YAMAGUCHI Tomuo 山口十六夫

… Alternative Names

山口十六夫

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Researcher Number	40010938
Other IDs
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Affiliation (based on the past Project Information) *help	1995 – 2006: 静岡大学, 電子工学研究所, 教授 1999: Shizuoka University, Professor, 教授 1988: 静岡大学, 電子工学研究所, 助教授
Review Section/Research Field	Principal Investigator Applied optics/Quantum optical engineering / Applied optics/Quantum optical engineering Except Principal Investigator Applied materials science/Crystal engineering / Inorganic materials/Physical properties / Inorganic materials/Physical properties / 電子材料工学 / Applied materials
Keywords	Principal Investigator 分光エリプソメトリ / scatterometry / magneto-optics / periodic wire / rectangular array / optical mesurement / lithography / periodic nano-structure / spectroellipsometry / 周期的矩形溝構造 … More / インコヒーレント / 磁気光学分光 / 断面構造 / 周期的幾何学構造 / 光散乱分光 / ellipsometry / anisotropic nanostructures / magneto optics / nanostructure / spectroscopic ellipsometry / 磁気光学 / 周期的Taワイアー / 矩形溝構造 / 光計測 / リソグラフィ / 周期的ナノ構造 / スキャッタロメトリ / empirical dielectric constants / RF sputtering / substrate temperature monitoring / in-situ monitoring of film growth / Spectroscopic ellipsometry / a-SiNX / Single tone phase shifting mask / Super resolution masks / DUV Lithography / Al_<1-X>Cr_XO_Y / 位相反転マスク / a-SiN_X / 経験的誘電率関数 / RFスパッタリング / 基板温度監視 / 堆積過程モニタリング / a-SiNx / 単層ハーフトーン位相シフトマスク / 超解像マスク / 極端紫外光リソグラフィ / サイズ効果 / アモルファスSiC / 硫黄不活性化層 / 誘電関数 / 光学定数 / SIMOX / アモルファスSi … More Except Principal Investigator SiC / 化合物半導体 / エリプソメトリ / camphor / surface / silicon carbide / nanotube / carbon / carbon nanotube / 表面 / 炭化ケイ素 / ナノチューブ / カーボン / カーボンナノチューブ / 数値解析 / ガリウムアンチモン / cllipsometry / ellipsometry / 気体吸蔵 / 電界放出 / numerical simulation / drop experiment / uni-directional solidification / InGaSb / InSb / GaSb / compound semiconductor / microgravity / 重力変動 / インディウムガリウムアンチモン / 航空機実験 / 落下塔実験 / 一方向凝固法 / インディウムガリウムアンチモン / インディウムアンチモン / ガリウムアンチモン / 微小重力環境 / Simulation / Orientation dependence / Solid-liquid interface / Gravitational segregation / Indium Antimonide / Gallium Antimonide / Compound semiconductor / Microgravity / インデイウムアンチモン / 微小重力実験 / 面方位依存性 / 固液界面形状 / 重力偏析 / インジウムアンチモン / 微小動実験 / Crystal Growth / Compound Semiconductor / Infrared Material / InGaAsSb / 四元化合物半導体 / 結晶成長 / 赤外光デバイス材料 / 消光法 / 4ゾーン測定 / 透明電極 / 炭化シリコン / 窒化シリコン / 非晶質シリコン / プラズマプロセス / 超格子構造 / マグネトロンスパッタ法 / アモルファス半導体多層薄膜 Less

Spectro-ellipsometric Analysis of Periodically Structured SamplesPrincipal Investigator
- Principal Investigator
  
  YAMAGUCHI Tomuo
- Project Period (FY)
  2003 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Shizuoka University
Fabrication of highly oriented carbon-nanotube films and its application to an emitter with high efficiency
- Principal Investigator
  
  MATSUMOTO Koichi
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Inorganic materials/Physical properties
- Research Institution
  Shizuoka University
Fabrication of highly oriented carbon-nanotube films and its application to an emitter with high efficiency
- Principal Investigator
  
  MATSUMOTO Koichi
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Inorganic materials/Physical properties
- Research Institution
  Shizuoka University
Dissolution and Growth of InGaSb Ternary Semiconductor under Microgravity
- Principal Investigator
  
  KUMAGAWA Masashi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Shizuoka University
Crystal Growth of InGaSb Semiconductors under Microgravity
- Principal Investigator
  
  KUMAGAWA Masashi
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for international Scientific Research
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Shizuoka University
Optimum design and evaluation by spectroscopic ellipsometry of optical thin films for DUV lithographyPrincipal Investigator
- Principal Investigator
  
  YAMAGUCHI Tomuo
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Shizuoka University
分光エリプソメトリ解析方法の開発と応用Principal Investigator
- Principal Investigator
  
  山口十六夫
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Shizuoka University
Crystal Growth of InGaAsSb Compound Semiconductors for Infrared Devices
- Principal Investigator
  
  KUMAGAWA Masashi
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Shizuoka University
多元スパッタ法による4配位系アモルファス半導体多層薄膜の作製
- Principal Investigator
  
  斎藤順雄
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Applied materials
- Research Institution
  Shizuoka University
プラズマによる薄膜堆積初期過程の「その場」計測
- Principal Investigator
  
  畑中義式
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  電子材料工学
- Research Institution
  Shizuoka University

All 2007 2006 2005 2004

All Journal Article

[Journal Article] Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy2007
- Author(s)
  R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
- Journal Title
  
  Opt. Express 13
  
  Pages: 4651-4656
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Magneto-optical spectroscopic scatterometry for analyzing patterned magnetic nanostructures2006
- Author(s)
  R.Antos, J.Mistrik, T.Yamaguchi, M.Veis, E.Liskova, S.Visnovsky, J.Pistora, B.Hillebrands, S.O.Demokritov, T.Kimura, Y.Otani
- Journal Title
  
  J. Magn. Soc. Jpn. 30,6-2
  
  Pages: 630-636
- NAID
  110004857412
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Total reflection ellipsometry of lamellar gratings2006
- Author(s)
  J.Pistora, J.Vlcek, K.Watanabe, K.Postava, S.Visnovsky, R.Antos, T.Yamaguchi
- Journal Title
  
  International Journal of Microwave and Optical Technology 1,2
  
  Pages: 910-913
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Magneto-optical polar Kerr effect spectroscopy on 2D-periodic subwavelength arrays of magnetic dots2006
- Author(s)
  R.Antos, S.Visnovsky, J.Mistrik, T.Yamaguchi
- Journal Title
  
  International J. of Microwave and Opt. Technol. 1・2
  
  Pages: 905-909
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Optics of anisotropic nanostructures2006
- Author(s)
  K.Rokushima, R.Antos, J.Mistrik, S.Visnovsky, T.Yamaguchi
- Journal Title
  
  Czech. J. Phys. 56・7
  
  Pages: 665-764
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Total reflection ellipsometry of lamellar gratings2006
- Author(s)
  J.Pistora, J.Vlcek, K.Watanabe, K.Postava, S.Visnovsky, R.Antos, T.Yamaguchi
- Journal Title
  
  Intern. J. of Microwave and Opt. Technol.(757)(11) 1・2
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Optics of anisotropic nanostructures2006
- Author(s)
  K.Rokushima, R.Antos, J.Mistrik, S.Visnovsky, T.Yamaguchi
- Journal Title
  
  Czech. J. Phys.(760)(9) 56・7
  
  Pages: 665-764
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Characterization of permalloy wires by optical and magneto-optical spectroscopy2006
- Author(s)
  R.Antos, J.Mistrik, S.Visnovsky, M.Aoyama, T.Yamaguchi, B.Hillebrands
- Journal Title
  
  Trans. Magn. Soc. Japan 4
  
  Pages: 282-285
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Magneto-optical polar Kerr effect spectroscopy on 2D-periodic subwavelength arrays of magnetic dots2006
- Author(s)
  R.Antos, S.Visnovsky, J.Mistrik, T.Yamaguchi
- Journal Title
  
  International Journal of Microwave and Optical Technology 1,2
  
  Pages: 905-909
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Magneto-optical spectroscopic scatterometry for analyzing patterned magnetic nanostructures2006
- Author(s)
  R.Antos, J.Mistrik, T.Yamaguchi, M.Veis, E.Liskova, S.Visnovsky, J.Pistora, B.Hillebrands, S.O.Demokritov, T.Kimura, Y.Otani
- Journal Title
  
  J. Magn. Soc. Japan 30・6-2
  
  Pages: 630-636
- NAID
  110004857412
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Spectroscopic ellipsometry : its accuracy and potentiality2006
- Author(s)
  J.Mistrik, T.Yamaguchi, R.Antos, Z.-T.Jiang, I.Ohlidal, M.Aoyama
- Journal Title
  
  International J. of Microwave and Opt. Technol. 1・2
  
  Pages: 523-527
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Optics of anisotropic nanostructures2006
- Author(s)
  K.Rokushima, R.Antos, J.Mistrik, S.Visnovsky, T.Yamaguchi
- Journal Title
  
  Czech. J. Phys 56,7
  
  Pages: 665-764
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Convergence properties of critical dimension measurementsby spectroscopic ellipsometry on gratings made of various materials2006
- Author(s)
  R.Antos, J.Pistora, J.Mistrik, T.Yamaguchi, S.Yamaguchi., M.Horie, S.Visnovsky, Y.Otani
- Journal Title
  
  J. Appl. Phys.(754)(12) 100
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials2006
- Author(s)
  R.Antos, J.Pistora, J.Mistrik, T.Yamaguchi, S.Yamaguchi, M.Horie, S.Visnovsky, Y.Otani
- Journal Title
  
  J. Appl. Phys. 100
  
  Pages: 54906-54906
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Magneto-optical spectroscopic scatterometry for analyzing patterned magnetic nanostructures2006
- Author(s)
  R.Antos, J.Mistrik, T.Yamaguchi, M.Veis, E.Liskova, S.Visnovsky, J.Pistora, B.Hillebrands, S.O.Demokritov, T.Kimura, Y.Otani
- Journal Title
  
  J. Magn. Soc. Japan(756)(13) 30・6-2
  
  Pages: 630-636
- NAID
  110004857412
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Magneto-optical polar Kerr effect spectroscopy on 2D-periodic subwavelength arrays of magnetic dots2006
- Author(s)
  R.Antos, S.Visnovsky, J.Mistrik, T.Yamaguchi
- Journal Title
  
  Intern. J. of Microwave and Opt. Technol.(759)(10) 1・2
  
  Pages: 905-909
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Spectroscopic ellipsometry on sinusoidal surface-relief gratings2005
- Author(s)
  R.Antos, I.Ohlidal, D.Franta, P.Klapetek, J.Mistrik, T.Yamaguchi, S.Visnovsky
- Journal Title
  
  Appl. Surf. Sci. 244,1-244,4
  
  Pages: 221-224
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Generalized scatterometry of laterally patterned periodic nanostructures based on spectroscopic ellipsometry2005
- Author(s)
  R.Antos, J.Mistrik, M.Aoyama, S.Visnovsky, Yamaguchi
- Journal Title
  
  ISSN 0388-5070 (Reports of the Graduate School of Electronic Science and Technology, Shizuoka University) 26
  
  Pages: 55-61
- NAID
  40006997285
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry2005
- Author(s)
  R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.Yamaguchi, M.Horie
- Journal Title
  
  Proc. SPIE (Jena, 12-16 Sept. 2005)(772)(3) 5965(国際会議プロシーディングス)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate2005
- Author(s)
  R.Antos, J.Pistora, I.Ohlidal, K.Postava, J.Mistrik, T.Yamaguchi, S.Visnovsky, M.Horie
- Journal Title
  
  J. Appl. Phys.(640)(3) 97
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth-and first-diffraction orders2005
- Author(s)
  R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
- Journal Title
  
  Appl. Phys. Lett. 86
  
  Pages: 231101-231101
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Spectroscopic ellipsometry on sinusoidal surface-relief gratings2005
- Author(s)
  R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi
- Journal Title
  
  Appl. Surf. Sci.(646)(5) 244 (1-4)
  
  Pages: 221-224
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Evidence of refractive index change in glass substrates induced by high-density reactive ion plating deposition of SiO2 film2005
- Author(s)
  J.Mistrik, I.Ohlidal, R.Antos, M.Aoyama, T.Yamaguchi.
- Journal Title
  
  Appl.Surf.Sci. 244(1-4)
  
  Pages: 51-54
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy2005
- Author(s)
  Roman Antos, Jan Mistrik, Tomuo Yamaguchi, Stefan Visnovsky, Sergej O.Demokritov, Burkard Hillebrands
- Journal Title
  
  Optics Express 13・12
  
  Pages: 4651-4656
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Spectroscopic ellipsometry on lamellar diffraction gratings on a thick transparent plate2005
- Author(s)
  R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi, J.Pistora, M.Horie
- Journal Title
  
  Appl.Surf.Sci. 244(1-4)
  
  Pages: 225-229
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate2005
- Author(s)
  R.Antos, J.Pistora, I.Ohlidal, K.Postava, J.Mistrik, T.Yamaguchi, S.Visnovsky, M.Horie
- Journal Title
  
  Journal of Applied Physics, 2005 97・53107(in press)
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Optical metrology of patterned magnetic structures : deep versus shallow gratings," presented at the 30th SPIE International Symposium on Microlithography-Metrology, Inspection, and Process Control for Microlithography XIX, February 27-March 4,2005, San Jose, California USA2005
- Author(s)
  R.Antos, M.Veis, E.Liskova, M.Aoyama, J.Hamrle, T.Kimura, P.Gustafik, M.Horie, J.Mistrik, T.Yamaguchi, S.Visnovsky, N.Okamoto
- Journal Title
  
  Proc. SPIE 5752
  
  Pages: 1050-1059
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth- andf irst-diffraction orders2005
- Author(s)
  R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
- Journal Title
  
  Appl. Phys. Lett.(724)(7) 86
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy2005
- Author(s)
  R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
- Journal Title
  
  Optics Express(729)(8) 13・12
  
  Pages: 4651-4656
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate2005
- Author(s)
  R.Antos, J.Pistora, I.Ohlidal, K.Postava, J.Mistrik, T.Yamaguchi, S.Visnovsky, M.Horie
- Journal Title
  
  J.Appl.Phys. 97
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Evidence of native oxides on the capping and substrate of Permalloy gratings by magneto-optical spectroscopy in the zeroth- and first-diffraction orders2005
- Author(s)
  R.Antos, J.Mistrik, T.Yamaguchi, S.Visnovsky, S.O.Demokritov, B.Hillebrands
- Journal Title
  
  Appl.Phys.Lett. 86
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Spectroscopic ellipsometry on sinusoidal gratings2005
- Author(s)
  R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi
- Journal Title
  
  Appl.Surf.Sci. 244(1-4)
  
  Pages: 221-224
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Airy-like internal reflection series applied in scatterometry and simulations of gratings2005
- Author(s)
  R.Antos, J.Mistrik, T.Yamaguchi, M.Horie, S.Visnovsky
- Journal Title
  
  Proc. SPIE (Munich, 12-16 June 2005)(773)(15) 5858(国際会議プロシーディングス)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Spectroscopic ellipsometry on lamellar gratings2005
- Author(s)
  R.Antos, I.Ohlidal, J.Mistrik, K.Murakami, T.Yamaguchi, J.Pistora, M.Horie, S.Visnovsky
- Journal Title
  
  Appl. Surf Sci 244,1-244,4
  
  Pages: 225-229
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Optical metrology of patterned magnetic structures : deep versus shallow gratings2005
- Author(s)
  R.Antos, M.Veis, E.Liskova, M.Aoyama, J.Hamrle, T.Kimura, P.Gustafik, M.Horie, J.Mistrik, T.Yamaguchi, S.Visnovsky, N.Okamoto
- Journal Title
  
  Proc. SPIE. (San Jose, Feb. 17-May 2005)(667)(14) 5752(国際会議プロシーディングス)
  
  Pages: 1050-1059
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Spectroscopic ellipsometry of sinusoidal gratings2005
- Author(s)
  R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi
- Journal Title
  
  Appl.Surf.Sci. (in press)
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Spectroscopic ellipsometry on lamellar gratings.2005
- Author(s)
  R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi, J.Pistora, M.Horie
- Journal Title
  
  Appl. Surf. Sci(647)(6) 244 (1-4)
  
  Pages: 225-229
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate2005
- Author(s)
  R.Antos, J.Pistora, I.Ohlidal, K.Postava, J.Mistrik, T.Yamaguchi, S.Visnovsky, M.Horie
- Journal Title
  
  J. Appl. Phys. 97
  
  Pages: 53107-53107
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Generalized scatterometry of laterally patterned periodic nanostructures based on spectroscopic ellipsometry2005
- Author(s)
  R.Antos, J.Mistrik, M.Aoyama, S.Visnovsky, T.Yamaguchi
- Journal Title
  
  Reports of the Graduate School of Electronic Science and Technology(Shizuoka University)(705)(4) 26
  
  Pages: 55-61
- NAID
  40006997285
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Spectroscopic ellipsometry of lamellar diffraction gratings on a thick transparent plate2005
- Author(s)
  R.Antos, I.Ohlidal, J.Mistrik, T.Yamaguchi, J.Pistora, M.Horie
- Journal Title
  
  Appl.Surf.Sci. (in press)
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Airy-like internal reflection series applied in scatterometry and simulations of gratings," presented at SPIE International Symposium on Optical Metrology-Micro-and Nano-Metrology the World of Photonics Congress 2005 (17th International Conference on Photonics in Europe Co-located with LASER 2005, World of Photonics); 12-16 June 2005, Munich, Germany2005
- Author(s)
  R.Antos, J.Mistrik, T.Yamaguchi, M.Horie, S.Visnovsky
- Journal Title
  
  Proc. SPIE 5858
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Characterization of permalloy wires by optical and magneto-optical spectroscopy2004
- Author(s)
  R.Antos, J.Mistrik, S.Visnovsky, M.Aoyama, T.Yamaguchi, B.Hillebrands
- Journal Title
  
  Trans. Magn. Soc. Japan(627)(2) 4 (4-2)
  
  Pages: 282-285
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders2004
- Author(s)
  R.Antos, J.Mistrik, M.Aoyama, T.Yamaguchi, S.Visnovsky, B.Hillebrands
- Journal Title
  
  J. Magn. Magn. Mater.(617)(1) 272-276
  
  Pages: 1670-1671
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders2004
- Author(s)
  R.Antos, J.Mistrik, M.Aoyama, T.Yamaguchi, S.Visnovsky, B.Hillebrands
- Journal Title
  
  J. Magn. Magn. Mater 272-276
  
  Pages: 1670-1671
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Characterization of permalloy wires by optical and magneto-optical spectroscopy2004
- Author(s)
  R.Antos, J.Mistrik, S.Visnovsky, M.Aoyama, T.Yamaguchi, B.Hillebrands
- Journal Title
  
  Trans.Magn.Soc.Japan 4・4-2
  
  Pages: 282-285
- Data Source
  KAKENHI-PROJECT-15560031
[Journal Article] Magneto-optical spectroscopy on permalloy wires in 0th and 1st diffraction orders2004
- Author(s)
  R.Antos, J.Mistrik, M.Aoyama, T.Yamaguchi, S.Visnovsky, B.Hillebrands
- Journal Title
  
  J.Magn.Magn.Mater. 272-276
  
  Pages: 1670-1671
- Data Source
  KAKENHI-PROJECT-15560031

1. HAYAKAWA Yasuhiro (00115453)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
2. KUMAGAWA Masashi (30022130)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
3. HIRATA Akira (00063610)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. MATSUMOTO Koichi (10022138)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. MURAKAMI Kenji (30182091)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. OZAWA Tetsuo (90247578)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. OKANO Yasunori (90204007)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 斎藤順雄 (40126777)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 畑中義式 (60006278)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. DAO Le H.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. DOST Sadic

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. SADIC Dost

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. XIE Xie

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. ZHONG Xingru

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

YAMAGUCHI Tomuo 山口 十六夫

山口 十六夫

Research Projects

Research Products

Co-Researchers

Spectro-ellipsometric Analysis of Periodically Structured SamplesPrincipal Investigator

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Fabrication of highly oriented carbon-nanotube films and its application to an emitter with high efficiency

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Fabrication of highly oriented carbon-nanotube films and its application to an emitter with high efficiency

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Dissolution and Growth of InGaSb Ternary Semiconductor under Microgravity

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Crystal Growth of InGaSb Semiconductors under Microgravity

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Optimum design and evaluation by spectroscopic ellipsometry of optical thin films for DUV lithographyPrincipal Investigator

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分光エリプソメトリ解析方法の開発と応用Principal Investigator

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Crystal Growth of InGaAsSb Compound Semiconductors for Infrared Devices

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多元スパッタ法による4配位系アモルファス半導体多層薄膜の作製

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プラズマによる薄膜堆積初期過程の「その場」計測

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[Journal Article] Evaluation of the quality of Permalloy gratings by diffracted magneto-optical spectroscopy2007

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[Journal Article] Magneto-optical spectroscopic scatterometry for analyzing patterned magnetic nanostructures2006

Author(s)

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NAID

Description

Data Source

[Journal Article] Total reflection ellipsometry of lamellar gratings2006

Author(s)

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Description

YAMAGUCHI Tomuo 山口十六夫

山口十六夫