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LI Yunlong
李 雲龍
Connect your ORCID iD
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Researcher Number
50260419
External Links
Affiliation (based on the past Project Information)
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1998: Tohoku Univ.Electrical Eng.Assistant, 工学部, 助手
1997: Graduate School of Eng.Tohoku.Univ., Assis., 仙台研究所・半導体プロセス開発センター, 主任研究員
1994 – 1996: 東北大学, 工学部, 助手
Review Section/Research Field
Principal Investigator
プラズマ理工学
Except Principal Investigator
プラズマ理工学
Keywords
Principal Investigator
スパッタリング制御 / マグネトロン放電プラズマ / 円筒型多極磁場電極 / 自己バイアス制御 / マグネトロン型高周波放電プラズマ / 大口径プラズマ / シース電圧制御 / 永久磁石付き円筒形RF電極
Except Principal Investigator
大口径プラズマ / 負イオン
…
More
/ プラズマプロセス / 均一プラズマ / ECRプラズマ / 高周波放電 / RF discharge / plasma processing / 高周波プラズマ / 変形マグネトロン放電 / C_<60>プラズマ生成 / ダストプラズマ / 新物質創製 / C_<60>生成 / Production of C_<60> Plasma / Dust Plasma / Negative Ion / Plasma Processing / Production of New Materials with Unique Functions / RFプラズマ / マグネトロン型プラズマ / ヘリコン波 / 誘導結合プラズマ / ラジカル / Plasma / Uniform Plasma / ECR Plasma / RF Plasma / Magnetron-Typed Plasma / Helicon Wave / Inductively Coupled Plasma / Radical / Plasma processing / 電子温度制御 / 振動励起 / 水素負イオン / 解離付着 / 低電子温度 / 高エネルギー電子 / 電子エネルギー / 水素プラズマ / 負イオンプラズマ / 解離再結合 / 電子付着 / 解離 / 励起 / Electron temperature control / vibrational excitation / negative H ion / dissociative attachment / low electron temperature / high energy electron / 大面積均一プラズマ / プラズマ材料プロセス / ラジカル計測 / 発光分光法 / Large-diameter plasma / Large-area uniform plasma / RF plasma / ECR plasma / Modified magnetron discharge / plasma materials processing / Radical measurment / Light emission spectroscopy / 大面積プラズマ / 高密度プラズマ / 電子エネルギー制御 / イオンエネルギー制御 / プラズマプロセシング / 変形マグネトロン型放電 / マグネットリング / LC共振放電 / 大面積プロセス / マグネトロン放電 / magnetron discharge / large-diameter plasma / uniform plasma / high-density plasma / electron energy control / ion-energy control
Less
Research Projects
(
7
results)
Co-Researchers
(
10
People)
Project Start Year (Newest)
Project Start Year (Oldest)
高周波放電プラズマにおけるスパッタリング制御
Principal Investigator
Principal Investigator
李 雲龍
Project Period (FY)
1996
Research Category
Grant-in-Aid for Encouragement of Young Scientists (A)
Research Field
プラズマ理工学
Research Institution
Tohoku University
Large-diameter plasma sourcs for plasma processing
Principal Investigator
SATO Noriyoshi
Project Period (FY)
1996
Research Category
Grant-in-Aid for international Scientific Research
Research Institution
Tohoku university
Development of modified magnetron-typed plasma source
Principal Investigator
SATO Noriyoshi
Project Period (FY)
1996 – 1998
Research Category
Grant-in-Aid for Scientific Research (A)
Research Field
プラズマ理工学
Research Institution
Tohoku University
Production of large-diameter plasmas for plasma processing
Principal Investigator
SATO Noriyoshi
Project Period (FY)
1995
Research Category
Grant-in-Aid for International Scientific Research.
Research Institution
Tohoku University
High efficient negative ion production by electron temperature control
Principal Investigator
IIZUKA Satoru
Project Period (FY)
1995 – 1997
Research Category
Grant-in-Aid for Scientific Research (A)
Research Field
プラズマ理工学
Research Institution
Tohoku University
高周波放電プラズマ大面積化
Principal Investigator
Principal Investigator
李 雲龍
Project Period (FY)
1994
Research Category
Grant-in-Aid for Encouragement of Young Scientists (A)
Research Field
プラズマ理工学
Research Institution
Tohoku University
The Establishment of C_<60> Plasma Production and Its Applications
Principal Investigator
SATO Noriyoshi
Project Period (FY)
1994 – 1996
Research Category
Grant-in-Aid for Scientific Research (A)
Research Field
プラズマ理工学
Research Institution
TOHOKU UNIVERSITY
# of Projects (Dsc)
# of Projects (Asc)
1.
IIZUKA Satoru
(20151227)
# of Collaborated Projects:
5 results
# of Collaborated Products:
0 results
2.
SATO Noriyoshi
(40005252)
# of Collaborated Projects:
4 results
# of Collaborated Products:
0 results
3.
HATAKEYAMA Rikizo
(00108474)
# of Collaborated Projects:
4 results
# of Collaborated Products:
0 results
4.
HIRATA Takamichi
(80260420)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
5.
CHOI Duk-In
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
6.
CHANG Hong-Young
# of Collaborated Projects:
2 results
# of Collaborated Products:
0 results
7.
ISHIGURO Seiji
(10193301)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
8.
ANDO Akira
(90182998)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
9.
INUTAKE Masaaki
(90023738)
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
10.
CHUNG Hong-Young
# of Collaborated Projects:
1 results
# of Collaborated Products:
0 results
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