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All Journal Article Presentation Patent
Journal of Material Science and Engineering with Advanced Technology
Volume: 19 Pages: 19-41
10.18642/jmseat_7100122042
Journal of Vacuum Science and Technology A
Volume: 33 Pages: 030904-030904
10.1116/1.5079526
信学技報
Volume: 119 Pages: 15-19
Journal of Material Science
Volume: 54 Pages: 228-237
Volume: 118 Pages: 69-74
Thin Solid Films
Volume: 644 Pages: 2017-2017
10.1016/j.tsf.2017.06.062
Materials Science in Semiconductor Processing
Volume: 67 Pages: 98-103
10.1016/j.mssp.2017.05.019
Volume: 117 Pages: 57-60
電子情報通信学会誌
Volume: J100-C Pages: 8-15
Jpn. J. Appl. Phys.
Volume: 55 Issue: 2S Pages: 02BC14-02BC14
10.7567/jjap.55.02bc14
210000146083
Volume: 55 Issue: 2S Pages: 02BC12-02BC12
10.7567/jjap.55.02bc12
J. Vac. Sci. & Technol. A
Volume: 33
10.1116/1.4935334
International Journal of Materials Engineering and Technology
Volume: (in press) Pages: 1-10
Japanese Journal of Applied Physics
Volume: 53
MRS Proceedings
Volume: 1633 Pages: 61-67
10.1557/opl.2014.20
Journal of Vacuum Science & Technology A
Volume: 32
10.1116/1.4831969
Volume: 53 Issue: 2S Pages: 02BC02-02BC02
10.7567/jjap.53.02bc02
MRS Symposium Proceedings
Volume: 1494 Pages: 127-132
10.1557/opl.2013.240
Volume: (in press)
Volume: 549 Pages: 18-21
10.1016/j.tsf.2013.06.035
Surface & Coatings Technology
Volume: 215 Pages: 148-151
Thin Solid Films 517
Pages: 3528-3531
Japanese Journal Applied Physics 48(In press)
Japanese Journal of Applied Physics 48
Japanese Journal of Applied Physics 48(in press)
Thin Solid Films 516
Pages: 659-662
Jpn. J. Appl. Phys 47
Pages: 573-576
Japanese Journal Applied Physics 47
Japanese Journal of Applied Physics 47
Pages: 5636-5638
40016161808
Thin Solid Films (印刷中)
第3回 Cat-CVD研究会講演予稿集
Pages: 97-100
Advanced Materials Research 11-12
Pages: 261-264
Japanese Journal of Applied Physics (in press)
