YASUNAGA Nobuo 安永暢男

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Researcher Number	70256171
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Affiliation (based on the past Project Information) *help	2004 – 2005: 東海大学, 工学部, 教授 2000 – 2001: 東海大学, 工学部, 教授 1996 – 1997: 東海大学, 工学部, 教授
Review Section/Research Field	Principal Investigator 機械工作・生産工学 / Production engineering/Processing studies
Keywords	Principal Investigator メカノケミカルポリシング / rutil type TiO2 abrasive / Polycrystalline SiC / Light catalytic effect / anataze type TiO2 abrasive / α-Fe2O3 abrasive / High tenperature polishing / Mechanochemical polishing / SiC single crystal / Fe203砥粒 … More / TiO2砥粒 / Fe2O3砥粒 / SiC単結晶 / ルチル型TiO_2砥粒 / 多結晶SiC / 光触媒効果 / アナターゼ型TiO_2砥粒 / α-Fe_2O_3砥粒 / 高温ポリシング / SiC結晶 / ZnO disk / BaCO3 disk / bounded abrasive polishing / Silicon wafer / pressure control polishing / dry polishing / clean polisihng / mechanochemical polishing / BaCO_3砥石 / 定圧研磨装置 / ドライ研磨 / ZnO砥石 / BaCO3砥石 / 砥石研磨 / シリコンウエハ / 定圧研磨技術 / ドライポリシング / クリーン研磨技術 / Joining / Laser PVD / Laser etching / Sapphire / Micro-fabrication / YAG laser / 接合 / レーザPVD / レーザエッチング / サファイヤ / マイクロファブリケーション / YAGレーザ Less

Research Projects
(3 results)
Research Products
(4 results)

Research on High Temperature Mechanochemical Polishing assisted by Light Catalytic EffectsPrincipal Investigator
- Principal Investigator
  
  YASUNAGA Nobuo
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tokai University
Research on Next Generation Ecological Dry PolishingPrincipal Investigator
- Principal Investigator
  
  YASUNAGA Nobuo
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  TOKAI UNIVERSITY
Study on Laser Micro-fabrication of Difficult-to-machine Single CrystalsPrincipal Investigator
- Principal Investigator
  
  YASUNAGA Nobuo
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  機械工作・生産工学
- Research Institution
  TOKAI UNIVERSITY

All Journal Article

[Journal Article] Machining Mechanisms of Si Wafers in Mechanochemical Polishing by Soft Abrasives2005
- Author(s)
  N.Yasunaga et al.
- Journal Title
  
  Advances in Abrasive Technology VIII
  
  Pages: 385-385
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16560099
[Journal Article] Machining Mechanisms of Si Wafers in Mechanochemical Polishing by Soft Abrasives2005
- Author(s)
  N.Yasunaga
- Journal Title
  
  Advances in Abrasive Technology VIII
  
  Pages: 385-385
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16560099
[Journal Article] High Temperature MCP Process Suitable for Extremely Hard High Functional SIC Wafers2004
- Author(s)
  N.Yasunaga et al.
- Journal Title
  
  Advances in Abrasive Technology Vol.7
  
  Pages: 385-385
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16560099
[Journal Article] High Temperature MCP Process Suitable for Extremely Hard High Functional SiC Wafers2004
- Author(s)
  N.Yasunaga et al.
- Journal Title
  
  Advances in Abrasive Technology Vol.7
  
  Pages: 385-385
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16560099