Kizu Ryosuke 木津良祐

Researcher Number	40760294
Other IDs
Affiliation (Current)	2025: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員
Affiliation (based on the past Project Information) *help	2024 – 2025: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員 2021 – 2022: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員 2017 – 2021: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員 2016: 国立研究開発法人産業技術総合研究所, 工学計測標準研究部門, 研究員
Review Section/Research Field	Principal Investigator Basic Section 21030:Measurement engineering-related / Basic Section 18020:Manufacturing and production engineering-related / Measurement engineering Except Principal Investigator Basic Section 21030:Measurement engineering-related
Keywords	Principal Investigator AFM / 原子間力顕微鏡(AFM) / 原子間力顕微鏡（AFM） / 長さ標準 / 結晶格子 / 走査トンネル顕微鏡 / 半導体ナノ構造 / 走査電子顕微鏡(SEM) / ラインエッジラフネス(LER) / ナノ構造 … More / 走査電子顕微鏡（SEM） / ラインエッジラフネス（LER） / 粗さ計測 / 走査プローブ顕微鏡 / 原子間力顕微鏡 / 線幅 / 不確かさ / ナノ計測 / 線幅校正 … More Except Principal Investigator SIトレーサビリティー / ナノメトロロジー / 原子間力顕微鏡 / 透過電子顕微鏡 / 絶対測長 / 試料加工 / 不確かさ / 測長 / 試料調製 / シリコン / 倍率校正 Less

Development of technologies to realize sub-nm absolute length measurement using transmission electron microscopy
- Principal Investigator
  
  小林慶太
- Project Period (FY)
  2025 – 2028
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21030:Measurement engineering-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
測長型走査トンネル顕微鏡による結晶格子間隔の絶対計測Principal Investigator
- Principal Investigator
  
  木津良祐
- Project Period (FY)
  2024 – 2028
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21030:Measurement engineering-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
SI traceble length measurement of lattice distances by a transmission electron microscope through the intermediary of the metrological atomis force micrscope
- Principal Investigator
  
  Kobayashi Keita
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21030:Measurement engineering-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
Ultraprecise dimensional measurement of semiconductor nanostructuresPrincipal Investigator
- Principal Investigator
  
  Kizu Ryosuke
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
Absolute evaluation of a probe-tip shape for the reduction of uncertainty of linewidth calibration using an AFMPrincipal Investigator
- Principal Investigator
  
  Kizu Ryosuke
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Measurement engineering
- Research Institution
  National Institute of Advanced Industrial Science and Technology

All 2023 2022 2021 2020 2019 2018 2017

All Journal Article Presentation Patent

[Journal Article] Photoresist shrinkage observation by a metrological tilting-AFM2023
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Journal Title
  
  Proc. SPIE
  
  Volume: 12496 Pages: 1249605-1249605
- DOI
  10.1117/12.2655566
- Data Source
  KAKENHI-PROJECT-19K14865
[Journal Article] Enhancing the precision of 3D sidewall measurements of photoresist using atomic force microscopy with a tip-tilting technique2023
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 133 Issue: 6 Pages: 065302-065302
- DOI
  10.1063/5.0130459
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K14865
[Journal Article] Unbiased line edge roughness measurement using profile-averaging method for precise roughness parameters measurement2022
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Journal Title
  
  Journal of Micro/Nanopatterning, Materials, and Metrology
  
  Volume: 21 Issue: 02 Pages: 024001-024001
- DOI
  10.1117/1.jmm.21.2.024001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K14865
[Journal Article] Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan2021
- Author(s)
  Misumi Ichiko、Kizu Ryosuke、Itoh Hiroshi、Kumagai Kazuhiro、Kobayashi Keita、Sigehuzi Tomoo
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: - Issue: 2 Pages: 83-90
- DOI
  10.1007/s41871-021-00119-1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04511
[Journal Article] Evaluating SEM-based LER metrology using a metrological tilting-AFM2021
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Journal Title
  
  Proc. SPIE
  
  Volume: 11611 Pages: 1161117-1161117
- DOI
  10.1117/12.2583475
- Data Source
  KAKENHI-PROJECT-19K14865
[Journal Article] Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology2020
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Journal Title
  
  Journal of Micro/Nanolithography, MEMS, and MOEMS
  
  Volume: 19 Issue: 04 Pages: 044001-044001
- DOI
  10.1117/1.jmm.19.4.044001
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K14865
[Journal Article] Comparison of SEM and AFM performances for LER reference metrology2020
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Journal Title
  
  Proc. of SPIE
  
  Volume: 11325 Pages: 21-21
- DOI
  10.1117/12.2551468
- Data Source
  KAKENHI-PROJECT-19K14865
[Journal Article] Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness2019
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Journal Title
  
  Proc. of SPIE
  
  Volume: 10959 Pages: 82-82
- DOI
  10.1117/12.2511712
- Data Source
  KAKENHI-PROJECT-16K18119
[Journal Article] Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism2018
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Kinoshita Kazuto、Gonda Satoshi
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 30 Issue: 1 Pages: 015004-015004
- DOI
  10.1088/1361-6501/aaf02a
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K18119
[Journal Article] Development of a metrological atomic force microscope with a tip-tilting mechanism for 3D nanometrology2018
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Kinoshita Kazuto、Gonda Satoshi
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 印刷中 Issue: 7 Pages: 075005-075005
- DOI
  10.1088/1361-6501/aabe1a
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K18119
[Patent] 粗さ解析のための方法及び情報処理システム2021
- Inventor(s)
  木津良祐
- Industrial Property Rights Holder
  国立研究開発法人産業技術総合研究所
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2021-112800
- Filing Date
  2021
- Data Source
  KAKENHI-PROJECT-19K14865
[Patent] 走査型プローブ顕微鏡のドリフト補正方法及びドリフト補正機能を備えた走査型プローブ顕微鏡2017
- Inventor(s)
  木津　良祐
- Industrial Property Rights Holder
  国立研究開発法人産業技術総合研究所
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2017-154999
- Filing Date
  2017
- Data Source
  KAKENHI-PROJECT-16K18119
[Presentation] 電子線を遮蔽する構造をもつ試料のTEM観察で現れる特異な回折図形と回折波からなる像2023
- Author(s)
  小林慶太, 木津良佑
- Organizer
  日本顕微鏡学会第79回学術講演会
- Data Source
  KAKENHI-PROJECT-20K04511
[Presentation] Photoresist shrinkage observation by a metrological tilting-AFM2023
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Organizer
  SPIE Advanced Lithography+Patterning 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K14865
[Presentation] ラインエッジラフネスが制御されたシリコンラインパターンの作製と評価2022
- Author(s)
  木津良祐、三隅伊知子、平井亜紀子、権太聡、高橋哲
- Organizer
  2022年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19K14865
[Presentation] High-resolution sidewall observation and LER measurement of a photoresist pattern by a metrological tilting-AFM2022
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Organizer
  SPIE Advanced Lithography+Patterning 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K14865
[Presentation] 傾斜探針型測長原子間力顕微鏡によるラインエッジラフネスの参照計測2021
- Author(s)
  木津良祐、三隅伊知子、平井亜紀子、権太聡
- Organizer
  次世代リソグラフィワークショップ 2021
- Invited
- Data Source
  KAKENHI-PROJECT-19K14865
[Presentation] Evaluating SEM-based LER metrology using a metrological tilting-AFM2021
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Organizer
  SPIE Advanced Lithography 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K14865
[Presentation] Comparison of SEM and AFM performances for LER reference metrology2020
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Organizer
  SPIE Advanced Lithography 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K14865
[Presentation] Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness2019
- Author(s)
  Kizu Ryosuke、Misumi Ichiko、Hirai Akiko、Gonda Satoshi
- Organizer
  SPIE Advanced Lithography 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K18119
[Presentation] 傾斜探針型測長AFMによる線幅計測における実効探針幅の補正2017
- Author(s)
  木津良祐、三隅伊知子、平井亜紀子、木下和人、権太聡
- Organizer
  精密工学会
- Place of Presentation
  慶應義塾大学（神奈川県）
- Year and Date
  2017-03-15
- Data Source
  KAKENHI-PROJECT-16K18119
[Presentation] 走査型プローブ顕微鏡像のドリフト補正2017
- Author(s)
  木津良祐、三隅伊知子、平井亜紀子、権太聡
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K18119

1. Kobayashi Keita (40556908)

# of Collaborated Projects: 2 results

# of Collaborated Products: 2 results
2. 堀泰明 (50443221)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Kizu Ryosuke 木津 良祐

Research Projects

Research Products

Co-Researchers

Development of technologies to realize sub-nm absolute length measurement using transmission electron microscopy

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

測長型走査トンネル顕微鏡による結晶格子間隔の絶対計測Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

SI traceble length measurement of lattice distances by a transmission electron microscope through the intermediary of the metrological atomis force micrscope

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Ultraprecise dimensional measurement of semiconductor nanostructuresPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Absolute evaluation of a probe-tip shape for the reduction of uncertainty of linewidth calibration using an AFMPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Photoresist shrinkage observation by a metrological tilting-AFM2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Enhancing the precision of 3D sidewall measurements of photoresist using atomic force microscopy with a tip-tilting technique2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Unbiased line edge roughness measurement using profile-averaging method for precise roughness parameters measurement2022

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan2021

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Evaluating SEM-based LER metrology using a metrological tilting-AFM2021

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology2020

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Comparison of SEM and AFM performances for LER reference metrology2020

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness2019

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism2018

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Development of a metrological atomic force microscope with a tip-tilting mechanism for 3D nanometrology2018

Kizu Ryosuke 木津良祐