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Saito Takeyasu  齊藤 丈靖

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… Alternative Names

SAITO Takeyasu  齊藤 丈靖

齊藤 丈靖  サイトウ タケヤス

齋藤 丈靖  サイトウ タケヤス

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Researcher Number 70274503
Other IDs
External Links
Affiliation (Current) 2025: 大阪公立大学, 大学院工学研究科 , 教授
Affiliation (based on the past Project Information) *help 2022 – 2023: 大阪公立大学, 工学(系)研究科(研究院), 教授
2019 – 2021: 大阪府立大学, 工学(系)研究科(研究院), 教授
2011 – 2018: 大阪府立大学, 工学(系)研究科(研究院), 准教授
1996 – 1997: 九州大学, 工学部, 助手
Review Section/Research Field
Principal Investigator
Basic Section 26020:Inorganic materials and properties-related / Reaction engineering/Process system / Reaction engineering/Process system / 反応・分離工学
Except Principal Investigator
Basic Section 27010:Transport phenomena and unit operations-related / Material processing/Microstructural control engineering / 化学工学一般 / Nanomaterials chemistry / 反応・分離工学
Keywords
Principal Investigator
表面修飾 / キャパシタ / 熱硬化性樹脂 / 賦活 / 電気二重層キャパシタ / 電荷移動抵抗 / 表面官能基 / 活性炭 / 表面反応 / レアメタルフリー … More / 磁性体 / 超微粒子 / ナノ粒子 / 磁性 / 超臨界二酸化炭素 / 窒化鉄 / 吸脱着 / EQCM / 臭化物イオン / 塩化物イオン / ポリエチレングリコール / 添加剤 / 銅めっき / トリメチルホウ素 / ホール効果 / ド-ピング / p型半導体 / CVD / ダイヤモンド … More
Except Principal Investigator
表面修飾 / ナノ粒子 / 徐放性制御 / 細胞培養 / 生育制御 / 養液栽培 / 溶解性制御 / 微小電極 / 二価銅 / 電極反応速度解析 / SPS / 塩素 / 添加剤 / 穴埋め / 銅めっき / ダマシン / 穴埋めっき / 一価銅 / TSV / ultrasonic / methane / boring / drill. / hot-filamnt / chemical vapor deposition / diamond thin film / コーティング / 結晶析出 / マイクロ波プラズマ / CVD / マイクロドリル / ダイヤモンド / 核発生 / 超音波 / メタン / 切削 / ドリル / 熱フィラメント / 気相合成法 / ダイヤモンド薄膜 / 合成機構 / 超臨界水 / 金属酸化物 / 規則配列 / 有機修飾 / ナノ結晶 / 酸化物ナノ粒子 / 有機分子修飾 / 水熱合成 / 金属酸化物ナノ結晶 / 結晶面 / 分離機構 / 細孔制御 / ゼオライト / シリカ / テンプレート / 細孔 / 気体分離 / 無機膜 Less
  • Research Projects

    (9 results)
  • Research Products

    (51 results)
  • Co-Researchers

    (11 People)
  •  Analysis of physicochemical behavior between metal particles and cells in culture medium and development of sustained-release control method

    • Principal Investigator
      Kensuke Kurahashi
    • Project Period (FY)
      2021 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 27010:Transport phenomena and unit operations-related
    • Research Institution
      Osaka Metropolitan University College of Technology
  •  Preparation of high-performance capacitors with thermosetting resin-derived activated carbon modified with supercritical carbon dioxidePrincipal Investigator

    • Principal Investigator
      Saito Takeyasu
    • Project Period (FY)
      2018 – 2020
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 26020:Inorganic materials and properties-related
    • Research Institution
      Osaka Prefecture University
  •  Role of Monovalent Copper Ion in Embedding Copper Damascene Wiring Pore

    • Principal Investigator
      Kondo Kazuo
    • Project Period (FY)
      2015 – 2018
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Material processing/Microstructural control engineering
    • Research Institution
      Osaka Prefecture University
  •  Low temperature synthesis of FeN nanoparticles with supercritical carbon dioxidePrincipal Investigator

    • Principal Investigator
      Saito Takeyasu
    • Project Period (FY)
      2015 – 2017
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Reaction engineering/Process system
    • Research Institution
      Osaka Prefecture University
  •  Assembly of polyhedral metal oxide nanocrystal to facilitate handling of nanomaterials

    • Principal Investigator
      Takami Seiichi
    • Project Period (FY)
      2013 – 2016
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Nanomaterials chemistry
    • Research Institution
      Tohoku University
  •  Adsorption and desorption behavior of organic additives during Cu electrodeposition using microfluidic devices and morphology estimationPrincipal Investigator

    • Principal Investigator
      SAITO Takeyasu
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Reaction engineering/Process system
    • Research Institution
      Osaka Prefecture University
  •  PREPARATION OF DIAMOND-COATED MICRODRILL BY CHEMICAL VAPOR DEPOSITION

    • Principal Investigator
      MOROOKA Shigeharu
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      化学工学一般
    • Research Institution
      KYUSHU UNIVERSITY
  •  テーラーメイド分子認識性無機薄膜の創製

    • Principal Investigator
      KUSAKABE Katsuki
    • Project Period (FY)
      1996
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      反応・分離工学
    • Research Institution
      Kyushu University
  •  トリメチルホウ素を用いたp型半導体ダイヤモンド単結晶薄膜の成長初期過程の制御Principal Investigator

    • Principal Investigator
      齊藤 丈靖
    • Project Period (FY)
      1996
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      反応・分離工学
    • Research Institution
      Kyushu University

All 2024 2023 2022 2021 2020 2019 2018 2017 2015 2014 2013 2012 2011

All Journal Article Presentation

  • [Journal Article] Structural Analysis of Furfural Resin-based Active Carbon to Control an Electric Double-layer Capacitor2020

    • Author(s)
      K. Hokari, S. Suzuki, N. Okamoto, T. Saito, I. Ide, M. Nishikawa, Y. Onishi
    • Journal Title

      Electrochemistry

      Volume: 88 Issue: 3 Pages: 127-131

    • DOI

      10.5796/electrochemistry.20-63004

    • NAID

      130007840229

    • ISSN
      1344-3542, 2186-2451
    • Year and Date
      2020-05-05
    • Language
      English
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18K04709
  • [Journal Article] Structural Analysis and Electric Double Layer Capacitor of Furfural Resin-Based Active Carbon with Different Particle Size2019

    • Author(s)
      K. Hokari, S. Suzuki, N. Okamoto, T. Saito, I.Ide, M. Nishikawa, Y. Onishi,
    • Journal Title

      Proc. of 2019 International Conference on Electronics Packaging, ICEP 2019

      Volume: - Pages: 441-443

    • DOI

      10.23919/icep.2019.8733546

    • Data Source
      KAKENHI-PROJECT-18K04709
  • [Journal Article] Role of Cuprous ion on Copper Electrodeposition Acceleration2015

    • Author(s)
      T.Hayashi, S.Matsuura, K.Kataoka, K.Nishimura, M.Kada, K.Kondo, T.Saito, N.Okamoto
    • Journal Title

      Journal of the Electrochemical Society

      Volume: 162(6)

    • Data Source
      KAKENHI-PROJECT-15K06511
  • [Journal Article] Adsorption behavior of poly (ethylene glycol) in the presence of two different kinds of halide ions, Br- and Cl- revealed using a microfluidic device and an EQCM2014

    • Author(s)
      Y. Tsujimoto, T. Saito, Y. Miyamoto, N.Okamoto, K. Kondo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 5S2 Pages: 05GA05-05GA05

    • DOI

      10.7567/jjap.53.05ga05

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Journal Article] Determination of Current Density Suppression Ability of Poly(ethylene glycol) during Copper2013

    • Author(s)
      T. Saito, Y. Tsujimoto, Y. Miyamoto, N. Okamoto, K. Kondo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 5S3 Pages: 05FB03-05FB03

    • DOI

      10.7567/jjap.52.05fb03

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Journal Article] Adsorption and Desorption Kinetic Study of Organic Additives during Copper Electrodeposition by Microfluidic Reactor2013

    • Author(s)
      T. Saito, Y. Tsujimoto, Y. Miyamoto, N. Okamoto, K. Kondo
    • Journal Title

      Proceedings of ICEP 2013

      Volume: 13th Pages: 639-644

    • Data Source
      KAKENHI-PROJECT-23560922
  • [Journal Article] Adsorption and Desorption Kinetic Study of Organic Additives during Copper Electrodeposition by Microfluidic Reactor2013

    • Author(s)
      T. Saito, Y. Tsujimoto, Y. Miyamoto, N. Okamoto, K. Kondo
    • Journal Title

      Proc. of Int. Conf. on Electronics Packaging 2013

      Pages: 639-644

    • Data Source
      KAKENHI-PROJECT-23560922
  • [Journal Article] Adsorption Kinetic Study of Poly(ethylene glycol) during Copper Electrodeposition2012

    • Author(s)
      Takeyasu Saito, Yutaka Miyamoto, Sunao Hattori, Naoki Okamoto, and Kazuo Kondo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Journal Article] Adsorption Kinetic Study of Poly(ethylene glycol) during Copper Electrodeposition by a Microfluidic Device2012

    • Author(s)
      T. Saito, Y. Miyamoto, S. Hattori, N. Okamoto, K. Kondo
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51 Issue: 5S Pages: 05EA03-05EA03

    • DOI

      10.7567/jjap.51.05ea03

    • NAID

      210000140634

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Journal Article] Adsorption Kinetic Study of Poly(ethylene glycol) during Copper Electrodeposition by a Microfluidic Device2012

    • Author(s)
      T. Saito, Y. Miyamoto, S. Hattori, N. Okamoto, K. Kondo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51(5) Issue: 5S Pages: 05EA03-05EA03

    • DOI

      10.1143/jjap.51.05ea03

    • NAID

      210000140634

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560872, KAKENHI-PROJECT-23560922
  • [Journal Article] 微小流路型反応器を利用した銅めっき液中添加剤作用の解析2012

    • Author(s)
      齊藤丈靖, 宮本豊, 服部直, 岡本尚樹, 近藤和夫
    • Journal Title

      信学技報

      Volume: 111

    • NAID

      110009546240

    • Data Source
      KAKENHI-PROJECT-23560922
  • [Journal Article] 微小流路型反応器を利用した銅めっき液中添加剤作用の解2012

    • Author(s)
      齊藤丈靖・宮本 豊・服部 直・岡本尚樹・近藤和夫
    • Journal Title

      信学技報

      Volume: Vol.111 No.463

    • Data Source
      KAKENHI-PROJECT-23560922
  • [Journal Article] Adosorption and desorption kinetic study of organic additives during copper electrodeposition by microfluidic reactor2011

    • Author(s)
      Y. Miyamoto, S. Hattori, N. Okamoto, T. Saito, K. Kondo
    • Journal Title

      Proc. of Int. Conf. on Electronics Packaging 2011

      Pages: 866-870

    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 金属ナノ粒子が誘導する細胞増殖効果の検討と細胞周辺の金属イオン濃度解析2024

    • Author(s)
      井上 昂星、金子 直毅、倉橋 健介、齊藤 丈靖、徳本 勇人
    • Organizer
      日本植物学会第88大会
    • Data Source
      KAKENHI-PROJECT-21K04759
  • [Presentation] 金属ナノ粒子の肥料転用における有効性の検証2023

    • Author(s)
      倉橋 健介、中村 太郎、齊藤 丈靖、中島 壮一朗、岩崎 哲史、徳本 勇人
    • Organizer
      日本植物学会第87大会
    • Data Source
      KAKENHI-PROJECT-21K04759
  • [Presentation] 細胞増殖を促進する酸化亜鉛ナノ粒子の粒径最適化技法の構築2023

    • Author(s)
      中島 壮一朗、 清水 翔太、倉橋 健介、徳本 勇人、齊藤 丈靖
    • Organizer
      化学工学会第54回秋季大会
    • Data Source
      KAKENHI-PROJECT-21K04759
  • [Presentation] 金属酸化物ナノ粒子を用いた緑藻に対する細胞増殖効果の解析2023

    • Author(s)
      中島 壮一朗、倉橋 健介、齊藤 丈靖、徳本 勇人
    • Organizer
      日本植物学会第87大会
    • Data Source
      KAKENHI-PROJECT-21K04759
  • [Presentation] ナノ粒子の溶解性制御による植物細胞の増殖促進2022

    • Author(s)
      倉橋 健介、岩崎 哲史、齊藤丈靖、徳本勇人
    • Organizer
      第57回植物工場研究センターコンソーシアム研修会
    • Data Source
      KAKENHI-PROJECT-21K04759
  • [Presentation] 大腸菌体内で生合成されるAuナノ粒子の物性評価2021

    • Author(s)
      菊池祥一朗、倉橋健介、徳本勇人、齊藤丈靖
    • Organizer
      化学工学会第52回秋季大会
    • Data Source
      KAKENHI-PROJECT-21K04759
  • [Presentation] Preparation of Furfural Resin-Based Active Carbon with Acid Treated Pore Surface Electric Double Layer Capacitor2021

    • Author(s)
      K. Hokari, S. Shimizu, N. Okamoto, T. Saito, I. Ide, M. Nishikawa, Y. Onishi
    • Organizer
      the 239th ECS Meeting and the 18th International Meeting on Chemical Sensors (IMCS)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K04709
  • [Presentation] Physical Properties of Furfural Resin-Based Active Carbon for Improved Electric Double Layer Capacitor2020

    • Author(s)
      K. Hokari, S. Suzuki, N. Okamoto, T. Saito, I. Ide, M. Nishikawa, Y. Onishi
    • Organizer
      PRiME 2020
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K04709
  • [Presentation] フラン樹脂由来活性炭への酸性表面官能基の導入と電気二重層キャパシタ特性2020

    • Author(s)
      清水翔太,帆苅奏,岡本尚樹,齊藤丈靖,井手勇,西川昌信,大西慶和
    • Organizer
      第30回マイクロエレクトロニクスシンポジウム
    • Data Source
      KAKENHI-PROJECT-18K04709
  • [Presentation] フラン樹脂由来活性炭の表面構造と電気二重層キャパシタ特性2019

    • Author(s)
      帆苅 奏,鈴木伸一郎,岡本尚樹,齊藤丈靖,井出 勇,西川昌信,大西慶和
    • Organizer
      電気化学秋季大会
    • Data Source
      KAKENHI-PROJECT-18K04709
  • [Presentation] Structural Analysis of Furfural Resin -Based Active Carbon to Control Electric Double Layer Capacitor.2019

    • Author(s)
      T. Saito, K. Hokari, S. Suzuki, N. Okamoto, I. Ide, M. Nishikawa, Y. Onishi
    • Organizer
      18th Asian Pacific Confederation of Chemical Engineering (APCChE) 2019, (Sapporo, Japan, Sep.)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K04709
  • [Presentation] 骨格の異なる熱硬化性樹脂由来活性炭の構造解析に基づく電気二重層キャパシタ特性の改善2019

    • Author(s)
      帆苅 奏,鈴木伸一郎,岡本尚樹,齊藤丈靖,井出 勇,西川昌信,大西慶和
    • Organizer
      電気化学秋季大会
    • Data Source
      KAKENHI-PROJECT-18K04709
  • [Presentation] フラン樹脂由来活性炭の粒径及び表面構造と電気二重層キャパシタ特性2019

    • Author(s)
      帆苅 奏,鈴木伸一郎,岡本尚樹,齊藤丈靖,井出 勇,西川昌信,大西慶和
    • Organizer
      第21回化学工学会学生発表会(京都大会)
    • Data Source
      KAKENHI-PROJECT-18K04709
  • [Presentation] 超臨界流体中で作製した熱硬化性樹脂由来活性炭の電気二重層キャパシタ特性2018

    • Author(s)
      鈴木伸一郎,帆苅 奏,中澤貴文,岡本尚樹,齊藤丈靖,井出 勇,西川昌信,大西慶和
    • Organizer
      化学工学会第50回秋季大会
    • Data Source
      KAKENHI-PROJECT-18K04709
  • [Presentation] 有機鉄化合物を用いた超臨界CO2中での鉄酸化物の作製2017

    • Author(s)
      田村 遥,岡本尚樹,齊藤丈靖
    • Organizer
      化学工学会学生発表会第19回豊中大会
    • Place of Presentation
      大阪大学石橋キャンパス
    • Data Source
      KAKENHI-PROJECT-15K14215
  • [Presentation] 超臨界二酸化炭素を用いた酸化鉄薄膜の作成2015

    • Author(s)
      角 嘉人、刀禰 正利、岡本 尚樹、齊藤 丈靖、近藤 和夫、高見 誠一
    • Organizer
      化学工学会 第47回秋季大会
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2015-09-10
    • Data Source
      KAKENHI-PROJECT-15K14215
  • [Presentation] 微小流路型反応器とEQCMを用いた銅めっき中添加剤作用の定量化2013

    • Author(s)
      辻本悠一, 宮本豊, 岡本尚樹, 齊藤丈靖, 近藤和夫
    • Organizer
      化学工学会第78年会
    • Place of Presentation
      大阪
    • Year and Date
      2013-03-17
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] Neutron Computed Tomography at the Mixing Point of Supercritical Water and Room Temperature Water in a Tubular Flow Reactor2013

    • Author(s)
      S. Takami, K. Ozawa, K. Sugioka, T. Tsukada, T. Adschiri, K. Sugioka, N.Takenaka, Y. Saito
    • Organizer
      The 6th International Symposium on High Pressure Processes Technology
    • Place of Presentation
      Belgrade, Serbia
    • Data Source
      KAKENHI-PROJECT-25286013
  • [Presentation] Adsorption and Desorption Kinetic Study of Organic Additives during Copper Electrodeposition by Microfluidic Reactor2013

    • Author(s)
      T. Saito, Y. Tsujimoto, Y. Miyamoto, N. Okamoto, K. Kondo
    • Organizer
      13th International Symposium on Electronics Packaging (ICEP2013)
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2013-04-12
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] Adsorption Behavior of Poly (Ethylene Glycol) in the Presence of Different Kinds of Halide Ions with a Microfluidic Device and an EQCM2013

    • Author(s)
      T. Saito, Y. Tsujimoto, Y. Miyamoto, N.Okamoto, K. Kondo
    • Organizer
      Advanced Metallization Conference 2013: 23rd Asian Session
    • Place of Presentation
      Tokyo, Japan
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 微小流路型反応器を用いた異種ハロゲンイオン存在下におけるポリエチレングリコール吸着挙動の解析2013

    • Author(s)
      辻本悠一, 宮本豊, 齊藤丈靖, 岡本尚樹, 近藤和夫
    • Organizer
      第23回マイクロエレクトロニクスシンポジウム
    • Place of Presentation
      Osaka, Japan
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] Adsorption Behavior of Poly (Ethylene Glycol) in the Presence of Different Kinds of Halide Ions with a Microfluidic Device and an EQCM2013

    • Author(s)
      T. Saito, Y. Tsujimoto, Y. Miyamoto, N. Okamoto, K. Kondo
    • Organizer
      Advanced Metallization Conference 2013:23rd Asian Session
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2013-10-09
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 微小流路型反応器を用いた異種ハロゲンイオン存在下におけるポリエチレングリコール吸着挙動の解析2013

    • Author(s)
      辻本悠一, 宮本豊, 齊藤丈靖, 岡本尚樹, 近藤和夫
    • Organizer
      第23回マイクロエレクトロニクスシンポジウム
    • Place of Presentation
      大阪
    • Year and Date
      2013-09-13
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 急速液置換による銅めっき用有機添加剤の吸脱着挙動2012

    • Author(s)
      辻本悠一, 宮本豊, 齊藤丈靖, 岡本尚樹, 近藤和夫
    • Organizer
      第22回マイクロエレクトロニクスシンポジウム
    • Place of Presentation
      大阪
    • Year and Date
      2012-09-13
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] Determination of Current Density Suppression Ability of Poly(ethylene glycol) during Copper Electrodeposition by an EQCM and a Microfluidic Device2012

    • Author(s)
      T. Saito, Y. Tsujimoto, Y. Miyamoto, N. Okamoto, K. Kondo
    • Organizer
      Advanced Metallization Conference 2012:22nd Asian Session
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2012-10-24
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] Determination of Current Density Suppression Ability of Poly(ethylene glycol) during Copper Electrodeposition by an EQCM and a Microfluidic Device.2012

    • Author(s)
      T. Saito, Y. Tsujimoto, Y. Miyamoto, N. Okamoto, K. Kondo
    • Organizer
      Advanced Metallization Conference 2012: 22nd Asian Session
    • Place of Presentation
      Tokyo, Japan
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 急速液置換による銅めっき用有機系添加剤の吸脱着挙動解析2012

    • Author(s)
      辻本悠一, 宮本豊, 齊藤丈靖, 岡本尚樹, 近藤和夫
    • Organizer
      第22回マイクロエレクトロニクスシンポジウム
    • Place of Presentation
      大阪
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 微小流路型反応器を利用した銅めっき液中添加剤作用の解析2012

    • Author(s)
      齊藤丈靖, 宮本豊, 服部直, 岡本尚樹, 近藤和夫
    • Organizer
      応用物理学会分科会シリコンテクノロジー「配線技術研究集会」
    • Place of Presentation
      東京
    • Year and Date
      2012-03-05
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 急速液置換による銅めっき用有機系添加剤の吸着作用の定量化2012

    • Author(s)
      宮本豊, 服部直, 岡本尚樹, 齊藤丈靖, 近藤和夫
    • Organizer
      化学工学会第77年会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-15
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 微小流路型反応器を利用した銅めっき液中添加剤作用の解2012

    • Author(s)
      齊藤丈靖・宮本 豊・服部 直・岡本尚樹・近藤和夫
    • Organizer
      応用物理学会シリコンテクノロジー分科会
    • Place of Presentation
      東京
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 急速液置換による銅めっき用有機系添加剤の吸脱着挙動解析2011

    • Author(s)
      宮本 豊・服部 直・岡本尚樹・齊藤丈靖・近藤和夫
    • Organizer
      第21回マイクロエレクトロニクスシンポジウム(MES2011)
    • Place of Presentation
      大阪
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 急速液置換による銅めっき用有機系添加剤の吸脱着挙動解析2011

    • Author(s)
      宮本豊, 服部直, 齊藤丈靖, 岡本尚樹, 近藤和夫
    • Organizer
      第21回マイクロエレクトロニクスシンポジウム
    • Place of Presentation
      大阪
    • Year and Date
      2011-09-08
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] Adosorption and desorption kinetic study of organic additives during copper electrodeposition by microfluidic reactor2011

    • Author(s)
      Y. Miyamoto, S. Hattori, N. Okamoto, T. Saito, K. Kondo
    • Organizer
      Int. Conf. on Electronics Packaging 2011 (ICEP2011)
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2011-04-14
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] Adsorption and desorption kinetic study of organic additives during copper electrodeposition by microfluidic reactor2011

    • Author(s)
      Yutaka Miyamoto, Sunao Hattori, Naoki Okamoto, Takeyasu Saito and Kazuo Kondo
    • Organizer
      ICEP 2011; International Conference on Electronics Packaging
    • Place of Presentation
      Nara, Japan
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 微小流路反応器を用いる銅めっき用有機系添加剤の吸脱着挙動の解析2011

    • Author(s)
      宮本 豊・服部 直・岡本尚樹・齊藤丈靖・近藤和夫
    • Organizer
      化学工学会第43回秋季大会
    • Place of Presentation
      名古屋
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] 微小流路反応器を用いる銅めっき用添加剤の吸着挙動の解析2011

    • Author(s)
      宮本豊, 服部直, 岡本尚樹, 齊藤丈靖, 近藤和夫
    • Organizer
      化学工学会第43回秋季大会
    • Place of Presentation
      名古屋
    • Year and Date
      2011-09-14
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] Adsorption and Desorption Behavior of Organic Additives During Copper Electrodeposition by Rapid Solution Exchange2011

    • Author(s)
      T. Saito, Y. Miyamoto, S. Hattori, N. Okamoto, K. Kondo
    • Organizer
      Advanced Metallization Conference 2011:21st Asian Session
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2011-09-14
    • Data Source
      KAKENHI-PROJECT-23560922
  • [Presentation] Adsorption and Desorption Behavior of Organic Additives During Copper Electrodeposition by Rapid Solution Exchange2011

    • Author(s)
      Takeyasu Saito, Yutaka Miyamoto, Sunao Hattori, Naoki Okamoto, and Kazuo Kondo
    • Organizer
      Advanced Metallization Conference 2011: 21st Asian Session
    • Place of Presentation
      Tokyo, Japan
    • Data Source
      KAKENHI-PROJECT-23560922
  • 1.  KUSAKABE Katsuki (30153274)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 2.  金子 豊 (00169583)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 3.  横井 昌幸 (80359348)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 4.  Takami Seiichi (40311550)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results
  • 5.  MOROOKA Shigeharu (60011079)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 6.  TSUBOTA Toshiki (10304750)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  HOJO Junichi (20038079)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  Kondo Kazuo (50250478)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 9.  Kensuke Kurahashi (60516821)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 6 results
  • 10.  冨樫 貴成 (80510122)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  Hayashi Taro
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results

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