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KAMAKURA Nozomu
鎌倉 望
Connect your ORCID iD
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Researcher Number
50323118
Affiliation
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2000 : Tohoku University, Research Institute of Electrical Communication, Research Associate, 電気通信研究所, 助手
Review Section/Research Field
Except Principal Investigator
電子デバイス・機器工学
/
固体物性I(光物性・半導体・誘電体)
Keywords
Except Principal Investigator
半導体 / 赤外分光 / Infrared spectroscopy / Semiconductor / Multiple internal reflection / 多重内部反射 / 反応機構 / In-line monitoring / Large-diameter Si wafer / Adsorption-desorption
…
More
/ Oxidation / 表面汚染 / 大口径ウェーハ / インライン・モニタリング / Reaction mechanism / 吸着・脱離 / surface contamination / 表面 / 有機物 / インライン・モニタ / シリコン / Surface / organic materials / 酸化
Less
Research Projects
(
2
results)
Co-Researchers
(
4
People)
Project Start Year(Newest)
Project Start Year(Oldest)
Research of hydrogen reaction dynamics at semiconductor surfaces by multiple-internal-reflection infrared spectroscopy
Principal Investigator
NIWANO Michio
Project Period (FY)
1999 – 2001
Research Category
Grant-in-Aid for Scientific Research (A)
Research Field
固体物性I(光物性・半導体・誘電体)
Research Institution
Tohoku University
Developmental Research of an Apparatus for In-line Monitoring of Contamination on Si Wafer Surface
Principal Investigator
NIWANO Michio
Project Period (FY)
1998 – 2000
Research Category
Grant-in-Aid for Scientific Research (B).
Research Field
電子デバイス・機器工学
Research Institution
Tohoku University
# of Projects (Dsc)
# of Projects (Asc)
1.
NIWANO Michio
(20134075)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
2.
KIMURA Yasuo
(40312673)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
3.
庄子 大生
(30312672)
# of Collaborated Projects :
2results
# of Collaborated Products :
0results
4.
遠田 義晴
(20232986)
# of Collaborated Projects :
1results
# of Collaborated Products :
0results
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