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ITOH Kazuo  伊藤 和男

ORCIDConnect your ORCID iD *help
Researcher Number 30106900
Other IDs
Affiliation (based on the past Project Information) *help 2001 – 2002: 群馬大学, 工学部, 助教授
1986: Faculty of Technology, Gunma University (Research Associate), 工学部, 助手
Review Section/Research Field
Principal Investigator
電子デバイス・機器工学
Except Principal Investigator
Applied materials
Keywords
Principal Investigator
Electron Beam Lithography / Reactive Ion Etching / 3-dimensional Structures / Expanded Pattern Transfer / パターン転写 / 形状転写 / 電子線リソグラフィ / 反応性イオンエッチング / 三次元形状 / 形状の増幅転写 … More
Except Principal Investigator
… More molecular beam evaporation / metallic superlattice / non-epitaxy / epitaxial deposition / ultra-high vacuum / superlattice film / アンダーソン局在 / 微少ギャップ半導体 / 半金属 / 分子線蒸着 / 金属超格子 / ノンエピタキシィ / エピタキシャル蒸着 / 超高眞空 / 超格子膜 Less
  • Research Projects

    (2 results)
  • Co-Researchers

    (2 People)
  •  Pattern Transfer of 3-dimensional Fine Structures to the Si Substrate with expanding the Vertical Dimensions Using the Reactive Ion EtchingPrincipal Investigator

    • Principal Investigator
      ITOH Kazuo
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      電子デバイス・機器工学
    • Research Institution
      Gunma University
  •  Exploring of New Properties of Non-Epitaxial Metallic Superlattices and Development of High Conductivity Superlattice Films

    • Principal Investigator
      TANUMA Sei-ichi
    • Project Period (FY)
      1984 – 1986
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      Applied materials
    • Research Institution
      Faculty of Technology, Gunma University
  • 1.  SASAKI Yoshisato (30008445)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 2.  TANUMA Sei-ichi (70013448)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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