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Tsuchiya Toshiyuki  土屋 智由

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TSUCHIYA Toshiyuki  土屋 智由

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Researcher Number 60378792
Other IDs
Affiliation (Current) 2025: 京都大学, 工学研究科, 教授
Affiliation (based on the past Project Information) *help 2019 – 2024: 京都大学, 工学研究科, 教授
2020: 京都大学, 工学(系)研究科(研究院), 教授
2018: 京都大学, 工学研究科, 准教授
2016: 京都大学, 工学研究科, 准教授
2012 – 2015: 京都大学, 工学(系)研究科(研究院), 准教授 … More
2011: 京都大学, 大学院・工学研究科, 准教授
2007 – 2011: Kyoto University, 工学研究科, 准教授
2009: Kyoto University, 大学院・工学研究科, 准教授
2007: Kyoto University, 准教授
2006: 京都大学, 工学研究科, 助教授 Less
Review Section/Research Field
Principal Investigator
Materials/Mechanics of materials / Basic Section 20010:Mechanics and mechatronics-related / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Medium-sized Section 20:Mechanical dynamics, robotics, and related fields / Basic Section 19020:Thermal engineering-related / Nano/Microsystems
Except Principal Investigator
Basic Section 24010:Aerospace engineering-related / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Broad Section C / Aerospace engineering
Keywords
Principal Investigator
MEMS / 単結晶シリコン / ナノギャップ / 顕微ラマン分光 / シリコン / SOI / 静電アクチュエータ / へき開 / 引張試験 / 機械特性 … More / 二酸化シリコン / 高温試験 / 腐食疲労 / 酸化 / 疲労試験 / マイクロシステム / 面接触 / 熱輸送計測 / neuromorphic computing / noise resiliency / Neuromorphic computing / Noise resiliency / Phase modulation / Surface Acoustic Wave / Reservoir Computing / センサ / リザバーコンピューティング / ベンチマークタスク / 非線形振動子 / 機械学習 / コグニティブコンピューティング / 伝熱 / 熱輸送 / サーモリフレクタンス / サーモリフレクタンス法 / カシミール力 / 熱放射 / 熱アクチュエータ / 熱電子放出 / へき開破壊 / 静電櫛歯アクチュエータ / 熱膨張アクチュエータ / 光チョッパ / マイクロマシン / 共振子 / 時間分解応力測定 / 振動子 / 光チョッパー / 動的局所応力計測 / 酸素析出欠陥 / 信頼化 / 共振振動 / 力学特性 / 寿命予測 / 信頼性 / 電子ビーム露光 / 静電容量 / フラーレン … More
Except Principal Investigator
電気推進 / 超小型衛星 / イオン液体 / 潤滑油 / トライボロジー / 境界潤滑 / 電界放出 / イオンビーム / エレクトロスプレー / 機械要素 / 量子ビーム分析 / 添加剤 / 中性粒子 / 潤滑 / ナノ隙間 / 流体潤滑 / ナノすきま / 摩擦係数 / 推力可変 / 高密度 / 微細加工 / 粒子計算 Less
  • Research Projects

    (17 results)
  • Research Products

    (112 results)
  • Co-Researchers

    (19 People)
  •  超小型エレクトロスプレー宇宙推進機における「疑似」質量損失機構の解明

    • Principal Investigator
      鷹尾 祥典
    • Project Period (FY)
      2024 – 2026
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 24010:Aerospace engineering-related
    • Research Institution
      Yokohama National University
  •  Toward understanding surface-to-surface contact - Measurement of physical phenomena using cleavage nanogapsPrincipal Investigator

    • Principal Investigator
      土屋 智由
    • Project Period (FY)
      2024 – 2027
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Review Section
      Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
    • Research Institution
      Kyoto University
  •  Science for Boundary Lubrication - Essence of Low Friction Mechanism Based on Structure and Dynamics of Additive Adsorption Layer

    • Principal Investigator
      平山 朋子
    • Project Period (FY)
      2023 – 2027
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Review Section
      Broad Section C
    • Research Institution
      Kyoto University
  •  境界潤滑層の構造とダイナミクス-低摩擦をもたらす潤滑油分子の最適設計

    • Principal Investigator
      平山 朋子
    • Project Period (FY)
      2023
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Review Section
      Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
    • Research Institution
      Kyoto University
  •  Cognitive sensing system where machines perform machine learningPrincipal Investigator

    • Principal Investigator
      土屋 智由
    • Project Period (FY)
      2022 – 2024
    • Research Category
      Grant-in-Aid for Challenging Research (Pioneering)
    • Review Section
      Medium-sized Section 20:Mechanical dynamics, robotics, and related fields
    • Research Institution
      Kyoto University
  •  Principle Friction Properties in Boundary and Fluid Lubrication in an Ideal Nano Gap

    • Principal Investigator
      Hirayama Tomoko
    • Project Period (FY)
      2022 – 2023
    • Research Category
      Grant-in-Aid for Challenging Research (Exploratory)
    • Review Section
      Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
    • Research Institution
      Kyoto University
  •  Heat Transfer Measurement on Nanogap -Investigation of Transition from Radiation to Heat ConductionPrincipal Investigator

    • Principal Investigator
      Tsuchiya Toshiyuki
    • Project Period (FY)
      2021 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 19020:Thermal engineering-related
    • Research Institution
      Kyoto University
  •  Elucidation of the electrospray phenomena between microelectrodes for versatile use in ultra-small space propulsion devices

    • Principal Investigator
      Takao Yoshinori
    • Project Period (FY)
      2021 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 24010:Aerospace engineering-related
    • Research Institution
      Yokohama National University
  •  Reservoir computing with MEMS resonatorsPrincipal Investigator

    • Principal Investigator
      土屋 智由
    • Project Period (FY)
      2021 – 2022
    • Research Category
      Grant-in-Aid for JSPS Fellows
    • Review Section
      Basic Section 20010:Mechanics and mechatronics-related
    • Research Institution
      Kyoto University
  •  MEMS共振器を用いたリザバーコンピューティングPrincipal Investigator

    • Principal Investigator
      土屋 智由
    • Project Period (FY)
      2020 – 2022
    • Research Category
      Grant-in-Aid for JSPS Fellows
    • Review Section
      Basic Section 20010:Mechanics and mechatronics-related
    • Research Institution
      Kyoto University
  •  Ultracompact electrospray space propulsion that can dramatically increase thrust density and secure redundant system

    • Principal Investigator
      TAKAO Yoshinori
    • Project Period (FY)
      2018 – 2020
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 24010:Aerospace engineering-related
    • Research Institution
      Yokohama National University
  •  Drastic improvement of efficiency for micro space propulsion using 3D-MEMS fabrication technique

    • Principal Investigator
      Takao Yoshinori
    • Project Period (FY)
      2015 – 2016
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Aerospace engineering
    • Research Institution
      Yokohama National University
  •  Thermal properties mesurement device for nanogapPrincipal Investigator

    • Principal Investigator
      Tsuchiya Toshiyuki
    • Project Period (FY)
      2014 – 2015
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Nano/Microsystems
    • Research Institution
      Kyoto University
  •  Time-resolved local-stress measurement of MEMS resonating structure using micro Raman spectroscopyPrincipal Investigator

    • Principal Investigator
      TSUCHIYA Toshiyuki
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Materials/Mechanics of materials
    • Research Institution
      Kyoto University
  •  カーボンナノ構造体力学特性評価のための静電力駆動、静電容量検出MEMSデバイスPrincipal Investigator

    • Principal Investigator
      土屋 智由
    • Project Period (FY)
      2007
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Materials/Mechanics of materials
    • Research Institution
      Kyoto University
  •  Explanation of reaction layer fatigue in silicon microstructure for development of highly-reliable MEMS devicesPrincipal Investigator

    • Principal Investigator
      TSUCHIYA Toshiyuki
    • Project Period (FY)
      2007 – 2011
    • Research Category
      Grant-in-Aid for Young Scientists (S)
    • Research Field
      Materials/Mechanics of materials
    • Research Institution
      Kyoto University
  •  MEMSデバイスの高信頼化のための単結晶シリコンの表面反応疲労現象の理解と制御Principal Investigator

    • Principal Investigator
      土屋 智由
    • Project Period (FY)
      2006 – 2007
    • Research Category
      Grant-in-Aid for Young Scientists (A)
    • Research Field
      Materials/Mechanics of materials
    • Research Institution
      Kyoto University

All 2024 2023 2022 2021 2020 2019 2018 2017 2016 2015 2013 2012 2011 2010 2009 2008 2007 2006 Other

All Journal Article Presentation Book

  • [Book] シリコンの破壊と疲労(第1編 第12章 3節) 服部敏雄他編:破壊力学大系2012

    • Author(s)
      佐藤 一雄,土屋智由
    • Total Pages
      9
    • Publisher
      エヌ・ティー・エス
    • Data Source
      KAKENHI-PROJECT-24656087
  • [Book] 破壊力学大系シリコンの破壊と疲労(第1編第12章3節)(服部敏雄他編)2012

    • Author(s)
      佐藤一雄, 土屋智由
    • Total Pages
      9
    • Publisher
      エヌ・ティー・エス
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Book] 破壊力学大系2012

    • Author(s)
      佐藤一雄、土屋智由
    • Publisher
      エヌ・ティース・エス
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Book] Reliability of MEMS2008

    • Author(s)
      T. Tsuchiya
    • Total Pages
      303
    • Publisher
      Wiley VCH
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Book] Comprehensive Microsystems(Chapter 1.01 Silicon and related materials)2007

    • Author(s)
      T. Tsuchiya
    • Publisher
      Elsevier
    • Data Source
      KAKENHI-PROJECT-18686013
  • [Book] Comprehensive Microsystems (Chapter 1.01 Silicon and related materials)2007

    • Author(s)
      T. Tsuchiya
    • Publisher
      Elsevier
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Adsorption Characteristics and Mechanical Responses of Lubricants Containing Polymer Additives under Fluid Lubrication with a Narrow Gap2024

    • Author(s)
      Hirayama Tomoko、Yamashita Naoki、Yamamoto Waka、Shirode Kenta、Okada Akira、Hatano Naoya、Tsuchiya Toshiyuki、Yamada Masako
    • Journal Title

      Langmuir

      Volume: 40 Issue: 12 Pages: 6229-6243

    • DOI

      10.1021/acs.langmuir.3c03725

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22K18756, KAKENHI-PROJECT-23H05448
  • [Journal Article] Non-linear processing with a Surface Acoustic Wave reservoir computer2023

    • Author(s)
      Claude Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    • Journal Title

      Microsystem Technologies

      Volume: -

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21F20799
  • [Journal Article] Numerical calculation of thermoreflectance coefficient of c-Si for wavelengths of 200?800 nm and temperatures of 300?500 K2023

    • Author(s)
      Shimofuri Masaki、Murakami Taichi、Miyake Shugo、Banerjee Amit、Hirotani Jun、Tsuchiya Toshiyuki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 62 Issue: 11 Pages: 112006-112006

    • DOI

      10.35848/1347-4065/ad07f8

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Journal Article] Design and Fabrication of Ionic Liquid Electrospray Thruster with Two-Stage Electrodes2023

    • Author(s)
      Akane NISHIMURA, Hirohide KATSUTA, Yoshinori TAKAO, Toshiyuki TSUCHIYA
    • Journal Title

      Journal of Evolving Space Activities

      Volume: 1 Issue: 0 Pages: n/a

    • DOI

      10.57350/jesa.7

    • ISSN
      2758-1802
    • Language
      English
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-21H01530
  • [Journal Article] Gap distance dependence on field emission at the nanogap between silicon cleavage surfaces2023

    • Author(s)
      Akura Yuki、Shimofuri Masaki、Banerjee Amit、Hirotani Jun、Tsuchiya Toshiyuki
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 41 Issue: 2 Pages: 022805-022805

    • DOI

      10.1116/6.0002456

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Journal Article] Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device2023

    • Author(s)
      Shimofuri Masaki、Banerjee Amit、Hirotani Jun、Hirai Yoshikazu、Tsuchiya Toshiyuki
    • Journal Title

      Journal of Microelectromechanical Systems

      Volume: 32 Issue: 1 Pages: 67-73

    • DOI

      10.1109/jmems.2022.3213999

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Journal Article] Non-linear processing with a surface acoustic wave reservoir computer2023

    • Author(s)
      Meffan Claude、Ijima Taiki、Banerjee Amit、Hirotani Jun、Tsuchiya Toshiyuki
    • Journal Title

      Microsystem Technologies

      Volume: 29 Issue: 8 Pages: 1197-1206

    • DOI

      10.1007/s00542-023-05463-4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Journal Article] Uniform needle-emitter arrays for ionic liquid electrospray thrusters with precise thrust control2021

    • Author(s)
      Tachibana Fumiya、Tsuchiya Toshiyuki、Takao Yoshinori
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SC Pages: SCCL06-SCCL06

    • DOI

      10.35848/1347-4065/abe997

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-18H01623
  • [Journal Article] Research and Development of Ultra-Small High-Thrust-Density Electrospray Thrusters2019

    • Author(s)
      鷹尾 祥典、土屋 智由、長尾 昌善、村上 勝久
    • Journal Title

      Aeronautical and Space Sciences Japan

      Volume: 67 Issue: 1 Pages: 5-11

    • DOI

      10.14822/kjsass.67.1_5

    • NAID

      130007542890

    • ISSN
      0021-4663, 2424-1369
    • Year and Date
      2019-01-05
    • Language
      Japanese
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18H01623
  • [Journal Article] Microfabricated emitter array for an ionic liquid electrospray thruster2017

    • Author(s)
      Kaito Nakagawa, Toshiyuki Tsuchiya, and Yoshinori Takao
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56

    • NAID

      210000147943

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Journal Article] シリコンの機械的信頼性2015

    • Author(s)
      土屋 智由
    • Journal Title

      機械の研究

      Volume: 67 Pages: 183-190

    • NAID

      40020378324

    • Data Source
      KAKENHI-PROJECT-26600062
  • [Journal Article] Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers2015

    • Author(s)
      上杉晃生,平井義和,菅野公二,土屋智由,田畑修
    • Journal Title

      Micro and Nano Letters

      Volume: 10 Issue: 12 Pages: 678-682

    • DOI

      10.1049/mnl.2015.0334

    • NAID

      120005712973

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-13J01559, KAKENHI-PROJECT-26600062
  • [Journal Article] Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution2012

    • Author(s)
      T.Tsuchiya
    • Journal Title

      Journal of Microelectromechanical Systems

      Volume: Vol.21(印刷中) Issue: 3 Pages: 523-529

    • DOI

      10.1109/jmems.2011.2182503

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Fatigue Testing of Polycrystalline Silicon Thin-film Membrane Using Out-of-plane Bending Vibration2012

    • Author(s)
      Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro, Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 11S Pages: 11PA02-11PA02

    • DOI

      10.1143/jjap.51.11pa02

    • NAID

      210000141610

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656087
  • [Journal Article] 加工条件の異なる(110)<110>単結晶シリコン薄膜の引張試験2012

    • Author(s)
      上杉晃生、平井義和、菅野公二、土屋智由、田畑修
    • Journal Title

      電気学会センサ・マイクロマシン部門誌

      Volume: Vol.132

    • NAID

      10031019952

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens2010

    • Author(s)
      T. Ikehara, T. Tsuchiya
    • Journal Title

      Micro & Nano Letters Vol. 5 No. 1

      Pages: 49-52

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment2010

    • Author(s)
      T. Tsuchiya, Y. Yamaji, K. Sugano, O. Tabata
    • Journal Title

      Experimental Mechanics Vol. 50 No. 4

      Pages: 509-516

    • NAID

      120002191878

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment2010

    • Author(s)
      T. Tsuchiya, Y. Yamaji, K. Sugano, O. Tabata
    • Journal Title

      Experimental Mechanics

      Volume: Vol.50, No.4 Pages: 509-516

    • NAID

      120002191878

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Measure ment of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens2010

    • Author(s)
      T. Ikehara, T. Tsuchiya
    • Journal Title

      Micro & Nano Letters

      Volume: Vol.5, No.1 Issue: 1 Pages: 49-52

    • DOI

      10.1049/mnl.2009.0073

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] マイクロ・ナノ材料の試験方法2010

    • Author(s)
      土屋智由
    • Journal Title

      塑性と加工

      Volume: 51 Pages: 1048-1052

    • NAID

      10027128642

    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Tensile Testing of Single Crystal Silicon Thin Films at 600oC Using IR Heating2010

    • Author(s)
      T. Tsuchiya, T. Ikeda, A. Tsunematsu, K. Sugano, O. Tabata
    • Journal Title

      Sensors and Materials

      Volume: Vol.22, No.1 Pages: 1-12

    • URL

      http://122.249.91.209/myukk/Journal/Download.php?fn=SM0784.pdf

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Tensile Testing of Single Crystal Silicon Thin Films at 600℃ Using IR Heating2010

    • Author(s)
      T.Tsuchiya
    • Journal Title

      Sensors and Materials 22

      Pages: 1-12

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment2010

    • Author(s)
      T.Tsuchiya
    • Journal Title

      Experimental Mechanics

      Volume: 50 Pages: 509-516

    • NAID

      120002191878

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment2010

    • Author(s)
      T.Tsuchiya
    • Journal Title

      Experimental Mechanics 50

      Pages: 509-516

    • NAID

      120002191878

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Design and fabrication of a differential capacitive three-axis SOI accelerometer using vertical comb electrodes2009

    • Author(s)
      T.Tsuchiya
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering 4

      Pages: 345-351

    • NAID

      10025774459

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Design and fabrication of differential capacitive three-axis SOI accelerometer using vertical comb2009

    • Author(s)
      T. Tsuchiya
    • Journal Title

      IEET Transactions on Electrical and Electronic Engineering 4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens2008

    • Author(s)
      T. Ikehara, T. Tsuchiya
    • Journal Title

      Journal of Microme chanics and Microen gineering

      Volume: Vol.18, No.7 Issue: 7 Pages: 75004-75004

    • DOI

      10.1088/0960-1317/18/7/075004

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Journal Article] Tensile-Mode Fatigue Tests and Fatigue Life Predictions of Single Crystal Silicon in Humidity Controlled2007

    • Author(s)
      Yusuke Yamaji, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya
    • Journal Title

      The 20th IEEE International Conference on Micro Electro Mechanical Systems

      Pages: 267-270

    • Data Source
      KAKENHI-PROJECT-18686013
  • [Journal Article] Tensile mode fatigue test of silicon thin films using electrostatic grip system2006

    • Author(s)
      Toshiyuki Tsuchiya, Yusuke Yamaji, Koji Sugano, Osamu Tabata
    • Journal Title

      The 9th International Fatigue Congress

      Pages: 47-47

    • Data Source
      KAKENHI-PROJECT-18686013
  • [Journal Article] Tensile and Tensile-mode Fatigue Test of Single Crystal Silicon in Various Environments2006

    • Author(s)
      Toshiyuki Tsuchiya, Yusuke Yamaji, Koji Sugano, Osamu Tabata
    • Journal Title

      Asia-Pacific Conference of Transducers and Micro-Nano Technology

      Pages: 230-230

    • Data Source
      KAKENHI-PROJECT-18686013
  • [Presentation] Theoretical Analysis of (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs2024

    • Author(s)
      Ayumu Takahashi, Shuya Okayama, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    • Organizer
      The 11th IEEE International Symposium on Inertial Sensors & Systems, INERTIAL 2024 (2024/3/25-28, Hiroshima, JAPAN)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] Exploring Surface Acoustic Wave Devices for Sound-Based Reservoir Computing2024

    • Author(s)
      Claude Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
    • Organizer
      The 37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2024), Austin, TX, (January 21-15, 2024), pp. 529-532.
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] Ionic Liquid Electrospray Thrusters with Different Types of Emitter Structures2023

    • Author(s)
      Yoshinori Takao, Masayoshi Nagao, Toshiyuki Tsuchiya, and Ryudo Tsukizaki
    • Organizer
      11th Asian Joint Conference on Propulsion and Power, Kanazawashi Cultural Hall, Kanazawa, Japan
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H01530
  • [Presentation] 物理リザバーコンピューティングへの実装を目的とした表面弾性波位相変調デバイスの開発2023

    • Author(s)
      井嶋 泰貴,Robert Claude Meffan,Amit Banerjee,廣谷 潤,土屋 智由
    • Organizer
      日本機械学会2023年度年次大会, 東京都立大学 南大沢キャンパス,2023年9月3-6日,J224p-16
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] Development of surface acoustic wave phase modulators for physical reservoir computing2023

    • Author(s)
      Taiki Ijima, Claude Meffan, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    • Organizer
      49th international conference on Micro and Nano Engineering (MNE2023) (Berlin, Germany), Sep. 25-28, 2023, pp. 417-418.
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] Physical Resevoir Computing using Nonlinear MEMS Resonator Having High Memory Capacity at “Edge of Chaos"2023

    • Author(s)
      Hiroki Takemura, Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
    • Organizer
      The 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2023)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] Optimisation of a physical reservoir computer’s parameters using a genetic algorithm2023

    • Author(s)
      Claude Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    • Organizer
      Deep learning meets Neuromorphic Hardware (a Workshop of European Conference on Machine Learning and Principles and Practice of Knowledge Discovery in Databases) (Turin, Italy) Sep. 18, 2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] PMA系高分子添加剤を含む潤滑油の流体潤滑特性(第1報)ーマイクロ流路デバイスを用いた圧力-流量特性評価ー2023

    • Author(s)
      山本和佳、山下直輝、平山朋子、土屋智由
    • Organizer
      トライボロジー会議2023春東京
    • Data Source
      KAKENHI-PROJECT-22K18756
  • [Presentation] Optimisation of a physical reservoir computer’s parameters using a genetic algorithm non-linear search2023

    • Author(s)
      Claude Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    • Organizer
      49th international conference on Micro and Nano Engineering (MNE2023) (Berlin, Germany), Sep. 25-28, 2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] 共振型加速度センサを一体化したMEMSリザバーコンピューティングによる人間行動認識2023

    • Author(s)
      千賀美咲,水本昂宏,Amit Banerjee,廣谷潤,土屋智由
    • Organizer
      第15回集積化MEMSシンポジウム,熊本城ホール,熊本,2023年11月6-9日
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] PMA系高分子添加剤を含む潤滑油の流体潤滑特性(第1報)ーマイクロ流路デバイスを用いた圧力-流量特性評価ー2023

    • Author(s)
      山本和佳、山下直輝、平山朋子、土屋智由
    • Organizer
      トライボロジー会議2023春東京
    • Data Source
      KAKENHI-PROJECT-23H05448
  • [Presentation] 面取り矩形支持ばねを用いた(100)単結晶シリコンリング型振動ジャイロの理論解析2023

    • Author(s)
      高橋歩夢,岡山修也,Amit Banerjee,廣谷潤,土屋智由
    • Organizer
      第15回集積化MEMSシンポジウム,熊本城ホール,熊本,2023年11月6-9日
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] IONIC LIQUID ELECTROSPRAY THRUSTER WITH TWO-STAGE ELECTRODES ON GLASS SUBSTRATE2023

    • Author(s)
      Akane Nishimura, Toshiyuki Tsuchiya, and Yoshinori Takao
    • Organizer
      36th IEEE International Conference on Micro Electro Mechanical Systems, Science Congress Center Munich, Germany
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H01530
  • [Presentation] Human Activity Recognition using Intelligent Resonant Accelerometer Employing MEMS Reservoir Computing2023

    • Author(s)
      Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
    • Organizer
      The 22nd International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’23)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] 反射率温度依存性を用いたレーザー光反射強度計測による表面温度の非接触測定2023

    • Author(s)
      村上 大志, 土屋 智由, 霜降 真希, 三宅 修吾
    • Organizer
      第14回「マイクロ・ナノ工学シンポジウム」
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Presentation] MEMSリザバーコンピューティング2023

    • Author(s)
      土屋 智由
    • Organizer
      第42回マイクロナノ先端技術交流会
    • Invited
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] Characterization of gap-distance dependency on field emission at nanogap between silicon cleavage surfaces by numerical calculations2022

    • Author(s)
      Yuki Akura, Masaki Shimofuri, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    • Organizer
      2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Presentation] Neuroaccelerometer using reservoir computing with parametric nonlinear response2022

    • Author(s)
      Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    • Organizer
      The 48th International Conference on Micro & Nano Engineering (MNE) and Eurosensors 2022
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] パルス電圧印加を用いた間隔可変単結晶シリコンナノギャップの電子輸送特性計測2022

    • Author(s)
      霜降 真希, 廣谷 潤, Banerjee Amit, 土屋 智由
    • Organizer
      第13回「マイクロ・ナノ工学シンポジウム」
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Presentation] A non-linear SAW resonator as a reservoir computing node2022

    • Author(s)
      Claude Meffan, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    • Organizer
      2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022), Nagoya, Japan, Aug. 28-31, 2022, A2-2-03.
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21F20799
  • [Presentation] Fabrication and Performance Characterization of an Ionic Liquid Electrospray Thruster with a Grooved Needle Emitter Shape2022

    • Author(s)
      Koki Matsukawa, Hirohide Katsuta, Yuiko Nakashima, Akane Nishimura, Toshiyuki Tsuchiya, and Yoshinori Takao
    • Organizer
      37th International Electric Propulsion Conference, Massachusetts Institute of Technology, Boston, MA, USA
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H01530
  • [Presentation] MEMS Resevoir Computing -Sensors Become More Intelligent-2022

    • Author(s)
      Toshiyuki Tsuchiya
    • Organizer
      Asia-Pacific Conference of Transducers and MIcro-Nano Technology (APCOT 2022)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] Intrinsic Friction Behaviour Originated from Molecular Structure of Lubricant in Nanoscale Gap Fabricated by MEMS2022

    • Author(s)
      Wataru Yagi, Yuanlin Xia, Toshiyuki Tsuchiya and Tomoko Hirayama
    • Organizer
      TRIBOCHEMISTRY BEAUNE 2022
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18756
  • [Presentation] Design and Fabrication of Ionic Liquid Electrospray Thruster with Two-Stage Electrodes2022

    • Author(s)
      Akane Nishimura, Yoshinori Takao, and Toshiyuki Tsuchiya
    • Organizer
      33rd International Symposium on Space Technology and Science
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H01530
  • [Presentation] 知能化共振加速度センサの記憶容量と感度の関係2022

    • Author(s)
      水本 昂宏, Banerjee Amit, 廣谷 潤, 土屋 智由
    • Organizer
      第14回「集積化MEMSシンポジウム」
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] Observation of Pull-In by Casimir Force in MEMS-Controlled Nanogap Fabricated by Silicon Cleavage2022

    • Author(s)
      Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee, and Toshiyuki Tsuchiya
    • Organizer
      The 35th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Presentation] 熱膨張アクチュエータによる変調機構を備えた環状結合非線形振動子群によるMEMSリザバーコンピューティング2022

    • Author(s)
      武田 侑大、水本 昂宏、竹村 拓樹、Banerjee Amit、廣谷 潤、土屋 智由
    • Organizer
      日本機械学会 2022年度 年次大会
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] 半導体へき開面ナノギャップにおける電界電子放出特性のギャップ間隔依存性の数値計算による評価2022

    • Author(s)
      安倉 祐樹、霜降 真希、Banerjee Amit、廣谷 潤、土屋 智由
    • Organizer
      日本機械学会 2022年度 年次大会
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Presentation] 真空ナノギャップを用いた熱電子発電実現に向けて2022

    • Author(s)
      土屋智由
    • Organizer
      伝熱学会 関西支部 第17回関西伝熱セミナー
    • Invited
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Presentation] A non-linear SAW resonator as a reservoir computing node2022

    • Author(s)
      Claude Meffan, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    • Organizer
      2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K18289
  • [Presentation] SOI-MEMS device for fabrication and physical properties measurement of single-crystal silicon nanogap with (111) cleavage plane surfaces2021

    • Author(s)
      Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee, Toshiyuki Tsuchiya
    • Organizer
      34th International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Presentation] 単結晶シリコンへき開面ナノギャップ間の熱電界電子トンネリング計測2021

    • Author(s)
      霜降 真希, 吉村 光葵, 文 和彦, 平井 義和, Banerjee Amit, 土屋 智由
    • Organizer
      日本機械学会 2021年度 年次大会
    • Data Source
      KAKENHI-PROJECT-21H01261
  • [Presentation] イオン液体エレクトロスプレースラスタのための二段電極構造の作製2021

    • Author(s)
      西邑 亜香音, 鷹尾 祥典, 土屋 智由
    • Organizer
      第38回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-21H01530
  • [Presentation] エレクトロスプレースラスタの一様なエミッタアレイ電極作製とイオン放出実験2021

    • Author(s)
      橘郁哉, 森田寛之, 土屋智由, 鷹尾祥典
    • Organizer
      令和2年度 宇宙輸送シンポジウム
    • Data Source
      KAKENHI-PROJECT-18H01623
  • [Presentation] イオン液体エレクトロスプレースラスタの二段電極作製に向けたガラス貫通加工の検討2020

    • Author(s)
      西邑亜香音, 鷹尾祥典, 土屋智由
    • Organizer
      第37回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-18H01623
  • [Presentation] Ionic Liquid Electrospray Thrusters with Uniform Needle-Emitter Arrays for Precise Thrust Control2020

    • Author(s)
      Fumiya Tachibana, Toshiyuki Tsuchiya, and Yoshinori Takao
    • Organizer
      33rd International Microprocesses and Nanotechnology Conference (MNC 2020)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18H01623
  • [Presentation] Development of Ionic Liquid Electrospray Thrusters with a Massive Emitter Array for Higher Thrust Density2019

    • Author(s)
      Yoshinori Takao, Naoki Inoue, Kanata Suzuki, Fumiya Tachibana, Masayoshi Nagao, Katsuhisa Murakami, and Toshiyuki Tsuchiya
    • Organizer
      36th International Electric Propulsion Conference
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18H01623
  • [Presentation] 2段電極一体化構造のイオン液体エレクトロスプレースラスタの試作2019

    • Author(s)
      松本有紀子, 橘郁哉, 土屋智由, 鷹尾祥典
    • Organizer
      第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-18H01623
  • [Presentation] MEMS加工技術を利用したエレクトロスプレースラスタの作製とイオンビーム計測2019

    • Author(s)
      橘 郁哉,土屋 智由,鷹尾 祥典
    • Organizer
      第63回宇宙科学技術連合講演会
    • Data Source
      KAKENHI-PROJECT-18H01623
  • [Presentation] 超小型人工衛星に搭載可能なマイクロ電気推進機2018

    • Author(s)
      鷹尾祥典, 土屋智由, 長尾昌善, 村上勝久
    • Organizer
      安全工学シンポジウム2018
    • Data Source
      KAKENHI-PROJECT-18H01623
  • [Presentation] エレクトロスプレースラスタにおけるイオンビーム引き出し機構の数値解析2017

    • Author(s)
      江本一磨, 土屋智由, 鷹尾祥典
    • Organizer
      日本機械学会関東学生会第56回学生員卒業研究発表講演会
    • Place of Presentation
      東京理科大学葛飾キャンパス(東京都葛飾区)
    • Year and Date
      2017-03-16
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] イオン液体を使ったエレクトロスプレースラスタにおけるビーム抽出実験と数値解析2017

    • Author(s)
      中川洋人, 江本一磨, 井上直樹, 土屋智由, 長尾昌善, 鷹尾祥典
    • Organizer
      第57回 航空原動機・宇宙推進講演会
    • Place of Presentation
      沖縄県市町村自治会館(沖縄県那覇市)
    • Year and Date
      2017-03-09
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] 高密度化したエミッタチップを用いたエレクトロスプレースラスタの製作と電流特性計測2017

    • Author(s)
      中川洋人, 井上直樹, 土屋智由, 長尾昌善, 鷹尾祥典
    • Organizer
      平成28年度 宇宙輸送シンポジウム
    • Place of Presentation
      JAXA宇宙科学研究所(神奈川県相模原市)
    • Year and Date
      2017-01-19
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] イオンビームと電子源を利用した超小型衛星用電気推進機の実用例とその課題2017

    • Author(s)
      鷹尾祥典, 小泉宏之, 土屋智由, 長尾昌善
    • Organizer
      日本学術振興会真空ナノエレクトロニクス第158委員会 第14回真空ナノエレクトロニクスシンポジウム
    • Place of Presentation
      アクトシティ浜松コングレスセンター(静岡県浜松市)
    • Year and Date
      2017-03-02
    • Invited
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] Particle-in-Cell法によるイオン液体を用いたエレクトロスプレースラスタの性能評価2017

    • Author(s)
      江本一磨, 土屋智由, 鷹尾祥典
    • Organizer
      平成28年度 宇宙輸送シンポジウム
    • Place of Presentation
      JAXA宇宙科学研究所(神奈川県相模原市)
    • Year and Date
      2017-01-19
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] Microfabricated Emitter Arrays for an Ionic Liquid Electrospray Thruster2016

    • Author(s)
      Kaito Nakagawa, Toshiyuki Tsuchiya, and Yoshinori Takao
    • Organizer
      29th International Microprocesses and Nanotechnology Conference (MNC 2016)
    • Place of Presentation
      ANAクラウンプラザホテル京都(京都府京都市)
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] Electromechanical Fabrication of Conformal Nanogap Electrodes for Thermotunnelling Cooling2016

    • Author(s)
      Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    • Organizer
      The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016)
    • Place of Presentation
      Sendai & Matsushima-bay, Miyagi, Japan
    • Year and Date
      2016-04-17
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26600062
  • [Presentation] イオン液体を用いたエレクトロスプレースラスタにおけるイオンビーム引き出し機構の数値解析2016

    • Author(s)
      江本一磨, 土屋智由, 鷹尾祥典
    • Organizer
      第60回 宇宙科学技術連合講演会
    • Place of Presentation
      函館アリーナ(北海道函館市)
    • Year and Date
      2016-09-06
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] イオン液体を用いたエレクトロスプレースラスタにおけるイオンビーム抽出特性2016

    • Author(s)
      中川洋人, 土屋智由, 鷹尾祥典
    • Organizer
      日本航空宇宙学会 第47期定時社員総会および年会講演会
    • Place of Presentation
      東京大学山上会館(東京都文京区)
    • Year and Date
      2016-04-14
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] イオン液体を用いたエレクトロスプレースラスタの試作2016

    • Author(s)
      中川洋人,土屋智由,鷹尾祥典
    • Organizer
      平成27年度 宇宙輸送シンポジウム
    • Place of Presentation
      JAXA宇宙科学研究所
    • Year and Date
      2016-01-14
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] Mems Based Test-Stand Device for “Nano” Characterization2016

    • Author(s)
      T. Tsuchiya
    • Organizer
      The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016)
    • Place of Presentation
      Sendai & Matsushima-bay, Miyagi, Japan
    • Year and Date
      2016-04-17
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26600062
  • [Presentation] イオン液体を用いたエレクトロスプレースラスタにおけるビーム引き出し特性の電極形状依存2016

    • Author(s)
      中川洋人, 土屋智由, 鷹尾祥典
    • Organizer
      第60回 宇宙科学技術連合講演会
    • Place of Presentation
      函館アリーナ(北海道函館市)
    • Year and Date
      2016-09-06
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] イオン液体を用いたエレクトロスプレースラスターにおけるイオンビーム抽出特性2016

    • Author(s)
      中川洋人,土屋智由,鷹尾祥典
    • Organizer
      日本航空宇宙学会第47期定時社員総会および年会講演会
    • Place of Presentation
      東京大学 山上会館
    • Year and Date
      2016-04-14
    • Data Source
      KAKENHI-PROJECT-15K14247
  • [Presentation] 時間分解顕微ラマン分光によるSi振動子の動的応力測定のための両側静電駆動型MEMS光チョッパ2013

    • Author(s)
      小北雄亮, 谷山彰, 平井義和, 田畑修, 土屋智由
    • Organizer
      第30回「センサ・マイクロマシンと応用システム」シンポジウム,電気学会
    • Place of Presentation
      仙台国際センター,仙台
    • Data Source
      KAKENHI-PROJECT-24656087
  • [Presentation] 時間分解顕微ラマン分光のためのプルイン型MEMS光チョッパの動作特性2013

    • Author(s)
      谷山彰,小北雄亮,平井義和,田畑修,土屋智由
    • Organizer
      日本実験力学会2013年度年次講演会
    • Place of Presentation
      由利本荘市文化交流館,由利本荘
    • Data Source
      KAKENHI-PROJECT-24656087
  • [Presentation] 時間分解顕微ラマン分光によるSi振動子の動的応力測定のための両側静電駆動型MEMS光チョッパ2013

    • Author(s)
      小北雄亮, 谷山彰, 平井義和, 田畑修, 土屋智由
    • Organizer
      第30回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      仙台国際センター,仙台
    • Data Source
      KAKENHI-PROJECT-24656087
  • [Presentation] 時間分解顕微ラマン分光のためのプルイン型MEMS光チョッパの動作特性2013

    • Author(s)
      谷山彰, 小北雄亮, 平井義和, 田畑修, 土屋智由
    • Organizer
      日本実験力学会2013年度年次講演会
    • Place of Presentation
      由利本荘市文化交流館,由利本荘
    • Data Source
      KAKENHI-PROJECT-24656087
  • [Presentation] Material and Device Reliability in Si MEMS Sensors2012

    • Author(s)
      Toshiyuki Tsuchiya
    • Organizer
      The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012)
    • Place of Presentation
      Nanjing, China
    • Invited
    • Data Source
      KAKENHI-PROJECT-24656087
  • [Presentation] Effect of crystallographic orientations and surface morphologies on fracture and fatigue of single crystal silicon2012

    • Author(s)
      Toshiyuki Tsuchiya
    • Organizer
      Okumetic-Nagoya University Seminar 2012
    • Place of Presentation
      Nagoya, Japan
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS2011

    • Author(s)
      T.Tsuchiya
    • Organizer
      The 19th IFIP/IEEE International Conference on Very Large Scale Integration
    • Place of Presentation
      Hong Kong
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] MEMSデバイスの高信頼化のための薄膜評価技術2010

    • Author(s)
      土屋智由
    • Organizer
      日本実験力学会ナノ計測分科会第1回研究会
    • Place of Presentation
      姫路、兵庫県立大学
    • Year and Date
      2010-01-18
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] 高信頼, 高機能MEMSの実現に向けたデバイス設計, 解析, 評価2010

    • Author(s)
      土屋智由
    • Organizer
      第20回マイクロナノ先端技術交流会
    • Place of Presentation
      東京、マイクロマシンセンタ
    • Year and Date
      2010-03-11
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] 単結晶シリコン扇型振動子の疲労試験2010

    • Author(s)
      土屋智由
    • Organizer
      マルチスケールモデリングによる材料科学研究会第2回研究会
    • Place of Presentation
      東京、東京大学
    • Year and Date
      2010-03-09
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] Technologies, applications, and reliabilities of microelectromechanical systems (MEMS)2009

    • Author(s)
      土屋智由
    • Organizer
      The 9th Society of Exploration Geophysicist of Japan International Symposium
    • Place of Presentation
      Sapporo, Japan
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] MEMS素子のモデリング技術2009

    • Author(s)
      土屋智由
    • Organizer
      電子情報通信学会 2009年ソサイエティ大会エレクトロニクス講演論文集2
    • Place of Presentation
      新潟、新潟大学
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] 単結晶シリコン引張試験における表面酸化の影響評価2008

    • Author(s)
      土屋智由
    • Organizer
      日本機械学会2008年度年次大会
    • Place of Presentation
      横浜国立大学
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] Fabrication of free-standing fullerene nanowire using direct electronbeam writing and sacrificial dry etching2008

    • Author(s)
      T. Tsuchiya
    • Organizer
      21st IEEE International Conference on Micro Electro Mechanical Systems
    • Place of Presentation
      Tucson, Arizona, USA
    • Data Source
      KAKENHI-PROJECT-19656030
  • [Presentation] Accelerated lifetime test method for structural materials in MEMS devices using resonant vibration2008

    • Author(s)
      T. Tsuchiya
    • Organizer
      Korea-Japan-China MEMS Standardization Workshop 2008
    • Place of Presentation
      東京
    • Year and Date
      2008-06-20
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] 単結晶シリコンMEMSデバイスの破壊と疲労2008

    • Author(s)
      土屋智由
    • Organizer
      応用物理学会結晶工学分科会第129回研究会
    • Place of Presentation
      京都
    • Year and Date
      2008-07-02
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] Effect of Surface Oxide Layer on Mechanical Properties of Single Crystalline Silicon2007

    • Author(s)
      K. Miyamoto, K. Sugano, T. Tsuchiya, O. Tabata
    • Organizer
      Material Research Society Meeting
    • Place of Presentation
      Boston
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] Effect of Surface Oxide Layer on Mechanical Properties of Single Crystalline Silicon2007

    • Author(s)
      K. Miyamoto, K. Sugano, T. Tsuchiya, O. Tabata
    • Organizer
      Material Research Society Meeting
    • Place of Presentation
      Boston, MA
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] 高温薄膜引張試験装置の開発2007

    • Author(s)
      土屋智由
    • Organizer
      日本機械学会2007年度年次大会
    • Place of Presentation
      大阪府吹田市(関西大学)
    • Data Source
      KAKENHI-PROJECT-19676002
  • [Presentation] 高温薄膜引張試験装置の開発2007

    • Author(s)
      土屋智由
    • Organizer
      日本機械学会2007年度年次大会
    • Place of Presentation
      大阪府吹田市(関西大学)
    • Data Source
      KAKENHI-PROJECT-18686013
  • [Presentation] Fabrication of free-standing fullerene nanowire using direct electronbeam writing and sacrificial dry etching2007

    • Author(s)
      T. Tsuchiya
    • Organizer
      MRS fall meeting 2007
    • Place of Presentation
      Boston, MA, USA
    • Data Source
      KAKENHI-PROJECT-19656030
  • [Presentation] 多段ICP-RIEプロセスにより一括作製したシリコンナノワイヤのMEMS引張試験

    • Author(s)
      土屋智由, 鈴木淳也, 平井義和, 田畑修
    • Organizer
      日本機械学会2014年度年次大会
    • Place of Presentation
      東京電機大学, 東京
    • Year and Date
      2014-09-07 – 2014-09-10
    • Data Source
      KAKENHI-PROJECT-26600062
  • [Presentation] 一本鎖DNAにより孤立アセンブルした単層カーボンナノチューブの電気特性

    • Author(s)
      外薗洸佑, 鈴木淳也, 平井義和, 土屋智由, 田畑修
    • Organizer
      第6回「集積化 MEMS シンポジウム」
    • Place of Presentation
      松江
    • Year and Date
      2014-10-20 – 2014-10-22
    • Data Source
      KAKENHI-PROJECT-26600062
  • 1.  Takao Yoshinori (80552661)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 25 results
  • 2.  Hirayama Tomoko (00340505)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 4 results
  • 3.  長尾 昌善 (80357607)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 3 results
  • 4.  三宅 修吾 (60743953)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 2 results
  • 5.  廣谷 潤 (80775924)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 21 results
  • 6.  富永 大輝 (50513694)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 7.  日野 正裕 (70314292)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 8.  張 賀東 (80345925)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 9.  TSUYOSHI Ikehara (10344102)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 10.  村越 庸一 (40358156)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  山下 直輝 (50847746)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 12.  杉山 正明 (10253395)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  大西 洋 (20213803)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  NAKAGAWA Kaito
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 8 results
  • 15.  EMOTO Kazuma
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 4 results
  • 16.  INOUE Naoki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 17.  MEFFAN ROBERT
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 18.  MEFFAN ROBERT CLAUDE
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 4 results
  • 19.  上杉 晃生
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 3 results

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