Fujiwara Hirokazu 藤原弘和

Researcher Number	30974886
Other IDs	https://orcid.org/0000-0002-8113-6000
Affiliation (Current)	2026: 東京大学, 大学院新領域創成科学研究科, 特任助教
Affiliation (based on the past Project Information) *help	2023 – 2024: 東京大学, 大学院新領域創成科学研究科, 特任助教
Review Section/Research Field	Principal Investigator Basic Section 21050:Electric and electronic materials-related
Keywords	Principal Investigator 酸化物デバイス / ハフニア系強誘電体 / オペランド観察 / レーザー / オペランド / 光電子顕微鏡 / 半導体デバイス / 強誘電体デバイス

Research Projects
(1 results)
Research Products
(14 results)

Characteristic modulation process of oxide devices visualized by nondestructive operando nano imagingPrincipal Investigator
- Principal Investigator
  
  Fujiwara Hirokazu
- Project Period (FY)
  2023 – 2024
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 21050:Electric and electronic materials-related
- Research Institution
  The University of Tokyo

All 2025 2024 2023

All Journal Article Presentation

[Journal Article] 半導体製造における新しい不良検査~歩留工場，プロセス短縮に向けて~2025
- Author(s)
  藤原弘和
- Journal Title
  
  車載テクノロジー
  
  Volume: 12 Pages: 59-64
- Data Source
  KAKENHI-PROJECT-23K13363
[Journal Article] Dielectric breakdown behavior of ferroelectric HfO2 capacitors by constant voltage stress studied by in situ laser-based photoemission electron microscopy2024
- Author(s)
  Yuki Itoya, Hirokazu Fujiwara, Cedric Bareille, Shik Shin, Toshiyuki Taniuchi, Masaharu Kobayashi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 63 Issue: 2 Pages: 020903-020903
- DOI
  10.35848/1347-4065/ad1e84
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K13363, KAKENHI-PROJECT-21H04549
[Journal Article] Nondestructive imaging of breakdown process in ferroelectric capacitors using in situ laser-based photoemission electron microscopy2023
- Author(s)
  Hirokazu Fujiwara,Yuki Itoya, Masaharu Kobayashi, Cedric Bareille, Shik Shin, Toshiyuki Taniuchi
- Journal Title
  
  Applied Physics Letters
  
  Volume: 123 Issue: 17 Pages: 173501-173501
- DOI
  10.1063/5.0162484
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K13363, KAKENHI-PROJECT-21H04549
[Presentation] レーザー励起光電子顕微鏡で可視化したフォトレジスト上の潜像と電場分布2025
- Author(s)
  藤原弘和, Cedric Bareille, 大川万里生, 谷内敏之
- Organizer
  第72回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K13363
[Presentation] 上部電極越しに観察した HfO2 系強誘電体の分極コントラスト: レーザー励起光電子顕微鏡2024
- Author(s)
  藤原弘和、糸谷祐喜、小林正治、Bareille Cedric、辛埴、谷内敏之
- Organizer
  第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K13363
[Presentation] In situ nondestructive spectromicroscopic analysis of dielectric breakdown in HfO2-based ferroelectric capacitors by laser-based photoemission electron microscope2024
- Author(s)
  Hirokazu Fujiwara, Yuki Itoya, Masaharu Kobayashi, Cedric Bareille, Shik Shin, Toshiyuki Taniuchi
- Organizer
  The 66th Electronic Materials Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K13363
[Presentation] Ferroelectric polarization contrast observed through the top electrode of InZnOx/Hf0.5Zr0.5O2/TiN capacitors2024
- Author(s)
  Hirokazu Fujiwara, Yuki Itoya, Masaharu Kobayashi, Cedric Bareille, Shik Shin, Toshiyuki Taniuchi
- Organizer
  LEEM-PEEM13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K13363
[Presentation] レーザー励起光電子顕微鏡による電子線レジストの高速潜像イメージング2024
- Author(s)
  藤原弘和, Cedric Bareille, 大川万里生, 谷内敏之
- Organizer
  第85回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K13363
[Presentation] Nondestructive imaging of CMOS process compatible HfO2-based ferroelectric devices: Laser-based PEEM2024
- Author(s)
  Hirokazu Fujiwara
- Organizer
  15th International Symposium on Atomic Level Characterizations for New Materials and Devices '24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K13363
[Presentation] Laser-Based Photoemission Electron Microscopy as a Nondestructive Imaging Tool for Ferroelectric Devices2024
- Author(s)
  Hirokazu Fujiwara
- Organizer
  2024 International Conference on Solid State Devices and Materials
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K13363
[Presentation] Laser-based photoemission electron microscopy as a nondestructive imaging tool for ferroelectric devices2024
- Author(s)
  Hirokazu Fujiwara
- Organizer
  2024 International Conference on Solid State Devices and Materials
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K13363
[Presentation] レーザー励起光電子顕微鏡を用いた HfO2 系強誘電体の強誘電ドメイン及びその温度変化の観察2023
- Author(s)
  糸谷祐喜、藤原弘和、Bareille Cedric、辛埴、谷内敏之、小林正治
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K13363
[Presentation] HfO2系強誘電体膜の絶縁破壊箇所の電子状態: レーザー励起光電子顕微鏡2023
- Author(s)
  藤原弘和、糸谷祐喜、小林正治、Bareille Cedric、辛埴、谷内敏之
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K13363
[Presentation] オペランドレーザー励起光電子顕微鏡による強誘電体キャパシタの非破壊イメージングの開拓2023
- Author(s)
  藤原弘和、糸谷祐喜、小林正治、Bareille Cedric、辛埴、谷内敏之
- Organizer
  シリコン材料・デバイス研究会
- Invited
- Data Source
  KAKENHI-PROJECT-23K13363

Fujiwara Hirokazu 藤原 弘和

Research Projects

Research Products

Characteristic modulation process of oxide devices visualized by nondestructive operando nano imagingPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Journal Article] 半導体製造における新しい不良検査~歩留工場，プロセス短縮に向けて~2025

Author(s)

Journal Title

Data Source

[Journal Article] Dielectric breakdown behavior of ferroelectric HfO2 capacitors by constant voltage stress studied by in situ laser-based photoemission electron microscopy2024

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Nondestructive imaging of breakdown process in ferroelectric capacitors using in situ laser-based photoemission electron microscopy2023

Author(s)

Journal Title

DOI

Data Source

[Presentation] レーザー励起光電子顕微鏡で可視化したフォトレジスト上の潜像と電場分布2025

Author(s)

Organizer

Data Source

[Presentation] 上部電極越しに観察した HfO2 系強誘電体の分極コントラスト: レーザー励起光電子顕微鏡2024

Author(s)

Organizer

Data Source

[Presentation] In situ nondestructive spectromicroscopic analysis of dielectric breakdown in HfO2-based ferroelectric capacitors by laser-based photoemission electron microscope2024

Author(s)

Organizer

Data Source

[Presentation] Ferroelectric polarization contrast observed through the top electrode of InZnOx/Hf0.5Zr0.5O2/TiN capacitors2024

Author(s)

Organizer

Data Source

[Presentation] レーザー励起光電子顕微鏡による電子線レジストの高速潜像イメージング2024

Author(s)

Organizer

Data Source

[Presentation] Nondestructive imaging of CMOS process compatible HfO2-based ferroelectric devices: Laser-based PEEM2024

Author(s)

Organizer

Data Source

[Presentation] Laser-Based Photoemission Electron Microscopy as a Nondestructive Imaging Tool for Ferroelectric Devices2024

Author(s)

Organizer

Data Source

[Presentation] Laser-based photoemission electron microscopy as a nondestructive imaging tool for ferroelectric devices2024

Author(s)

Organizer

Data Source

[Presentation] レーザー励起光電子顕微鏡を用いた HfO2 系強誘電体の 強誘電ドメイン及びその温度変化の観察2023

Author(s)

Organizer

Data Source

[Presentation] HfO2系強誘電体膜の絶縁破壊箇所の電子状態: レーザー励起光電子顕微鏡2023

Author(s)

Organizer

Data Source

[Presentation] オペランドレーザー励起光電子顕微鏡による強誘電体キャパシタの非破壊イメージングの開拓2023

Author(s)

Organizer

Data Source

Fujiwara Hirokazu 藤原弘和

[Presentation] レーザー励起光電子顕微鏡を用いた HfO2 系強誘電体の強誘電ドメイン及びその温度変化の観察2023