Mita Yoshio 三田吉郎

… Alternative Names

MITA Yoshio 三田吉郎

Less

Researcher Number	40323472
Other IDs
External Links
Affiliation (Current)	2025: 東京大学, 大学院工学系研究科(工学部), 教授
Affiliation (based on the past Project Information) *help	2021 – 2025: 東京大学, 大学院工学系研究科(工学部), 教授 2016 – 2019: 東京大学, 大学院工学系研究科(工学部), 准教授 2011 – 2016: 東京大学, 工学(系)研究科(研究院), 准教授 2007 – 2010: Graduate School of Engineering, Department of Electrical Engineering, Associate Professor 2006: 東京大学, 大学院工学系研究科, 助教授 … More 2005: 東京大学, 大学院・工学系研究科, 助教授 2001 – 2004: Graduate School of Engineering, The University of Tokyo, Lecturer, 大学院・工学系研究科, 講師 2000: 東京大学, 大規模集積システム設計教育研究センター, 助手 Less
Review Section/Research Field	Principal Investigator Electron device/Electronic equipment / Medium-sized Section 21:Electrical and electronic engineering and related fields Except Principal Investigator Electronic materials/Electric materials / Medium-sized Section 21:Electrical and electronic engineering and related fields / Medium-sized Section 30:Applied physics and engineering and related fields / Electronic materials/Electric materials / Production engineering/Processing studies / 電力工学・電気機器工学
Keywords	Principal Investigator MEMS / CMOS-MEMS / マイクロマシン / 電子デバイス・集積回路 / Deep-RIE / VLSI / 三次元集積回路 / チップレット / テラヘルツ応用 / 知能ロボティックス … More / 電子デバイス・機器 / 知能ロボティクス / 先端機能デバイス / 精密部品加工 / バイオミメティクス / マイクロアクチュエータ / 電気浸透流 / 高電圧集積回路 / 太陽電池 / 自律分散 / ＶＬＳＩ / ＣＭＯＳ－ＭＥＭＳ / 自律分散システム / オンチップ太陽電池 / ポストプロセス / スマートセンサ情報システム / 三次元形状検出 / 光物性 / マイクロ・ナノデバイス / 沿面放電 / 深掘りRIE / 特徴抽出 / アスペクト比 / バルクマイクロマシーニング / 配線爆発 / 初期視覚処理 … More Except Principal Investigator 画像認識 / VLSI / VLSIシステム / 心理学的脳モデル / Image recognition / 強誘電体メモリ / アナログVLSI / 連想プロセッサ / トポロジカル工学 / MEMS工学 / TopoMEMS / トポロジカル電気回路 / MEMSアニーリング・マシーン / トポロジカル物性物理学 / トポロジカル絶縁体 / トポロジカル電気工学 / トポロジカル・エレクトロニクス / トポロジカル電気機械システム / トポロジカルMEMS / トポロジカル・パワー伝送 / トポロジカル・ワイヤレス通信 / トポロジカル5G技術 / トポロジカル集積回路 / トポロジカルMEMS工学 / メンブレン / メタマテリアル / 真空紫外光 / 非線形光学 / フォトニック結晶 / ego-motion perception / object tracking / gesture recognition / image recognition / directional edge detection / motion field / CMOS image sensor / brain processor / 時間領域演算回路 / Ego-Motion Detection / CMOSイメージセンサ / 動画像処理 / 動きの認識 / エッジ検出フィルター / Principal Motion Distribution / 隠れマルコフモデル / ジェスチャー理解 / 動き検出 / ego motion detection / エッヂ情報 / 動きベクトル検出 / ego-motion認識 / 動作認識 / 動き場生成 / 生体情報処理 / 物体追跡 / エゴモーション認識 / ジェスチャー認識 / 方向性エッジ検出 / 動きフィールド生成 / CMOSイメージセンサー / ブレインプロセッサー / Edge Filtering / Face Detection / DP Matching / Hetero Gate Floating Gate MOS / Ferroelectric Memory / VLSI System / Psychological Brain Model / ワイドバンドCDMA / CDMAマッチトフィルタ / 言語認識 / 音声認識 / 右脳・左脳統合プロセサ / アナログ連想回路 / Multiple Clueサーチ / PPEDベクトル / 遅延ロジック / シーケンスマッチング / エピソード連想 / エピソード記憶 / マッチトフィルタ / CDMA / エッジフィルタ / エッジ検出 / 顔検出 / DPマッチング / Hetero Gate Floatin Gate MOS / Ferroelectric memory / Analog VLSI / Psychological brain model / Brain computing / Medical radiograph analysis / Associative processor / エッヂ検出 / νMOS / 連想プロセサ / 特徴抽出 / ベクトル化 / 矯正歯科 / セファロ分析 / 特徴ベクトル / Generarized Lloidアルゴリズム / CMOS / 医用X線写真解析 / 集積回路 / 手書き文字認識 / 多重解像度 / 低消費電力 / Zoom Lens Metaphor / CMOS VLSI / 連想処理 / 心理学的モデル / 脳型コンピュータ / 医用X線写真診断 / メタマテラル・表面プラズモン / メタマテリアル・表面プラズモン / ナノマイクロ加工 / 正則化 / Lカーブ手法 / 沿面放電 / サブミクロン / 信号変換集積回路 / 帯電測定 / MEMS / 静電容量型表面電位計 Less

Academic Platform towards Sub-THz High-Power, Highly-dense integrated circuitPrincipal Investigator
- Principal Investigator
  
  三田吉郎
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 21:Electrical and electronic engineering and related fields
- Research Institution
  The University of Tokyo
Topological MEMS Engineering
- Principal Investigator
  
  江澤雅彦
- Project Period (FY)
  2023 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 21:Electrical and electronic engineering and related fields
- Research Institution
  The University of Tokyo
Development of Vacuum Ultraviolet Coherent Light Source Technology Using Dielectric Nanomembrane Artificial Nanotructures
- Principal Investigator
  
  小西邦昭
- Project Period (FY)
  2021 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 30:Applied physics and engineering and related fields
- Research Institution
  The University of Tokyo
Expolatory Academic Research on In-water Sensor Platform by Silicon and Organic Material IntegrationPrincipal Investigator
- Principal Investigator
  
  Mita Yoshio
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  The University of Tokyo
Plasmonic nanostructures realizing miniaturized infrared spectrometric image-array-sensor for endoscopy
- Principal Investigator
  
  Delaunay Jean-Jacques
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
An Energy-Autonomous Distributed Water Strider by High-Voltaged Standard VLSI and MEMS IntegrationPrincipal Investigator
- Principal Investigator
  
  MITA Yoshio
- Project Period (FY)
  2011 – 2015
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  The University of Tokyo
A Deep-Trench Optical-Detector Integrated Early Vision Processor and an Application to Motion DetectionPrincipal Investigator
- Principal Investigator
  
  MITA Yoshio
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  The University of Tokyo
集積回路技術を活用した高時間・高空間分解アレイ型表面電荷密度分布センサの開発
- Principal Investigator
  
  日高邦彦
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  The University of Tokyo
LSI情報処理回路と集積化したMEMSナノプローブによる放電電荷分布の高精細測定Principal Investigator
- Principal Investigator
  
  三田吉郎
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  The University of Tokyo
A Motion-Analysis VLSI Image Sensor System Extracting the Meaning of Action From Moving Images
- Principal Investigator
  
  SHIBATA Tadashi
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  The University of Tokyo
知覚情報処理回路の配線爆発を解消するMEMS融合型VLSIPrincipal Investigator
- Principal Investigator
  
  三田吉郎
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  The University of Tokyo
A Psychologically-Inspired VLSI Brain Model System Implementing Subconscious Information Processing Based on Analog/Digital Marged Computation
- Principal Investigator
  
  SHIBATA Tadashi
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  The University of Tokyo
An Intelligent Image-Recognition VLSI System Employing Neuron-MOS Feature Extracting Circuitry
- Principal Investigator
  
  SHIBATA Tadashi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  The University of Tokyo

[Book] ＭＥＭＳデバイス徹底入門2018
- Author(s)
  三田　吉郎
- Total Pages
  192
- Publisher
  日刊工業新聞社
- ISBN
  9784526078712
- Data Source
  KAKENHI-PROJECT-16H04345
[Book] ドライ・ウエットエッチング技術全集, 4章 9節, MEMSにおける高アスペクト、ノッチフリーのドライエッチング加工2009
- Author(s)
  三田吉郎, 他(分担執筆)
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-20686024
[Book] ドライ・ウエットエッチング技術全集2009
- Author(s)
  三田吉郎他(分担執筆)
- Total Pages
  425
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-20686024
[Book] 最新機械・機器要素技術 3章 15節, センサ・アクチュエータの加工(光学リソ含む)2008
- Author(s)
  吉川昌範(編著), 三田吉郎, 他(分担執筆)
- Publisher
  NGTコーポレーション
- Data Source
  KAKENHI-PROJECT-20686024
[Book] 最新機械・機器要素技術 2章 10節, センサー2008
- Author(s)
  吉川昌範(編著), 三田吉郎, 他(分担執筆)
- Publisher
  NGTコーポレーション
- Data Source
  KAKENHI-PROJECT-20686024
[Journal Article] On-Chip CMOS-MEMS-Based Electroosmotic Flow Micropump Integrated With High-Voltage Generator2020
- Author(s)
  Okamoto Yuki、Ryoson Hiroyuki、Fujimoto Koji、Ohba Takayuki、Mita Yoshio
- Journal Title
  
  Journal of Microelectromechanical Systems
  
  Volume: 29 Issue: 1 Pages: 86-94
- DOI
  10.1109/jmems.2019.2953290
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H04345, KAKENHI-PROJECT-17J04382
[Journal Article] Area-selective Cu Film Growth on TiN and SiO<sub>2</sub> by Supercritical Fluid Deposition2020
- Author(s)
  Usami Naoto、Ota Etsuko、Higo Akio、Momose Takeshi、Mita Yoshio
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 140 Issue: 1 Pages: 31-36
- DOI
  10.1541/ieejsmas.140.31
- NAID
  130007779002
- ISSN
  1341-8939, 1347-5525
- Year and Date
  2020-01-01
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18J10240, KAKENHI-PROJECT-16H04345
[Journal Article] Influence of Pretreatment on Adhesion Quality of Supercritical-fluid-deposited Cu Film on Si2019
- Author(s)
  Usami Naoto、Ota Etsuko、Momose Takeshi、Higo Akio、Mita Yoshio
- Journal Title
  
  Sensors and Materials
  
  Volume: 31 Issue: 8 Pages: 2481
- DOI
  10.18494/SAM.2019.2316
- ISSN
  0914-4935, 2435-0869
- Year and Date
  2019-08-19
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18J10240, KAKENHI-PROJECT-16H04345
[Journal Article] A Device for Localized Measurement of Small Particles with Electrode-Integrated Small Pores2019
- Author(s)
  Takeshiro Yudai、Usami Naoto、Okamoto Yuki、Takada Takeaki、Higo Akio、Ikeno Rimon、Washizu Nobuei、Asada Kunihiro、Mita Yoshio
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 139 Issue: 8 Pages: 271-276
- DOI
  10.1541/ieejsmas.139.271
- NAID
  130007686521
- ISSN
  1341-8939, 1347-5525
- Year and Date
  2019-08-01
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18J10240, KAKENHI-PROJECT-16H04345, KAKENHI-PROJECT-17J04382
[Journal Article] A Micro Racetrack Optical Resonator Test Structure to Optimize Pattern Approximation in Direct Lithography Technologies2019
- Author(s)
  Higo Akio、Sawamura Tomoki、Fujiwara Makoto、Ota Etsuko、Mizushima Ayako、Lebrasseur Eric、Arakawa Taro、Mita Yoshio
- Journal Title
  
  2019 IEEE Conference on Microelectronic Test Structures (ICMTS 2019), 18-21 Mar, Kita-Kyushu, Japan
  
  Volume: 1 Pages: 4-7
- DOI
  10.1109/icmts.2019.8730981
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] Continuity assessment for supercritical-fluids-deposited (SCFD) Cu film as electroplating seed layer2019
- Author(s)
  Usami Naoto、Ota Etsuko、Higo Akio、Momose Takeshi、Mita Yoshio
- Journal Title
  
  2019 IEEE Conference on Microelectronic Test Structures (ICMTS 2019), 18-21 Mar, Kita-Kyushu, Japan
  
  Volume: 1 Pages: 54-57
- DOI
  10.1109/icmts.2019.8730945
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] A zero-power sensing MEMS shock sensor with a latch-reset mechanism for multi-threshold events monitoring2019
- Author(s)
  Reddy R. Ranga、Komeda Keisuke、Okamoto Yuki、Lebrasseur Eric、Higo Akio、Mita Yoshio
- Journal Title
  
  Sensors and Actuators A: Physical
  
  Volume: 295 Pages: 1-10
- DOI
  10.1016/j.sna.2019.05.036
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H04345, KAKENHI-PROJECT-17J04382
[Journal Article] Experimental Comparison of Rapid Large-area Direct Electron Beam Exposure Methods with Plasmonic Devices2019
- Author(s)
  Higo Akio、Sawamura Tomoki、Fujiwara Makoto、Lebrasseur Eric、Mizushima Ayako、Ota Etsuko、Mita Yoshio
- Journal Title
  
  Sensors and Materials
  
  Volume: 31 Issue: 8 Pages: 2511
- DOI
  10.18494/SAM.2019.2443
- ISSN
  0914-4935, 2435-0869
- Year and Date
  2019-08-19
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] Stick-to-Analyze Zeta Potential Measurement Chip with Integrated Electroosmotic Micropump and Liquid Flow Sensor2019
- Author(s)
  Okamoto Yuki、Fujimoto Koji、Ryoson Hiroyuki、Ohba Takayuki、Mita Yoshio
- Journal Title
  
  The 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)
  
  Volume: 1 Pages: 437-440
- DOI
  10.1109/memsys.2019.8870895
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] Damage Assessment Structure of Test-Pad Post-Processing on CMOS LSIs2019
- Author(s)
  Okamoto Yuki、Mizushima Ayako、Usami Naoto、Kinoshita Jun、Higo Akio、Mita Yoshio
- Journal Title
  
  2019 IEEE Conference on Microelectronic Test Structures (ICMTS 2019), 18-21 Mar, Kita-Kyushu, Japan
  
  Volume: 1 Pages: 184-187
- DOI
  10.1109/icmts.2019.8730991
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] High-Resolution Piezoelectric Mems Scanner Fully Integrated With Focus-Tuning and Driving Actuators2019
- Author(s)
  Inagaki Shunsuke、Okamoto Yuki、Higo Akio、Mita Yoshio
- Journal Title
  
  The 20th International Conference on Solid State Sensors and Actuators (Transducers 2019 - EUROSENSORS XXXIII), 23-27 June 2019, Berlin, Germany
  
  Volume: 1 Pages: 474-477
- DOI
  10.1109/transducers.2019.8808636
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] Z-Axis Controllable Mille-Feuille Electrode Electrorotation Device Utilizing Levitation Effect2019
- Author(s)
  Okamoto Yuki、Tsuchiya Taku、Moslonka Charles、Lin Yu-Sheng、Tsang Sung、Marty Frederic、Mizushima Ayako、Sun Chen-li、Wang Hsiang-Yu、Tixier-Mita Agnes、Francais Olivier、Le Pioufle Bruno、Mita Yoshio
- Journal Title
  
  The 20th International Conference on Solid State Sensors and Actuators (Transducers 2019 - EUROSENSORS XXXIII), 23-27 June 2019, Berlin, Germany
  
  Volume: 1 Pages: 213-216
- DOI
  10.1109/transducers.2019.8808820
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] Impact Test for Ensuring Reliability of Gas Sensors Using Large Particle Size-Zeolite2018
- Author(s)
  Yamada Kentaro、Grand Julien、Okamoto Yuki、Reddy Rangareddygari Ranga、Denoual Matthieu、Mintova Svetlana、Tixier-Mita Agnes、Mita Yoshio
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 138 Issue: 9 Pages: 430-434
- DOI
  10.1541/ieejsmas.138.430
- NAID
  130007479703
- ISSN
  1341-8939, 1347-5525
- Year and Date
  2018-09-01
- Language
  Japanese
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17J04382, KAKENHI-PROJECT-16H04345
[Journal Article] A Review on Increasing of Breakdown Voltage of Standard CMOS LSI Circuits by MEMS Post-Process2018
- Author(s)
  Okamoto Yuki、Mita Yoshio
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 138 Issue: 7 Pages: 319-326
- DOI
  10.1541/ieejsmas.138.319
- NAID
  130007387001
- ISSN
  1341-8939, 1347-5525
- Year and Date
  2018-07-01
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17J04382, KAKENHI-PROJECT-16H04345
[Journal Article] On-Chip High-Voltage Charge Pump With MEMS Post-Processed Standard 5-V CMOS on SOI for Electroosmotic Flow Micropumps2018
- Author(s)
  Okamoto Yuki、Takehara Hiroaki、Fujimoto Koji、Ichiki Takanori、Ohba Takayuki、Mita Yoshio
- Journal Title
  
  IEEE Electron Device Letters
  
  Volume: 39 Issue: 6 Pages: 851-854
- DOI
  10.1109/led.2018.2829925
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17J04382, KAKENHI-PROJECT-16H04345
[Journal Article] Test structure for electrical assessment of UV laser direct fine patterned material2018
- Author(s)
  Usami Naoto、Higo Akio、Mizushima Ayako、Okamoto Yuki、Mita Yoshio
- Journal Title
  
  IEEE 31st International Conference on Microelectronic Test Structures (ICMTS 2018)
  
  Volume: 1 Pages: 185-188
- DOI
  10.1109/icmts.2018.8383794
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] High-uniformity centimeter-wide Si etching method for MEMS devices with large opening elements2018
- Author(s)
  Okamoto Yuki、Tohyama Yukiya、Inagaki Shunsuke、Takiguchi Mikio、Ono Tomoki、Lebrasseur Eric、Mita Yoshio
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 57 Issue: 4S Pages: 04FC03-04FC03
- DOI
  10.7567/jjap.57.04fc03
- NAID
  210000148868
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04345, KAKENHI-PROJECT-17J04382
[Journal Article] Progress and opportunities in high-voltage microactuator powering technology towards one-chip MEMS2018
- Author(s)
  Mita Yoshio、Hirakawa Atsushi、Stefanelli Bruno、Mori Isao、Okamoto Yuki、Morishita Satoshi、Kubota Masanori、Lebrasseur Eric、Kaiser Andreas
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 57 Issue: 4S Pages: 04FA05-04FA05
- DOI
  10.7567/jjap.57.04fa05
- NAID
  210000148853
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345, KAKENHI-PROJECT-17J04382
[Journal Article] An on-chip test structure for studying the frictional behavior of deep-RIE MEMS sidewall surfaces2018
- Author(s)
  Reddy R Ranga、Okamoto Yuki、Mita Yoshio
- Journal Title
  
  IEEE 31st International Conference on Microelectronic Test Structures (ICMTS 2018)
  
  Volume: 1 Pages: 173-178
- DOI
  10.1109/icmts.2018.8383792
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] Microscale ultrahigh-frequency resonant wireless powering for capacitive and resistive MEMS actuators2018
- Author(s)
  Mita Yoshio、Sakamoto Naoyuki、Usami Naoto、Frapp? Antoine、Higo Akio、Stefanelli Bruno、Shiomi Hidehisa、Bourgeois Julien、Kaiser Andreas
- Journal Title
  
  Sensors and Actuators A: Physical
  
  Volume: 275 Pages: 75-87
- DOI
  10.1016/j.sna.2018.03.020
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18J10240, KAKENHI-PROJECT-16H04345
[Journal Article] Fabrication of PbS QD/Silicon Hybrid Infrared Photodiode for LSI Platform2018
- Author(s)
  Higo Akio、Mita Yoshio、Wang Haibin、Kubo Takaya、Segawa Hiroshi、Usami Naoto、Okamoto Yuki、Yamada Kentaro、Takeshiro Yudai、Sugiyama Masakazu
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 138 Issue: 7 Pages: 307-311
- DOI
  10.1541/ieejsmas.138.307
- NAID
  130007386998
- ISSN
  1341-8939, 1347-5525
- Year and Date
  2018-07-01
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17J04382, KAKENHI-PROJECT-18J10240, KAKENHI-PROJECT-16H04345
[Journal Article] Mask-programmable on-chip photovoltaic cell array2018
- Author(s)
  Takeshiro Y.、Okamoto Y.、Mita Y.
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 1052 Pages: 012144-012144
- DOI
  10.1088/1742-6596/1052/1/012144
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] A micromachined all-solid on-chip thin-film battery towards uninterruptible photovoltaic cells2018
- Author(s)
  Kuriyama Taisei、Suzuki Akiyoshi、Okamoto Yuki、Kimura Isao、Morikawa Yasuhiro、Mita Yoshio
- Journal Title
  
  018 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 23-25 May, Roma, Italy,
  
  Volume: 1 Pages: 153-156
- DOI
  10.1109/dtip.2018.8394215
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] 15-year educational experience on autonomous electronic information devices by flipped classroom and try-by-yourself methods2017
- Author(s)
  Mita Yoshio、Kawahara Yoshihiro
- Journal Title
  
  IET Circuits, Devices & Systems
  
  Volume: 11 Issue: 4 Pages: 321-329
- DOI
  10.1049/iet-cds.2016.0406
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis2017
- Author(s)
  Okamoto Yuki、Lebrasseur Eric、Mori Isao、Marty Frederic、Mita Yoshio
- Journal Title
  
  IEEE Transactions on Semiconductor Manufacturing
  
  Volume: 30 Issue: 3 Pages: 201-208
- DOI
  10.1109/tsm.2017.2694845
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345, KAKENHI-PROJECT-17J04382
[Journal Article] A scalable, optically-driven, high-voltage switch for remote MEMS device operation fabricated with a standard CMOS process2017
- Author(s)
  Isao Mori, Yuki Okamoto, Yoshio Mita
- Journal Title
  
  IEICE Electron. Express
  
  Volume: 14 Issue: 3 Pages: 20161174-20161174
- DOI
  10.1587/elex.14.20161174
- NAID
  130005330369
- ISSN
  1349-2543
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H04345
[Journal Article] On-chip High-voltage Silicon Photovoltaic Cell Array Made by a CMOS Post-processed Device Isolation Method for Driving a MEMS Actuator in a Remote Manner2016
- Author(s)
  Isao Mori, Eric Lebrasseur, Masanori Kubota and Yoshio Mita
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 136 Issue: 2 Pages: 24-30
- DOI
  10.1541/ieejsmas.136.24
- NAID
  130005122064
- ISSN
  1341-8939, 1347-5525
- Language
  English
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-23686053
[Journal Article] Characterization of zeolite-trench-embedded microcantilevers with CMOS strain gauge for integrated gas sensor applications2016
- Author(s)
  Shu Inoue, Matthieu Denoual, Hussein Awala, Julien Grand, Sveltana Mintova, Agnes Tixier-Mita and Yoshio Mita
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 4S Pages: 04EF14-04EF14
- DOI
  10.7567/jjap.55.04ef14
- NAID
  210000146337
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23686053
[Journal Article] A Nearest Neighbor Classifier Employing Critical Boundary Vectors for Efficient On-Chip Template Reduction2016
- Author(s)
  Wenjun Xia, Yoshio Mita, Tadashi Shibata
- Journal Title
  
  IEEE Transactions on Neural Networks and Learning Systems
  
  Volume: 27 Issue: 5 Pages: 1094-1107
- DOI
  10.1109/tnnls.2015.2437901
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-23686053
[Journal Article] Discharging-phototransistor-integrated high-voltage Si photovoltaic cells for fast driving demonstration of an electrostatic MEMS actuator by wavelength modulation2016
- Author(s)
  Isao Mori, Eric Lebrasseur and Yoshio Mita
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 4S Pages: 04EF12-04EF12
- DOI
  10.7567/jjap.55.04ef12
- NAID
  210000146335
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-23686053
[Journal Article] Independent light-trapping cavity for ultra-sensitive plasmonic sensing2014
- Author(s)
  Y.-L. Ho, L.-C. Huang, E. Lebrasseur, Y. Mita, and J.-J. Delaunay
- Journal Title
  
  Applied Physics Letters
  
  Volume: 105 Issue: 6 Pages: 061112-061112
- DOI
  10.1063/1.4893275
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-14J09884, KAKENHI-PROJECT-23686053, KAKENHI-PROJECT-25630019, KAKENHI-PROJECT-26289013
[Journal Article] A heat balanced sigma-delta uncooled bolometer2014
- Author(s)
  M Denoual, D Brouard, A Veith, O De Sagazan, M Pouliquen, P Attia, E Lebrasseur, Y Mita and G Allegre
- Journal Title
  
  Meas. Sci. Technol.
  
  Volume: 25 Issue: 6 Pages: 065101-065101
- DOI
  10.1088/0957-0233/25/6/065101
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23686053
[Journal Article] Power-Regulated Thermal Actuator Based on UV-Patterned Polyimides for a Ciliary Motion System2013
- Author(s)
  Julien Malapert, Satoshi Morishita, Manabu Ataka, Hiroyuki Fujita, Dominique Collard and Yoshio Mita
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 133 Issue: 3 Pages: 77-84
- DOI
  10.1541/ieejsmas.133.77
- NAID
  10031155389
- ISSN
  1341-8939, 1347-5525
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23686053
[Journal Article] Silicon sub-micron-gap deep trench Pirani vacuum gauge for operation at atmospheric pressure2011
- Author(s)
  Masanori Kubota, Yoshio Mita, Masakazu Sugiyama
- Journal Title
  
  J.Micromech.Microeng.
  
  Volume: 21 Pages: 45034-45034
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686024
[Journal Article] Silicon sub-micron-gap deep trench Pirani vacuum gauge for operation at atmospheric pressure2011
- Author(s)
  Masanori Kubota, Yoshio Mita, and Masakazu Sugiyama
- Journal Title
  
  J. Micromech. Microeng.
  
  Volume: 21 Issue: 4 Pages: 45034-45034
- DOI
  10.1088/0960-1317/21/4/045034
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23686053
[Journal Article] Demonstration of a wireless driven MEMS pond skater that uses EWOD technology2009
- Author(s)
  Y.Mita, et.al
- Journal Title
  
  Journal of Solid-State Electronics
  
  Volume: Vol.53 Pages: 798-802
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686024
[Journal Article] Test Structure for Characterizing Low Voltage Coplanar EWOD System2009
- Author(s)
  Yifan Li, Yoshio Mita, Leslie I. Haworth, William Parkes, Masanori Kubota, Anthony J. Walton
- Journal Title
  
  IEEE Transactions on Semiconductor Manufacturing, IEEE Transactions
  
  Volume: Vol. 22, No. 1 Pages: 88-95
- Data Source
  KAKENHI-PROJECT-20686024
[Journal Article] Demonstration of a wireless driven MEMS pond skater that uses EWOD technology2009
- Author(s)
  Yoshio Mita, Y. Li, M. Kubota, S. Morishita, W. Parkes, L.I. Haworth, B.W. Flynn, J.G. Terry, T.-B. Tang, A.D. Ruthven, S. Smith and A.J. Walton
- Journal Title
  
  Journal of Solid-State Electronics
  
  Volume: Vol. 53 Pages: 798-802
- Data Source
  KAKENHI-PROJECT-20686024
[Journal Article] Polarization transmissive photovoltaic film device consisting of Siphotodiode wire-grid2008
- Author(s)
  Kenichiro Hirose, Yoshio Mita, et.al.
- Journal Title
  
  J. Opt. A : Pure Appl. Opt. 10
  
  Pages: 44014-44014
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686024
[Journal Article] Polarization transmissive photovoltaic film device consisting of Si photodiode wire-grid2008
- Author(s)
  Kenichiro Hirose, Yoshio Mita, Yoshiaki Imai, Freederic Marty, Tarik Bourouina, Kunihiro Asada, Shuichi Sakai, Tadashi Kawazoe and Motoichi Ohtsu
- Journal Title
  
  Journal of Optics A: Pure Appl. Opt.
  
  Volume: 10 Pages: 44014-44014
- Data Source
  KAKENHI-PROJECT-20686024
[Journal Article] Electric Ejection of Viscous Inks From MEMS Capillary Array Head for Direct Drawing of Fine Patterns2008
- Author(s)
  R. Ohigashi, K. Tsuchiya, Yoshio Mita, and H. Fujita
- Journal Title
  
  Journal of Microelectromechanical Systems 17
  
  Pages: 272-277
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686024
[Journal Article] Electric Ejection of Viscous Inks From MEMS Capillary Array Head for Direct Drawing of Fine Patterns2008
- Author(s)
  Ryoichi Ohigashi, Katsunori Tsuchiya, Yoshio Mita, and Hiroyuki Fujita
- Journal Title
  
  Journal of Microelectromechanical Systems
  
  Volume: Vol. 17, No.2 Pages: 272-277
- Data Source
  KAKENHI-PROJECT-20686024
[Journal Article] Test Structure for Characterizing Low Voltage Coplanar EWOD System2008
- Author(s)
  Yifan Li, Yoshio Mita et.al.
- Journal Title
  
  IEEE Transactions on Semiconductor Manufacturing 22
  
  Pages: 88-95
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686024
[Journal Article] SOIウェハ上における沿面放電現象2007
- Author(s)
  林純也, 安井遼, 熊田亜紀子, 日高邦彦, 三田吉朗
- Journal Title
  
  平成19年電気学会全国大会論文集 Vol. 1
  
  Pages: 79-79
- Data Source
  KAKENHI-PROJECT-17656092
[Journal Article] SOIウェハ上における沿面放電現象2007
- Author(s)
  林純也, 安井遼, 熊田亜紀子, 日高邦彦, 三田吉郎
- Journal Title
  
  平成19年電気学会全国大会 K327-C2
  
  Pages: 1-66
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] Silicon on PDMS' : SOI Extra Thin Active Layer Transfered to Organic Film for Flexible Applications2007
- Author(s)
  Sakda Srisomrun, Yoshio Mita, Kazunori Hoshino, Masakazu Sugiyama, Tadashi Shibata
- Journal Title
  
  IEEE International Conference on MicroElectroMechanical Systems (MEMS 2007) Jan.22-25
  
  Pages: 263-266
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] ナノ開口・大開口のエッチングを可能とする輪郭描画法2006
- Author(s)
  久保田雅則, 三田吉郎, マーティー・フレデリック, ブルイナ・タリク, 柴田直
- Journal Title
  
  電気学会センサ・マイクロマシン部門誌 Volume 126-E Number 6
  
  Pages: 235-240
- NAID
  10017582286
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation2006
- Author(s)
  Yamato Fukuta, Yves Andre Chapuis, Yoshio Mita, Hiroyuki Fuiita
- Journal Title
  
  IEEE Journal of Micro-Electro-Mechanical Systems Vol.15,No.4
  
  Pages: 212-226
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] Contour Lithography Methods for DRIE Fabrication of Nanometre-Millimetre-Scale Coexisting Microsystems2006
- Author(s)
  Yoshio Mita, Masanori Kubota, Tomoyuki Harada, Frederic Marty, Bassam Saadany, Tarik Bourouina, Tadashi Shibata
- Journal Title
  
  Journal of Micromechanics and Microengineering Vol.16
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] An improved LOCOS-contour method for fabricating nanometer-and-millimeter-scale coexisting structures2006
- Author(s)
  M.Kubota, Y.Mita, F.Marty, T.Bourouina, T.Shibata
- Journal Title
  
  MicroMechanics Europe Workshop, Goteborg, 1
  
  Pages: 107-110
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] Aspect Ratio Dependent Scalloping Attenuation in DRIE and an Application to Low-Loss Fiber-Optical Switch2006
- Author(s)
  Yoshio Mita, M.Kubota, M.Sugiyama, F.Marty, T.Bouroina, T.Shibata
- Journal Title
  
  IEEE International Conference on MicroElectro Mechanical Systems (MEMS2006), Istanbul 1
  
  Pages: 114-117
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] A highly simple failure detection method for electrostatic microactuators : application to automatic testing and accelerated lifetime estimation2006
- Author(s)
  B.Caillard, Y.Mita, Y.Fukuta, T.Shibata, H.Fujita
- Journal Title
  
  IEEE Transactions on Semiconductor Manufacturing 19,No.1
  
  Pages: 35-42
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] Free-Space Tunable and Drop Optical Filters Using Vertical Bragg Mirros on Silicon2006
- Author(s)
  Bassam Saadany, Maurine Malak, Masanori Kubota, Frederic Marty, Yoshio Mita, Diaa Khalil, Tarik Bourouina
- Journal Title
  
  IEEE Journal of Selected Topics in Quantum Electronics Vol.12,No.6
  
  Pages: 1480-1488
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] High Aspect Ratio Nano-Structures (HARNS) for Photonic MEMS Based on Vertical DBR Architecture2005
- Author(s)
  F.Marty, B.Saadany, T.Bourouina, Yoshio Mita, T.Shibata
- Journal Title
  
  Int.Conf.on Solid-State Sensors, Actuators and Microsystems (Transducers '05)
- Data Source
  KAKENHI-PROJECT-15760236
[Journal Article] An Analog Edge-Filtering Processor Employing Only-Nearest-Neighbor Interconnects2005
- Author(s)
  Y.Nakashita, Y.Mita, T.Shibata
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44,No.4B
  
  Pages: 2119-2124
- NAID
  10022538747
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205043
[Journal Article] An Analog Edge-Filtering Processor Employing Only-Nearest-Neighbor Interconnects2005
- Author(s)
  Y.Nakashita, Y.Mita, T.Shibata
- Journal Title
  
  Japanese Journal of Applied Physics (印刷中)
- NAID
  10022538747
- Data Source
  KAKENHI-PROJECT-14205043
[Journal Article] An Analog Edge-Filtering Processor Employing Only-Nearest-Neighbor Interconnects2005
- Author(s)
  Y.Nakashita, Y.Mita, T.Shibata
- Journal Title
  
  Japanese Journal of Applied Physics Vol. 44, No. 4B
  
  Pages: 2119-2124
- NAID
  10022538747
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205043
[Journal Article] An-Analog Edge-Filtering Processor Employing Only-Nearest-Neighbor Interconnects2005
- Author(s)
  Y.Nakashita, Y.Mita, T.Shibata
- Journal Title
  
  Japanese Journal of Applied Physics 44,No.4B
  
  Pages: 2119-2124
- NAID
  10022538747
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] Advanced Etching of Silicon Based On Deep Reactive Ion Etching For Silicon High Aspect Ratio Micro Structures And Three-Dimensional Micro- And Nano-Structures2005
- Author(s)
  F.Marty, L.Rousseau, B.Saadany, B.Mercier, O.Francais, Y.Mita, T.Bourouina
- Journal Title
  
  Microelectronics Journal, Circuits and Systems section Vol.36
  
  Pages: 673-677
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] Electrical Critical Dimension Measurement Method by Integration of Test Structure into MEMS Devices2005
- Author(s)
  K.Ito, Yoshio Mita, M.Kubota, F.Marty, T.Bourouina, T.Shibata
- Journal Title
  
  Int.Conf.on Solid-State Sensors, Actuators and Microsystems (Transducers '05)
- Data Source
  KAKENHI-PROJECT-15760236
[Journal Article] A Contour-Lithography-Method for Rapid and Precise Deep-Etched Nano-MEMS Structure Fabrication2005
- Author(s)
  Masanori Kubota, Yoshio Mita, Frederic Marty, Tarik Bourouina, Tadashi Shibata
- Journal Title
  
  In Proc. of International Conference on Solid-State Sensors and Actuators and Microsystems (Transducers 2005), Seoul 2
  
  Pages: 1449-1452
- Data Source
  KAKENHI-PROJECT-17760274
[Journal Article] A Contour-Lithography Method for Rapid and Precise Deep-Etched Nano-MEMS Structure Fabrication2005
- Author(s)
  M.Kubota, Yoshio Mita, K.Ito, F.Marty, T.Bourouina, T.Shibata
- Journal Title
  
  Int.Conf.on Solid-State Sensors, Actuators and Microsystems (Transducers '05)
- Data Source
  KAKENHI-PROJECT-15760236
[Journal Article] Batch bulk-micromachined high-precision metal-on-insulator microspires and their application to scanning tunneling microscopy2004
- Author(s)
  D.Kobayashi, Y.Mita, T.Shibata, T.Bourouina, H.Fujita
- Journal Title
  
  Journal of Micromechanics and Microengineering Vol.14, No.9
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205043
[Journal Article] Batch bulk-micromachined high-precision metal-on-insulator micro-spires and their application to scanning tunneling microscopy2004
- Author(s)
  D.Kobayashi, Y.Mita, T.Shibata, T.Bourouina, H.Fujita
- Journal Title
  
  Journal of Micromechanics and Microengineering 14,No.9
- Data Source
  KAKENHI-PROJECT-15760236
[Journal Article] Batch bulk-micromachined high-precision metal-on-insulator microspires and their application to scanning tunneling microscopy2004
- Author(s)
  D.Kobayashi, Y.Mita, T.Shibata, T.Bourouina, H.Fujita
- Journal Title
  
  Journal of Micromechanics and Microengineering vol.14,no.9
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205043
[Journal Article] An Analog Edge-Filtering Processor Employing Only-Nearest-Neighbor Interconnects2004
- Author(s)
  Y.Nakashita, Y.Mita, T.Shibata
- Journal Title
  
  Ext. Abstracts of the International Conference on Solid State Devices and Materials (SSDM 2004), Sep., Tokyo, Japan
  
  Pages: 356-357
- NAID
  10022538747
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205043
[Journal Article] An Analog Edge-Filtering Processor Employing Only-Nearest-Neighbor Interconnects,2004
- Author(s)
  Y.Nakashita, Y.Mita, T.Shibata
- Journal Title
  
  Extended Abstracts of the International Conference on Solid State Devices and Materials (SSDM '04), Tokyo Japan
  
  Pages: 356-357
- NAID
  10022538747
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205043
[Journal Article] Conveyor for Pneumatic Two-Dimensional Manipulation Realized by Arrayed MEMS and its Control2004
- Author(s)
  Y.Fukuta, M.Yanada, A.Ino, Yoshio Mita, Y.Chapuis, S.Konishi, H.Fujita
- Journal Title
  
  Journal of Robotics and Mechatronics (JRM) 16,No.2
  
  Pages: 163-170
- Data Source
  KAKENHI-PROJECT-15760236
[Journal Article] An Analog Edge-Filtering Processor Employing Only-Nearest-Neighbor Interconnects2004
- Author(s)
  Y.Nakashita, Yoshio Mita, T.Shibata
- Journal Title
  
  Japanese Journal of Applied Physics
- NAID
  10022538747
- Data Source
  KAKENHI-PROJECT-15760236
[Journal Article] High-Precision Metal-on-Insulator Micro Spires for Use in Non-magnetic-Probe Magnetic Microscopy,2003
- Author(s)
  D.Kobayashi, Y.Mita, T.Shibata, T.Bourouina, H.Fujita, P.Beauvillan
- Journal Title
  
  Proc. 14th MicroMechanics Europe Workshop (MME'03),Delft, The Netherlands
  
  Pages: 131-134
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205043
[Journal Article] High-Precision Metal-on-Insulator Micro Spires for Use in Nonmagnetic-Probe Magnetic Microscopy2003
- Author(s)
  D.Kobayashi, Y.Mita, T.Shibata, T.Bourouina, H.Fujita, P.Beauvillan
- Journal Title
  
  Proc. 14th MicroMechanics Europe Workshop (MME'03),Nov. 2-4, Delft, Netherlands.
  
  Pages: 131-134
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205043
[Journal Article] Bulk Micromachined Image-Forwarding Mirror Array for Feature Extraction VLSI Sensor System2002
- Author(s)
  Yoshio Mita, Tadashi Shibata
- Journal Title
  
  Proceedings of International Conference on Optical MEMS and Their Applications, Lugano, Switzerland, Aug. 2002.
  
  Pages: 205-206
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205043
[Journal Article] Bulk Micromachined Image-Forwarding Mirror Array for Feature Extraction VLSI Sensor System,2002
- Author(s)
  Yoshio Mita, Tadashi Shibata
- Journal Title
  
  Proceedings of International Conference on Optical MEMS and Their Applications, Lugano, Switzerland
  
  Pages: 205-206
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205043
[Presentation] Su-Schrieffer-Heeger Topological Electrical Circuit Using In-Plane Mutual Inductance2024
- Author(s)
  Ryohei TAKAHASHI, Kei MISUMI, Keigo TSUJI, Anne-Claire EILER, Shun YASUNAGA, Akio HIGO, Ryosho NAKANE, Tetsuya IIZUKA, Motohiko EZAWA, Yoshio MITA
- Organizer
  Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00171
[Presentation] OPERATION OF ARRAYED LOGIC ELEMENTS FOR MEMS ISING MACHINE2023
- Author(s)
  Shun Yasunaga, Motohiko Ezawa, Keigo Tsuji, Kei Misumi, Tomoki Sawamura, Shinji Tsuboi, Ayako Mizushima, Yukinori Ochiai, Akio Higo, and Yoshio Mita
- Organizer
  Transducers 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00171
[Presentation] "TopoMEMS varicaps'' - MEMS comb-drive variable capacitors with tailored stroke-to-capacitance2023
- Author(s)
  Yoshio MITA, Shun YASUNAGA, Keigo TSUJI, Akio HIGO, Tetsuya IIZUKA, Motohiko EZAWA
- Organizer
  Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00171
[Presentation] MEMS イジングマシンの実現に向けた双安定演算素子配列2023
- Author(s)
  安永竣, 江澤雅彦, 辻啓吾, 三角啓, 澤村智紀, 坪井伸二, 水島彩子, 落合幸徳, 肥後昭男, 三田吉郎
- Organizer
  第 40 回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-23H00171
[Presentation] CIRCULARLY POLARIZED VACUUM ULTRAVIOLET COHERENT LIGHT GENERATION USING A SQUARE LATTICE PHOTONIC CRYSTAL NANOMEMBRANE2021
- Author(s)
  Kuniaki Konishi, Daisuke Akai, Yoshio Mita, Makoto Ishida, Junji Yumoto, Makoto Kuwata-Gonokami
- Organizer
  The 21st International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H04660
[Presentation] Application of Open Target Research on CMOS-MEMS with New Materials to Industrial Innovation2019
- Author(s)
  Yoshio Mita, Yuta Nakayama, Kenji Suzuki, Takeshi Mizuno, Tokiko Endo, and Takeshi Yoshimura
- Organizer
  International Symposium on Electronics and Smart Devices (ISESD 2019), 8-9, October, Bali, Indonesia.
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] 積圧電アクチュエータによる自己変形を利用した可変焦点大面積MEMS 光スキャナ2019
- Author(s)
  稲垣俊典、岡本有貴、肥後昭男、三田吉郎
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19pm5-PS3-24
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] モノリシック集積多層電極による細胞電気回転測定の垂直位置制御2019
- Author(s)
  槌屋拓、岡本有貴、Moslonka Charles、Lin Yu-Sheng、Tsang Sung、Marty Frederic、水島彩子、Sun Chen-li、Wang Hsiang-Yu、Francais Olivier、Le Pioufle Bruno、三田吉郎
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19pm5-PS3-66
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] 2 段階パラメータランピングによる高アスペクト垂直深掘りトレンチの作製2019
- Author(s)
  栗山大成、ルブラッスールエリック、平川顕二、岩瀬正幸、小笠原宗博、依田孝、三田吉郎
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19am3-PS3-7
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] ”Trust and Coordinate” - Case Study in UTokyo Nanofabrication Site with Nanotechnology Platform2019
- Author(s)
  Yoshio Mita
- Organizer
  OECD Global Science Forum - Science Europe 2nd International Workshop on Optimising the operation and use of national Research Infrastructure, 28-29 Nov 2019, Sejong Hall, Seoul, Korea
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] ソフトマイクロアクチュエータを目指すP（VDF-TrFE）圧電薄膜加工2019
- Author(s)
  山口龍太郎、宇佐美尚人、松下裕司、吉村武、肥後昭男、三田吉郎
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19pm5-PS3-16
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] apanese Nanotechnology Platform, UTokyo VDEC Fabrication Site, and Collaboration Project with CNRS-RENATECH2019
- Author(s)
  Yoshio Mita and Michel de Labachererie
- Organizer
  2nd European Nanofabrication Research Infrastructure Symposium (ENRIS 2019), 16-18 June 2019, Enschede, the Netherland,
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] マイクロモジュラーロボットに向けたサブミリメートルスケール静電着脱機構の検証2019
- Author(s)
  三角啓、宇佐美尚人、肥後昭男、Piranda Benoit、Bourgeois Julien、三田吉郎
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、20am2-PS3-25
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] 失敗は成功の元: ナノテクノロジープラットフォームで試して拓く先端集積MEMS2019
- Author(s)
  三田吉郎
- Organizer
  第17回ナノテクノロジー総合シンポジウム, 2019年2月1日, 東京ビッグサイト
- Invited
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] 高アスペクト比深掘りトレンチの均一な電解めっきを可能とする超臨界流体薄膜堆積法で作製された低抵抗銅薄膜種層2019
- Author(s)
  宇佐美尚人、太田悦子、肥後昭男、百瀬健、三田吉郎
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19am3-PS3-23
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] モノリシック高電圧駆動回路集積CMOS-MEMS 電気浸透流マイクロポンプ2019
- Author(s)
  岡本有貴、良尊弘幸、藤本興治、大場隆之、三田吉郎
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2019、アクトシティ浜松、静岡県、19pm3-T-3
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] 産学連携とナノテクプラットフォームで拓く集積化高感度超音波プローブの研究2019
- Author(s)
  三田吉郎, 吉村武, 水野隆, 鈴木謙次, 中山雄太, 遠藤登喜子
- Organizer
  第32回回路とシステムワークショップ、22 - 23 Aug. 2019、東京電機大学、東京都、A2-1、pp. 77 - 79
- Invited
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies on Vibration2018
- Author(s)
  Yoshio Mita, Eric Lebrasseur, and Akio Higo
- Organizer
  European Workshop on Microelectroincs Education (EWME 2018), 24-26 Sep, Braunschweig Germany
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] 機械的混合加振による圧電薄膜アクチュエータ集積2軸MEMS光スキャナ2018
- Author(s)
  稲垣俊典、岡本有貴、肥後昭男、三田吉郎
- Organizer
  第35回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2018、札幌国際会議場、北海道、01pm1-PS-185
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] Agile-Style Development of CMOS-Integrated Micro Electro Chemical Mechanical Systems by LSI Foundry and Nanotechnology Platform2018
- Author(s)
  Yoshio Mita, Eric Lebrasseur, Matthieu Denoual, Kentaro Yamada, Julien Grand, Yuki Okamoto, Rangareddygari Ranga Reddy, Tixier-Mita Agnes, Svetlana Mintova, and Akio Higo
- Organizer
  International Symposium on Electronics and Smart Devices (ISESD 2018), 23-24, October, Bandung, Indonesia,
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] 超臨界流体を用いたシリコン酸化膜上への銅薄膜直接成膜技術による高アスペクト比ナノ開口構造の埋め込みの実現2018
- Author(s)
  宇佐美尚人, 肥後昭男、太田悦子、三田吉郎
- Organizer
  第35回「センサ・マイクロマシンと応用システム」シンポジウム、19 - 21 Nov. 2018、札幌国際会議場、北海道、01pm1-PS-183
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] An arrayed test structure for transistor damage assessment induced by circuit analysis and repairing processes with back-side-accessing Focused Ion Beam2017
- Author(s)
  Naoto Usami, Jun Kinoshita, Rimon Ikeno, Yuki Okamoto, Masaaki Tanno, Kunihiro Asada and Yoshio Mita
- Organizer
  2017 IEEE Conference on Microelectronic Test Structures (ICMTS 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] "Yes We Can" - A Short-Cut Research and Development of Miniaturized Smart Devices and Sensors through Open Facility on MEMS Integrated VLSI (Keynote Speech)2017
- Author(s)
  Mita Yoshio
- Organizer
  2017 IEEE International Symposium on Electronics and Smart Devices (ISESD)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] Visualizing is Believing - Test Strucutures for Deep-Etched High Aspect Ratio MEMS Process and Device Characterization (Invited)2017
- Author(s)
  Mita Yoshio
- Organizer
  10th IEEE/ACM Workshop on Variability, Modeling, and Characterization (VMC), Irvine, CA, USA
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] 集積化MEMS の未来を拓くナノテクノロジープラットフォーム-新機能・高信頼センサシステムの実現とその課題〜(招待講演)2017
- Author(s)
  三田吉郎
- Organizer
  日本画像学会2017年度関東シンポジウム 2017年12月12日発明会館、東京
- Invited
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] Test Structures for Nano-Gap Fabrication Process Development for Nano-Electromechanical Systems2017
- Author(s)
  Stewart Smith, Yudai Takeshiro, Yuki Okamoto, Jonathan G. Terry, Anthony J. Walton, Rimon Ikeno, Kunihiro Asada and Yoshio Mita
- Organizer
  2017 IEEE Conference on Microelectronic Test Structures (ICMTS 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] IoT-MEMSに適した非接触エネルギー伝送手法の研究2017
- Author(s)
  三田吉郎
- Organizer
  エイトラムダフォーラム2017第4回会合、2017年12月14日フォレスト本郷
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] Integration of a photovoltaic remote driver with high-voltage MEMS using standard CMOS technology (Invited Talk)2017
- Author(s)
  Mita Yoshio
- Organizer
  Journee Nationale de la Technologie Emergente (CNRS-RENATECH), 20-22, Novemberm Orleans, France (2017.11.22)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] Introduction to Electronic Information Devices - Try-by-yourself-style lecture on autonomous electronic devices2016
- Author(s)
  Yoshio Mita and Yoshihiro Kawahara
- Organizer
  European Workshop on Microelectroincs Education (EWME 2016)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] 集積化CMOS-MEMSによる高機能流体素子とその展開-VDECとナノテクPFが拓く短TAT試作研究の試み2016
- Author(s)
  三田吉郎
- Organizer
  アドバンテスト展2016
- Invited
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] An End-point Visualization Test Structure for All Plasma Dry Release of Deep-RIE MEMS2016
- Author(s)
  Yuki Okamoto, Eric Lebrasseur, Isao Mori, and Yoshio Mita
- Organizer
  IEEE 2016 International Conference on Microelectronic Test Structures (ICMTS)
- Place of Presentation
  メルパルク横浜,神奈川県横浜市
- Year and Date
  2016-03-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] Microfabricated test structures for thermal resonant gas sensor2016
- Author(s)
  Matthieu Denoual, M. Pouliquen, Julien Grand, Hussein Awala, Sveltana Mintova, O. de Sagazan, Shu Inoue, Agnes Tixier-Mita, Yoshio Mita, and D. Robbes
- Organizer
  IEEE 2016 International Conference on Microelectronic Test Structures (ICMTS)
- Place of Presentation
  メルパルク横浜,神奈川県横浜市
- Year and Date
  2016-03-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] Demonstration of 0-30V Comb-Drive MEMS Actuator by integrated switching circuit with post-mesa-isolated standard 5V CMOS transistors2016
- Author(s)
  Yuki Okamoto, Isao Mori, and Yoshio Mita
- Organizer
  Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP), Budapest, Hungary
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] エネルギー自立IoTデバイス向け電圧・電流プログラマブル太陽電池アレイ2016
- Author(s)
  竹城雄大、岡本有貴、三田吉郎
- Organizer
  、LSIとシステムのワークショップ2016
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] Hotspot liquid microfluidic cooling: comparing the efficiency between horizontal flow and vertical flow2016
- Author(s)
  Yuki Okamoto, Hiroyuki Ryoson, Koji Fujimoto, Keiji Honjo, Takayuki Ohba, and Yoshio Mita
- Organizer
  The 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Paris, France
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04345
[Presentation] Zeolite-trench-embedded micro cantilevers for CMOS strain-gauge integrated gas sensors2015
- Author(s)
  Shu Inoue, Ryota Setoguchi, Matthieu Denoual, Sveltana Mintova, and Yoshio Mita
- Organizer
  The 2015 International Conference on Solid State Devices and Materials
- Place of Presentation
  札幌コンベンションセンター,北海道札幌市
- Year and Date
  2015-09-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] A Strain-Sensor-Integrated Test Bed for Electro Mechanical Characterization of VLSI Probe2015
- Author(s)
  Ryota Setoguchi, Eric Lebrasseur, Masanori Kubota, and Yoshio Mita
- Organizer
  Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
- Place of Presentation
  Montpellier, France
- Year and Date
  2015-04-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] Wireless Drive of A Mems Ciliary Motion Actuator via Coupled Magnetic Resonances using Micro Inductors2015
- Author(s)
  Naoyuki Sakamoto, Antoine Frappe, Bruno Stefanelli, Andreas Kaiser and Yoshio Mita
- Organizer
  The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
- Place of Presentation
  Anchorage, USA
- Year and Date
  2015-06-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] Discharging-Phototransistor-Integrated High-Voltage Si Photovoltaic Cells for Fast Driving of an Electrostatic MEMS Actuator byWavelength Modulation2015
- Author(s)
  Isao Mori and Yoshio Mita
- Organizer
  The 2015 International Conference on Solid State Devices and Materials
- Place of Presentation
  札幌コンベンションセンター,北海道札幌市
- Year and Date
  2015-09-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] An Integrated CMOS-MEMS Probe having Two-Tips per Cantilever for Individual Contact Sensing and Kelvin Measurement with Two Cantilevers2013
- Author(s)
  Kota Hosaka, Satoshi Morishita, Isao Mori, Masanori Kubota, and Yoshio Mita
- Organizer
  25th IEEE International Conference on Microelectronic Test Structures (ICMTS)
- Place of Presentation
  大阪大学中之島センター, 大阪
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] Evaluation of silicon fracture strength dependence on stealth dicing layers for "cleave-before-use" MEMS FREESTANDING cantilever probes2013
- Author(s)
  Masanori Kubota, Kota Hosaka, Masakazu Sugiyama, and Yoshio Mita
- Organizer
  The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13)
- Place of Presentation
  Barcelona, Spain
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] 省電力・長寿命MEMSメモリを目指すマイクロラッチ機構設計と作製2013
- Author(s)
  米田佳祐,久保田雅則,ティクシェ三田アニエス,森下賢志,森功,保坂航太,三田吉郎
- Organizer
  電子情報通信学会LSIとシステムのワークショップ2013
- Place of Presentation
  北九州国際会議場, 福岡
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] Experimental Evaluation of High Voltage Hold-off Capability of Post-Mesa-Isolated Standard CMOS Devices2013
- Author(s)
  Atsushi Hirakawa, Satoshi Morishita, Isao Mori, Masanori Kubota, and Yoshio Mita
- Organizer
  The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13)
- Place of Presentation
  Barcelona, Spain
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] Integration of EWOD Pumping Device in Deep Microfluidic Channels using a Three-Dimensional Shadowmask2012
- Author(s)
  Satoshi Morishita, Masanori Kubota, and Yoshio Mita,
- Organizer
  IEEE International Conference on MicroElectroMechanical Systems (MEMS 2012)
- Place of Presentation
  Paris, France
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] A 50 nm-Wide 5 μm-Deep Copper Vertical Gap Formation Method by a Gap-Narrowing Post-Process with Supercritical Fluid Deposition for Pirani Gauge Operating over Atmospheric Puressure2012
- Author(s)
  Masanori Kubota, Yoshio Mita, Takeshi Momose, Aiko Kondo, Yukihiro Shimogaki, Yoshiaki Nakano, Masakazu Sugiyama
- Organizer
  IEEE International Conference on Micro ElectroMechanical Systems (MEMS 2012)
- Place of Presentation
  Paris, France
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] Integration of EWOD Pumping Device in Deep Microfluidic Channels using a Three-Dimensional Shadowmask2012
- Author(s)
  Satoshi Morishita, Masanori Kubota, Yoshio Mita
- Organizer
  IEEE International Conference on MicroElectroMechanical Systems (MEMS 2012)
- Place of Presentation
  Paris, France
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Blur-Range Test Structure of Collimation-Controller-Integrated Silicon Shadow Mask for Three-Dimensional Surface Patterning with Sputtering2012
- Author(s)
  Satoshi Morishita, Masanori Kubota, Yoshio Mita
- Organizer
  25th IEEE International Conference on Microelectronic Test Structures (ICMTS)
- Place of Presentation
  San Diego, CA, USA
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Blur-Range Test Structure of Collimation-Controller-Integrated Silicon Shadow Mask for Three-Dimensional Surface Patterning with Sputtering2012
- Author(s)
  Satoshi Morishita, Masanori Kubota, and Yoshio Mita,
- Organizer
  25th IEEE International Conference on Microelectronic Test Structures (ICMTS)
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] A 50 nm-Wide 5 um-Deep Copper Vertical Gap Formation Method by a Gap-Narrowing Post-Process with Supercritical Fluid Deposition for Pirani Gauge Operating over Atmospheric Puressure2012
- Author(s)
  Masanori Kubota, Yoshio Mita, Takeshi Momose, Aiko Kondo, Yukihiro Shimogaki, Yoshiaki Nakano and Masakazu Sugiyama
- Organizer
  IEEE International Conference on MicroElectroMechanical Systems (MEMS 2012)
- Place of Presentation
  Paris, France
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] Value-Added VLSI devices by MEMS technology2011
- Author(s)
  Yoshio Mita, Satoshi Morishita, Isao Mori, and Masanori Kubota,
- Organizer
  AWAD 2011
- Place of Presentation
  Daejeon, Korea
- Invited
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] オンチップ光発電回路とMEMSの集積化研究動向2011
- Author(s)
  三田吉郎
- Organizer
  電子情報通信学会ソサイアティ大会
- Place of Presentation
  札幌,北海道,日本(招待講演)
- Year and Date
  2011-09-15
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] MEMS-integrated VLSI Foundry Scheme in the University of Tokyo VDEC and its Application to Particle Sensor2011
- Author(s)
  Yoshio Mita
- Organizer
  International Workshop on High Energy Geophysics 2011-Muon and Neutrino Radiography
- Place of Presentation
  Happon-en, Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Monolithically-Integrated, Batch Post-Processed 17.8 V Silicon Solar Cell for Remote MEMS Driving2011
- Author(s)
  Isao Mori, Satoshi Morishita, Masanori Kubota, Kentaroh Watanabe, Yoshio Mita
- Organizer
  The 2011 International Conference on Solid State Devices and Materials
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Monolithically-Integrated, Batch Post-Processed 17.8 V Silicon Solar Cell for Remote MEMS Driving2011
- Author(s)
  Isao Mori, Satoshi Morishita, Masanori Kubota, Kentaroh Watanabe and Yoshio Mita
- Organizer
  2011 International Conference on Solid State Devices and Materials
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] Value-Added VLSI devices by MEMS technology2011
- Author(s)
  Yoshio Mita, Satoshi Morishita, Isao Mori, and Masanori Kubota
- Organizer
  AWAD 2011
- Place of Presentation
  Daejeon, Korea(Invited)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] More-than-VLSI Devices by MEMS Deep Etching Technology2010
- Author(s)
  Yoshio Mita
- Organizer
  IEICE ICD symposium in Vietnam (ICDV)
- Place of Presentation
  Ho Chi Minh City, Vietnam(招待講演)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Bridge-Connected Isolated Silicon Islands Post-Processing Method for Fine-Grain-Integrated±10V-Operating CMOS-MEMS by Standard 5V CMOS Process Technology2010
- Author(s)
  Satoshi Morishita, Masanori Kubota, Isao Mori, Kunihiro Asada, Frederic Marty, Yosbio Mita
- Organizer
  Micromecanics and Microengineering Europe 2010
- Place of Presentation
  Enschede, Netherlands
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] "More-than-VLSI" Devices by MEMS Deep Etching Technology2010
- Author(s)
  Yoshio Mita
- Organizer
  IEICE ICD symposium in Vietnam (ICDV)
- Place of Presentation
  Ho Chi Minh City, Vietnam(Invited)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A bulk micromachined vertical nano-gap Pirani wide-range pressure test structure for MEMS-integration2010
- Author(s)
  Masanori Kubota, Yoshio Mita, Masakazu Sugiyama, and Yoshiaki Nakano
- Organizer
  23^<rd> IEEE International Conference on Microelectronic Test Structures (ICMTS)
- Place of Presentation
  Hiroshima, Japan(pp.14-17)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Bridge-Connected Isolated Silicon Islands Post-Processing Method for Fine-Grain-Integrated ±10V-Operating CMOS-MEMS by Standard 5V CMOS Process Technology2010
- Author(s)
  Satoshi Morishita, Masanori Kubota, Isao Mori, Kunihiro Asada, Frederic Marty, and Yoshio Mita
- Organizer
  21^<st> Workshop on Micromechanics and Microsystems Workshop, (MME 2010)
- Place of Presentation
  Enschede, Netherlands(A08 pp.48-51)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] Methode d'lsolation a Posteriori des Composants Electronique Integre sur Puce Silicium2010
- Author(s)
  Yoshio Mita, Satoshi Morishita, Isao Mori, Masanori Kubota, Frederic Marty, Kunihiro Asada
- Organizer
  Journee Francophone de la Recherche(フランス語による科学シンポジウム)
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2010-11-27
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] Autonomous Distributed MEMS Robots as Technology Drivers2010
- Author(s)
  Yoshio Mita
- Organizer
  Japan-France Frontiers of Engineering (JFFoE)
- Place of Presentation
  Grenoble, France(招待講演)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Balanced-SeeSaw MEMS Swing Probe for Vertical Profilometry of Deep Micro Structures2010
- Author(s)
  Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Agnes Tixier-Mita, Satoshi Morishita, Takahisa Masuzawa
- Organizer
  23rd IEEE International Conference on Microelectronic Test Structures (ICMTS)
- Place of Presentation
  Hiroshima, Japan
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Balanced-SeeSaw MEMS Swing Probe for Vertical Profilometry of Deep Micro Structures2010
- Author(s)
  Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Agnes Tixier-Mita, Satoshi Morishita, and Takahisa Masuzawa
- Organizer
  23rd IEEE International Conference on Microelectronic Test Structures (ICMTS)
- Place of Presentation
  Hiroshima, Japan(pp.58-63)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] Autonomous Distributed MEMS Robots as Technology Drivers2010
- Author(s)
  Yoshio Mita
- Organizer
  Japan-France Frontiers of Engineering (JFFoE)
- Place of Presentation
  Grenoble, France(Invited)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A bulk micromachined vertical nano-gap Pirani wide-range pressure test structure for MEMS-integration2010
- Author(s)
  Masanori KUBOTA, Yoshio MITA, Masakazu SUGIYAMA, Yashiaki NAKANO
- Organizer
  23rd IEEE International Conference on Microelectronic Test Structures (ICMTS)
- Place of Presentation
  Hiroshima, Japan
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A CMOS Compatible Low Temperature Process for Photonic Crystal MEMS Scanner2009
- Author(s)
  K. Takahashi, I. W. Jung, A. Higo, Yoshio Mita, H. Fujita, H. Toshiyoshi, and O. Solgaard
- Organizer
  IEEE/LEOS International Conference On Optical MEMS and Their Applications (OMEMS 2009)
- Place of Presentation
  (pp.77-78)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Curvature Controlled Flexible Silicon Micro Electrode Array to Wrap Neurons for Signal Analysis2009
- Author(s)
  Jun-Hyoung Kim, Masanori Kubota, Akio Higo, Hideki Abe, Yoshitaka Oka, Yoshio Mita
- Organizer
  The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09)
- Place of Presentation
  Denver, USA
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Three-Dimensional Silicon Shadowmask for Patterning On Trenches with Vertical Walls", The 15th International Conference on Solid-State Sensors, Actuators and Microsystems2009
- Author(s)
  Satoshi Morishita, JunHyong Kim, Frederic Marty, Yifan Li, Anthony J.Walton, Yoshio Mita
- Organizer
  The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09)
- Place of Presentation
  Denver, USA
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A CMOS Compatible Low Temperature Process for Photonic Crystal MEMS Scanner2009
- Author(s)
  K.Takahashi, I.W.Jung, A.Higo, Y.Mita, H.Fujita, H.Toshiyoshi, O.Solgaard
- Organizer
  IEEE/LEOS International Conference On Optical MEMS and Their Applications (OMEMS 2009)
- Place of Presentation
  Florida, USA
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] 高機能ＭＥＭＳ三次元構造形成のためのプロセス技術2009
- Author(s)
  三田吉郎
- Organizer
  応用物理学会秋季全国大会
- Place of Presentation
  (招待講演)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] An Active Swing Probing Method for High Aspect Ratio Deep Hole Profiler2009
- Author(s)
  Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Akio Higo, Shaojun Ma, Satoshi Morishita, Masakazu Sugiyama, and Takahisa Masuzawa
- Organizer
  20^<th> Workshop on Micromachining, Micromechanics and Microsystems, (MME 2009)
- Place of Presentation
  Toulouse, France(D12)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] An Active Swing Probing Method for High Aspect Ratio Deep Hole Profiler2009
- Author(s)
  Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Akio Higo, Shaojun Ma, Satoshi Morishita, Masakazu Sugiyama, Takahisa Masuzawa
- Organizer
  20th Workshop on Micromachining, Micromechanics and Microsystems, (MME 2009)
- Place of Presentation
  Toulouse, France
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] 高機能MEMS三次元構造形成のためのプロセス技術2009
- Author(s)
  三田吉郎
- Organizer
  応用物理学会秋季全国大会
- Place of Presentation
  Kumamoto, Japan(招待講演)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] La Methode "Swing-Probing" Pour la Profilom\`etrie de Microtrous Tr\`es Profonds2009
- Author(s)
  Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Shaojun Ma, Akio Higo, Agnes Tixier-Mita, Satoshi Morishita, Masakazu Sugiyama, et Takahisa Masuzawa
- Organizer
  Journee Francophone de laRecherche (フランス語による科学シンポジウム)
- Place of Presentation
  Maison Franco-Japonaise, Tokyo, Japon
- Year and Date
  2009-11-14
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] La Methode "Swing-Probing" Pour la Profilometrie de Microtrous Tres Profonds2009
- Author(s)
  Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Shaojun Ma, Akio Higo, Agnes Tixier-Mita, Satoshi Morishita, Masakazu Sugiyama, et Takahisa Masuzawa
- Organizer
  Journee Francophone de la Recherche(フランス語による科学シンポジウム)
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2009-11-14
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Three-Dimensional Silicon Shadowmask for Patterning On Trenches with Vertical Walls2009
- Author(s)
  Satoshi Morishita, JunHyong Kim, Frederic Marty, Yifan Li, Anthony J. Walton, and Yoshio Mita
- Organizer
  The 15^<th> International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09)
- Place of Presentation
  Denver, USA(pp.1608-1611)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] A Curvature Controlled Flexible Silicon Micro Electrode Array to Wrap Neurons for Signal Analysis2009
- Author(s)
  Jun-Hyoung Kim, Masanori Kubota, Akio Higo, Hideki Abe, Yoshitaka Oka, and Yoshio Mita
- Organizer
  The 15^<th> International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09)
- Place of Presentation
  Denver, USA(pp.1810-1813)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] Vision stereo pour la d'etection d'obstacles vulnerables : methode de≪recherche du voisin≫pour l'amelioration de la precision de mise en corresnondance2008
- Author(s)
  Yoshio Mita, L.Bouraou et M.Parent
- Organizer
  Journee Francophone de la Recherche
- Place of Presentation
  東京(日本)
- Year and Date
  2008-11-28
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] 柔らかいシリコンマイクロ構造とその神経信号解析への応用2008
- Author(s)
  金俊亨、久保田雅則、肥後昭男、三田吉郎
- Organizer
  応用物理学会第二回集積化MEMS技術研究会
- Place of Presentation
  東京大学(研究奨励賞受賞)
- Year and Date
  2008-11-21
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] Surface Corrugated P-N Junction on Deep Submicron Trenches for Polarization Detection With Improved Efficiency2008
- Author(s)
  Yoshiaki Imai, Yoshio Mita, Kenichiro Hirose, Masanori Kubota and Tadashi Shibata
- Organizer
  Asia-Pacific Conference of Transducers (APCOT)
- Place of Presentation
  Taiwan
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] Vision stereo pour la detection d'obstacles vulnerables: methode de 《recherche du voisin》 pour l'amelioration de la precision de mise en correspondance(仏語)2008
- Author(s)
  Yoshio Mita, L.Bouraoui et M.Parent
- Organizer
  Journee Francophone de la Recherche(フランス語による化学シンポジウム)
- Place of Presentation
  東京(日本)
- Year and Date
  2008-11-28
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] Wireless Driven EWOD Technology for MEMS Pond Skater Application2008
- Author(s)
  Yoshio Mita, Yifan Li, Masanori Kubota, William Parkes, Leslie I. Haworth, Brian W. Flynn, Jonathan G. Terry, T.B. Tang, Alec Ruthven, Stewart Smith, and Anthony J. Walton
- Organizer
  38^<th> European Solid-State Device Research Conference (ESSDERC 2008)
- Place of Presentation
  Edinburgh, UK, (pp.306-309)
- Data Source
  KAKENHI-PROJECT-20686024
[Presentation] UTokyo VDEC’s CMOS-MEMS Technology via Nanotechnology Platform for Prospective Integrated Magnetic Sensor
- Author(s)
  Yoshio Mita, Eric Lebrasseur, Tomoki Sawamura, Naoko Kondo, and Kunihiro Asada
- Organizer
  20th IMEKO TC4 International Symposium and 18th International Workshop on ADC Modelling and Testing Research on Electric and Electronic Measurement for the Economic Upturn
- Place of Presentation
  Benevento, Italy
- Year and Date
  2014-09-15 – 2014-09-17
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] A Test Structure of Bypass Diodes for On-chip High-Voltage Silicon Photovoltaic Cell Array
- Author(s)
  Isao Mori, Masanori Kubota and Yoshio Mita
- Organizer
  2014 IEEE International Conference on Microelectronic Test Structures (ICMTS)
- Place of Presentation
  Udine, Italy
- Year and Date
  2014-03-24 – 2014-03-27
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] Remote power feed and control of MEMS with 58 V silicon photovoltaic cell made by a CMOS post-process dry release and device isolation method
- Author(s)
  Isao Mori, Masanori Kubota, Eric Lebrasseur, Yoshio Mita,
- Organizer
  Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP 2014)
- Place of Presentation
  Cannes, France
- Year and Date
  2014-04-01 – 2014-04-04
- Data Source
  KAKENHI-PROJECT-23686053
[Presentation] "MEMS de Piano" - an Experimental Course of Design, Fabrication, and Testing of MEMS Oscillator
- Author(s)
  Yoshio MITA, Masanori KUBOTA, Matthieu DENOUAL, Eric Lebrasseur, and Tomoki Sawamura
- Organizer
  10th European Workshop on Micoelectronics Education (EWME 2014)
- Place of Presentation
  Tallinn, Estonia
- Year and Date
  2014-05-10 – 2014-05-14
- Data Source
  KAKENHI-PROJECT-23686053

1. SHIBATA Tadashi (00187402)

# of Collaborated Projects: 3 results

# of Collaborated Products: 11 results
2. Delaunay Jean-Jacques (80376516)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
3. Okamoto Yoshitaka (40169157)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. Tabata Hitoshi (00263319)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. Suzuki Yuji (80222066)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 日高邦彦 (90181099)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
7. 熊田亜紀子 (20313009)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
8. 松岡成居 (10114646)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 小西邦昭 (60543072)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
10. 江澤雅彦 (10504805)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
11. 高野恭弥 (10822801)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Mita Yoshio 三田 吉郎

MITA Yoshio 三田 吉郎

Research Projects

Research Products

Co-Researchers

Academic Platform towards Sub-THz High-Power, Highly-dense integrated circuitPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Topological MEMS Engineering

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of Vacuum Ultraviolet Coherent Light Source Technology Using Dielectric Nanomembrane Artificial Nanotructures

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Expolatory Academic Research on In-water Sensor Platform by Silicon and Organic Material IntegrationPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Plasmonic nanostructures realizing miniaturized infrared spectrometric image-array-sensor for endoscopy

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

An Energy-Autonomous Distributed Water Strider by High-Voltaged Standard VLSI and MEMS IntegrationPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

A Deep-Trench Optical-Detector Integrated Early Vision Processor and an Application to Motion DetectionPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

集積回路技術を活用した高時間・高空間分解アレイ型表面電荷密度分布センサの開発

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

LSI情報処理回路と集積化したMEMSナノプローブによる放電電荷分布の高精細測定Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

A Motion-Analysis VLSI Image Sensor System Extracting the Meaning of Action From Moving Images

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

知覚情報処理回路の配線爆発を解消するMEMS融合型VLSIPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

A Psychologically-Inspired VLSI Brain Model System Implementing Subconscious Information Processing Based on Analog/Digital Marged Computation

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

An Intelligent Image-Recognition VLSI System Employing Neuron-MOS Feature Extracting Circuitry

Principal Investigator

Project Period (FY)

Mita Yoshio 三田吉郎

MITA Yoshio 三田吉郎