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CHANG WENHSIN  張 文馨

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張 文馨  チャン ウェンシン

Chang Wen Hsin  張 文馨

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Researcher Number 30796834
Other IDs
Affiliation (Current) 2026: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 上級主任研究員
Affiliation (based on the past Project Information) *help 2026: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員
2023 – 2024: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員
2019 – 2020: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究員
Review Section/Research Field
Principal Investigator
Basic Section 21060:Electron device and electronic equipment-related
Keywords
Principal Investigator
Ge / 接触抵抗 / GeOI (111) / Sb2Te3 / コンタクト抵抗 / GeOI / vdW接合 / Bi2Te3 / 三次元集積 / MOS … More / トランジスタ / 界面準位 / 半導体 / 半導体プロセス / HI / プラズマ / 原子層エッチング Less
  • Research Projects

    (3 results)
  • Research Products

    (6 results)
  • Co-Researchers

    (1 People)
  •  ドーピング技術と自己形成終端現象の融合によるGe n-FETの高性能化技術Principal Investigator

    • Principal Investigator
      張 文馨
    • Project Period (FY)
      2026 – 2028
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 21060:Electron device and electronic equipment-related
    • Research Institution
      National Institute of Advanced Industrial Science and Technology
  •  Precise Control of Ge Nanosheet Channel Structure and Investigation of Carrier Transport through vdW ContactsPrincipal Investigator

    • Principal Investigator
      張 文馨
    • Project Period (FY)
      2024 – 2025
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 21060:Electron device and electronic equipment-related
    • Research Institution
      National Institute of Advanced Industrial Science and Technology
  •  Development of low temperature Ge atomic layer etching for 3D integrationPrincipal Investigator

    • Principal Investigator
      Chang Wen Hsin
    • Project Period (FY)
      2019 – 2020
    • Research Category
      Grant-in-Aid for Early-Career Scientists
    • Review Section
      Basic Section 21060:Electron device and electronic equipment-related
    • Research Institution
      National Institute of Advanced Industrial Science and Technology

All 2025 2024 2020

All Journal Article Presentation Patent

  • [Journal Article] Performance and reliability improvement in Ge(100) nMOSFETs through channel flattening process2020

    • Author(s)
      W. H. Chang, T. Irisawa, W. Mizubayashi, H. Ishii, and T. Maeda
    • Journal Title

      Solid-State Electronics

      Volume: 169 Pages: 107816-107816

    • DOI

      10.1016/j.sse.2020.107816

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19K15053, KAKENHI-PROJECT-17H06148
  • [Patent] 積層構造及びその製造方法、半導体装置2024

    • Inventor(s)
      張文馨、畑山祥吾、 岡田直也、入沢寿史、齊藤雄太
    • Industrial Property Rights Holder
      国立研究開発法人産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2024-115146
    • Filing Date
      2024
    • Data Source
      KAKENHI-PROJECT-23K26168
  • [Presentation] Bi2Te3/Ge van der Waals Heterostructure for unpinning Fermi-level of n-Ge2025

    • Author(s)
      Wen Hsin Chang, Shogo Hatayama, Naoya Okada, Toshifumi Irisawa, and Yuta Saito
    • Organizer
      2025 MRS Spring Meeting & Exhibit
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K26168
  • [Presentation] Bi2Te3/Ge 擬似vdW接合によるn-Geへのオーミックコンタクト形成2024

    • Author(s)
      張文馨、畑山祥吾、 岡田直也、入沢寿史、齊藤雄太
    • Organizer
      2024秋応用物理学会
    • Data Source
      KAKENHI-PROJECT-23K26168
  • [Presentation] Te-based layered materials for Fermi-level Depinning on n-Ge2024

    • Author(s)
      Wen Hsin Chang, Shogo Hatayama, Naoya Okada, Toshifumi Irisawa, and Yuta Saito
    • Organizer
      2025 International Conference on Solid State Devices and Materials (SSDM)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K26168
  • [Presentation] HIプラズマ処理によるGe MOS界面特性の改善2020

    • Author(s)
      張文馨、入沢寿史、石井裕之、前田辰郎
    • Organizer
      2020秋応用物理学会
    • Data Source
      KAKENHI-PROJECT-19K15053
  • 1.  齊藤 雄太 (50738052)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results

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