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SUGAWARA Minoru
菅原 実
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Researcher Number
50008504
External Links
Affiliation
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1995 : 八戸工業大学, 工学部, 教授
1988 – 1990 : 群馬大学, 工学部, 教授
1986 : Gunma University, Faculty of Engineering, Professor, 工学部, 教授
Review Section/Research Field
Principal Investigator
電子材料工学
/
Applied physics, general
Keywords
Principal Investigator
RF放電 / オプトガルバノ効果 / シランプラズマの診断 / 高周波放電 / 探針法 / 負イオン / イオン電導 / モンテ・カルロシミュレーション / 非平衡プラズマ / Plasma Chemistry
…
More
/ ダブルプルーブ法 / SF_6ガス放電 / Plasma / 単探針 / シランプラズマの診断法 / プラズマ素過程 / フォトンカウンテング法 / フォトカウンティング法 / 低周波放電 / プラズマ化学 / 低気圧放電 / r.f.Discharge / Plasma Polymerization / プラズマ / ダブルプロ-ブ法 / Plasma Diagnostics / Elementary Processes in Plasmas / プラズマ診断 / r.f.放電 / プラズマ重合 / Plasma Processing / 複探針 / プラズマプロセス / イオンシース
Less
Research Projects
(
4
results)
Co-Researchers
(
13
People)
Project Start Year(Newest)
Project Start Year(Oldest)
RF放電電極シース内のイオン電導機構
Principal Investigator
Principal Investigator
菅原 実
Project Period (FY)
1995
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
Applied physics, general
Research Institution
Hachinohe Institute of Technology
反応性非平衡RFプラズマの診断
Principal Investigator
Principal Investigator
菅原 実
Project Period (FY)
1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Gunma University
反応性非平衝RFプラズマの診断
Principal Investigator
Principal Investigator
菅原 実
Project Period (FY)
1988 – 1990
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Gunma University
Gaseous Electronic and Device Technological Studies on the Plasma Processing of Various Materials Utilizing Non-equilibrium Plasms.
Principal Investigator
Principal Investigator
SUGAWARA Minoru
Project Period (FY)
1984 – 1986
Research Category
Grant-in-Aid for Co-operative Research (A)
Research Field
電子材料工学
Research Institution
Gunma University
# of Projects (Dsc)
# of Projects (Asc)
1.
石川 稜威男
(00020446)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
2.
松沢 秀典
(40006234)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
3.
菅ノ又 伸治
(50020425)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
4.
小林 祥男
(10042582)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
5.
ITATANI Ryohei
(90025833)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
6.
DOTE Toshihiko
(20087422)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
7.
MASE Hiroshi
(30007611)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
8.
SATOH Noriyoshi
(40005252)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
9.
大内 幹夫
(90057258)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
10.
松岡 昭男
(70114197)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
11.
岡田 富男
(10111395)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
12.
内田 喜之
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
13.
UCHITA Yoshiyuki
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
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