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KAWABE Takaya  河辺 隆也

ORCIDConnect your ORCID iD *help
Researcher Number 40023717
Affiliation (based on the past Project Information) *help 1993 – 1994: 筑波大学, 物理学系, 助教授
Review Section/Research Field
Principal Investigator
プラズマ理工学
Keywords
Principal Investigator
trapping / sputtering / discharge pressure / desorption / impurities / discharge cleaning / ultra-high vacuum / グロー放電 / トラッピング / スパッタリング … More / 放電圧力 / 脱離 / 不純物 / 放電洗浄 / 超高真空 Less
  • Research Projects

    (1 results)
  • Co-Researchers

    (2 People)
  •  Research on the Glow Discharge Cleaning Method by Use of Glow Mode Plasma SourcePrincipal Investigator

    • Principal Investigator
      KAWABE Takaya
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      University of Tsukuba
  • 1.  KAGATSUME Akiko
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  KITAJIMA Masahiro
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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