TAJIMA Satomi 田嶋聡美

Researcher Number	50537941
Other IDs	https://orcid.org/0000-0002-9044-6967
Affiliation (based on the past Project Information) *help	2013 – 2015: 名古屋大学, 工学(系)研究科(研究院), 准教授 2011: 東京大学, 大学院・工学研究科, 特任研究員 2010 – 2011: 東京大学, 大学院・工学系研究科, 特任研究員
Review Section/Research Field	Principal Investigator Plasma electronics / Applied physics, general
Keywords	Principal Investigator nmスケール / ゲート周辺 / プラズマダメージ除去 / 温度管理 / 吸着分子 / 副生成物制御 / 密度汎関数法 / 表面反応 / 半導体加工 / 低速エッチング … More / ケミカルドライエッチング / MEMS / 表面改質 / 生体模倣材料 / ＣＶＤ / 大気圧プラズマ / ガスセンサー / PECVD / 国際研究者交流　スロベニア / センサー / 炭化水素 / 表面電位 / ばらつき制御 / ＰＥＣＶＤ / カーボン膜 / 吸着 / 安定駆動 / 電子エネルギー / 小型 / プラズマへの液体導入 / 高精度化 / Heプラズマ / プラズマレスエッチング / 局所はっ水化 / パルス駆動 / μTAS / 血漿分離 / ストリーマー / ジェット進展 / パルス変調 / マイクロプラズマ Less

ゲート周辺ダメージ層除去プラズマレス低速平滑エッチング技術開発とメカニズム解明Principal Investigator
- Principal Investigator
  
  田嶋聡美
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Plasma electronics
- Research Institution
  Nagoya University
Development of the miniaturized hydrocarbon sensor using the nanocarbon multilayersPrincipal Investigator
- Principal Investigator
  
  TAJIMA Satomi
- Project Period (FY)
  2013 – 2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Plasma electronics
- Research Institution
  Nagoya University
Development of a small-scale heavy metal detection system using pulse-modulated inductively coupled He microplasma combined with micro total analysis systemPrincipal Investigator
- Principal Investigator
  
  TAJIMA Satomi
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Applied physics, general
- Research Institution
  The University of Tokyo

All 2016 2015 2014 2013 2012 2011 2010 Other

All Journal Article Presentation Book Patent

[Book] エレクトロニクス実装学会誌　19 (2) ISSN1343-96772016
- Author(s)
  田嶋聡美
- Total Pages
  9
- Publisher
  一般社団法人エレクトロニクス実装学会
- Data Source
  KAKENHI-PROJECT-26706022
[Book] 日本真空学会SP部会　薄膜・機能材料を用いたアクアイノベーション　～成膜，微細加工技術から分析・応用まで～2015
- Author(s)
  田嶋聡美
- Total Pages
  9
- Publisher
  一般社団法人日本真空学会
- Data Source
  KAKENHI-PROJECT-26706022
[Book] 超精密加工専門委員会　会誌『超精密 Vol.21』2015
- Author(s)
  田嶋聡美
- Total Pages
  6
- Publisher
  公益社団法人精密工学会
- Data Source
  KAKENHI-PROJECT-26706022
[Journal Article] High sensitivity of carbon nanowalls based sensor for detection of organic vapours2015
- Author(s)
  P. Slobodian, U. Cvelbar, P. Riha, R. Olejnik, J. Martyas, G. Filpic, H. Watanabe, H. J. Cho, S. Tajima, H. Kondo, M. Sekine and M. Hori
- Journal Title
  
  RSC Advances
  
  Volume: 5 Issue: 110 Pages: 90515-90520
- DOI
  10.1039/c5ra12000d
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706022
[Journal Article] Evaluation of the difference in the ratecoefficients of NOx(X = 1 or 2) + F2 -> F + FNOx by thestereochemical arrangement using the density functional theory2015
- Author(s)
  Satomi Tajima, Toshio Hayashi, and Masaru Hori
- Journal Title
  
  J. Phys. Chem. A
  
  Volume: 119 Issue: 8 Pages: 1381-1387
- DOI
  10.1021/jp510886b
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-25600123, KAKENHI-PROJECT-26706022
[Journal Article] Formation of Nanoporous Features, Flat Surfaces, or Crystallographically Oriented Etched Profiles by the Si Chemical Dry Etching Using the Reaction of F2 + NOー＞F + FNO at an Elevated Temperature2013
- Author(s)
  S. Tajima, T. Hayashi, K. Ishikawa, M. Sekine, and M. Hori
- Journal Title
  
  J. Phys. Chem. C
  
  Volume: 117 Issue: 40 Pages: 20810-20818
- DOI
  10.1021/jp4084794
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25600123
[Journal Article] On/off pulse modulation of atmospheric-pressure helium/argon inductively coupled plasma mcrojet for plasma processing of polymers2010
- Author(s)
  S.Tajima S.Tsuchiya, M.Matsumori, S.Nakatsuka, T.Ichiki
- Journal Title
  
  J.Photopolym.Sci.Technol.
  
  Volume: 23 Pages: 555-560
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760051
[Journal Article] Optical and electrical characterization of pulse-modulated argon atmospheric-pressure inductively coupled microplasma jets2010
- Author(s)
  S.Tajima, M.Matsumori, S.Nakatsuka, S.Tsuchiya, T.Ichiki
- Journal Title
  
  J.Appl.Phys
  
  Volume: 108
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760051
[Journal Article] Optical and electrical characterization of pulse-modulated argon atmospheric-pressure inductively coupled microplasma jets2010
- Author(s)
  S. Tajima, M. Matsumori, S. Nakatsuka, S. Tsuchiya, and T. Ichiki
- Journal Title
  
  J. Appl. Phys
  
  Volume: 108 Pages: 833021-5
- Data Source
  KAKENHI-PROJECT-22760051
[Journal Article] On/off pulse modulation of atmospheric-pressure helium/argon inductively coupled plasma mcrojet for plasma processing of polymers2010
- Author(s)
  S. Tajima, S. Tsuchiya, M. Matsumori, S. Nakatsuka, and T. Ichiki
- Journal Title
  
  J. Photopolym. Sci. Technol
  
  Volume: 23 Pages: 555-560
- Data Source
  KAKENHI-PROJECT-22760051
[Journal Article] Generation dynamics of an argon atmospheric-pressure inductively coupled plasma microjet evaluated by spectroscopic measurement techniques in review
- Author(s)
  Satomi Tajima, Keiichiro Urabe, Dae-Sung Lee, Kunihide Tachibana, and Takanori Ichiki
- Journal Title
  
  Satomi Tajima, Keiichiro Urabe, Dae-Sung Lee, Kunihide Tachibana, and Takanori Ichiki
- Data Source
  KAKENHI-PROJECT-22760051
[Patent] Low-speed etching technique and etching equipment using F2 and NO2 gases2015
- Inventor(s)
  田嶋聡美、林俊雄、堀勝
- Industrial Property Rights Holder
  田嶋聡美、林俊雄、堀勝
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-030105
- Filing Date
  2015-02-25
- Data Source
  KAKENHI-PROJECT-25600123
[Patent] Low-speed etching technique and etching equipment using F2 and NO2 gases2015
- Inventor(s)
  S. Tajima, T. Hayashi, M. Hori
- Industrial Property Rights Holder
  S. Tajima, T. Hayashi, M. Hori
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-030105
- Filing Date
  2015-02-25
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Effects of fluorine termination on nanostructures and electrical properties of carbon nanowalls2016
- Author(s)
  H. Cho, S. Tajima, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, M. Hiramatsu, M. Hori
- Organizer
  8th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials / 9th International Conference on Plasma-Nano Technology & Science, Nagoya University
- Place of Presentation
  名古屋大学, 愛知県名古屋市
- Year and Date
  2016-03-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Ar/NO/F2ガスを用いたカーボンナノウォールの化学終端処理が表面微細構造および電気的特性に及ぼす効果2015
- Author(s)
  趙亨峻, 田嶋聡美, 竹田圭吾, 近藤博基, 石川健治, 関根誠, 平松美根男, 堀勝
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場, 愛知県名古屋市
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Chemical dry etching of Si using F2 and NO2 gases at elevated temperature2015
- Author(s)
  S. Tajima, H. Hayashi, K. Ishikawa, M. Sekine, and M. Hori
- Organizer
  7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/8th International Conference on Plasma-Nano Technology & Science (ISPlasma2015/IC-PLANTS2015)
- Place of Presentation
  名古屋大学
- Year and Date
  2015-03-30
- Invited
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Chemical dry etching for solar cell patterning2015
- Author(s)
  S. Tajima
- Organizer
  Workshop on Nanomaterials for Energy Applications
- Place of Presentation
  AIST Tsukuba Central 2, 茨城県つくば市
- Year and Date
  2015-09-29
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Effects of Fluorine Termination of Carbon Nanowall Edges onTheir Electrical Properties by Ar/NO/F2 Mixture Gas Treatments2015
- Author(s)
  H. J. Cho, S. Tajima, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, M. Hiramatsu, M. Hori
- Organizer
  9th International Conference　on Reactive Plasmas/68rd Gaseous Electronics Conference/33th Symposium on Plasma Processing, (ICRP-9/GEC-68/SPP-33)
- Place of Presentation
  Hawaii Convention Center, Honolulu, HI, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] F2+NOx→F+FNOxを用いたSi系材料ケミカルドライエッチングにおける大気中水分のエッチングレートへの寄与2015
- Author(s)
  田嶋聡美
- Organizer
  日本真空学会スパッタリング及びプラズマプロセス技術部会（SP部会）第143回定例研究会
- Place of Presentation
  信州大学, 長野県長野市
- Year and Date
  2015-06-03
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Change in optical properties by texturing Si compounds by F2 and NOx gases2015
- Author(s)
  S. Tajima, T. Hayashi, M. Sasaki, K. Yamakawa, K. Ishikawa, M. Sekine, M. Hori
- Organizer
  Japan Society of Applied Physics (JSAP)-Optical Society of America (OSA) Joint Symposia 2015
- Place of Presentation
  名古屋国際会議場, 愛知県名古屋市
- Year and Date
  2015-09-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Modification of chemical bonding structures and electrical properties of carbon nanowalls by Ar/F2 post-treatments2015
- Author(s)
  H. J. Cho, S. Tajima, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Mineo Hiramatsu and Masaru Hori
- Organizer
  The 10th Anniversary Asian-European International Conference on Plasma Surface Engineering (AEPSE2015)
- Place of Presentation
  Ramada Plaza Jeju, Jeju Island, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] プラズマを用いた樹脂表面改質と薄膜との密着性改善2015
- Author(s)
  田嶋聡美
- Organizer
  株式会社昭和真空相模原工場　若手技術者勉強会
- Place of Presentation
  株式会社昭和真空相模原工場, 神奈川県相模原市
- Year and Date
  2015-07-03
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] プラズマを利用した金属とプラスチックの結合2015
- Author(s)
  田嶋聡美
- Organizer
  一般社団法人　日本塑性加工学会　プラスチックプロセス分科会　第８７回研究会
- Place of Presentation
  山形大学東京サテライト, 東京都港区
- Year and Date
  2015-12-04
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] プラズマプロセス後の表面の様子を調べよう2015
- Author(s)
  田嶋聡美
- Organizer
  第九回先端プラズマ技術研究会（社会貢献・中小企業向け）
- Place of Presentation
  名古屋大学, 愛知県名古屋市
- Year and Date
  2015-11-20
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Chemical dry etching of Si using F2 and NO2 gases at elevated temperature2015
- Author(s)
  S. Tajima, H. Hayashi, K. Ishikawa, M. Sekine, and M. Hori
- Organizer
  7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/8th International Conference on Plasma-Nano Technology & Science (ISPlasma2015/IC-PLANTS2015)
- Place of Presentation
  名古屋大学
- Year and Date
  2015-03-30
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] プラズマを用いた異種材料の表面改質と接着前処理のノウハウ2015
- Author(s)
  田嶋聡美
- Organizer
  株式会社神戸製鋼所金属樹脂接合勉強会
- Place of Presentation
  名古屋大学, 愛知県名古屋市
- Year and Date
  2015-04-23
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] 密度汎関数法による低速ケミカルドライエッチング反応時の表面反応モデリング2015
- Author(s)
  田嶋聡美, 林俊雄, 佐々木実, 山川晃司, 石川健治, 関根誠, 堀勝
- Organizer
  第25回日本MRS年次大会
- Place of Presentation
  横浜市開港記念会館, 神奈川県横浜市
- Year and Date
  2015-12-08
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Surface reaction during the slow Si etching using F2 and NO22015
- Author(s)
  S. Tajima, H. Hayashi, K. Ishikawa, M. Sekine, and M. Hori
- Organizer
  The 62nd Japan Society of Applied Physics (JSAP) Spring Meeting
- Place of Presentation
  東海大学
- Year and Date
  2015-03-12
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] The challenges and issues of plasma-assisted adhesion improvement2015
- Author(s)
  S. Tajima
- Organizer
  68th Advisory Committee on Ultra Precision Workshop
- Place of Presentation
  メルパルク大阪
- Year and Date
  2015-01-23
- Invited
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Surface reaction during the slow Si etching using F2 and NO22015
- Author(s)
  S. Tajima, H. Hayashi, K. Ishikawa, M. Sekine, and M. Hori
- Organizer
  The 62nd Japan Society of Applied Physics (JSAP) Spring Meeting
- Place of Presentation
  東海大学
- Year and Date
  2015-03-12
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] 東海地区の自動車・航空宇宙・ヘルスケア産業界が寄せるプラズマ加工と表面モデリングのニーズ2015
- Author(s)
  田嶋聡美
- Organizer
  一般社団法人　応用物理学会　九州支部特別講演
- Place of Presentation
  九州大学伊都キャンパス, 福岡県福岡市
- Year and Date
  2015-11-24
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] 電気自動車・スマホの心臓部のものづくりを分子レベルで考えよう2015
- Author(s)
  田嶋聡美
- Organizer
  平成27年度あいち理数教育推進事業「知の探究講座」（社会貢献・高校生向け）
- Place of Presentation
  名古屋大学, 愛知県名古屋市
- Year and Date
  2015-07-23
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Difference in chemical dry etching of Si related materials using NO and NO22015
- Author(s)
  S. Tajima, H. Hayashi, M. Hori
- Organizer
  The 20th Workshop on Advanced Plasma Processes and Diagnostics & The 7th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials
- Place of Presentation
  北海道大学
- Year and Date
  2015-01-28
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] 密度汎関数法によるケミカルドライエッチングの気相,表面反応モデルの構築と課題と東海地区の自動車・航空宇宙・ヘルスケア産業会が寄せるプラズマ加工のニーズ2015
- Author(s)
  田嶋聡美
- Organizer
  半導体プロセス表面反応講習会
- Place of Presentation
  株式会社日立ハイテクノロジーズ, 山口県下松市
- Year and Date
  2015-08-27
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Modeling molecules responsible for the sidewall protection during the chemical dry etching of silicon related materials using F2 + NOx -> F + FNOx2015
- Author(s)
  S. Tajima, T. Hayashi, K. Yamakawa, M. Sasaki, K. Ishikawa, M. Sekine, and M. Hori
- Organizer
  Hawaii Convention Center, Honolulu, HI, USA
- Place of Presentation
  Hawaii Convention Center, Honolulu, HI, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] The challenges and issues of plasma-assisted adhesion improvement2015
- Author(s)
  S. Tajima
- Organizer
  68th Expert Committee on Ultra Precision Workshop
- Place of Presentation
  メルパルク大阪
- Year and Date
  2015-01-23
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] A vibrational infrared thermal detector released by plasmaless Si etching process2015
- Author(s)
  J. -H. Jeong, S. Kumagai, S. Tajima, T. Hayashi, K. Yamakawa, M. Sasaki
- Organizer
  7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/8th International Conference on Plasma-Nano Technology & Science (ISPlasma2015/IC-PLANTS2015)
- Place of Presentation
  名古屋大学
- Year and Date
  2015-03-28
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Anisotropic chemical dry silicon wafer etching using F2 + NO -> F + FNO reaction2014
- Author(s)
  S. Tajima, T. Hayashi, K. Yamakawa, M. Sasaki, K. Ishikawa, M. Sekine, and M. Hori
- Organizer
  36th International Symposium on Dry Process
- Place of Presentation
  Pacifico Yokohama, 横浜市
- Year and Date
  2014-11-28
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Chemical Dry Etching of the Si Sacrificial Layer in MEMS Devices2014
- Author(s)
  S. Tajima, T. Hayashi, M. Sasaki
- Organizer
  International Nanotechnology Exhibition & Conference (nano tech 2014)
- Place of Presentation
  Tokyo Big Sight, Tokyo, Japan
- Invited
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] The change in growth, differentiation, and adhesion characteristics of plasma-treated A549 and Saos-2 cells2014
- Author(s)
  S. Tajima
- Organizer
  Central Japan Medical and Bio seeds research academia-industry matching workshop
- Place of Presentation
  ウインク愛知、名古屋市
- Year and Date
  2014-12-10
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] How to design a chamber for material processing?2014
- Author(s)
  S. Tajima
- Organizer
  Female junior and high school students science and technology major promotion seminar
- Place of Presentation
  名古屋大学
- Year and Date
  2014-08-06
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Intoroduction of the plasma material surface treatment2014
- Author(s)
  S. Tajima
- Organizer
  Sumitomo Seika Chemicals, Co., Ltd. Beppu Factory Workshop
- Place of Presentation
  住友精化株式会社　別府工場
- Year and Date
  2014-11-05
- Invited
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Intoroduction of the plasma material surface treatment2014
- Author(s)
  S. Tajima
- Organizer
  Sumitomo Seika Chemicals, Co., Ltd., Beppu Factory workshop
- Place of Presentation
  住友精化株式会社、別府工場
- Year and Date
  2014-11-05
- Invited
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Analysis of F loss during the chemical dry etching of Si using NO and F2 gases (II)2014
- Author(s)
  S. Tajima, T. Hayashi, K. Ishikawa, M. Sekine, M. Sasaki, K. Yamakawa, and M. Hori
- Organizer
  The 75th Japan Society of Applied Physics (JSAP) Autumn Meeting
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-19
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Designing the material process chamber2014
- Author(s)
  S. Tajima
- Organizer
  Female junior and high school students science and technology major promotion seminar
- Place of Presentation
  名古屋大学
- Year and Date
  2014-08-06
- Invited
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Anisotropic chemical dry silicon wafer etching using F2 + NO  F + FNO reaction2014
- Author(s)
  S. Tajima, T. Hayashi, K. Yamakawa, M. Sasaki, K. Ishikawa, M. Sekine, M. Hori
- Organizer
  36th International Symposium on Dry Process
- Place of Presentation
  PACIFICO Convention Plaza、横浜市
- Year and Date
  2014-11-28
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Analysis of F loss during the chemical dry etching of Si using NO and F2 gases (II)2014
- Author(s)
  S. Tajima, T. Hayashi, K. Ishikawa, M. Sekine, M. Sasaki, K. Yamakawa, and M. Hori
- Organizer
  The 75th Japan Society of Applied Physics (JSAP) Autumn Meeting
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-19
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Modification of A549 mitochondria activity, cell shape, and cell cytoskeleton by an atomic oxygen radical source2013
- Author(s)
  Satomi Tajima, Kenji Ishikawa, Keigo Takeda, and Masaru Hori
- Organizer
  The 2013 JSAP-MRS symposia
- Place of Presentation
  Doshisha University, Kyotanabe Campus, Kyotanabe, Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Fabricating the smooth chemically dry etched Si surface for MEMS devices2013
- Author(s)
  S. Tajima, T. Hayashi, Minoru Sasaki, K. Ishikawa, M. Sekine, and M. Hori
- Organizer
  The 35th International Symposium on Dry Process (DPS2013)
- Place of Presentation
  Ramada Plaza Jeju Hotel, Jeju Island, Korea
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Effect of neutral species generated by the micro hollow-cathode discharge radical source on the modification of A549 cell viability2013
- Author(s)
  S. Tajima, M. Hori
- Organizer
  The 9th Asian-European International Conference on Plasma Surface Engineering (AEPSE2013)
- Place of Presentation
  Ramada Plaza Jeju Hotel, Jeju Island, Korea
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Si chemical dry etching in NOx (x=1 or 2) / F2 gas mixture at an elevated temperature (II)2013
- Author(s)
  S. Tajima, T. Hayashi, K. Ishikawa, M. Sekine, and M. Hori
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  Doshisha University, Kyotanabe Campus, Kyotanabe, Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Indirect plasma treatment of SAOS-2 and NHDF cells by surface dielectric barrier discharge2013
- Author(s)
  S. Tajima, R. Gristina, P. Ambrico, D. Pignatelli, K. Masur, K.-D. Weltmann, T. von Woedtke, H. Toyoda, M. Hori, P. Favia
- Organizer
  The 21st International Symposium on Plasma Chemistry
- Place of Presentation
  Cairns, QLD, Australia
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] 名古屋大学におけるプラズマの研究動向と最新のトピックス2013
- Author(s)
  S. Tajima
- Organizer
  平成25年度第1回かがわ健康関連製品開発地域技術討論会
- Place of Presentation
  香川大学
- Invited
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Si chemical dry etching using the reaction of NO and F22013
- Author(s)
  S. Tajima, T. Hayashi, K. Ishikawa, M. Sekine, and M. Hori
- Organizer
  17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  SKKU, Suon, Korea
- Invited
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] Development of a Si dry chemical etching technique using NO/F_2 gas mixtures without using plasmas2012
- Author(s)
  S.Tajima, K.Ishikawa, T.Hayashi, M.Hori
- Organizer
  The 5^<th> International Conference on Plasma-Nano technology & Science
- Place of Presentation
  犬山国際観光センター(愛知県)
- Year and Date
  2012-03-10
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Development of a plasma-less Si chemical dry etching method2012
- Author(s)
  S. Tajima, K. Ishikawa, T. Hayashi, and M. Hori
- Organizer
  59th Spring meeting of the Japan Society of Applied Physics
- Place of Presentation
  早稲田大学(東京都)
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Development of a Si dry chemical etching technique using NO/F_2 gas mixtures without using plasmas2012
- Author(s)
  S. Tajima, K. Ishikawa, T. Hayashi, and M. Hori
- Organizer
  The 5th International Conference on Plasma-Nanotechnology & Science
- Place of Presentation
  犬山国際観光センター(愛知県)
- Year and Date
  2012-03-10
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Development of a plasma-less Si chemical dry etching method2012
- Author(s)
  S.Tajima, K.Ishikawa, T.Hayashi, M.Hori
- Organizer
  59^<th> Spring meeting of the Japan Society of Applied Physics
- Place of Presentation
  早稲田大学(東京都)
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] High-speed plasma enhanced chemical vapor deposition of flurocarbon film by atmosphereic-pressure inductively coupled plasma microjet2011
- Author(s)
  S. Tajima, S. Tsuchiya, and T. Ichiki
- Organizer
  The 28th International Conference of Photopolymer Science and Technology
- Place of Presentation
  千葉大学(千葉県)
- Year and Date
  2011-06-23
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Stable sample introduction to the pulse-modulated atmospheric-pressure inductively coupled plasma microjet atomic emission spectrometry2011
- Author(s)
  T. Nomura, S. Tsuchiya, S. Tajima, and T. Ichiki
- Organizer
  第58回春季応用物理学会
- Place of Presentation
  神奈川工科大学(神奈川県)
- Year and Date
  2011-03-26
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Optical observation of the atmospheric-pressure inductively coupled plasma jet propagation dynamics2011
- Author(s)
  S. Tajima, and T. Ichiki
- Organizer
  第58回春季応用物理学会
- Place of Presentation
  神奈川工科大学(神奈川県)
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Fast separation of blood cells by a T-shape microfluidic device2011
- Author(s)
  S. Tajima and T. Ichiki
- Organizer
  The 21st MRS-Japan Academic Symposium
- Place of Presentation
  横浜情報文化センター(神奈川県)
- Year and Date
  2011-12-19
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Fast separation of blood cells by a T-shape microfluidic device2011
- Author(s)
  S.Tajima, T.Ichiki
- Organizer
  The 21st MRS-Japan Academic Syrmposium
- Place of Presentation
  横浜情報文化センター(神奈川県)
- Year and Date
  2011-12-19
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] High-speed deposition of fluorocarbon films by C_4F_8/H_2/Ar atmospheric-pressure inductively coupled plasma2011
- Author(s)
  S. Tajima and T. Ichiki
- Organizer
  The 33rd International Symposium on Dry Process
- Place of Presentation
  日京都ガーデンパレスホテル(京都府)
- Year and Date
  2011-11-10
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Spatiotemporal distributions of excited state Ar atoms and N2 molecules in a pulse-modulated Ar atmospheric-pressure inductively coupled plasma microjet2011
- Author(s)
  S. Tajima and T. Ichiki
- Organizer
  The 24th Symposium on Plasma Science for Materials(SPSM-24)
- Place of Presentation
  大阪大学(大阪府)
- Year and Date
  2011-07-19
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] High-speed plasma enhanced chemical vapor deposition of flurocarbon film by atmosphereic-pressure inductively coupledplasma microjet2011
- Author(s)
  S.Tajima, S.Tsuchiya, T.Ichiki
- Organizer
  The 28^<th> International Conference of Photopolymer Science and Technology
- Place of Presentation
  千葉大学(千葉県)
- Year and Date
  2011-06-23
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] High-speed deposition of fluorocarbon films by C_4F_8/H_2/Ar atmospheric-pressure inductively coupled plasma2011
- Author(s)
  S.Tajima, T.Ichiki
- Organizer
  The 33rd International Symposium on Dry Process
- Place of Presentation
  京都ガーデンパレスホテル(京都府)
- Year and Date
  2011-11-10
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] On/off pulse modulation of atmospheric-pressure helium/argon inductively coupled plasma microjet for plasma processing of polymers2010
- Author(s)
  S. Tajima, S. Tsuchiya, M. Matsumori, S. Nakatsuka, and T. Ichiki
- Organizer
  The 27th International conference of photopolymer science and technology(ICPST-27)
- Place of Presentation
  千葉大学(千葉県)
- Year and Date
  2010-06-24
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Generation of pulse-modulated He and He/Ar atmospheric-pressure inductively coupled microjets2010
- Author(s)
  S. Tajima, S. Tsuchiya, T. Numura, M. Matsumori, S. Nakatsuka, and T. Ichiki
- Organizer
  第70回秋季応用物理学会
- Place of Presentation
  長崎大学(長崎県)
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Dynamic observation of the pulse-modulated atmospheric-pressure ICP microjets2010
- Author(s)
  S.Tajima, T.Ichiki
- Organizer
  20th Materials Research Society (MRS)-Japan Academic Symposium
- Place of Presentation
  開港記念館(神奈川県)
- Year and Date
  2010-12-21
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Dynamic observation of the pulse-modulated atmospheric-pressure ICP microjets2010
- Author(s)
  S. Tajima, and T. Ichiki
- Organizer
  20th Materials Research Society(MRS)-Japan Academic Symposium
- Place of Presentation
  開港記念館(神奈川県)
- Year and Date
  2010-12-21
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] On/off pulse modulation of atmospheric-pressure helium/argon inductively coupled plasma microjet for plasma processing of polymers2010
- Author(s)
  S.Tajima, S.Tsuchiya, M.Matsumori, S.Nakatsuka, T.Ichiki
- Organizer
  The 27th International conference of photopolymer science and technology (ICPST-27)
- Place of Presentation
  千葉大学(千葉県)
- Year and Date
  2010-06-24
- Data Source
  KAKENHI-PROJECT-22760051
[Presentation] Development of a atmospheric-pressure plasma chemical vapor deposition system for the reduction of the process variability
- Author(s)
  S. Tajima, K. Yamada, K. Nanki, T. Nakajima, H. Yasuda, H. Kurita, K. Takashima, and A. Mizuno
- Organizer
  Symposium for the promotion of the female science and engineering researcher
- Place of Presentation
  豊橋技術科学大学
- Year and Date
  2015-03-10 – 2015-03-15
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] The reaction between the etched product and the Si (100) surface during the chemical dry etching in F2 and NO gases
- Author(s)
  S. Tajima, T. Hayashi, K. Ishikawa, M. Sekine, M. Sasaki, K. Yamakawa, and M. Hori
- Organizer
  Gorden Research Conference Plasma Processing Science
- Place of Presentation
  Bryant Univ., Smithfield, RI, USA
- Year and Date
  2014-07-27 – 2014-07-30
- Data Source
  KAKENHI-PROJECT-25600123
[Presentation] The reaction between the etched product and the Si (100) surface during the chemical dry etching in F2 and NO gases
- Author(s)
  S. Tajima, T. Hayashi, K. Ishikawa, M. Sekine, M. Sasaki, K. Yamakawa, and M. Hori
- Organizer
  Gorden Research Conference Plasma Processing Science
- Place of Presentation
  Bryant Univ., Smithfield, RI, USA
- Year and Date
  2014-07-27 – 2014-07-30
- Data Source
  KAKENHI-PROJECT-26706022
[Presentation] Difference in chemical dry etching of Si related materials using NO and NO2
- Author(s)
  S. Tajima, H. Hayashi, and M. Hori
- Organizer
  The 20th Workshop on Advanced Plasma Processes and Diagnostics & The 7th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials
- Place of Presentation
  北海道大学
- Year and Date
  2015-01-27 – 2015-01-28
- Invited
- Data Source
  KAKENHI-PROJECT-25600123

1. 近藤博基 (50345930)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
2. CVELVAR Uros

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
3. SLOBODIAN Petr

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. FAVIA Pietro

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
5. GRISTINA Roberto

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results

TAJIMA Satomi 田嶋 聡美

Research Projects

Research Products

Co-Researchers

ゲート周辺ダメージ層除去プラズマレス低速平滑エッチング技術開発とメカニズム解明Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of the miniaturized hydrocarbon sensor using the nanocarbon multilayersPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of a small-scale heavy metal detection system using pulse-modulated inductively coupled He microplasma combined with micro total analysis systemPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Book] エレクトロニクス実装学会誌 19 (2) ISSN1343-96772016

Author(s)

Total Pages

Publisher

Data Source

[Book] 日本真空学会SP部会 薄膜・機能材料を用いたアクアイノベーション ～成膜，微細加工技術から分析・応用まで～2015

Author(s)

Total Pages

Publisher

Data Source

[Book] 超精密加工専門委員会 会誌『超精密 Vol.21』2015

Author(s)

Total Pages

Publisher

Data Source

[Journal Article] High sensitivity of carbon nanowalls based sensor for detection of organic vapours2015

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Evaluation of the difference in the ratecoefficients of NOx(X = 1 or 2) + F2 -> F + FNOx by thestereochemical arrangement using the density functional theory2015

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Formation of Nanoporous Features, Flat Surfaces, or Crystallographically Oriented Etched Profiles by the Si Chemical Dry Etching Using the Reaction of F2 + NOー＞F + FNO at an Elevated Temperature2013

Author(s)

Journal Title

DOI

Data Source

[Journal Article] On/off pulse modulation of atmospheric-pressure helium/argon inductively coupled plasma mcrojet for plasma processing of polymers2010

Author(s)

Journal Title

Data Source

[Journal Article] Optical and electrical characterization of pulse-modulated argon atmospheric-pressure inductively coupled microplasma jets2010

Author(s)

Journal Title

Data Source

[Journal Article] Optical and electrical characterization of pulse-modulated argon atmospheric-pressure inductively coupled microplasma jets2010

Author(s)

Journal Title

Data Source

[Journal Article] On/off pulse modulation of atmospheric-pressure helium/argon inductively coupled plasma mcrojet for plasma processing of polymers2010

Author(s)

Journal Title

Data Source

[Journal Article] Generation dynamics of an argon atmospheric-pressure inductively coupled plasma microjet evaluated by spectroscopic measurement techniques in review

Author(s)

Journal Title

Data Source

[Patent] Low-speed etching technique and etching equipment using F2 and NO2 gases2015

Inventor(s)

Industrial Property Rights Holder

Industrial Property Rights Type

Industrial Property Number

Filing Date

Data Source

[Patent] Low-speed etching technique and etching equipment using F2 and NO2 gases2015

TAJIMA Satomi 田嶋聡美

[Book] エレクトロニクス実装学会誌　19 (2) ISSN1343-96772016

[Book] 日本真空学会SP部会　薄膜・機能材料を用いたアクアイノベーション　～成膜，微細加工技術から分析・応用まで～2015

[Book] 超精密加工専門委員会　会誌『超精密 Vol.21』2015