Seike Yoshiyuki 清家善之

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清家善之セイケヨシユキ

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Researcher Number	70584069
Affiliation (Current)	2026: 愛知工業大学, 工学部, 教授
Affiliation (based on the past Project Information) *help	2023 – 2024: 愛知工業大学, 工学部, 教授
Review Section/Research Field	Principal Investigator Basic Section 18020:Manufacturing and production engineering-related
Keywords	Principal Investigator スプレー / 二酸化炭素 / 深層学習 / 誘導帯電 / 半導体 / 洗浄 / AI / 摩擦帯電 / 二流体スプレー / 静電気障害

Creation of a new semiconductor device manufacturing process using inductive charging technology aimed at reducing CO2 emissionsPrincipal Investigator
- Principal Investigator
  
  清家善之
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Aichi Institute of Technology

All 2024 2023

All Journal Article Presentation Book

[Book] 半導体製造における洗浄技術2024
- Author(s)
  監修羽深等, 清家善之
- Total Pages
  232
- Publisher
  シーエムシー出版
- Data Source
  KAKENHI-PROJECT-23K03627
[Journal Article] Evaluating the Removal of Polystyrene Latex Particles Using the Quartz Transducer Ultrasonic Cleaners in the Megahertz Frequency Range2024
- Author(s)
  Seike Yoshiyuki、Takagi Rai、Hikita Tomomi、Honda Yuji、Taoka Noriyuki、Ichino Yusuke、Mori Tatsuo
- Journal Title
  
  ECS Transactions
  
  Volume: 114 Issue: 1 Pages: 83-92
- DOI
  10.1149/11401.0083ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K03627
[Journal Article] 純水スプレー時に発生する飛行液滴の帯電制御2024
- Author(s)
  清家善之
- Journal Title
  
  静電気学会誌
  
  Volume: 48 Pages: 131-136
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K03627
[Journal Article] ESD Prevention Technology for Two-Fluid Pure Water Spray Cleaning with Controlled Electrostatic Charge2023
- Author(s)
  Yoshiyuki Seike, Hiroharu Suzuki, Yusuke Ichino, Tatsuo Mori
- Journal Title
  
  Solid State Phenomena
  
  Volume: 346 Pages: 244-249
- DOI
  10.4028/p-xfxqv7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K03627
[Journal Article] 半導体デバイス製造に用いられる物理的なウェット洗浄2023
- Author(s)
  清家善之
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 67 Pages: 389-392
- Data Source
  KAKENHI-PROJECT-23K03627
[Journal Article] 半導体デバイスの物理的ウエット洗浄技術2023
- Author(s)
  清家善之
- Journal Title
  
  混相流
  
  Volume: 32 Pages: 189-196
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] 純水噴霧の誘導帯電メカニズムの解析2024
- Author(s)
  渡部一哲, 伊藤康生, 森竜雄, 一野祐亮, 田岡紀之, 清家善之
- Organizer
  応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] Evaluating the Removal of Polystyrene Latex Particles Using the Quartz Transducer Ultrasonic Cleaners in the Megahertz Frequency Range2024
- Author(s)
  Yoshiyuki Seike, Rai Takagi, Tomomi Hikita, Yuji Honda, Noriyuki Taoka, Yusuke Ichino, Tatsuo Mori
- Organizer
  Pacific Rim international meeting of The Electrochemical Society (ECS), The Electrochemical Society of Japan (ECSJ), and The Korean Electrochemical Society (KECS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] Analysis of Charging Phenomena on Silicon Wafers with Oxide Films in Two-Fluid Spray2024
- Author(s)
  Kousei Ito, Yuta Fukatsu, Tatsuo Mori, Yusuke Ichino, Noriyuki Taoka, Yoshiyuki Seike
- Organizer
  The International Council on Electrical Engineering Conference 2024 (ICEE2024)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] Control of Static Electricity Generated by Two-fluid Spray of Pure Water2024
- Author(s)
  Yoshiyuki Seike, Hiroharu Suzuki, Yusuke Ichino, Noriyuki Taoka, Tatsuo Mori
- Organizer
  The International Council on Electrical Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] 純水を用いたスプレー時のSiO2ウェハ表面電位の解析2024
- Author(s)
  伊藤康生, 森竜雄, 一野祐亮, 田岡紀之, 清家善之
- Organizer
  第34回 RCJ信頼性シンポジウム
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] Electrostatic Characteristics at the Start of Two-Fluid Spray Cleaning for Semiconductors2024
- Author(s)
  Ittetsu Watanabe, Riho Hirano, Tatsuo Mori, Yusuke Ichino, Noriyuki Taoka, Yoshiyuki Seike
- Organizer
  The International Council on Electrical Engineering Conference 2024 (ICEE2024)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] Control of Static Electricity Generated by Two-fluid Spray of Pure Water2024
- Author(s)
  oshiyuki Seike, Hiroharu Suzuki, Yusuke Ichino, Noriyuki Taoka, Tatsuo Mori
- Organizer
  The International Council on Electrical Engineering Conference 2024 (ICEE2024)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] Analysis of Charging Phenomena on Silicon Wafers with Oxide Films in Two-Fluid Spray2024
- Author(s)
  Kousei Ito, Yuta Fukatu, Tatsuo Mori, Yusuke Ichino, Noriyuki Taoka, Yoshiyuki Seike
- Organizer
  The International Council on Electrical Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] Electrostatic Characteristics at the Start of Two-Fluid Spray Cleaning for Semiconductors2024
- Author(s)
  Ittetsu Watanabe, Riho Hirano, Tatsuo Mori, Yusuke Ichino, Noriyuki Taoka, Yoshiyuki Seike
- Organizer
  The International Council on Electrical Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] 二流体スプレー時の飛行液滴の電荷特性とSiO2ウェハの表面電位の関係性2024
- Author(s)
  伊藤康生, 渡辺一哲, 森竜雄, 一野祐亮, 田岡紀之, 清家善之
- Organizer
  応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] 純水の二流体スプレーにおける誘導帯電メカニズムの解析2024
- Author(s)
  渡部一哲, 伊藤康生, 森竜雄, 一野祐亮, 田岡紀之, 清家善之
- Organizer
  第48回静電気学会全国大会
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] 深層学習を用いた純水スプレー時に発生する静電気量の推測手法の確立2023
- Author(s)
  清家善之
- Organizer
  第33回 RCJ信頼性シンポジウム
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] ESD Prevention Technology for Two-Fluid Pure Water Spray Cleaning with Controlled Electrostatic Charge2023
- Author(s)
  Yoshiyuki Seike, Hiroharu Suzuki, Yusuke Ichino, Tatsuo Mori
- Organizer
  16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] 二流体スプレーの噴射開始時に発生する静電気特性2023
- Author(s)
  渡部一哲, 一野祐亮, 田岡紀之, 森竜雄, 清家善之
- Organizer
  応用物理学会界面ナノ電子化学研究会　第8回ポスター発表会
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] 二流体スプレー純水洗浄時に発生するシリコンウェハ表面電位の変化2023
- Author(s)
  伊藤康生, 一野祐亮, 田岡紀之, 森竜雄, 清家善之
- Organizer
  応用物理学会界面ナノ電子化学研究会　第8回ポスター発表会
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] 誘導帯電素子を用いた二流体スプレー時の発生電荷量の制御2023
- Author(s)
  清家善之, 鈴木洋陽, 一野祐亮, 田岡紀之, 森竜雄
- Organizer
  第84回応用物理学会秋季大会
- Data Source
  KAKENHI-PROJECT-23K03627
[Presentation] Electrostatic Discharge Prevention technology in Pure Water Spray Cleaning of Semiconductor Cleaning Process Using Machine Learning2023
- Author(s)
  Yoshiyuki Seike
- Organizer
  The 9th Annual World Congress of Advanced Materials (WCAM-2023)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03627

1. 森竜雄 (40230073)

# of Collaborated Projects: 1 results

# of Collaborated Products: 17 results
2. 真田俊之 (50403978)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Seike Yoshiyuki 清家 善之

清家 善之 セイケ ヨシユキ

Research Projects

Research Products

Co-Researchers

Creation of a new semiconductor device manufacturing process using inductive charging technology aimed at reducing CO2 emissionsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Book] 半導体製造における洗浄技術2024

Author(s)

Total Pages

Publisher

Data Source

[Journal Article] Evaluating the Removal of Polystyrene Latex Particles Using the Quartz Transducer Ultrasonic Cleaners in the Megahertz Frequency Range2024

Author(s)

Journal Title

DOI

Data Source

[Journal Article] 純水スプレー時に発生する飛行液滴の帯電制御2024

Author(s)

Journal Title

Data Source

[Journal Article] ESD Prevention Technology for Two-Fluid Pure Water Spray Cleaning with Controlled Electrostatic Charge2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] 半導体デバイス製造に用いられる物理的なウェット洗浄2023

Author(s)

Journal Title

Data Source

[Journal Article] 半導体デバイスの物理的ウエット洗浄技術2023

Author(s)

Journal Title

Data Source

[Presentation] 純水噴霧の誘導帯電メカニズムの解析2024

Author(s)

Organizer

Data Source

[Presentation] Evaluating the Removal of Polystyrene Latex Particles Using the Quartz Transducer Ultrasonic Cleaners in the Megahertz Frequency Range2024

Author(s)

Organizer

Data Source

[Presentation] Analysis of Charging Phenomena on Silicon Wafers with Oxide Films in Two-Fluid Spray2024

Author(s)

Organizer

Data Source

[Presentation] Control of Static Electricity Generated by Two-fluid Spray of Pure Water2024

Author(s)

Organizer

Data Source

[Presentation] 純水を用いたスプレー時のSiO2ウェハ表面電位の解析2024

Author(s)

Organizer

Data Source

[Presentation] Electrostatic Characteristics at the Start of Two-Fluid Spray Cleaning for Semiconductors2024

Author(s)

Organizer

Data Source

[Presentation] Control of Static Electricity Generated by Two-fluid Spray of Pure Water2024

Author(s)

Organizer

Data Source

[Presentation] Analysis of Charging Phenomena on Silicon Wafers with Oxide Films in Two-Fluid Spray2024

Author(s)

Organizer

Data Source

[Presentation] Electrostatic Characteristics at the Start of Two-Fluid Spray Cleaning for Semiconductors2024

Author(s)

Organizer

Data Source

[Presentation] 二流体スプレー時の飛行液滴の電荷特性とSiO2ウェハの表面電位の関係性2024

Author(s)

Organizer

Data Source

[Presentation] 純水の二流体スプレーにおける誘導帯電メカニズムの解析2024

Author(s)

Seike Yoshiyuki 清家善之

清家善之セイケヨシユキ