Hasegawa, Michiaki Mori, Masahiko Ishino, Mamiko Nishiuchi, Kotaro Kondo, Masaharu Nishikino, Masaki Kando, Toshiyuki Shirai, Kiminori Kondo
- Journal Title
  
  Matter Radiat. Extremes
  
  Volume: 8 Issue: 5 Pages: 054002-054002
- DOI
  10.1063/5.0153578
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22K14021, KAKENHI-PROJECT-22KJ2402, KAKENHI-PROJECT-21H03750
[Journal Article] Sub-nanometer scale depth patterning on sapphire crystal by femtosecond soft x-ray laser pulse irradiation2023
- Author(s)
  Mikami Katsuhiro、Ishino Masahiko、Motoyama Hiroto、Dinh Thanh-Hung、Yokomae Shunya、Yamaguchi Gota、Egawa Satoru、Sakaue Kazuyuki、Mimura Hidekazu、Higashiguchi Takeshi、Kubota Yuya、Owada Shigeki、Iwasaki Atsushi、Inubushi Yuichi、Nishikino Masaharu
- Journal Title
  
  Optics Letters
  
  Volume: 48 Issue: 19 Pages: 5041-5044
- DOI
  10.1364/ol.501589
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21H03750, KAKENHI-PROJECT-23K26111, KAKENHI-PROJECT-23K26577
[Journal Article] 軟X線レーザーによるアブレーション研究2022
- Author(s)
  石野　雅彦, 三上　勝大, タンフン　ヂン, 錦野　将元
- Journal Title
  
  フォトニクスニュース
  
  Volume: 8 Pages: 83-87
- Data Source
  KAKENHI-PROJECT-21H03750
[Journal Article] Enhancement of Gain Coefficient of Li-Like Ion 3d-4f Soft X-ray Laser Oscillation by a Single Resonator2022
- Author(s)
  Namba Shinichi、Wang Jiahao、Ohiro Hikari、Zhang Jiawei、Kishimoto Maki、Yamasaki Kotaro、Hasegawa Noboru、Dinh Thanhhung、Ishino Masahiko、Higashiguchi Takeshi、Nishikino Masaharu
- Journal Title
  
  Atoms
  
  Volume: 10 Issue: 4 Pages: 128-128
- DOI
  10.3390/atoms10040128
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00141, KAKENHI-PROJECT-21H03750
[Journal Article] Nonlinear propagation effect in x-ray parametric amplification during high harmonic generation2022
- Author(s)
  Seres J.、Seres E.、Serrat C.、Dinh T. H.、Hasegawa N.、Ishino M.、Nishikino M.、Nakano K.、Namba S.
- Journal Title
  
  Journal of the Optical Society of America B
  
  Volume: 39 Issue: 4 Pages: 1263-1263
- DOI
  10.1364/josab.454902
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00141, KAKENHI-PROJECT-21H03750
[Journal Article] Independent contribution of optical attenuation length in ultrafast laser-induced structural change2021
- Author(s)
  Tatsunori Shibuya, Kazuyuki Sakaue, Hiroshi Ogawa, Daisuke Satoh, Thanh-Hung Dinh, Masahiko Ishino, Masahito Tanaka, Masakazu Washio, Takeshi Higashiguchi, Masaharu Nishikino, Akira Kon, Yuya Kubota, Yuichi Inubushi, Shigeki Owada, Yohei Kobayashi, and Ryunosuke Kuroda
- Journal Title
  
  Optics Express, pp. 33121-33133 (2021.9).
  
  Volume: Vol. 29(21) Issue: 21 Pages: 33121-33133
- DOI
  10.1364/oe.432130
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18H01233, KAKENHI-PROJECT-20H02157, KAKENHI-PROJECT-20K12494, KAKENHI-PROJECT-21H03750
[Journal Article] Study on Irradiation Effects by Femtosecond-pulsed Extreme Ultraviolet in Resist Materials2021
- Author(s)
  Hosaka Yuji、Yamamoto Hiroki、Ishino Masahiko、Dinh Thanh-Hung、Nishikino Masaharu、Kon Akira、Owada Shigeki、Inubushi Yuichi、Kubota Yuya、Maekawa Yasunari
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 34 Issue: 1 Pages: 95-98
- DOI
  10.2494/photopolymer.34.95
- NAID
  130008119663
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2021-06-11
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H02489, KAKENHI-PROJECT-21H03750
[Journal Article] Short pulse soft x-ray laser ablation research2021
- Author(s)
  Ishino Masahiko、Dinh Thanh-Hung、Mikami Katsuhiro、Hasegawa Noboru、Nishikino Masaharu
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 11886 Pages: 2-2
- DOI
  10.1117/12.2591909
- Open Access
- Data Source
  KAKENHI-PROJECT-21H03750
[Journal Article] Dependence of dose rate on the sensitivity of the resist under ultra-high flux extreme ultraviolet (EUV) pulse irradiation2021
- Author(s)
  Okamoto Kazumasa, Kawai Shunpei, Ikari Yuta, Hori Shigeo, Konda Akihiro, Ueno Koki, Arai Yohei, Ishino Masahiko, Thanhhung Dinh, Nishikino Masaharu, Kon Akira, Owada Shigeki, Inubushi Yuichi, Kinoshita Hiroo, Kozawa Takahiro
- Journal Title
  
  Applied Physics Express
  
  Volume: 14 Issue: 6 Pages: 066502-066502
- DOI
  10.35848/1882-0786/abfca3
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K15402, KAKENHI-PROJECT-19K05330, KAKENHI-PROJECT-18H03895, KAKENHI-PROJECT-21H03750
[Journal Article] Calibration of Mo/Si Multilayer Beam-splitter for Soft X-Ray Laser Beamline2021
- Author(s)
  Ishino Masahiko, Thanhhung Dinh, Hasegawa Noboru, Nishikino Masaharu, Sakaue Kazuyuki, Higashiguchi Takeshi, Hatano Tasashi
- Journal Title
  
  Photon Factory Activity Report 2020
  
  Volume: #38
- Open Access
- Data Source
  KAKENHI-PROJECT-21H03750
[Journal Article] Surface processing of PMMA and metal nano-particle resist by sub-micrometer focusing of coherent extreme ultraviolet high-order harmonics pulses2020
- Author(s)
  Sakaue Kazuyuki、Motoyama Hiroto、Hayashi Ryosuke、Iwasaki Atsushi、Mimura Hidekazu、Yamanouchi Kaoru、Shibuya Tatsunori、Ishino Masahiko、Dinh Thanh-Hung、Ogawa Hiroshi、Higashiguchi Takeshi、Nishikino Masaharu、Kuroda Ryunosuke
- Journal Title
  
  Optics Letters
  
  Volume: 45 Issue: 10 Pages: 2926-2926
- DOI
  10.1364/ol.392695
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K12494, KAKENHI-PROJECT-20H00371, KAKENHI-PROJECT-19K15402
[Journal Article] Laser-induced damage thresholds and mechanism of silica glass induced by ultra-short soft x-ray laser pulse irradiation2020
- Author(s)
  Mikami Katsuhiro、Ishino Masahiko、Dinh Thanh-Hung、Motokoshi Shinji、Hasegawa Noboru、Kon Akira、Inubushi Yuichi、Owada Shigeki、Kinoshita Hiroo、Nishikino Masaharu
- Journal Title
  
  Optics Letters
  
  Volume: 45 Issue: 8 Pages: 2435-2435
- DOI
  10.1364/ol.389288
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K15402
[Journal Article] Soft x-ray laser beamline for surface processing and damage studies2020
- Author(s)
  Ishino Masahiko、Dinh Thanh-Hung、Hosaka Yuji、Hasegawa Noboru、Yoshimura Kimio、Yamamoto Hiroki、Hatano Tadashi、Higashiguchi Takeshi、Sakaue Kazuyuki、Ichimaru Satoshi、Hatayama Masatoshi、Sasaki Akira、Washio Masakazu、Nishikino Masaharu、Maekawa Yasunari
- Journal Title
  
  Applied Optics
  
  Volume: 59 Issue: 12 Pages: 3692-3692
- DOI
  10.1364/ao.387792
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K15402
[Journal Article] Calibration of a CCD-Based Energy Monitor for High Power Soft x-ray Lasers2020
- Author(s)
  Thanh-Hung Dinh, Masahiko Ishino, Masaharu Nishikino, Takeshi Higashiguchi, Tadashi Hatano
- Journal Title
  
  Photon Factory Activity Report 2019
  
  Volume: 37
- Open Access
- Data Source
  KAKENHI-PROJECT-19K15402
[Journal Article] Ablation threshold and crater morphology of amorphous and crystalline SiO2 glass for extreme ultraviolet femtosecond pulses2020
- Author(s)
  Shibuya T.、Sakaue K.、Ogawa H.、Dinh T.-H.、Satoh D.、Terasawa E.、Washio M.、Tanaka M.、Higashiguchi T.、Ishino M.、Kubota Y.、Inubushi Y.、Owada S.、Nishikino M.、Kobayashi Y.、Kuroda R.
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 59 Issue: 12 Pages: 122004-122004
- DOI
  10.35848/1347-4065/abc85a
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K12494, KAKENHI-PROJECT-19K15402
[Journal Article] Parametric attosecond pulse amplification far from the ionization threshold from high order harmonic generation in He+2020
- Author(s)
  Serrat C.、Seres J.、Seres E.、Dinh T. H.、Hasegawa N.、Nishikino M.、Namba S.
- Journal Title
  
  Optics Express
  
  Volume: 28 Issue: 16 Pages: 24243-24243
- DOI
  10.1364/oe.398595
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00141, KAKENHI-PROJECT-19K15402
[Journal Article] Controlled strong excitation of silicon as a step towards processing materials at sub-nanometer precision2019
- Author(s)
  Dinh Thanh-Hung、Medvedev Nikita、Ishino Masahiko、Kitamura Toshiyuki、Hasegawa Noboru、Otobe Tomohito、Higashiguchi Takeshi、Sakaue Kazuyuki、Washio Masakazu、Hatano Tadashi、Kon Akira、Kubota Yuya、Inubushi Yuichi、Owada Shigeki、Shibuya Tatsunori、Ziaja Beata、Nishikino Masaharu
- Journal Title
  
  Communications Physics
  
  Volume: 2 Issue: 1 Pages: 1-9
- DOI
  10.1038/s42005-019-0253-2
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15402
[Journal Article] Sensitivity enhancement of poly(methyl methacrylate) upon exposure to picosecond-pulsed extreme ultraviolet2019
- Author(s)
  Hosaka Yuji、Oyama Tomoko Gowa、Yamamoto Hiroki、Ishino Masahiko、Dinh Thanh-Hung、Nishikino Masaharu、Maekawa Yasunari
- Journal Title
  
  Applied Physics Letters
  
  Volume: 115 Issue: 7 Pages: 073109-073109
- DOI
  10.1063/1.5116284
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18K18308, KAKENHI-PROJECT-19K15402
[Journal Article] Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses2016
- Author(s)
  Tao Wu, Takeshi Higashiguchi, Bowen Li, Goki Arai, Hiroyuki Hara, Yoshiki Kondo, Takanori Miyazaki, Thanh-Hung Dinh, Padraig Dunne, Fergal O’Reilly, Emma Sokell, and Gerry O’Sullivan
- Journal Title
  
  Journal of Physics B
  
  Volume: 49 Issue: 3 Pages: 035001-035001
- DOI
  10.1088/0953-4075/49/3/035001
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570, KAKENHI-PROJECT-15K18045
[Journal Article] Generation of radially polarized high energy mid-infrared optical vortex by use of a passive axially symmetric ZnSe waveplate2015
- Author(s)
  Toshitaka Wakayama, Hiroki Oikawa, Atsushi Sasanuma, Goki Arai, Yusuke Fujii, Thanh-Hung Dinh, Takeshi Higashiguchi, Kazuyuki Sakaue, Masakazu Washio, Taisuke Miura, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Motoki Yonemura and Yukitoshi Otani
- Journal Title
  
  Ａｐｐｌｉｅｄ　Ｐｈｙｓｉｃｓ　Ｌｅｔｔｅｒｓ
  
  Volume: 107 Issue: 8 Pages: 081112-081112
- DOI
  10.1063/1.4929686
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420205, KAKENHI-PROJECT-15H03570, KAKENHI-PROJECT-15K18045, KAKENHI-PROJECT-26286083
[Journal Article] Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source2015
- Author(s)
  Hiroyuki Hara, Goki Arai, Thanh-Hung Dinh, Weihua Jiang, Taisuke Miura, Akira Endo, Takeo Ejima, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Atsushi Sunahara, and Takeshi Higashiguchi
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 118 Issue: 19 Pages: 193301-193301
- DOI
  10.1063/1.4935817
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570, KAKENHI-PROJECT-25400539, KAKENHI-PROJECT-15K18045
[Journal Article] Analysis of extreme ultraviolet spectra from laser produced rhenium plasmas2015
- Author(s)
  Tao Wu, Takeshi Higashiguchi, Bowen Li, Yuhei Suzuki, Goki Arai, Thanh-Hung Dinh, Padraig Dunne, Fergal O’Reilly, Emma Sokell, Luning Liu, and Gerry O’Sullivan
- Journal Title
  
  Journal of Physics B
  
  Volume: 48 Issue: 16 Pages: 165005-165005
- DOI
  10.1088/0953-4075/48/16/165005
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570, KAKENHI-PROJECT-15K18045
[Journal Article] Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions2015
- Author(s)
  Thanh-Hung Dinh, Yuhei Suzuki, Goki Arai, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Shinsuke Fujioka, Noboru Hasegawa, Tetsuya Kawachi, Masaharu Nishikino, and Takeshi Higashiguchi
- Journal Title
  
  Applied Physics Letters
  
  Volume: 107 Issue: 12
- DOI
  10.1063/1.4931497
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570, KAKENHI-PROJECT-15K18045
[Patent] 表面造形方法及び表面造形装置2023
- Inventor(s)
  石野雅彦, ヂンタンフン, 錦野将元, 三上勝大
- Industrial Property Rights Holder
  量研
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2023-041379
- Filing Date
  2023
- Data Source
  KAKENHI-PROJECT-21H03750
[Patent] レジスト材料、レジストパターンの製造方法、及び、レジストパターン2022
- Inventor(s)
  吉村公男, タンフンヂン, 石野雅彦, 錦野将元...
- Industrial Property Rights Holder
  量研
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2022-067860
- Filing Date
  2022
- Data Source
  KAKENHI-PROJECT-21H03750
[Patent] 「表面造形方法」2019
- Inventor(s)
  石野雅彦, タンフンヂン, 錦野将元 et al.
- Industrial Property Rights Holder
  石野雅彦, タンフンヂン, 錦野将元 et al.
- Industrial Property Rights Type
  特許
- Filing Date
  2019
- Data Source
  KAKENHI-PROJECT-19K15402
[Presentation] Ultrafast laser-driven extreme-ultraviolet sources for applications to advanced nanolithography2024
- Author(s)
  Thanh-Hung Dinh, Shinichi Namba, Hiroki Yamamoto, Noboru Hasegawa, Masahiko Ishino, Masaharu Nishikino
- Organizer
  The 13th Advanced Lasers and Photon Sources
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Challenge of Using Ultrafast Short-wavelength Lasers in Advanced Nano-processing2024
- Author(s)
  Thanh-Hung Dinh
- Organizer
  SACLA Users’ Meeting 2024
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Development of a compact 100-TW-class laser for energetic quantum beam generation toward practical applications2023
- Author(s)
  Thanh-Hung Dinh
- Organizer
  The 18th International Conference on X-Ray Lasers
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] 超短パルス軟Ｘ線レーザーによる加工メカニズム2023
- Author(s)
  タンフン　ヂン
- Organizer
  日本光学会Ｘ線・ＥＵＶ結像光学研究グループ第2回研究会「2光子リソグラフィーの最前線」
- Invited
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Estimation of laser parameters for generating enough number of energetic heavy ions for applying as the injector of the next generation heavy ion synchrotron accelerator2023
- Author(s)
  Hata Masayasu, Kojima Sadaoki, Miyatake Tatsuhiko, Dinh Thanh-Hung, Kondo Kotaro, Hasegawa Noboru, Ishino Masahiko, Mori Michiaki, Sakaki Hironao, Nishiuchi Mamiko, Kon Akira, Nishikino Masaharu, Kando Masaki, Shirai Toshiyuki, Kondo Kiminori
- Organizer
  7th Asia-Pacific Conference on Plasma Physics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Research on micromachining using ultrashort pulses of ionizing radiation2023
- Author(s)
  Thanh-Hung Dinh
- Organizer
  レーザー学会学術講演会第43回年次大会
- Invited
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Soft x-ray laser ablation study and development of coherent x-ray sources for surface processing2023
- Author(s)
  Ishino Masahiko, Thanh-Hung Dinh
- Organizer
  The 18th International Conference on X-Ray Lasers
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Study on initial process of femtosecond soft x-ray laser ablation2023
- Author(s)
  Thanh-Hung Dinh, Masahiko Ishino, Noboru Hasegawa, Yoshiteru Yonetani, Masayasu Hata, Masaharu Nishikino
- Organizer
  The 12th Asia-Pacific Laser Symposium
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] 超短パルス軟X線レーザーによるアブレーション研究感光性樹脂材料の感度評価研究への応用2022
- Author(s)
  石野　雅彦, 保坂　勇志, タンフン　ヂン, 山本　洋揮
- Organizer
  第71回高分子討論会
- Invited
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Enhancement of high-order harmonics radiations around 13.5 nm by a long-interaction gas tube and its application to development of photoresist materials2022
- Author(s)
  Shinichi Namba, J. Seres, E. Seres, C. Serrat, Thanhhung Dinh, Hasegawa Noboru, Ishino Masahiko, Yamamoto Hiroki, Nishikino Masaharu, Kawachi Tetsuya
- Organizer
  6th Asia-Pacific Conference on Plasma Physics, Division of Plasma Physics, Association of Asia Pacific Physical Societies
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Recent Research activity for EUV Lithography at QST2022
- Author(s)
  Yamamoto Hiroki, Hosaka Yuji, Yoshimura Kimio, Ishino Masahiko, Thanh-Hung Dinh, Nishikino Masaharu, Maekawa Yasunari
- Organizer
  The 39th International Conference of Photopolymer Science and Technology 2022
- Invited
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Recent Research Activity for EUV lithography at QST2022
- Author(s)
  Yamamoto Hiroki, Hosaka Yuji, Yoshimura Kimio, Ishino Masahiko, Thanhhung Dinh, Nishikino Masaharu, Maekawa Yasunari
- Organizer
  RadTech Asia 2022 Japan
- Invited
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Material Processing by Ultrashort EUV Pulses: Fundamentals and Prospects2022
- Author(s)
  Thanhhung Dinh
- Organizer
  第96回レーザー加工学会講演会
- Invited
- Data Source
  KAKENHI-PROJECT-21H03750
[Presentation] Self-organization of nano-structures induced by an intense pulse of femtosecond EUV laser2021
- Author(s)
  Thanh-Hung Dinh, Masahiko Ishino, Yoshiteru Yonetani, Toshiki Kitamura, Noboru Hasegawa, Masaharu Nishikino
- Organizer
  研究会「光の軌道角運動量の発生機構と物質相互作用の理解」
- Data Source
  KAKENHI-PROJECT-19K15402
[Presentation] フェムト秒極端紫外線レーザーによる自己組織微細構造体の形成に関する研究2021
- Author(s)
  Thanh-Hung Dinh, Masahiko Ishino, Toshiki Kitamura, Yoshiteru Yonetani, Noboru Hasegawa, Masaharu Nishikino
- Organizer
  一般社団法人レーザー学会学術講演会第41回年次大会
- Data Source
  KAKENHI-PROJECT-19K15402
[Presentation] Formation of self-organized periodic nano-structures by an intense pulse of femtosecond EUV laser2020
- Author(s)
  Thanh-Hung Dinh, Masahiko Ishino, Yoshiteru Yonetani, Toshiki Kitamura, Noboru Hasegawa, Masaharu Nishikino
- Organizer
  International Conference on X-Ray Lasers 2020 (ICXRL 2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15402
[Presentation] Plasma-based X-ray Laser: Recent progress at the QST-KPSI2019
- Author(s)
  Dinh Thanh-Hung, Noboru Hasegawa, Isino Masahiko, Namba Shinichi, Masaharu Nishikino
- Organizer
  Eleventh International Conference on Inertial Fusion Sciences and Applications, Osaka
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15402
[Presentation] Highly precise material processing by ultrashort pulse soft x-ray laser2019
- Author(s)
  Dinh Thanh-Hung
- Organizer
  The 15th Symposium of Japanese Research Community on X-ray Imaging Optics，Sendai
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15402
[Presentation] Recent activities of ultra-high intensity laser-driven x-ray generation at KPSI Japan2019
- Author(s)
  Thanhhung Dinh, Michiaki Mori, Noboru Hasegawa, Masaharu Nishikino, Kiminori Kondo, Tetsuya Kawachi
- Organizer
  SPIE, Pragure
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15402
[Presentation] 短パルスCO2レーザーによるレーザー生成プラズマの高効率化2016
- Author(s)
  ヂンタンフン，笹沼淳史，天野玲保，荒居剛己，東口武史，三浦泰祐
- Organizer
  次世代レーザー技術とEUV・軟X線光源に関する研究会
- Place of Presentation
  ZAOセンタープラザ（山形県山形市）
- Year and Date
  2016-01-24
- Data Source
  KAKENHI-PROJECT-15K18045
[Presentation] レーザー生成多価イオンプラズマ軟X線光源のスペクトル較正2016
- Author(s)
  ヂンタンフン，近藤芳希，田村賢紀，小野祐一，荒居剛己，原広行，大田茂，北野謙，江島丈雄，羽多野忠，東口武史
- Organizer
  次世代レーザー技術とEUV・軟X線光源に関する研究会
- Place of Presentation
  ZAOセンタープラザ（山形県山形市）
- Year and Date
  2016-01-24
- Data Source
  KAKENHI-PROJECT-15K18045
[Presentation] Development of Nanosecond Pulse CO2 Laser for Efficient Extreme Ultraviolet Generation2015
- Author(s)
  Reiho Amano, Thanh Hung Dinh, Atsushi Sasanuma, Goki Arai, Yusuke Fujii, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Taisuke Miura, Akira Endo, Tomas Mocek, and Takeshi Higashiguchi
- Organizer
  The 4th Advanced Lasers and Photon Sources (ALPS’15)
- Place of Presentation
  Conference Center, PACIFICO Yokohama, Yokohama Japan
- Year and Date
  2015-04-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K18045
[Presentation] Spectral and temporal behavior of multiply ionized high-Z plasmas in the water window soft x-ray spectral region2015
- Author(s)
  T. H. Dinh, Y. Suzuki, G. Arai, M. Nishikino, N. Hasegawa, T. Kawachi, P. Dunne, G. O’Sullivan, and T. Higashiguchi
- Organizer
  2015 IEEE Photonics Conference, 28th Annual Conference of The IEEE Photonics Society
- Place of Presentation
  Hyatt Regency Reston, Reston, Virginia USA
- Year and Date
  2015-10-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K18045
[Presentation] An efficient 6.x nm extreme ultraviolet source produced by a short pulse CO2 laser2015
- Author(s)
  T. H. Dinh, R. Amano, A. Sasanuma, G. Arai, Y. Fujii, A. Takahashi, D. Nakamura, T. Okada, T. Makimura, T. Miura, A. Endo, T. Mocek, P. Dunne, G. O’Sullivan, and T. Higashiguchi
- Organizer
  The 7th Asian Workshop on Generation and Application of Coherent XUV and X-ray Radiation (7th AWCXR)
- Place of Presentation
  the Center for Relativistic Laser Science of Institute for Basic Science, Gwangju Institute of Science and Technology, Gwangju, Korea
- Year and Date
  2015-08-31
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K18045
[Presentation] Unresolved transition arrays from laser-produced high-Z plasmas for microscopy in the water window soft x-ray region2015
- Author(s)
  Thanh-Hung Dinh, Yoshiki Kondo, Goki Arai, Taisuke Miura, Akira Endo, Tetsuya Makimura, Padraig Dunne, Gerry O’Sullivan, Tadashi Hatano, Takeio Eijima, and Takeshi Higashiguchi
- Organizer
  The 13th Symposium on X-ray Imaging Optics
- Place of Presentation
  Noyori Conference Hall, Nagoya University (Higashiyama campus), Nagoya, Japan
- Year and Date
  2015-11-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K18045
[Presentation] Multiply charged ion plasma sources for compact x-ray microscopy in the water window spectral region2015
- Author(s)
  T. H. Dinh, Y. Kondo, G. Arai, T. Miura, A. Endo, T. Makimura, P. Dunne, G. O’Sullivan, T. Hatano, T. Ejima, and T. Higashiguchi
- Organizer
  SPIE/OSJ Biophotonics Japan 2015
- Place of Presentation
  Univesity of Tsukuba (Tokyo campus), Tokyo, Japan
- Year and Date
  2015-10-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K18045
[Presentation] Development of a compact water window soft x-ray source based on multiply charged ion plasmas2015
- Author(s)
  Thanh-Hung Dinh, Yoshiki Kondo, Goki Arai, Taisuke Miura, Akira Endo, Tetsuya Makimura, Tadashi Hatano, Takeo Ejima, Takeshi Higashiguchi
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場 (愛知県名古屋市)
- Year and Date
  2015-09-16
- Data Source
  KAKENHI-PROJECT-15K18045
[Presentation] Development of a 10-Hz short pulse CO2 laser for short wavelength light sources2015
- Author(s)
  Reiho Amano, Atsushi Sasanuma, Thanh-Hung Dinh, Goki Arai, Yusuke Fujii, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Tetsuya Makimura, Taisuke Miura, Akira Endo, Tomas Mocek, Padraig Dunne, Gerry O’Sullivan, and Takeshi Higashiguchi
- Organizer
  SPIE/OSJ Biophotonics Japan 2015
- Place of Presentation
  Univesity of Tsukuba (Tokyo campus), Tokyo, Japan
- Year and Date
  2015-10-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K18045

1. 長谷川登 (50360409)

# of Collaborated Projects: 2 results

# of Collaborated Products: 6 results
2. 石野雅彦 (80360410)

# of Collaborated Projects: 2 results

# of Collaborated Products: 12 results
3. 錦野将元 (70370450)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
4. 米谷佳晃 (80399419)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
5. 畑昌育 (60712429)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
6. 豊田光紀 (40375168)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. SAKAUE Kazuyuki

# of Collaborated Projects: 0 results

# of Collaborated Products: 3 results
8. WASHIO Masakazu

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
9. WAKAYAMA Toshitaka

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
10. OZAKI Norimasa

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
11. KISHIMOTO Maki

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
12. 東口武史

# of Collaborated Projects: 0 results

# of Collaborated Products: 6 results
13. 難波愼一

# of Collaborated Projects: 0 results

# of Collaborated Products: 4 results
14. 保坂勇志

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
15. 小島完興

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

DINH THANH HUNG ヂン タンフン

ヂン タンフン ヂン タンフン

Research Projects

Research Products

Co-Researchers

軟X線レーザー干渉顕微鏡の開発とアブレーションによる損傷形成過程の解明

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Development of advanced plasma soft x-ray laser and next generation nano-processing technologyPrincipal Investigator

Principal Investigator

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Study on Next Generation of High Precision Processing Using Ultrashort Pulse X-ray LaserPrincipal Investigator

Principal Investigator

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次世代の半導体リソグラフィー露光用極端紫外光源のスペクトル制御と高効率化Principal Investigator

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[Journal Article] Ablation study using soft x-ray laser2024

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[Journal Article] Damage threshold of LiF crystal irradiated by femtosecond hard XFEL pulse sequence2023

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[Journal Article] Spectral Shift and Split of Harmonic Lines in Propagation Affected High Harmonic Generation in a Long-Interaction Gas Tube2023

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[Journal Article] Induction heating for desorption of surface contamination for high-repetition laser-driven carbon-ion acceleration2023

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[Journal Article] Sub-nanometer scale depth patterning on sapphire crystal by femtosecond soft x-ray laser pulse irradiation2023

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[Journal Article] 軟X線レーザーによるアブレーション研究2022

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[Journal Article] Enhancement of Gain Coefficient of Li-Like Ion 3d-4f Soft X-ray Laser Oscillation by a Single Resonator2022

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[Journal Article] Nonlinear propagation effect in x-ray parametric amplification during high harmonic generation2022

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[Journal Article] Independent contribution of optical attenuation length in ultrafast laser-induced structural change2021

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[Journal Article] Study on Irradiation Effects by Femtosecond-pulsed Extreme Ultraviolet in Resist Materials2021

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DINH THANH HUNG ヂンタンフン

ヂンタンフンヂンタンフン