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塚本 兼二  ツカモト ケンジ

ORCIDConnect your ORCID iD *help
Researcher Number 40207345
Affiliation (based on the past Project Information) *help 1989: 熊本大学, 工学部, 助手
Review Section/Research Field
Except Principal Investigator
高分子合成
Keywords
Except Principal Investigator
Electron-beam exposure characteristics / Electron-beam sensitivity / Dry etching resistance / Contrast / 2, 3-Epithiopropyl methacrylate / Electron-beam resist / 感度 / postーbake / preーbake / ガラス転移温度 … More / エピチオプロピルメタクリラ-ト) / ポリ(2、3 / 後硬化現像 / 2,3ーエピチオプロピルメタクリテ-ト / 2,3-エピチオプロピルメタクリラ-ト / 後硬化現象 / 感度曲線 / エッチング / 耐プラズマ性 / コントラスト / 2,3ーエピチオプロピルメタクリラ-ト / 電子線レジスト Less
  • Research Projects

    (1 results)
  • Co-Researchers

    (7 People)
  •  Development of new electron-beam resist

    • Principal Investigator
      EGAWA Hiroaki
    • Project Period (FY)
      1989 – 1991
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      高分子合成
    • Research Institution
      Kumamoto University
  • 1.  EGAWA Hiroaki (50040358)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 2.  TAKAMASA Nonaka (50040423)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 3.  ONO Hiroshi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 4.  HIGASHI Hiromi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 5.  江川 大海
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 6.  EGAWA Hiromi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  東 廣巳
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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