YOSHIMURA Satoru 吉村智

… Alternative Names

吉村智ヨシムラサトル

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Researcher Number	40294029
Other IDs
External Links
Affiliation (Current)	2025: 大阪大学, 大学院工学研究科, 准教授
Affiliation (based on the past Project Information) *help	2024 – 2025: 大阪大学, 大学院工学研究科, 准教授 2016 – 2019: 大阪大学, 工学研究科, 准教授 2012 – 2015: 大阪大学, 工学(系)研究科(研究院), 准教授 2011 – 2012: 大阪大学, 大学院・工学研究科, 准教授 2009 – 2010: 大阪大学, 工学研究科, 准教授 … More 2007 – 2008: 大阪大学, 大学院・工学研究科, 准教授 2006: 大阪大学, 大学院工学研究科, 助教授 2006: Osaka University, Graduate School of Engineering, Associate Professor, 工学研究科, 助教授 2003 – 2005: Osaka University, 大学院・工学研究科, 助教授 1998 – 2002: Osaka University, Graduate School of Engineering, Researcher, 大学院・工学研究科, 助手 1997: 大阪大学, 工学部, 助手 Less
Review Section/Research Field	Principal Investigator Plasma science / Basic Section 14030:Applied plasma science-related / Basic Section 80040:Quantum beam science-related / Quantum beam science / プラズマ理工学 Except Principal Investigator プラズマ理工学 / Plasma science / Nuclear fusion studies
Keywords	Principal Investigator イオンビーム / シリコンカーバイド / 触媒 / インジウム / プラズマ / 計算機トモグラフィー / 有機金属分子 / 結晶成長 / 有機金属 / ゼオライト … More / ヘテロエピ成長 / CVD / SiC / 触媒化学 / イオン / 中性粒子ビーム / 複数断面 / トカマク / 内部構造 / 磁場反転配位 / 軟X線 / 可視域光 / 磁気圧縮プラズマ / 磁場反転配位プラズマ / フォトダイオード / プラズマ移送 / フーリエ-ベッセル展開法 / 反転磁場配位プラズマ … More Except Principal Investigator 磁場反転配位 / 磁場反転配位プラズマ / プラズマ / FRCプラズマ / Field Reversed Configuration / 高ベータ / 磁気プローブ / ミラー磁場 / 極限ベータ配位 / 低中性子発生 / 閉じ込め改善 / 高ベータプラズマ / 核融合 / FRC Plasma / イオンビーム / 反応性プラズマ / ion beam / Monte-Carlo simulation / molecular dynamics simulation / ultraviolet / reactive sputtering / etching / plasma / 紫外線照射 / モンテカルロシミュレーション / 分子動力学シミュレーション / 紫外線 / 反応性スパッタリング / エッチング / Rotating magnetic field / RF LC resonant circuit / IGBT inverter circuit / Current drove / FRC plasma / 回転磁場 / 高周波大電力共振器 / IGBTインバーター回路 / 電流駆動 / Scaling / Heating / Confinement / High beta / Adiabatic Compression / Magnetic Compression / 磁気圧縮加熱 / 高環境適合性 / 先進燃料 / スケーリング則 / 加熱 / 閉じ込め / 断熱圧縮 / 磁気圧縮 / ion assist / pulsed glow plasma / tribology / diamond thin films / inverter / low friction film / process plasma / surface treatment / イオンアシスト / ダイヤモンド薄膜 / イオシアシスト / パルスグロー / トライボロジー / ダイヤモンド簿膜 / インバーター / 低摩擦膜 / プロセスプラズマ / 表面処理技術 / D-3He Fusion / confinement improvement / high beta plasma / Nuclear Fusion / 分光測定 / スクレーフオフ / 反転磁場配位 / 静電プローブ / スクレープオフプラズマ / ヘリウム3核融合 / Edge Plasma / Plasma Translation / Magnetic Plasma Compression / Particle Beam Injection / 周辺プラズマ / プラズマ移送 / 磁気圧縮プラズマ / 粒子ビーム入射 / 大気圧プラズマ / PMMA / 細胞外マトリックス / 蛋白質 / シミュレーション / バイオ関連機器 / たんぱく質 / 表面・界面物性 / プラズマ表面相互作用 / プラズマエッチング / プラズマCVD / 反応性ラジカル / 分子動力学 / 光物性 / 膜堆積 / プラズマプロセス Less

ナノクラスターイオンビーム技術とSiC, GeC, GaNのストイキオメトリ結晶成長への応用Principal Investigator
- Principal Investigator
  
  吉村智
- Project Period (FY)
  2025 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 80040:Quantum beam science-related
- Research Institution
  The University of Osaka
Data-driven plasma diagnostics techniques for semiconductor process applicationsPrincipal Investigator
- Principal Investigator
  
  吉村智
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for JSPS Fellows
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Osaka University
Surface reaction analyses of plasma-assisted atomic layer processesPrincipal Investigator
- Principal Investigator
  
  吉村智
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for JSPS Fellows
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Osaka University
Development of organometallic molecular ion beam deposition method for the stoichiometric crystal growthPrincipal Investigator
- Principal Investigator
  
  Yoshimura Satoru
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
Indium implantations onto porous zeolites for the development of novel catalystsPrincipal Investigator
- Principal Investigator
  
  Yoshimura Satoru
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Quantum beam science
- Research Institution
  Osaka University
Application of ion beam induced chemical vapor deposition for SiC film formationPrincipal Investigator
- Principal Investigator
  
  Yoshimura Satoru
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
Systematic Study Analyses of radical-surface interaction in plasma bio-processing
- Principal Investigator
  
  HAMAGUCHI Satoshi
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
Low energy indium ion beam injection for the development of novel catalystsPrincipal Investigator
- Principal Investigator
  
  YOSHIMURA Satoru
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
Elementary processes of photon, radical, and electron irradiation and their synergetic effects for plasma-surface interaction
- Principal Investigator
  
  HAMAGUCHI Satoshi
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
Analyses of Photo-induced Surface Reaction Processes during Plasma Sputtering
- Principal Investigator
  
  HAMAGUCHI Satoshi
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
複数断面の軟X線計算機トモグラフィーによるFRCプラズマ内部構造の動的変化の研究Principal Investigator
- Principal Investigator
  
  吉村智
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
Current drive and its spatial diffusion of high-beta plasma by the application of RF rotating magnetic field
- Principal Investigator
  
  GOTO Seiichi
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Osaka University
Magnetic compression heating of extremely high beta plasma configuration
- Principal Investigator
  
  OKADA Shigefumi
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Osaka University
Investigation of behavior of scrape-off plasma flow in ultra-high beta configuration
- Principal Investigator
  
  GOTO Seiichi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Osaka University
Research on a functional inverter discharge plasma and a deposition of low frictional thin films for metal mechanical parts
- Principal Investigator
  
  GOTO Seiichi
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  プラズマ理工学
- Research Institution
  Osaka University
可視域光断層像再生によるFRCプラズマ内部構造の動的変化研究Principal Investigator
- Principal Investigator
  
  吉村智
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Osaka University
Development on FRC Plasma Sustainment Method for Helium-3 Fusion
- Principal Investigator
  
  GOTO Seiichi
- Project Period (FY)
  1996 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Nuclear fusion studies
- Research Institution
  Osaka University

[Journal Article] Low-energy mass-selected ion beam deposition of silicon carbide with Bernas-type ion source using methylsilane2019
- Author(s)
  S. Yoshimura, S. Sugimoto, T. Takeuchi, K. Murai, M. Kiuchi
- Journal Title
  
  AIP Advances
  
  Volume: 9 Issue: 9 Pages: 095051-095051
- DOI
  10.1063/1.5116614
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17H02997
[Journal Article] Effects of injected ion energy on silicon carbide film formation by low-energy SiCH3+ beam irradiation2019
- Author(s)
  Yoshimura Satoru、Sugimoto Satoshi、Takeuchi Takae、Murai Kensuke、Kiuchi Masato
- Journal Title
  
  Thin Solid Films
  
  Volume: 685 Pages: 408-413
- DOI
  10.1016/j.tsf.2019.06.057
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18K18526, KAKENHI-PROJECT-17H02997
[Journal Article] Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond2019
- Author(s)
  Yoshimura Satoru、Sugimoto Satoshi、Takeuchi Takae、Kiuchi Masato
- Journal Title
  
  AIP Advances
  
  Volume: 9 Issue: 2 Pages: 025008-025008
- DOI
  10.1063/1.5084181
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17H02997
[Journal Article] Characteristics of films deposited by the irradiation of GeCHx+ ions produced from hexamethyldigermane and their dependence on the injected ion energy2019
- Author(s)
  S. Yoshimura, S. Sugimoto, T. Takeuchi, K. Murai, M. Kiuchi
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  
  Volume: 461 Pages: 1-5
- DOI
  10.1016/j.nimb.2019.09.014
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H02997
[Journal Article] Deposition of indium nanoparticles on powdered material by pulse arc plasma to synthesize catalysts for Friedel-Crafts alkylation2018
- Author(s)
  S. Yoshimura, Y. Nishimoto, S. Sugimoto, M. Kiuchi, M. Yasuda
- Journal Title
  
  e-Journal of Surface Science and Nanotechnology
  
  Volume: 16
- NAID
  130006727036
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13406
[Journal Article] Low-energy mass-selected ion beam production of fragments from tetraethylorthosilicate for the formation of silicon dioxide film2018
- Author(s)
  Yoshimura Satoru、Sugimoto Satoshi、Takeuchi Takae、Murai Kensuke、Kiuchi Masato
- Journal Title
  
  Thin Solid Films
  
  Volume: 655 Pages: 22-26
- DOI
  10.1016/j.tsf.2018.04.003
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H02997
[Journal Article] Injected ion energy dependence of SiC film deposited by low-energy SiC3H9+ ion beam produced from hexamethyldisilane2018
- Author(s)
  Yoshimura Satoru、Sugimoto Satoshi、Takeuchi Takae、Murai Kensuke、Kiuchi Masato
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  
  Volume: 420 Pages: 6-11
- DOI
  10.1016/j.nimb.2018.01.031
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H02997
[Journal Article] Identification of fragment ions produced from hexamethyldisilazane and production of low-energy mass-selected fragment ion beam2018
- Author(s)
  Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Kensuke Murai, Masato Kiuchi
- Journal Title
  
  Nucl. Instrum. Meth. Phys. Res. B
  
  Volume: 430 Pages: 1-5
- DOI
  10.1016/j.nimb.2018.05.040
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18K18526, KAKENHI-PROJECT-17H02997
[Journal Article] Catalytic property of an indium-deposited powder-type material containing silicon and its dependence on the dose of indium nano-particles irradiated by a pulse arc plasma process2017
- Author(s)
  S. Yoshimura, Y. NIshimoto, M. Kiuchi, Y. Agawa, H. Tanaka, M. Yasuda
- Journal Title
  
  AIP Advances
  
  Volume: 7 Issue: 6
- DOI
  10.1063/1.4990517
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13406
[Journal Article] Low-energy mass-selected ion beam production of fragments produced from hexamethyldisiloxane for the formation of silicon oxide film2017
- Author(s)
  S. Yoshimura, S. Sugimoto, K. Murai, M. Kiuchi
- Journal Title
  
  Surface and Coatings Technology
  
  Volume: 313 Pages: 402-406
- DOI
  10.1016/j.surfcoat.2017.02.009
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K13406
[Journal Article] Low-energy SiC2H6+ and SiC3H9+ ion beam productions by the mass-selection of fragments produced form hexamethyldisilane for SiC film formations2016
- Author(s)
  S. Yoshimura, S. Sugimoto, K. Murai, M. Kiuchi
- Journal Title
  
  AIP Advances
  
  Volume: 6 Issue: 12
- DOI
  10.1063/1.4972206
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15K13406
[Journal Article] Low-energy mass-selected ion beam production of fragments produced from hexamethyldisilane for SiC film formation2016
- Author(s)
  S. Yoshimura, S. Sugimoto, M. Kiuchi
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 119 Issue: 10
- DOI
  10.1063/1.4943497
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25287154
[Journal Article] Indium implantation onto zeolite by pulse arc plasma process for the development of novel catalysts2015
- Author(s)
  S. Yoshimura, Y. Nishimoto, M. Kiuchi, M. Yasuda
- Journal Title
  
  Chemistry Letters
  
  Volume: 44 Issue: 10 Pages: 1292-1294
- DOI
  10.1246/cl.150499
- NAID
  130005101464
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K13406, KAKENHI-PROJECT-26810059
[Journal Article] 新規反応触媒開発を目指したゼオライトへのインジウム担持の試み2015
- Author(s)
  吉村智, 木内正人, 西本能弘, 安田誠, 馬場章夫, 杢野由明, 杉本敏司, 浜口智志
- Journal Title
  
  スマートプロセス学会誌
  
  Volume: 4 Pages: 228-233
- NAID
  130005263569
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15K13406
[Journal Article] Application of ion beam induced chemical vapor deposition for SiC film formation on Si substrates using methylsilane2015
- Author(s)
  S. Yoshimura, S. Sugimoto, K. Murai, K. Honjo, M. Kiuchi
- Journal Title
  
  e-Journal of Surface Science and Nanotechnology
  
  Volume: 13 Pages: 174-178
- NAID
  130005065390
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-25287154
[Journal Article] Low Energy Indium or Gallium Ion Implantations to SiO<sub>2 </sub>Thin Films for Development of Novel Catalysts2014
- Author(s)
  S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Journal Title
  
  e-J. Surf. Sci. Nanotechnol.
  
  Volume: 12 Issue: 0 Pages: 197-202
- DOI
  10.1380/ejssnt.2014.197
- NAID
  130004438877
- ISSN
  1348-0391
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-25287154
[Journal Article] Computed multiple tomography for translated field reversed configuration plasma2014
- Author(s)
  S. Yoshimura, S. Sugimoto, S. Okada
- Journal Title
  
  IEEE Transactions on Plsma Science
  
  Volume: 42 Issue: 10 Pages: 2510-2511
- DOI
  10.1109/tps.2014.2321399
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25287154
[Journal Article] Dependence of catalytic properties of indium implanted SiO2 thin films on the film-substrate temperature during indium ion implantation2013
- Author(s)
  S. Yoshimura, K. Ikuse, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B
  
  Volume: 315 Pages: 222-226
- DOI
  10.1016/j.nimb.2013.04.072
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25287154
[Journal Article] ポリメタクリル酸メチル樹脂の水素プラズマ曝露と低エネルギーアルゴンイオンビームによるエッチング2013
- Author(s)
  吉村智、幾世和将、杉本敏司、村井健介、木内正人、浜口智志
- Journal Title
  
  Journal of the Vacuum Society of Japan
  
  Volume: 56 Pages: 129-132
- NAID
  10031163964
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25287154
[Journal Article] Surface modification of poly(methyl methacrylate) by hydrogen-plasma exposure and its sputtering characteristics by ultraviolet light irradiation2013
- Author(s)
  S. Yoshimura, K. Ikuse, S. Sugimoto, K. Murai, K. Honjo, M. Kiuchi, S. Hamaguchi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 52 Issue: 9R Pages: 090201-090201
- DOI
  10.7567/jjap.52.090201
- NAID
  210000142776
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25287154
[Journal Article] ポリメタクリル酸メチル樹脂の水素プラズマ曝露と低エネルギーアルゴンイオンビームによるエッチング2013
- Author(s)
  吉村智, 幾世和将, 杉本敏司, 村井健介, 木内正人, 浜口智志
- Journal Title
  
  Journal of the Vacuum Society of Japan
  
  Volume: 56 Pages: 129-132
- NAID
  10031163964
- URL
  http://www.vacuum-jp.org
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Journal Article] Dependence of catalytic properties of Indium-implanted SiO2 thin films on the energy and dose of incident Indium ions2012
- Author(s)
  S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Journal Title
  
  Thin Solid Films
  
  Volume: 520
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] Sputtering yields of CaO, SrO, and BaO by monochromatic noble gas ion bombardment2012
- Author(s)
  S. Yoshimura, K. Hine, M. Kiuchi, J. Hashimoto, M. Terauchi, Y. Honda, M. Nishitani, S. Hamaguchi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 51
- NAID
  210000072700
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Journal Article] Low energy metal ion beam production with a modified Freeman-type ion source for development of novel catalysts2012
- Author(s)
  S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Journal Title
  
  e-Journal of Surface Science and Nanotechnology
  
  Volume: 10 Pages: 139-144
- URL
  http://www.ssj.org/ejssnt
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Journal Article] Sputtering yields and surface modification of poly(methyl methacrylate) (PMMA) by low-energy, Ar+/CF3+ ion bombardment with vacuum ultraviolet (VUV) photon irradiation2012
- Author(s)
  S. Yoshimura, Y. Tsukazaki, M. Kiuchi, S.Sugimoto, and S. Hamaguchi
- Journal Title
  
  J. Phys. D; Appl. Phys
  
  Volume: 45 Issue: 50 Pages: 1-10
- DOI
  10.1088/0022-3727/45/50/505201
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075, KAKENHI-PROJECT-22540506, KAKENHI-PROJECT-22612002
[Journal Article] Low energy metal ion beam production with a modified Freeman-type ion source for development of novel catalysts2012
- Author(s)
  S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Journal Title
  
  e-J. Surf. Sci. Nanotech.
  
  Volume: 10 Pages: 139-144
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] Low energy metal ion beam production with a modified Freeman-type ion source for development of novel catalysts2012
- Author(s)
  S.Yoshimura, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
- Journal Title
  
  e-J.Surf.Sci.Nanotech.(2012)
  
  Volume: (掲載予定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] ポリメタクリル酸メチル樹脂の水素プラズマ曝露と低エネルギーアルゴンイオンビームによるエッチング2012
- Author(s)
  吉村智
- Journal Title
  
  Journal of the Vacuum Society of Japan
  
  Volume: 56 Pages: 129-132
- NAID
  10031163964
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Journal Article] Dependence of catalytic properties of indium-implanted SiO_2 thin films on the energy and dose of incident indium ions2012
- Author(s)
  S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Journal Title
  
  Thin Solid Films
  
  Volume: 520 Issue: 15 Pages: 4894-4897
- DOI
  10.1016/j.tsf.2012.03.028
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506, KAKENHI-PROJECT-23655083, KAKENHI-PROJECT-24750090
[Journal Article] Sputtering yields of CaO, SrO, and BaO by monochromatic noble gas ion bombardment2012
- Author(s)
  S.Yoshimura, K.Hine, M.Kiuchi, J.Hashimoto, M.Terauchi, Y.Honda, M.Nishitani, S.Hamaguchi
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: (掲載予定)
- NAID
  210000072700
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] Dependence of catalytic properties of Indium-implanted SiO2 thin films on the energy and dose of incident Indium ions2012
- Author(s)
  S.Yoshimura, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
- Journal Title
  
  Thin Solid Films
  
  Volume: (掲載予定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] Sputtering yields of magnesium hydroxide [Mg(OH)2] by noble-gas ion bombardment2012
- Author(s)
  Kazumasa Ikuse, Satoru Yoshimura, Masato Kiuchi, Masaharu Terauchi, Mikihiko Nishitani, and Satoshi Hamaguchi
- Journal Title
  
  J. Phys. D: Appl. Phys.
  
  Volume: 45
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] Sputtering yields of CaO, SrO, and BaO by monochromatic noble gas ion bombardment2012
- Author(s)
  S. Yoshimura
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 51 Issue: 8S1 Pages: 08HB02-08HB02
- DOI
  10.1143/jjap.51.08hb02
- NAID
  210000072700
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Journal Article] Sputtering yields and surface modification of poly(methyl methacrylate) (PMMA) by low-energy Ar+/CF3+ ion bombardment with vacuum ultraviolet (VUV) photon irradiation2012
- Author(s)
  S. Yoshimura, Y. Tsukazaki, M. Kiuchi, S. Sugimoto, S. Hamaguchi,.
- Journal Title
  
  J. Phys. D: Appl. Phys.
  
  Volume: 45
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] Sputtering yields of CaO, SrO, and BaO by monochromatic noble gas ion bombardment2012
- Author(s)
  S. Yoshimura, K. Hine, M. Kiuchi, J. Hashimoto, M. Terauchi, Y. Honda, M.Nishitani, and S. Hamaguchi
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 51
- NAID
  210000072700
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] Experimental evaluation of CaO, SrO and BaO sputtering yields by Ne^+ or Xe^+ions2011
- Author(s)
  S. Yoshimura, K. Hine, M. Kiuchi, J. Hashimoto, M. Terauchi, Y. Honda, M. Nishitani, S. Hamaguchi
- Journal Title
  
  Journal of Physics D: Applied Physics
  
  Volume: 44 Issue: 25 Pages: 255203-255203
- DOI
  10.1088/0022-3727/44/25/255203
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Journal Article] Experimental evaluation of CaO, SrO, and BaO sputtering yields by Ne or Xe ions2011
- Author(s)
  S.Yoshimura, K.Hine, M.Kiuchi, J.Hashimoto, M.Terauchi, Y.Honda, M.Nishitani, S.Hamaguchi
- Journal Title
  
  J.Phys.D : Appl.Phys
  
  Volume: 44
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] Soft x-ray computer tomography of tokamak plasma in control experiment of locked mode disruption by electron cyclotron heating2011
- Author(s)
  S. Yoshimura, T. Maekawa
- Journal Title
  
  IEEE Transactions on Plasma Science
  
  Volume: 39 Issue: 11 Pages: 3000-3001
- DOI
  10.1109/tps.2011.2131685
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Journal Article] Novel catalysts : indium implanted SiO_2 thin films2010
- Author(s)
  S.Yoshimura, et al.
- Journal Title
  
  Applied Surface Science
  
  Volume: 257 Pages: 192-196
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Journal Article] Effect of light irradiation from inductively coupled Ar plasma on etching yields of SiO_2 film by CF_3 ion beam injections2010
- Author(s)
  S.Yoshimura, Y.Tsukazaki, K.Ikuse, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  J.Phys. : Conference Series
  
  Volume: 232
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] Novel catalysts : indium implanted SiO2 thin films2010
- Author(s)
  S.Yoshimura, K.Hine, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
- Journal Title
  
  Appl.Surf.Sci.
  
  Volume: 257 Pages: 192-196
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22244075
[Journal Article] Effect of light irradiation from inductively coupled Ar plasma on etching yields of SiO_2 film by CF_3 ion beam injections2010
- Author(s)
  S.Yoshimura, et al.
- Journal Title
  
  Journal of Physics : Conference Series
  
  Volume: 232 Pages: 12020-12020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Journal Article] Novel catalysts: indium implanted SiO_2 thin films2010
- Author(s)
  S. Yoshimura, K. Hine, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Journal Title
  
  Applied Surface Science
  
  Volume: 257 Issue: 1 Pages: 192-196
- DOI
  10.1016/j.apsusc.2010.06.063
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Journal Article] Effect of Ultraviolet Light Irradiation on Etching Process of Poly(methyl methacrylate) by Ion Beam Injections2009
- Author(s)
  S. Yoshimura, K. Ikuse, Y. Tsukazaki, M. Kiuchi, S. Hamaguchi
- Journal Title
  
  J. Phys. :Conf. Series 191
  
  Pages: 0120301-5
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Sputtering yields of Au by low-energy noble gas ion bombard ment2009
- Author(s)
  K.Ikuse, S.Yoshimura, K.Hine, M.Kiuchi, S.Hamaguchi,
- Journal Title
  
  J.Phys.D : Appl.Phys. 42
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] CF_3^+イオンビームを用いたポリメタクリル酸メチル樹脂のエッチングにおける紫外光照射の効果2009
- Author(s)
  幾世和将, 吉村智, 塚崎泰裕, 木内正人, 浜口智志
- Journal Title
  
  Journal of the Vacuum Society of Japan (印刷中)
- NAID
  10024897826
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Effect of Ultraviolet Light Irradiation on Etching Process of Poly(methylmethacrylate)by Ion Beam Injections2009
- Author(s)
  S.Yoshimura, K.Ikuse, Y.Tsukazaki, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  J.Phys. : Conf.Series 191
  
  Pages: 120301-5
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Sputtering yields of Au by low-energy noble gas ion bombardment2009
- Author(s)
  K. Ikuse, S. Yoshimura, K. Hine, M. Kiuchi, S. Hamaguchi
- Journal Title
  
  J. Phys. D: Appl. Phys. 42
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] CF_3^+イオンビームを用いたポリメタクリル酸メチル樹脂のエッチングにおける紫外光照射の効果2009
- Author(s)
  幾世和将, 吉村智, 塚崎泰裕, 木内正人, 浜口智志
- Journal Title
  
  J.Vac.Soc.Jpn. 52
  
  Pages: 127-130
- NAID
  10024897826
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] CF3+イオンビームを用いたポリメタクリル酸メチル樹脂のエッチングにおける紫外光照射の効果2009
- Author(s)
  幾世和将, 吉村智, 塚崎泰裕, 木内正人, 浜口智志
- Journal Title
  
  J. Vac. Soc. Jpn. 52
  
  Pages: 127-130
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いたSiO2/Si基板へのインジウムイオン注入2008
- Author(s)
  幾世和将, 吉村智, 滝沢敏史, 唐橋一浩, 木内正人, 浜口智志
- Journal Title
  
  Journal of the Vacuum Society of Japan 51
  
  Pages: 218-220
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いたSiO_2/Si基板へのインジウムイオン注入2008
- Author(s)
  日根清裕, 吉村智, 唐橋一浩, 木内正人, 浜口智志
- Journal Title
  
  真空 (印刷中)
- NAID
  10021157088
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] 光照射を重畳したCF_3イオンビームによるSiO_2エッチング率の測定2008
- Author(s)
  幾世和将, 吉村智, 滝沢敏史, 唐橋一浩, 木内正人, 浜口智志
- Journal Title
  
  Journal of the Vacuum Society of Japan 51
  
  Pages: 158-161
- NAID
  10021156954
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] 光照射を重畳したCF3イオンビームによるSiO2エッチング率の測定2008
- Author(s)
  幾世和将, 吉村智, 滝沢敏史, 唐橋一浩, 木内正人, 浜口智志
- Journal Title
  
  Journal of the Vacuum Society of Japan 51
  
  Pages: 158-161
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Measurement of sticking probability and sputtering yield of Au by low-energy mass selected ion beams with a quartz crystal microbalance2008
- Author(s)
  K. Ikuse, S. Yoshimura, M. Kiuchi, K. Hine, S. Hamaguchi
- Journal Title
  
  Journal of Physics : Conference Series 106
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Measurement of sticking probability and sputtering yield of Au by low-energy mass selected ion beams with a quartz crystal microbalance2008
- Author(s)
  K. Ikuse, S. Yoshimura, M. Kiuchi, K. Hine, S. Hamaguchi
- Journal Title
  
  Journal of Physics: Conference Series 106
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] 光照射を重畳したCF_3イオンビームによるSiO_2エッチング率の測2008
- Author(s)
  幾世和将, 吉村智, 滝澤敏史, 唐橋一浩, 木内正人, 浜口智志
- Journal Title
  
  真空 (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Measurement of Au sputtering yields by Ar and He ions with a low-energy mass selected ion beam system2008
- Author(s)
  K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, S. Hamaguchi
- Journal Title
  
  Journal of Physics : Conference Series 106
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いたSiO_2/Si基板へのインジウムイオン注入2008
- Author(s)
  幾世和将, 吉村智, 滝沢敏史, 唐橋一浩, 木内正人, 浜口智志
- Journal Title
  
  Journal of the Vacuum Society of Japan 51
  
  Pages: 218-220
- NAID
  10021157088
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Experimental evaluation of MgO sputtering yields by monochromatic Ne, Kr, or Xe ion beam2008
- Author(s)
  K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, J. Hashimoto, M. Terauchi, M. Nishitani, S. Hamaguchi
- Journal Title
  
  Thin Solid Films 517
  
  Pages: 835-840
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Measurement of Au sputtering yields by Ar and He ions with a low-energy mass selected ion beam system2008
- Author(s)
  K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, S. Hamaguchi
- Journal Title
  
  Journal of Physics: Conference Series 106
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Energy Dependence of Crystalline Structure on Ion Beam Deposited Au Thin Films2007
- Author(s)
  T.Takizawa, T.Maeda, M.Kiuchi, S.Yoshimura, S.Hamaguchi
- Journal Title
  
  Phil.Mag. (in press)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Temporal evolution of ion fragment production from dimethylsilane by a hot tungsten wire and compounds deposited on the tungsten surface2007
- Author(s)
  S.Yoshimura, A.Toh, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  Jpn.J.Appl.Phys. (in press)
- NAID
  10018901450
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Temporal evolution of ion fragment production from dimethylsilane by a hot tungsten wire and compounds deposited on the tungsten surface2007
- Author(s)
  S.Yoshimura, A.Toh, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  Jpn. J. Appl. Phys. (印刷中)
- NAID
  10018901450
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いたネオンによる金のスパッタ率の測定2007
- Author(s)
  日根清裕, 吉村智, 木内正人, 浜口智志
- Journal Title
  
  真空 (印刷中)
- NAID
  10019928259
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Measurement of Magnesium Oxide Sputtering Yields by He and Ar Ions with a Low-Energy Mass-Selected Ion Beam System2007
- Author(s)
  K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, J. Hashimoto, M. Terauchi, M. Nishitani, S. Hamaguchi
- Journal Title
  
  Jpn. J. Applied Phys. 46
- NAID
  210000063805
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Measurement of Au Sputtering Yields by Neon with Low-Energy Mass Analyzed Ion Beam System2007
- Author(s)
  K.Hine, S.Yoshimura, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  Shinku (in press) (in Japanese)
- NAID
  10019928259
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Measurement of Magnesium Oxide Sputtering Yields by He and Ar Ions with a Low-Energy Mass-Selected Ion Beam System2007
- Author(s)
  K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, J. Hashimoto, M. T Terauchi, M. Nishitani, S. Hamaguchi
- Journal Title
  
  Jpn. J. Applied Phys. 46
- NAID
  210000063805
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19204056
[Journal Article] Energy Dependence of Crystalline Structure on Ion Beam Deposited Au Thin Films2007
- Author(s)
  T.Takizawa, T.Maeda, M.Kiuchi, S.Yoshimura, S.Hamaguchi
- Journal Title
  
  Phil. Mag. (印刷中)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Fragment Ions of Dimethylsilane Produced by Hot Tungsten Wires2006
- Author(s)
  S.Yoshimura, A.Toh, S.Sugimoto, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  Jpn. J. Appl. Phys. 45 (10B)
  
  Pages: 8204-8207
- NAID
  10018339336
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] フリーマン型イオン源におけるメチルシランのフラグメントイオンとタングステンワイヤ表面状態2006
- Author(s)
  藤章至, 吉村智, 杉本敏司, 木内正人, 浜口智志
- Journal Title
  
  真空 49 (6)
  
  Pages: 383-385
- NAID
  10017598622
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Temporal evolution of ion fragment production from methylsilane by a hot tungsten wire2006
- Author(s)
  S.Yoshimura, A.Toh, T.Toyoshima, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  J.Appl.Phys. 100 (9)
- NAID
  120006955415
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Fragment Ions Produced from Methylsilane by Hot Tungsten and Compounds Deposited on Tungsten Surface2006
- Author(s)
  A.Toh, S.Yoshimura, S.Sugimoto, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  Shinku 49(6) (in Japanese)
  
  Pages: 383-385
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いた金の堆積率の測定2006
- Author(s)
  日根清裕, 吉村智, 前田拓也, 木内正人, 浜口智志
- Journal Title
  
  真空 49 (3)
  
  Pages: 55-57
- NAID
  10018133603
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Temporal evolution of ion fragment production from methylsilane by a hot tungsten wire2006
- Author(s)
  S.Yoshimura, A.Toh, T.Toyoshima, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  J. Appl. Phys. 100 (9)
- NAID
  120006955415
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Fragment ions of methylsilane produced by hot tungsten wires2006
- Author(s)
  S.Yoshimura, A.Toh, T.Maeda, S.Sugimoto, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  Jpn. J. Appl. Phys. 45 (3A)
  
  Pages: 1813-1815
- NAID
  40007177952
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Fragment ions of methylsilane produced by hot tungsten wires2006
- Author(s)
  S.Yoshimura, A.Toh, T.Maeda, S.Sugimoto, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  Jpn.J.Appl.Phys. 45
  
  Pages: 1813-1815
- NAID
  40007177952
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Measurement of Au Deposition Rates with Low-Energy Mass Separated Ion Beam Deposition Apparatus2006
- Author(s)
  K.Hine, S.Yoshimura, T.Maeda, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  Shinku 49(3) (in Japanese)
  
  Pages: 55-57
- NAID
  10018133603
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Fragment Ions of Dimethylsilane Produced by Hot Tungsten Wires2006
- Author(s)
  S.Yoshimura, A.Toh, S.Sugimoto, M.Kiuchi, S.Hamaguchi
- Journal Title
  
  Jpn.J.Appl.Phys. 45 (10B)
  
  Pages: 8204-8207
- NAID
  10018339336
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Soft x-ray computer tomography of sawtooth collapse associated with m=2 and m=3 modes with five detector arrays on the WT-3 tokamak2005
- Author(s)
  S.Yoshimura, M.Sukegawa, T.Maekawa, Y.Terumichi
- Journal Title
  
  IEEE Transactions on Plasma Science 33・2
  
  Pages: 444-445
- Data Source
  KAKENHI-PROJECT-15740326
[Journal Article] WT-3トカマクにおける電子サイクロトロン加熱によるm=2ティアリングモードの抑制2004
- Author(s)
  吉村智, 前川孝, 曄道恭
- Journal Title
  
  高温学会誌 30巻・3号
  
  Pages: 131-139
- NAID
  10029252062
- Data Source
  KAKENHI-PROJECT-15740326
[Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いた金の堆積率の測定
- Author(s)
  日根清裕, 吉村智, 前田拓也, 木内正人, 浜口智志
- Journal Title
  
  真空 (印刷中)
- NAID
  10018133603
- Data Source
  KAKENHI-PROJECT-17340174
[Journal Article] Dependence of catalytic properties of indium implanted SiO2thin films on the film-substrate temperature during indium ion implantation
- Author(s)
  S. Yoshimura, K. Ikuse, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Journal Title
  
  Nuclear Instruments and Method in Physics Research B
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22540506
[Presentation] 質量分離有機金属分子イオンビーム堆積法のストイキオメトリ成膜への応用2019
- Author(s)
  吉村智、杉本敏司、竹内孝江、村井健介、木内正人
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H02997
[Presentation] ヘキサメチルジシラザンの解離フラグメントによる低エネルギーケイ素分子イオンビームの生成2018
- Author(s)
  吉村智、杉本敏司、竹内孝江、村井健介、木内正人
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H02997
[Presentation] 低エネルギーケイ素分子イオンビームの生成と酸化ケイ素成膜への応用2018
- Author(s)
  吉村智、杉本敏司、竹内孝江、木内正人
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17H02997
[Presentation] 解離フラグメントによる有機金属イオンビームの生成とストイキオメトリ結晶成長2018
- Author(s)
  吉村智、杉本敏司、竹内孝江、村井健介、木内正人
- Organizer
  プラズマ・核融合学会第35回年会
- Data Source
  KAKENHI-PROJECT-17H02997
[Presentation] ヘキサメチルジシランの解離フラグメントの低エネルギーイオンビーム生成とシリコンカーバイド成膜2017
- Author(s)
  吉村智, 杉本敏司, 木内正人
- Organizer
  第44回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県・横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K13406
[Presentation] Indium nano-particles deposition to zeolite powder by a pulse arc plasma processs for synthesizing catalysts2017
- Author(s)
  S. Yoshimura, Y. Nishimoto, S. Sugimoto, M. Kiuchi, M. Yasuda
- Organizer
  The 8th International Symposium on Surface Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13406
[Presentation] 低エネルギー有機ケイ素イオンビームの生成とSiC等成膜への応用2017
- Author(s)
  吉村智、杉本敏司、竹内孝江、木内正人
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H02997
[Presentation] インジウム担持ゼオライト触媒活性のインジウムドース依存性2016
- Author(s)
  吉村智, 西本能弘, 木内正人, 安田誠
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟朱鷺メッセ（新潟県・新潟市）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K13406
[Presentation] Fragment ion production from hexamethyldisilane in a Freeman-type ion source for SiC film formation2015
- Author(s)
  S. Yoshimura, M. Kiuchi
- Organizer
  37th International Symposium on Dry Process
- Place of Presentation
  Awaji Yumebutai International Conference Center, Awaji Island, Japan
- Year and Date
  2015-11-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25287154
[Presentation] ゼオライトへのインジウム担持とその触媒活性2015
- Author(s)
  吉村智, 西本能弘, 木内正人, 安田誠
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県・名古屋市）
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-15K13406
[Presentation] Low energy gallium ion injections to silicon dioxide thin films for development of novel catalysts2014
- Author(s)
  S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Organizer
  International Symposium on Non-equilibrium Plasma and Complex-System Sciences
- Place of Presentation
  Osaka Univ.
- Data Source
  KAKENHI-PROJECT-25287154
[Presentation] 低エネルギーインジウム照射 SiO2 の触媒効果の基板温度依存性2013
- Author(s)
  吉村智、幾世和将、木内正人、西本能弘、安田誠、馬場章夫、浜口智志
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工大
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-22540506
[Presentation] Low energy indium or gallium iom beam injection to SiO2 thin films for development of novel catalysts2013
- Author(s)
  S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Organizer
  12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12) & 21st International Colloquium on Scanning Probe Microscopy (ICSPM21)
- Place of Presentation
  Tsukuba International Congress Center
- Data Source
  KAKENHI-PROJECT-25287154
[Presentation] 低エネルギーインジウム照射SiO2の触媒効果の基板温度依存性2013
- Author(s)
  吉村智
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-22540506
[Presentation] 低エネルギーイオンビーム照射によるPMMAエッチングイールドの測定と水素プラズマ暴露のエッチングイールドへの影響2012
- Author(s)
  吉村智、塚崎泰裕、杉本敏司、木内正人、浜口智志
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学早稲田キャンパス
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22540506
[Presentation] 低エネルギーイオンビーム照射によるPMMAエッチングイールドの測定と水素プラズマ暴露のエッチングイールドへの影響2012
- Author(s)
  吉村智
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学(東京都)
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-22244075
[Presentation] Low energy mass-selected metal ion beam production with a modified Freeman-type ion source2012
- Author(s)
  Y.Yoshimura
- Organizer
  The 8^<th> EU-Japan Joint Symposium on Plasma Processing
- Place of Presentation
  Nara, Japan
- Year and Date
  2012-01-16
- Data Source
  KAKENHI-PROJECT-22244075
[Presentation] 低エネルギーイオンビーム照射によるPMMAエッチングイールドへの紫外線照射および水素プラズマ暴露の影響2012
- Author(s)
  吉村智
- Organizer
  第53回真空に関する連合講演会
- Place of Presentation
  甲南大学ポートアイランドキャンパス
- Data Source
  KAKENHI-PROJECT-22540506
[Presentation] Low energy metal iom beam injection to SiO2 thin films for development of novel catalysts2012
- Author(s)
  S. Yoshimura
- Organizer
  25th International Conference on Atomic Collisions in Solids (ICACS-25), 21-25 October, 2012, & 8th International Symposium on Swift Heavy Ions in Matter (SHIM2012)
- Place of Presentation
  京都大学
- Data Source
  KAKENHI-PROJECT-22540506
[Presentation] Low energy metal ion beam injection to SiO_2 thin films for development of novel catalysts2012
- Author(s)
  S. Yoshimura, K. Ikuse, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Organizer
  25th International Conference on Atomic Collisions in Solid
- Place of Presentation
  Kyoto University, Japan
- Year and Date
  2012-10-24
- Data Source
  KAKENHI-PROJECT-22540506
[Presentation] インジウム照射SiO2基板の触媒効果の入射エネルギー依存性2011
- Author(s)
  吉村智
- Organizer
  第72回応用物理学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-08-29
- Data Source
  KAKENHI-PROJECT-22244075
[Presentation] Measurement of MgO, CaO, SrO, and BaO sputtering yields by noble gas ions for plasma display panel cells2011
- Author(s)
  S.Yoshimura
- Organizer
  The 33nd International Symposium on Dry Process
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2011-11-10
- Data Source
  KAKENHI-PROJECT-22244075
[Presentation] Low energy mass-selected metal ion beam production with a modifled Freeman-type ion source for the development of novel catalysts2011
- Author(s)
  S.Yoshimura
- Organizer
  6^<th> International Symposium on Surface Science and Nanotechnology
- Place of Presentation
  Tokyo Japan
- Year and Date
  2011-11-11
- Data Source
  KAKENHI-PROJECT-22244075
[Presentation] インジウム照射 SiO_2基板の触媒効果の入射エネルギー依存性2011
- Author(s)
  吉村智、木内正人、西本能弘、安田誠、馬場章夫、浜口智志
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-22540506
[Presentation] Low energy mass-selected metal ion beam production with a modified Freeman-type ion source for the development of novel catalysts2011
- Author(s)
  S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
- Organizer
  International Symposium on Surface Science and Nanotechnology
- Place of Presentation
  Tower Hall Funabori, Tokyo, Japan
- Year and Date
  2011-11-11
- Data Source
  KAKENHI-PROJECT-22540506
[Presentation] インジウム照射SiO2基板の触媒効果の入射エネルギー依存性2011
- Author(s)
  吉村智、木内正人、西本能弘、安田誠、馬場章夫、浜口智志
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学小白川キャンパス
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-22540506
[Presentation] 低エネルギーイオンビーム照射装置を用いたシリカ基板へのインシウムおよびガリウムの注入2009
- Author(s)
  吉村智
- Organizer
  第50回真空に関する連合講演会
- Place of Presentation
  学習院目白キャンパス、東京
- Year and Date
  2009-11-04
- Data Source
  KAKENHI-PROJECT-19204056
[Presentation] Measurement of sputtering/etching yields by CF3 ion beam injection with UV light irradiation2009
- Author(s)
  Y. Tsukazaki, K. Ikuse, S. Yoshimura, M. Kiuchi, S. Hamaguchi
- Organizer
  the 4th International Symposium on Atomic Technology
- Place of Presentation
  Maiko Villa, Kobe
- Year and Date
  2009-11-18
- Data Source
  KAKENHI-PROJECT-19204056
[Presentation] 低エネルギーイオンビーム照射装置を用いたシリカ基板へのインジウムおよびガリウムの注入2009
- Author(s)
  吉村智、塚崎泰裕、木内正人、浜口智志
- Organizer
  第50回真空に関する連合講演会
- Place of Presentation
  学習院目白キャンパス、東京
- Year and Date
  2009-11-04
- Data Source
  KAKENHI-PROJECT-19204056
[Presentation] EFFECTS OF ULTRAVIOLET LIGHT IRRADIATION ON REACTIVE ION ETCING OF ORGANIC POLYMERS AND SiO22009
- Author(s)
  K. Ikuse, S. Yoshimura, K. Hine, K. Karahashi, M. Kiuchi, S. Hamaguchi
- Organizer
  International Congress on Plasma Physics (ICPP)2008
- Place of Presentation
  Fukuoka International Congress Center
- Year and Date
  2009-09-08
- Data Source
  KAKENHI-PROJECT-19204056
[Presentation] NeおよびXeイオンの照射によるMgO, CaO, SrO, BaOのスパッタ率測定2009
- Author(s)
  吉村智, 日根清裕, 木内正人, 橋本潤, 寺内正治, 本多洋介, 坂井全弘, 西谷幹彦, 浜口智志
- Organizer
  2009年春季第56回応用物理学関係連合講演会
- Place of Presentation
  筑波大学
- Year and Date
  2009-03-30
- Data Source
  KAKENHI-PROJECT-19204056
[Presentation] MgO sputtering yields by noble gas ions at relatively low injection energies2008
- Author(s)
  S. Yoshimura, K. Hine, M. Matsukuma, K. Ikuse, M. Kiuchi, T. Nakao, J. Hashimoto, M. Terauchi, M. Nishitani, S. Hamaguchi
- Organizer
  15^<th> International Display Workshops
- Place of Presentation
  Toki Messe Niigata Convention Center, Niigata, Japan
- Year and Date
  2008-12-03
- Data Source
  KAKENHI-PROJECT-19204056
[Presentation] CF3イオンビームを用いたPMMAエッチングにおける光照射重畳効果2008
- Author(s)
  幾世和将, 吉村智, 木内正人, 浜口智志
- Organizer
  第49回真空に関する連合講演会
- Place of Presentation
  松江市くにびきメッセ
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-19204056
[Presentation] 低エネルギー領域における酸化マグネシウム薄膜のスパッタ率測定2007
- Author(s)
  日根清裕, 吉村智, 幾世和将, 木内正人, 橋本潤, 寺内正治, 西谷幹彦, 浜口智志
- Organizer
  第2回アトミック/ポリスケールテクノロジー連携研究会
- Place of Presentation
  東京理科大学長万部キャンパス
- Year and Date
  2007-08-24
- Data Source
  KAKENHI-PROJECT-19204056
[Presentation] 低エネルギーインジウム照射SiO2の触媒効果の基板温度依存性
- Author(s)
  吉村智
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学　神奈川県厚木市
- Data Source
  KAKENHI-PROJECT-22244075
[Presentation] ゼオライトへの低エネルギーインジウムイオン照射と触媒効果
- Author(s)
  吉村智, 木内正人, 西本能弘, 安田誠, 馬場章夫, 浜口智志
- Organizer
  第55回真空に関する連合講演会
- Place of Presentation
  大阪府立大学I-siteなんば
- Year and Date
  2014-11-18 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-25287154
[Presentation] 低エネルギーイオンビーム照射によるPMMAエッチングイールドへの紫外線照射および水素プラズマ暴露の影響
- Author(s)
  吉村智
- Organizer
  第53回真空に関する連合講演会
- Place of Presentation
  甲南大学ポートアイランドキャンパス
- Data Source
  KAKENHI-PROJECT-22244075
[Presentation] Application of ion beam induced chemical vapor deposition for SiC film formation
- Author(s)
  S. Yoshimura, S. Sugimoto, K. Murai, K. Honjo, M. Kiuchi
- Organizer
  The 7th International Symposium on Surface Science (ISSS-7)
- Place of Presentation
  Kunibiki Messe, Matsue, Shimane, Japan
- Year and Date
  2014-11-02 – 2014-11-06
- Data Source
  KAKENHI-PROJECT-25287154
[Presentation] Low energy metal iom beam injection to SiO2 thin films for development of novel catalysts
- Author(s)
  S. Yoshimura
- Organizer
  25th International Conference on Atomic Collisions in Solids (ICACS-25), (21-25 October, 2012) & 8th International Symposium on Swift Heavy Ions in Matter (SHIM2012)
- Place of Presentation
  Kyoto University, Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-22244075

1. KIUCHI Masato (50356862)

# of Collaborated Projects: 5 results

# of Collaborated Products: 50 results
2. GOTO Seiichi (90029140)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
3. SUGIMOTO Satoshi (70187665)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
4. OSKADA Shigefumi (40135661)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
5. OKUBO Mamoru (50243168)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
6. HAMAGUCHI Satoshi (60301826)

# of Collaborated Projects: 3 results

# of Collaborated Products: 56 results
7. INOMOTO Michiaki (00324799)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. SHIKATA Shinichi (00415689)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
9. YAMADA Hideaki (90443233)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. KITANO Katsuhisa (20379118)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. YASUDA Makoto (40273601)

# of Collaborated Projects: 1 results

# of Collaborated Products: 9 results
12. OHI Shoichi (50029154)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. SAMUKAWA Seiji (30323108)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 上田良夫 (30193816)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. 竹内孝江 (80201606)

# of Collaborated Projects: 1 results

# of Collaborated Products: 12 results
16. NAKAJIMA Yuji

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. KIDA Takehisa

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. CHOUTEAU SIMON

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. SPISKE LUCAS

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

YOSHIMURA Satoru 吉村 智

吉村 智 ヨシムラ サトル

Research Projects

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Co-Researchers

ナノクラスターイオンビーム技術とSiC, GeC, GaNのストイキオメトリ結晶成長への応用Principal Investigator

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Data-driven plasma diagnostics techniques for semiconductor process applicationsPrincipal Investigator

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Surface reaction analyses of plasma-assisted atomic layer processesPrincipal Investigator

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Development of organometallic molecular ion beam deposition method for the stoichiometric crystal growthPrincipal Investigator

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Indium implantations onto porous zeolites for the development of novel catalystsPrincipal Investigator

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Application of ion beam induced chemical vapor deposition for SiC film formationPrincipal Investigator

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Low energy indium ion beam injection for the development of novel catalystsPrincipal Investigator

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複数断面の軟X線計算機トモグラフィーによるFRCプラズマ内部構造の動的変化の研究Principal Investigator

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YOSHIMURA Satoru 吉村智

吉村智ヨシムラサトル