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YODO Tokuo  淀 徳男

ORCIDConnect your ORCID iD *help
Researcher Number 70288752
Other IDs
External Links
Affiliation (based on the past Project Information) *help 2012 – 2015: 大阪工業大学, 工学部, 教授
2004: Osaka Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授
1997 – 2003: 大阪工業大学, 工学部, 助教授
Review Section/Research Field
Principal Investigator
Electronic materials/Electric materials / Electronic materials/Electric materials
Except Principal Investigator
Inorganic materials/Physical properties
Keywords
Principal Investigator
ECRプラズマ / InN / ECR plasma / OEIC / 光電子集積回路 / Si基板 / 六方晶 / 窒化物混晶 / 結晶性 / lattice matching … More / GaAsN alloy / galium nitride / エピタキシャル成長 / 格子不整合 / 格子整合 / residual oxygen concentration / low temperature growth / cubic InN / band gap energy / Optical Electric Integrated Circuits / Nitride alloy / 窒化物混晶半導体 / 酸素不純物 / 残留酸素濃度 / 低温成長 / 立方晶InN / バンドギャップ / Anneal / Crystalline quality / Hexagonal crystal / Nitride alloy crystal / Si substrate / 立方晶 / PL発光 / アニール / プラズマ発光 / Si基盤 / Crystal structure / InGaAsN alloy / As doping / 窒化ガリウムインジウム砒素 / 立方晶窒化ガリウム / プラズマダメージ / シリコン基板表面 / シリコン基板上窒化ガリウム / 窒化インジウム / 窒化インジウムガリウム砒素 / シリコン / ガリウム砒素 / nitride semiconductor / galium arsenide on silicon / epitaxial growth / GaAs_<1-x>N_x / 窒化物 / Gabs_<1-X>N_Y / エピタヤンヤル成長 / 界面電荷整合性 / GaAs on Si / 窒化的半導体 / エピタキシカル砒素 / 窒化カリウム砒素 / 窒化カリウム / シリコン基板上ガリウム砒素 … More
Except Principal Investigator
ナノインプリント / 表面ナノ修飾基板 / 超機能創出 / 組織制御 / 結晶構造 / 酸化物 / 層状構造 / 固相結晶成長 / 酸化モリブデン / 酸化バナジウム / エピタキシャル成長 / 固相結晶化 / 酸化物薄膜 / 一軸圧縮 / 結晶構造制御 Less
  • Research Projects

    (5 results)
  • Research Products

    (22 results)
  • Co-Researchers

    (2 People)
  •  Solid-phase crystallization of oxide thin films on nanoscale-controlled substrates via post-annealing under uniaxial compression for exploring the novel functionalities

    • Principal Investigator
      Yoshimoto Mamoru
    • Project Period (FY)
      2012 – 2015
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Inorganic materials/Physical properties
    • Research Institution
      Tokyo Institute of Technology
  •  Five-dimensional alloy growth of AlInGaNAs and fundamental investigation for realizing Opto-Electronic Integurated CircuitsPrincipal Investigator

    • Principal Investigator
      YODO Tokuo
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka Institute of Technology
  •  Crystal growth of AlInGaNAs 5-alloy nitrides and fundamental investigation for fabricating optoelectronic integration circuitPrincipal Investigator

    • Principal Investigator
      YODO Tokuo
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka Institute of Technology
  •  Crystal growth of InGaAsN alloy using ECR plasma and basic investigation for realizing OEICPrincipal Investigator

    • Principal Investigator
      YODO Tokuo
    • Project Period (FY)
      1999 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka Instizute of Technology
  •  Crystal growth of GaAsN alloy using ECR plasma and basic investigation for realizing OEICPrincipal Investigator

    • Principal Investigator
      YODO Tokuo
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka Institute of Technology

All 2004 2003 2002

All Journal Article

  • [Journal Article] Room-temperature growth of ultrasmooth AlN epitaxial thin films on sapphire with NiO buffer layer2004

    • Author(s)
      Atsushi Sasaki, Jin Liu, Wakana Hara, Shusaku Akiba, Keisuke Saito, Tokuo Yodo
    • Journal Title

      J Mater.Res. Vol.19, No.9

      Pages: 2725-2729

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Influences of In2O3 crystal grains formed by anneal on characteristics of hexagonal InN crystalline films grown on Si(111) substrates2004

    • Author(s)
      Tokuo Yodo, Yasunobu Kitayama, Kazunari Miyaki, Hiroaki Yona, Yoshiyuki Harada
    • Journal Title

      Jpn.J.Appl.Phys. Vol.43, No.2A

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Influences of In2O3 crystal grains formed by anneal on characteristics of hexagonal InN crystalline films grown on Si(111) substrates2004

    • Author(s)
      Tokuo Yodo, Yasunobu Kitayama, Kazunari Miyaki, Hiroaki Yona, Yoshiyuki Harada
    • Journal Title

      Jpn.J.Appl.Phys. 43,2A

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] ECR-assisted MBE growth of In1-xGaxN heteroepitaxial films on Si2004

    • Author(s)
      Tokuo Yodo, Yasunari Kitayama, Kazunari Miyaki, Hiroaki Yona, Yoshiyuki Harada
    • Journal Title

      Superlattices and Microstrucures Vol.36

      Pages: 547-561

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Room-temperature growth of ultrasmooth AlN epitaxial thin films on sapphire with NiO buffer layer2004

    • Author(s)
      Atsushi Sasaki, Jin Liu, Wakana Hara, Shusaku Akiba, Keisuke Saito, Tokuo Yodo, Mamoru Yohimoto
    • Journal Title

      J Mater.Res. 19,9

      Pages: 2725-2729

    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Room-temperature growth of ultrasmooth AlN epitaxial thin films on sapphire with NiO buffer layer2004

    • Author(s)
      Atsushi Sasaki, Jin Liu, Wakana Hara, Shusaku Akiba, Keisuke Saito, Tokuo Yodo, Mamoru Yoshimoto
    • Journal Title

      J Mater.Res. 19,9

      Pages: 2725-2729

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Visible Emissions Near 1.9-2.2 eV From Hexagonal InN Films Grown By Electron Cyclotron Resonance Plasma-Assisted Molecular-Beam Epitaxy2004

    • Author(s)
      Tokuo Yodo, Yasunobu Kitayama, Kazunari Miyaki, Hiroaki Yona, Yoshiyuki, Harada, Kathryn E.Prince, K.Scott A.Butcher
    • Journal Title

      J.Cryst.Growth 269

      Pages: 145-154

    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Visible Emissions Near 1.9-2.2 eV From Hexagonal InN Films Grown By Electron Cyclotron Resonance Plasma-Assisted Molecular-Beam Epitaxy2004

    • Author(s)
      Tokuo Yodo, Yasunobu Kitayama, Kazunari Miyaki, Hiroaki Yona, Yoshiyuld, Harada, Kathryn E.Prince, K.Scott A.Butcher
    • Journal Title

      J.Cryst.Growth Vol.269

      Pages: 145-154

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] ECR-assisted MBE growth of In1-xGaxN heteroepitaxial films on Si2004

    • Author(s)
      Tokuo Yodo, Yasunari Kitayama, Kazunari Miyaki, Hiroaki Yona, Yoshiyuki Harada
    • Journal Title

      Superlattices and Microstrucures 36

      Pages: 547-561

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Visible Emissions Near 1.9-2.2eV From Hexagonal InN Films Grown By Electron Cyclotron Resonance Plasma-Assisted Molecular-Beam Epitaxy2004

    • Author(s)
      Tokuo Yodo, Yasunobu Kitayama, Kazunari Miyaki, Hiroaki Yona, Yoshiyuki, Harada, Kathryn E.Prince, K.Scott A.Butcher
    • Journal Title

      J.Cryst.Growth 269

      Pages: 145-154

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] ECR-assisted MBE growth of In1-xGaxN heteroepitaxial films on Si2004

    • Author(s)
      Tokuo Yodo, Yasunari Kitayama, Kazunari Miyaki, Hiroaki Yona, Yoshiyuki
    • Journal Title

      Superlattices and Microstrucures 36

      Pages: 547-561

    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Visible emissions near 2.2eV from InN films grown on Si(111) and sapphire(0001) substrates by electron cyclotron resonance plasma-assisted molecular-beam epitaxy2003

    • Author(s)
      T.Yodo, H.Yona, Y.Harada, A.Sasaki, M.Yoshimoto
    • Journal Title

      phys.state.sol. (c)0,No.7

      Pages: 2802-2805

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Effect of substrate bias voltage under growth on characteristics of InN films grown by molecular-beam epitaxy assisted by electron cyclotron resonance plasma2003

    • Author(s)
      H.Yona, Y.Harada, T.Yodo
    • Journal Title

      phys.state.sol. (c)0,No.7

      Pages: 2545-2548

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Low temperature growth of GaN films on Si(111) substrates by electron cyclotron resonance plasma-assisted molecular-beam epitaxy2003

    • Author(s)
      T.Yodo, R.Fujita, M.Yamada, Y.Harada
    • Journal Title

      22th Electronic Materials Symposium, Laforet Biwako, Moriyama, Shiga, Extended Abstracts 22

      Pages: 191-192

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Characterization of polycrystalline GaN layers grown on alkali metal-free glass substrates by molecular-beam epitaxy assisted by electron cyclotron resonance plasma2003

    • Author(s)
      T.Yodo, T.Hirano, Y.Harada
    • Journal Title

      Polycrystalline Semiconductors VII, Solid State Phenomena (edited by T.Fuyuki et.al.) 93

      Pages: 307-312

    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Low temperature growth of GaN films on Si(111) substrates by electron cyclotron resonance plasma-assisted molecular-beam epitaxy2003

    • Author(s)
      T.Yodo, R.Fujita, M.Yamada, Y.Harada
    • Journal Title

      22th Electronic Materials Symposium, Laforet Biwako, Moriyama, Shiga, Extended Abstracts F14

      Pages: 191-192

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Visible emissions near 2.2 eV from InN films grown on Si(111) and sapphire(0001) substrates by electron cyclotron resonance plasma-assisted molecular-beam epitaxy2003

    • Author(s)
      T.Yodo, H.Yona, Y.Harada, A.Sasaki, M.Yoshimoto
    • Journal Title

      phys.state.sol. (c)0,No.7

      Pages: 2802-2805

    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Visible emissions near 2.2 eV from InN films grown on Si (111) and sapphire (0001) substrates by electron cyclotron resonance plasma-assisted molecular-beam epitaxy2003

    • Author(s)
      T.Yodo, H.Yona, Y.Harada, A.Sasaki, M.Yoshimoto
    • Journal Title

      phys.state.sol.(c) 0,No.7

      Pages: 2802-2805

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Effect of substrate bias voltage under growth on characteristics of InN films grown by molecular-beam epitaxy assisted by electron cyclotron resonance plasma2003

    • Author(s)
      H.Yona, Y.Harda, T.Yodo
    • Journal Title

      phys.state.sol.(c) 0,No.7

      Pages: 2545-2548

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Effect of substrate bias voltage under growth on characteristics of InN films grown by molecular-beam epitaxy assisted by electron cyclotron resonance plasma2003

    • Author(s)
      H.Yona, Y.Harda, T.Yodo
    • Journal Title

      phys.state.sol. (c)0,No.7

      Pages: 2545-2548

    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Characterization of polycrystalline GaN layers grown on alkali metal-free glass substrates by molecular-beam epitaxy assisted by electron cyclotron resonance plasma2002

    • Author(s)
      T.Yodo, T.Hirano, Y.Harada
    • Journal Title

      Polycrystalline Semiconductors VII, Solid State Phenomena (edited by T.Fuyuki et al.) Vol.93

      Pages: 307-312

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • [Journal Article] Characterization of polycrystalline GaN layers grown on alkali metal-free glass substrates by molecular-beam epitaxy assisted by electron cyclotron resonance plasma2002

    • Author(s)
      T.Yodo, T.Hirano, Y.Harada
    • Journal Title

      Polycrystalline Semiconductors VII, Solid State Phenomena (edited by T.Fuyuki et al.) 93

      Pages: 307-312

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560284
  • 1.  Yoshimoto Mamoru (20174998)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  MATSUDA Akifumi (80621698)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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