FURUYA KENJI 古屋謙治

… Alternative Names

古屋謙治フルヤケンジ

FURUYA Kenji 古屋謙治

古屋護治フルヤケンジ

Less

Researcher Number	70229128
Other IDs
External Links
Affiliation (Current)	2025: 九州大学, 基幹教育院, 教授
Affiliation (based on the past Project Information) *help	2013: 九州大学, 基幹教育院, 教授 2012: 九州大学, 学内共同利用施設等, 教授 2006: Kyushu University, Faculty of Engineering Sciences, Associate Professor, 大学院総合理工学研究院, 助教授 2004 – 2005: Kyushu University, Department of Molecular & Material Sciences, Accociate Professor, 大学院・総合理工学研究院, 助教授 2004: 九州大学, 大学院・理工学研究院, 助教授 … More 2003: 九州大学, 大学院・総合理工学研究院, 助手 2003: 九州大学, 総合理工学研究院, 助手 1998: 九州大学, 大学院総合理工学研究科, 助手 1997: 九州大学, 大学院・総合理工学研究科, 助手 1995: 九州大学, 大学院・総合理工学研究科, 助手 1993: 九州大学, 大学院・総合理工学研究科, 助手 1993: Kyushu University, Interdisciplinary Graduate School of Engineering Sciences, Re, 総合理工学研究科, 助手 Less
Review Section/Research Field	Principal Investigator Plasma science / Physical chemistry Except Principal Investigator Environmental technology/Environmental materials / Analytical chemistry / 構造化学 / Physical chemistry
Keywords	Principal Investigator コインシデンス測定 / Mass spectrometry / プラズマ / 質量分析 / 解離性イオン化 / 電子エネルギーロススペクトル / 反応素過程 / Thin Film / Reaction Mechanism / Growth of gaseous molecules … More / Plasma / Fluorocarbon / 薄膜 / 反応機構 / 気相成長 / フルオロカーボン / Lithium ion / Growth of gaseous molecule / Dication of CF3 / SiO2 etching process / Perfluorocarbon plasma / CF4生成機構 / CF4検出 / パーフルオロカーボン / リチウムイオン / 気相分子成長 / CF3の2価イオン / SiO2エッチングプロセス / パーフルオロカーボンプラズマ / ヨウ素フィルター / 低波数ラマン分光 / ダストプラズマ / アセチレン / エチレン / 発光 / 超励起分子 / 電子衝撃 / 窒素分子 / 酸素分子 / 並進エネルギー分析 / 電子-分子衝突 / 超音速分子線 / 発光スペクトル / 電子衝突 … More Except Principal Investigator NOx / photochemical process / laser / microwave discharge / global warming / exhaust / greenhouse gases / air pollution / エキシマーレーザー / 大気環境保全 / エキシマレーザー / 窒素酸化物 / マイクロ波放電 / 光プロセス / レーザー / マイクロ波プラズマ / 公害防止・対策 / 環境技術 / 大気汚染防止・浄化 / nonradiative relaxation / transient absorption / multi-color enhancement / thermal lens / photothermal spectroscopy / separation analysis / nonfluorescent molecules / single molecule detection / 無幅射綬和 / 分子カウンティング / 無輻射緩和 / 過渡吸収 / 多色増幅効果 / 顕微熱レンズ検出 / 光熱変換分光法 / 分離分析 / 無蛍光性化学種 / 単一分子検出 / Doppler profile / Vibrataional and rotational distribution / Emission cross section / Paschen line / Excited dhydrogen atom / Infrared emission / Reaction dynamics / Electron-impact / 水素 / 断面積 / 赤外発光スペクトル / 超励起状態 / 励起解離 / 振動回転分布、 / 発光断面積、 / パッシェン系列、 / 励起水素原子、 / 赤外発光、 / 反応素過程、 / 電子衝突、 / ドプラー線形 / 振動回転分布 / 発光断面積 / パッシェン系列 / 励起水素原子 / 赤外発光 / 反応素過程 / 電子衝突 / 超励起分子 / コインシデンス測定 / 角度分布 / エネルギー分布 / 電子衝撃 / 電子放出 / 自動イオン化 / 電子エネルギーロス Less

Study on the mechanism of periodic void generation in reactive dusty plasmasPrincipal Investigator
- Principal Investigator
  
  FURUYA KENJI
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Plasma science
- Research Institution
  Kyushu University
Growth of gaseous macromolecules in the downstream region of fluorocarbon plasmas and its applicationPrincipal Investigator
- Principal Investigator
  
  FURUYA Kenji
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  KYUSHU UNIVERSITY
DEVELOPMENT OF A NOVEL DETECTION METHOD FOR SINGLE NONFLUORECSECT MOLECULES IN LIQUID SOLUTIONS
- Principal Investigator
  
  HARATA Akira
- Project Period (FY)
  2003 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Analytical chemistry
- Research Institution
  KYUSHU UNIVERCITY
Development of removal Apparatuses of Exhausted Gases by Using Microwave Discharge and Photochemical Processes
- Principal Investigator
  
  TSUJI Masaharu
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Environmental technology/Environmental materials
- Research Institution
  KYUSHU UNIVERSITY
HIGHLY SENSITIVE DETECTION OF HAZARDOUS GASES PRODUCED IN THE PLASMAS OF PERFLUOROCARBON ALTERNATIVESPrincipal Investigator
- Principal Investigator
  
  FURUYA Kenji
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  KYUSHU UNIVERSITY
発光-フラグメントイオンコインシデンス測定で見る超励起分子の解離ダイナミクスPrincipal Investigator
- Principal Investigator
  
  古屋護治 (古屋謙治)
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Physical chemistry
- Research Institution
  Kyushu University
自動イオン化で放出される電子のエネルギー分布と角度分布の測定
- Principal Investigator
  
  OGAWA Teiichiro
- Project Period (FY)
  1997
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Physical chemistry
- Research Institution
  Kyushu University
電子衝突励起で生成したフラグメントイオンのエネルギー分析Principal Investigator
- Principal Investigator
  
  古屋謙治
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Physical chemistry
- Research Institution
  Kyushu University
電子衝突励起による散乱電子-発光コインシデンス装置の開発Principal Investigator
- Principal Investigator
  
  古屋謙治
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Physical chemistry
- Research Institution
  Kyushu University
Electron-Impact Molecular Excitation and Dissociation as studied by the Infrared Emission Spectroscopy
- Principal Investigator
  
  OGAWA Teiichiro
- Project Period (FY)
  1990 – 1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (A)
- Research Field
  
  構造化学
- Research Institution
  Kyushu University

All 2013 2007 2006 2005 2004 2003

All Journal Article Presentation

[Journal Article] Surface Structure and Chemical Bonding of Polymeric Perfluorocarbon in the Initial Stage of Deposition in Ar/c-C_4F_8 plasmas2007
- Author(s)
  Kenji Furuya et al.
- Journal Title
  
  24th Symposium on Plasma Processing (SPP-24) Proceedings 2007
  
  Pages: 245-246
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] Surface Structure and Chemical Bonding of Polymeric Perfluorocarbon in the Initial Stage of Deposition in Ar/c-C_4F_8 plasmas2007
- Author(s)
  Kenji Furuya et al.
- Journal Title
  
  24th Symposium on Plasma Processing (SPP-24) Proceedings
  
  Pages: 245-246
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] Growth of fluorocarbon macromolecules in the gas phase : II. The growth mechanisms of large positive ions observed in the downstream region of Ar/CF_4 plasmas2006
- Author(s)
  Kenji Furuya et al.
- Journal Title
  
  Jpn.J.Appl.Phys. Vol.45, No.6A
  
  Pages: 5219-5231
- NAID
  10018149285
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] Growth of fluorocarbon macromolecules in the gas phase : II. The growth mechanisms of large positive ions observed in the downstream region of Ar/CF_4 plasmas2006
- Author(s)
  Kenji Furuya et al.
- Journal Title
  
  Japanese Journal of Applied Physics 45・6A
  
  Pages: 5219-5231
- NAID
  10018149285
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] パーフルオロ化合物プラズマ下流における気相分子成長-観測・反応・成膜-2006
- Author(s)
  古屋謙治他
- Journal Title
  
  真空 49・3(印刷中)
- NAID
  10018133650
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] パーフルオロ化合物プラズマ下流における気相分子成長-観測・反応・成膜-2006
- Author(s)
  古屋謙治他
- Journal Title
  
  真空 49・3
  
  Pages: 195-197
- NAID
  10018133650
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] リチウムイオン付着法を利用した質量分析2006
- Author(s)
  古屋謙治
- Journal Title
  
  ぶんせき 2006・12
  
  Pages: 644-644
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] Mass spectrometry using a lithium ion attachment technique2006
- Author(s)
  Kenji Furuya
- Journal Title
  
  Bunseki Vol.2006, No.12
  
  Pages: 644-644
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] Mass Spectrometric Investigation of Perfluorocarbon Macromolecules in the Downstream Region of Ar/CF_4 Plasmas and the Formation Mechanisms of Large Positive Ions2006
- Author(s)
  Kenji Furuya et al.
- Journal Title
  
  6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing (ICRP-6/SPP-23) Proceedings 2006
  
  Pages: 391-392
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] Growth of Gaseous Macromolecules in the Downstream Region of Perfluorocompounds Plasmas2006
- Author(s)
  Kenji Furuya et al.
- Journal Title
  
  J.Vac.Soc.Jpn. Vol.49, No.3
  
  Pages: 195-197
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] Growth of fluorocarbon macromolecules in the gas phase (II). The growth mechanisms of large positive ions observed in the downstream region of Ar/CF_4 plasmas2006
- Author(s)
  Kenji Furuya et al.
- Journal Title
  
  Japanese Journal of Applied Physics (印刷中)
- NAID
  10018149285
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] Growth of fluorocarbon macromolecules in the gas phase (II). The growth mechanisms of large positive ions observed in the downstream region of Ar/CF_4 plasmas2006
- Author(s)
  Kenji FURUYA, Shinobu YUKITA, Akira HARATA
- Journal Title
  
  Japanese Journal of Applied Physics 45(6A)
  
  Pages: 5219-5231
- NAID
  10018149285
- Data Source
  KAKENHI-PROJECT-15205011
[Journal Article] Mass Spectrometric Investigation of Perfluorocarbon Macromolecules in the Downstream Region of Ar/CF_4 Plasmas and the Formation Mechanisms of Large Positive Ions2006
- Author(s)
  Kenji Furuya et al.
- Journal Title
  
  6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing (ICRP-6/SPP-23) Proceedings
  
  Pages: 391-392
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540471
[Journal Article] Growth of gaseous macromolecules downstream in perfluorocarbon plasmas and its application to thin film formation2005
- Author(s)
  K.Furuya, S.Yukita, H.Okumura, R.Nakanishi, M.Makita, A.Harata
- Journal Title
  
  Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing (Proceedings)
  
  Pages: 623-624
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Growth of gaseous macromolecules downstream in perfluorocarbon plasmas and its application to thin film formation2005
- Author(s)
  K.Furuya.S.Yukita, H.Okumura, R.Nakanishi, M.Makita, A.Harata
- Journal Title
  
  Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing, Proceedings
  
  Pages: 623-624
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Growth of Fluorocarbon Macromolecules in a Gas Phase (I). Mass Spectroscopic Investigation Down stream in Ar/CF_4 Plasmas.2005
- Author(s)
  Kenji FURUYA, Shinobu YUKITA, Hiroshi OKUMURA, Akira HARATA
- Journal Title
  
  Chemistry Letters 34
  
  Pages: 224-225
- Data Source
  KAKENHI-PROJECT-15205011
[Journal Article] Growth of gaseous macromolecules downstream in perfluorocarbon plasmas and its application to thin film formation2005
- Author(s)
  K.Furuya, S.Yukita, H.Okumura, R.Nakanishi, M.Makita, A.Harata
- Journal Title
  
  Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing(Proceedings)
  
  Pages: 623-624
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Growth of fluorocarbon macromolecules in a gas phase (I). Mass spectrometric investigation of products in the downstream region of Ar/CF_4 plasmas2005
- Author(s)
  K.Furuya.S.Yukita, H.Okumura, A.Harata
- Journal Title
  
  Chem.Lett. 34
  
  Pages: 224-225
- NAID
  10014364385
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Growth of Fluorocarbon Macromolecules in a Gas Phase(I). Mass Spectrometric Investigation of Products in the Downstream Region of Ar/CF_4 Plasmas2005
- Author(s)
  Kenji Furuya, Shinobu Yukita, Hiroshi Okumura, Akira Harata
- Journal Title
  
  Chemistry Letters 34
  
  Pages: 224-225
- NAID
  10014364385
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Growth of Fluorocarbon Macromolecules in a Gas Phase (I). Mass Spectrometric Investigation of Products in the Downstream Region of Ar/CF_4 Plasmas2005
- Author(s)
  Kenji Furuya, Shinobu Yukita, Hiroshi Okumura, Akira Harata
- Journal Title
  
  Chemistry Letters 34
  
  Pages: 224-225
- NAID
  10014364385
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] ドライエッチング過程で再合成される有害物質の生成機構に関する研究2004
- Author(s)
  古屋謙治
- Journal Title
  
  新エネルギー・産業技術総合開発機構(NEDO)委託「電子デバイス製造プロセスで使用するエッチングガスの代替ガス・システム及び代替プロセスの研究開発」成果報告書(技術研究組合超先端電子技術開発機構(ASET))
  
  Pages: 524-538
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Study on the production mechanism of hazardous gases re-synthesized in dry etching processes (in Japanese)2004
- Author(s)
  K.Furuya
- Journal Title
  
  Report of Research and Development of Alternative Gas System and Alternative Process Technology for Etching Gases Used in the Manufacture of Electronic Devices
  
  Pages: 524-538
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Quantitative Analysis of CF4 Produced in the SiO_2 Etching Process Using c-C_4F_8, C_3F_8, and C_2F_6 Plasmas by In Situ Mass Spectrometry2004
- Author(s)
  Kenji Furuya, Yoshihiko Hatano
- Journal Title
  
  Japanese Journal of Applied Physics 43
  
  Pages: 342-346
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Quantitative Analysis of CF_4 Produced in the SiO_2 Etching Process by c-C_4F_8,C_3F_8,and C_2F_6 Plasmas Using In-Situ Mass Spectrometry2004
- Author(s)
  K.Furuya, Y.Hatano
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 342-346
- NAID
  10021992333
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Quantitative Analysis of CF_4 Produced in the SiO_2 Etching Process by c-C_4F_8,C_3F_8,and C_2F_6 Plasmas Using In-Situ Mass Spectrometry2003
- Author(s)
  K.Furuya, Y.Hatano
- Journal Title
  
  Atomic Collision Research in Japan 29
  
  Pages: 1-2
- NAID
  10021992333
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] c-C_4F_8、C_3F_8、およびC_2F_6プラズマを用いたSiO_2エッチングプロセスで生成したCF_4のIn Situ質量分析法による定量分析2003
- Author(s)
  古屋謙治, 籏野嘉彦
- Journal Title
  
  九州大学中央分析センター報告 21
  
  Pages: 33-41
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Quantitative Analysis of CF_4 Produced in the SiO_2 Etching Process Using c-C_4F_8, C_3F_8, and C_2F_6 Plasmas by In Situ Mass Spectrometry2003
- Author(s)
  Kenji Furuya, Yoshihiko Hatano
- Journal Title
  
  Atomic Collision Research in Japan 29
  
  Pages: 1-2
- NAID
  10011949690
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Journal Article] Quantitative Analysis of CF_4 Produced in the SiO_2 Etching Process Using c-C_4F_8,C_3F_8,and C_2F_6 Plasmas by In Situ Mass Spectrometry (in Japanese)2003
- Author(s)
  K.Furuya, Y.Hatano
- Journal Title
  
  Report of the Center of Advanced Instrumental Analysis, Kyushu University 21
  
  Pages: 33-41
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15540476
[Presentation] 反応性プラズマ中での分子成長2013
- Author(s)
  古屋謙治
- Organizer
  九重分光関連夏季セミナー
- Place of Presentation
  大分
- Data Source
  KAKENHI-PROJECT-24654197
[Presentation] 反応性プラズマ中での分子成長2013
- Author(s)
  古屋謙治
- Organizer
  九重分光関連夏季セミナー2013
- Place of Presentation
  国立大学九重共同研修所
- Invited
- Data Source
  KAKENHI-PROJECT-24654197

1. OGAWA Teiichiro (50028156)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
2. HARATA Akira (90222231)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
3. ISHIOKA Toshio (60304838)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. TSUJI Masaharu (30038608)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. TSUJI Takeshi (50284568)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 中島慶治 (50188934)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

FURUYA KENJI 古屋 謙治

古屋 謙治 フルヤ ケンジ

FURUYA Kenji 古屋 謙治

古屋 護治 フルヤ ケンジ

Research Projects

Research Products

Co-Researchers

Study on the mechanism of periodic void generation in reactive dusty plasmasPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Growth of gaseous macromolecules in the downstream region of fluorocarbon plasmas and its applicationPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

DEVELOPMENT OF A NOVEL DETECTION METHOD FOR SINGLE NONFLUORECSECT MOLECULES IN LIQUID SOLUTIONS

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of removal Apparatuses of Exhausted Gases by Using Microwave Discharge and Photochemical Processes

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

HIGHLY SENSITIVE DETECTION OF HAZARDOUS GASES PRODUCED IN THE PLASMAS OF PERFLUOROCARBON ALTERNATIVESPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

発光-フラグメントイオンコインシデンス測定で見る超励起分子の解離ダイナミクスPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

自動イオン化で放出される電子のエネルギー分布と角度分布の測定

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

電子衝突励起で生成したフラグメントイオンのエネルギー分析Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

電子衝突励起による散乱電子-発光コインシデンス装置の開発Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Electron-Impact Molecular Excitation and Dissociation as studied by the Infrared Emission Spectroscopy

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Surface Structure and Chemical Bonding of Polymeric Perfluorocarbon in the Initial Stage of Deposition in Ar/c-C_4F_8 plasmas2007

Author(s)

Journal Title

Description

Data Source

[Journal Article] Surface Structure and Chemical Bonding of Polymeric Perfluorocarbon in the Initial Stage of Deposition in Ar/c-C_4F_8 plasmas2007

Author(s)

Journal Title

Description

Data Source

[Journal Article] Growth of fluorocarbon macromolecules in the gas phase : II. The growth mechanisms of large positive ions observed in the downstream region of Ar/CF_4 plasmas2006

Author(s)

Journal Title

FURUYA KENJI 古屋謙治

古屋謙治フルヤケンジ

FURUYA Kenji 古屋謙治

古屋護治フルヤケンジ