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LI Yunlong  李 雲龍

ORCIDConnect your ORCID iD *help
Researcher Number 50260419
External Links
Affiliation (based on the past Project Information) *help 1998: Tohoku Univ.Electrical Eng.Assistant, 工学部, 助手
1997: Graduate School of Eng.Tohoku.Univ., Assis., 仙台研究所・半導体プロセス開発センター, 主任研究員
1994 – 1996: 東北大学, 工学部, 助手
Review Section/Research Field
Principal Investigator
プラズマ理工学
Except Principal Investigator
プラズマ理工学
Keywords
Principal Investigator
スパッタリング制御 / 永久磁石付き円筒形RF電極 / シース電圧制御 / 大口径プラズマ / マグネトロン型高周波放電プラズマ / 自己バイアス制御 / 円筒型多極磁場電極 / マグネトロン放電プラズマ
Except Principal Investigator
大口径プラズマ / 変形マグネトロン放電 … More / 高周波プラズマ / plasma processing / RF discharge / 高周波放電 / ECRプラズマ / 均一プラズマ / プラズマプロセス / 負イオン / ion-energy control / electron energy control / high-density plasma / uniform plasma / large-diameter plasma / magnetron discharge / マグネトロン放電 / 大面積プロセス / LC共振放電 / マグネットリング / 変形マグネトロン型放電 / プラズマプロセシング / イオンエネルギー制御 / 電子エネルギー制御 / 高密度プラズマ / 大面積プラズマ / Light emission spectroscopy / Radical measurment / plasma materials processing / Modified magnetron discharge / ECR plasma / RF plasma / Large-area uniform plasma / Large-diameter plasma / 発光分光法 / ラジカル計測 / プラズマ材料プロセス / 大面積均一プラズマ / high energy electron / low electron temperature / dissociative attachment / negative H ion / vibrational excitation / Electron temperature control / 励起 / 解離 / 電子付着 / 解離再結合 / 負イオンプラズマ / 水素プラズマ / 電子エネルギー / 高エネルギー電子 / 低電子温度 / 解離付着 / 水素負イオン / 振動励起 / 電子温度制御 / Plasma processing / Radical / Inductively Coupled Plasma / Helicon Wave / Magnetron-Typed Plasma / RF Plasma / ECR Plasma / Uniform Plasma / Plasma / ラジカル / 誘導結合プラズマ / ヘリコン波 / マグネトロン型プラズマ / RFプラズマ / Production of New Materials with Unique Functions / Plasma Processing / Negative Ion / Dust Plasma / Production of C_<60> Plasma / C_<60>生成 / 新物質創製 / ダストプラズマ / C_<60>プラズマ生成 Less
  • Research Projects

    (7 results)
  • Co-Researchers

    (10 People)
  •  高周波放電プラズマにおけるスパッタリング制御Principal Investigator

    • Principal Investigator
      李 雲龍
    • Project Period (FY)
      1996
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Tohoku University
  •  Large-diameter plasma sourcs for plasma processing

    • Principal Investigator
      SATO Noriyoshi
    • Project Period (FY)
      1996
    • Research Category
      Grant-in-Aid for international Scientific Research
    • Research Institution
      Tohoku university
  •  Development of modified magnetron-typed plasma source

    • Principal Investigator
      SATO Noriyoshi
    • Project Period (FY)
      1996 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Tohoku University
  •  Production of large-diameter plasmas for plasma processing

    • Principal Investigator
      SATO Noriyoshi
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for International Scientific Research.
    • Research Institution
      Tohoku University
  •  High efficient negative ion production by electron temperature control

    • Principal Investigator
      IIZUKA Satoru
    • Project Period (FY)
      1995 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Tohoku University
  •  高周波放電プラズマ大面積化Principal Investigator

    • Principal Investigator
      李 雲龍
    • Project Period (FY)
      1994
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Tohoku University
  •  The Establishment of C_<60> Plasma Production and Its Applications

    • Principal Investigator
      SATO Noriyoshi
    • Project Period (FY)
      1994 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      TOHOKU UNIVERSITY
  • 1.  IIZUKA Satoru (20151227)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 0 results
  • 2.  SATO Noriyoshi (40005252)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 0 results
  • 3.  HATAKEYAMA Rikizo (00108474)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 0 results
  • 4.  HIRATA Takamichi (80260420)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 5.  CHOI Duk-In
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 6.  CHANG Hong-Young
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 7.  ISHIGURO Seiji (10193301)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  ANDO Akira (90182998)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  INUTAKE Masaaki (90023738)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  CHUNG Hong-Young
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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