Michihata Masaki 道畑正岐

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MICHIHATA Masaki 道畑正岐

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Researcher Number	70588855
Other IDs	https://orcid.org/0000-0002-2373-6534
Affiliation (Current)	2024: 東京大学, 大学院工学系研究科(工学部), 准教授
Affiliation (based on the past Project Information) *help	2018 – 2024: 東京大学, 大学院工学系研究科(工学部), 准教授 2015 – 2018: 東京大学, 先端科学技術研究センター, 助教 2015: 大阪大学, 大学院工学研究科, 助教 2012 – 2015: 大阪大学, 工学(系)研究科(研究院), 助教 2013: 大阪大学, 大学院工学研究科, 助教 2011: 大阪大学, 大学院・工学研究科, 助教 2010: 大阪大学, 工学研究科, 助教
Review Section/Research Field	Principal Investigator Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields Except Principal Investigator Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Basic Section 15020:Experimental studies related to particle-, nuclear-, cosmic ray and astro-physics / Materials/Mechanics of materials
Keywords	Principal Investigator Whispering gallery mode / 直径計測 / WGM / 光共振 / テーパファイバ / 真球度 / 定在波 / 屈折率 / テーパ光ファイバー / 球体 … More / 直径 / WGM共振 / マイクロ球 / マイクロプローブ / 微小球共振 / 寸法計測 / 計測理論 / 内面形状 / 回折格子 / 内面構造 / 計測基準点 / 光周波数コム / 細径ファイバー / Mie散乱 / 光ファイバ / テーパ光ファイバ / 近接場プローブ / 有限要素解析 / SNOM / 近接場 / 偏光 / Goos-Haenchenシフト / 自律校正 / ビート周波数 / 伝搬定数 / テーパファイバー / モード解析 / 微小球 / 標準計測 / 光共振器 / 金属微細構造 / 回折限界 / レーザ加工 / ハイスピードカメラ / ナノ加工 / 光放射圧ポテンシャル / 金属ナノ粒子 / 光放射圧 / 付加加工 / 光ピンセット / ベッセルビーム / インプロセス / 付加製造 / 光圧 / 校正 / 計測不確かさ / 切削油 / 工具刃先 / 共焦点 / 工具摩耗 / 蛍光 / 蛍光共焦点 / オンマシン計測 / 工具計測 / 切削油蛍光 / マイクロCMM / 微小球共振器 / 光カップリング / NSOM … More Except Principal Investigator レーザーアブレーション / レーザー加工 / 局在型表面プラズモン / 伝搬型表面プラズモン / ナノ粒子 / パルストレイン / パルストレインビーム / コヒーレントフォノン / 水酸化フラーレン / ウォータジェットレーザー加工 / ウォータジェットレーザ加工 / 高アスペクト比 / 微細穴加工 / 表面検査 / 表面欠陥 / シリコンウエハ / ナノ異物 / ナノ欠陥 / 異物検出 / コヒーレント結像 / 微細機能構造 / ナノ計測 / 超解像 / シミュレーション / 校正 / 圧縮 / 三次元座標導出 / FSR / アライメント / 電気双極子能率 / ミューオン異常磁気能率 / 測長網 / ボールレンズ / パルス間隔 / 自由スペクトル領域 / エタロン / 絶対測長干渉計 / 光周波数コム / EDM / g-2 / muon / ball lens / oprical frequency comb / interferometer / alignment monitor / ナノ除去加工 / マイクロレジン / 光触媒ナノ粒子 / 放射圧制御 / 光トラップ / 並列制御 / 空間局在光場 / 放射圧並列制御 / 空間局在光場制御 / レーザートラップ / ナノ・マイクロ加工 / マクロファクトリ / ナノマイクロ加工 / セルインマイクロファクトリ / マイクロファクトリ / 電子増強ラマン散乱効果 / 超微細レーザー加工計測 / ナノ局所界面 / ナノ微細加工 / ラマン散乱計測 / 超短パルスレーザー加工 / レーザーアブレ－ション / ナノ加工 / 表面加工 / ダメージレス加工 / 表面励起 / ダブルパルス / アブレーション / インコヒーレント励起 / コヒーレント励起 / 表面励起加工 / フェムト秒レーザー / 化学的相互作用 / 反応性ナノ粒子 / 表面微細構造クラスター / ナノ研磨プロセス / 表面増強ラマン散乱 / デバイストークスアインシュタインの法則 / 偏光解消 / 粘性計測 / 回転ブラウン運動 / 回転拡散係数 / ブラウン運動 / 蛍光偏光法 / 加工量計測 / 定在場スケール / 非熱的アブレーション加工 / フェムト秒パルスレーザー / 光放射圧 / 微粒子レンズ / 超高アスペクト比微細加工 / フォトニック・ナノジェット / 原子直接加工 / コヒーレント振動 / フェムト秒パルス / 非平衡状態 / 原子加工 / レーザ加工 / フェムト秒レーザ / 超短パルスレーザー / 加工現象計測・解析 / 表面増強ラマン散乱法 / 分子加工原理 / 材料除去過程 / ナノデジタルパターニング / 加工機能性超微粒子 Less

3次元空間座標基準モニタリングによる内面構造のナノスケール精度計測Principal Investigator
- Principal Investigator
  
  道畑正岐
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  The University of Tokyo
破壊的干渉照明を用いた次世代極細光ファイバ直径のナノ精度計測原理の確立Principal Investigator
- Principal Investigator
  
  道畑正岐
- Project Period (FY)
  2022 – 2023
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  The University of Tokyo
次世代機能デバイス実現のための高品位・超高アスペクト比微細穴加工システムの開発
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  The University of Tokyo
1nm表面異物欠陥の自律探索を実現する動的位相差検出型・近接場液相プローブ計測法
- Principal Investigator
  
  高橋哲
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  The University of Tokyo
質量標準トレーサビリティ体系のための超高精度・広範囲なシリコン球体計測Principal Investigator
- Principal Investigator
  
  道畑正岐
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  The University of Tokyo
Challenge of New Concept of Photo-Excited Nano-Removal Processing by Parallel Control of Spatially Localized Light
- Principal Investigator
  
  Takahashi Satoru
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  The University of Tokyo
Development of the alignment monitor for muon g-2/EDM experiment
- Principal Investigator
  
  KUME Tatsuya
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 15020:Experimental studies related to particle-, nuclear-, cosmic ray and astro-physics
- Research Institution
  High Energy Accelerator Research Organization
Nano-defect super-resolution measurement of next-generation micro-functional structures using localized optical fields with dynamic phase control
- Principal Investigator
  
  Takahashi Satoru
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  The University of Tokyo
Measurement of 3-dimensional standard shape in micro-scale using whispering gallery mode resonancePrincipal Investigator
- Principal Investigator
  
  Michihata Masaki
- Project Period (FY)
  2018 – 2020
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  The University of Tokyo
Fabrication of 3-dimensional metal structure with sub-100 nm resolution using optical potentialPrincipal Investigator
- Principal Investigator
  
  Michihata Masaki
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
On machine measurement of cutting tool profile using fluorescent from cutting fluidPrincipal Investigator
- Principal Investigator
  
  Michihata Masaki
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Measurement of a micro-sphere using whispering gallery mode resonancePrincipal Investigator
- Principal Investigator
  
  Michihata Masaki
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Development of localized light-controlled cell-in-microfactories for the production of composite microparticle functional structures
- Principal Investigator
  
  Takahashi Satoru
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Raman spectrum analysis for measuring temperature and material property on the nano-machined surface by short pulse laser
- Principal Investigator
  
  Takaya Yasuhiro
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
In-process nano surface processing control by using time resolved coherent phonon excitation on semiconductor target with
- Principal Investigator
  
  Hayashi Terutake
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Kyushu University
  Osaka University
Laser micro-machining using photonic nanojets controlled by in-situ measurement
- Principal Investigator
  
  Takaya Yasuhiro
- Project Period (FY)
  2012 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Study on ultra-precision viscosity measurement using a fluorescent probe
- Principal Investigator
  
  HAYASHI Terutake
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Osaka University
Sphere measurement using whispering gallery modePrincipal Investigator
- Principal Investigator
  
  MICHIHATA Masaki
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Analysis of polishing machanism using chemical reactive nanoparticles based on Raman spectrum enhanced by localized and propagating surface plasmon resonance
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Microsphere resonator based micro-probe for 3-dimensional coordinate metrologyPrincipal Investigator
- Principal Investigator
  
  MICHIHATA Masaki
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Research Activity Start-up
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning
- Principal Investigator
  
  TAKAYA Yasuhiro
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
A novel fabrication technique based on coherent phonon oscillation by using femto pulse train beam
- Principal Investigator
  
  HAYASHI Terutake
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University

[Book] Progress in Optomechatronic Technologies "chapter 4"2014
- Author(s)
  Atsushi Adachi, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya
- Total Pages
  205
- Publisher
  Springer International Publishing
- Data Source
  KAKENHI-PROJECT-24656102
[Journal Article] Theoretical analysis on coherent optical super-resolution method for inspection of functional micro-structured surfaces with complex-amplitude-response distribution2023
- Author(s)
  Kume Hiromasa、Michihata Masaki、Takahashi Satoru
- Journal Title
  
  Precision Engineering
  
  Volume: 80 Pages: 138-159
- DOI
  10.1016/j.precisioneng.2022.11.011
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02036
[Journal Article] Measurement of diameter of sub-micrometer fiber based on analysis of scattered light intensity distribution under standing wave illumination2022
- Author(s)
  Michihata Masaki、Murakami Sojiro、Kadoya Shotaro、Takahashi Satoru
- Journal Title
  
  CIRP Annals
  
  Volume: 71 Issue: 1 Pages: 421-424
- DOI
  10.1016/j.cirp.2022.03.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22K18747, KAKENHI-PROJECT-20H02040
[Journal Article] Measurement properties of electric field intensity distribution of whispering gallery mode with near-field optical probe2022
- Author(s)
  Liu Yushen、Kadoya Shotaro、Michihata Masaki、Takahashi Satoru
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 33 Issue: 9 Pages: 095501-095501
- DOI
  10.1088/1361-6501/ac74a2
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H02040
[Journal Article] Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator2022
- Author(s)
  Y. Guan, S. Masui, S. Kadoya, M. Michihata and S. Takahashi
- Journal Title
  
  J. Phys. Conf. Ser. 2368
  
  Volume: 1 Issue: 1 Pages: 12014-12014
- DOI
  10.1088/1742-6596/2368/1/012014
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21K18668, KAKENHI-PROJECT-22KJ1106
[Journal Article] Numerical analysis on high resolution optical measurement method with long working distance objective for in-line inspection of micro-structured surface2021
- Author(s)
  Kume Hiromasa、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Precision Engineering
  
  Volume: 67 Pages: 232-247
- DOI
  10.1016/j.precisioneng.2020.09.012
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02036
[Journal Article] The FDTD Analysis of Near-Field Response for Microgroove Structure With Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy2021
- Author(s)
  Guan Yizhao、Kume Hiromasa、Kadoya Shotaro、Michihata Masaki、Takahashi Satoru
- Journal Title
  
  Journal of Manufacturing Science and Engineering
  
  Volume: 144 Issue: 3
- DOI
  10.1115/1.4051827
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02036
[Journal Article] In-Process Diameter Measurement Technique for Micro-Optical Fiber with Standing Wave Illumination2021
- Author(s)
  Michihata Masaki、Zheng Zhao、Funaiwa Daiki、Murakami Sojiro、Kadoya Shotaro、Takahashi Satoru
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 4 Issue: 1 Pages: 28-36
- DOI
  10.1007/s41871-020-00081-4
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18K18803, KAKENHI-PROJECT-20H02040
[Journal Article] The FDTD analysis for dark field in-process depth measurements of fine microgrooves2021
- Author(s)
  Guan Yizhao、Kadoya Shotaro、Michihata Masaki、Takahashi Satoru
- Journal Title
  
  Measurement: Sensors
  
  Volume: 18 Pages: 100257-100257
- DOI
  10.1016/j.measen.2021.100257
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H02036
[Journal Article] Micro-scale Additive Manufacturing Using the Optical Potential Generated by a Bessel Beam2020
- Author(s)
  Michihata Masaki、Yokei Makoto、Kadoya Shotaro、Takahashi Satoru
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 3 Issue: 4 Pages: 292-298
- DOI
  10.1007/s41871-020-00079-y
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H04900
[Journal Article] Advanced generation of functional dual-periodic microstructured surface based on optical in-process measurement2020
- Author(s)
  Takahashi Satoru、Masui Shuzo、Michihata Masaki、Takamasu Kiyoshi
- Journal Title
  
  CIRP Annals
  
  Volume: 69 Issue: 1 Pages: 477-480
- DOI
  10.1016/j.cirp.2020.04.076
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02036
[Journal Article] Radial mode number identification on whispering gallery mode resonances for diameter measurement of microsphere2019
- Author(s)
  Kobayashi Yumeki、Michihata Masaki、Zhao Zheng、Chu Bohuai、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 30 Issue: 6 Pages: 065201-065201
- DOI
  10.1088/1361-6501/ab1241
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18K18803
[Journal Article] In-process measurement for cure depth control of nano stereolithography using evanescent light2019
- Author(s)
  S. Takahashi, D. Kong, M. Michihata, K. Takamasu
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 68 Issue: 1 Pages: 527-530
- DOI
  10.1016/j.cirp.2019.04.072
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02214
[Journal Article] Fundamental study on micro-scaled additive manufacturing using optical potential induced by optical radiation pressure by Bessel beam2019
- Author(s)
  MICHIHATA Masaki、HAYASHI Masahiro、YOKEI Makoto、TAKAMASU Kiyoshi、TAKAHASHI Satoru
- Journal Title
  
  Transactions of the JSME (in Japanese)
  
  Volume: 85 Issue: 880 Pages: 19-00244-19-00244
- DOI
  10.1299/transjsme.19-00244
- NAID
  130007772974
- ISSN
  2187-9761
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H04900
[Journal Article] Development of measuring system of whispering gallery mode resonances for evaluating a diameter of microsphere2019
- Author(s)
  MICHIHATA Masaki、KOBAYASHI Yumeki、CHU Bohuai、TAKAMASU Kiyoshi、TAKAHASHI Satoru
- Journal Title
  
  Transactions of the JSME (in Japanese)
  
  Volume: 85 Issue: 880 Pages: 19-00226-19-00226
- DOI
  10.1299/transjsme.19-00226
- NAID
  130007772938
- ISSN
  2187-9761
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18K18803
[Journal Article] Fabrication of nano/micro dual-periodic structures by multi-beam evanescent wave interference lithography using spatial beats2019
- Author(s)
  Masui Shuzo、Torii Yuki、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Optics Express
  
  Volume: 27 Issue: 22 Pages: 31522-31522
- DOI
  10.1364/oe.27.031522
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18J21820, KAKENHI-PROJECT-15H02214
[Journal Article] Surface Imaging Technique by an Optically Trapped Microsphere in Air Condition2018
- Author(s)
  Michihata Masaki、Kim Jonggang、Takahashi Satoru、Takamasu Kiyoshi、Mizutani Yasuhiro、Takaya Yasuhiro
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 1 Issue: 1 Pages: 32-38
- DOI
  10.1007/s41871-018-0004-0
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H04900, KAKENHI-PROJECT-26249006
[Journal Article] In-Process Measurement of Thickness of Cured Resin in Evanescent-Wave-Based Nano-stereolithography Using Critical Angle Reflection2018
- Author(s)
  Kong Deqing、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Nanomanufacturing and Metrology
  
  Volume: 1 Issue: 2 Pages: 112-124
- DOI
  10.1007/s41871-018-0013-z
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
[Journal Article] In-process Measurement of Gradient Boundary of Resin in Evanescent-wave-based Nano-stereolithography using Reflection Interference Near Critical Angle2018
- Author(s)
  Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 31 Issue: 3 Pages: 441-446
- DOI
  10.2494/photopolymer.31.441
- NAID
  130007481467
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2018-06-25
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02214
[Journal Article] Modified Linnik microscopic interferometry for quantitative depth evaluation of diffraction-limited microgroove2018
- Author(s)
  Ye Shiwei、Takahashi Satoru、Michihata Masaki、Takamasu Kiyoshi
- Journal Title
  
  Measurement Science and Technology
  
  Volume: 29 Issue: 5 Pages: 054011-054011
- DOI
  10.1088/1361-6501/aab008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
[Journal Article] One-shot stereolithography for biomimetic micro hemisphere covered with relief structure2018
- Author(s)
  Suzuki Yuki、Suzuki Kunikazu、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
- Journal Title
  
  Precision Engineering
  
  Volume: 54 Pages: 353-360
- DOI
  10.1016/j.precisioneng.2018.07.004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26249006, KAKENHI-PROJECT-15H02214
[Journal Article] Precise diameter measurement of a microsphere based on polarization analysis of whispering gallery mode resonance2017
- Author(s)
  Masaki Michihata, Akifumi Kawasaki, Yasuhiro Takaya
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: -
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05505
[Journal Article] Diameter measurement of a microsphere based on analysis of resonant wavelengths of whispering gallery modes2017
- Author(s)
  Masaki Michihata, Akifumi Kawasaki, Yasuhiro Takaya
- Journal Title
  
  Journal of Engineering Manufacture
  
  Volume: -
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H05505
[Journal Article] Measurement of a tool wear profile using confocal fluorescence microscopy of the cutting fluid layer2016
- Author(s)
  Yasuhiro Takaya, Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 65 Pages: 467-470
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K13847
[Journal Article] Evanescent Light Exposing System under Nitrogen Purge for Nano- Stereolithography2016
- Author(s)
  Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Journal Title
  
  Procedia CIRP
  
  Volume: 42 Pages: 77-80
- DOI
  10.1016/j.procir.2016.02.192
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02214
[Journal Article] Fundamental Study on Novel On-Machine Measurement Method of a Cutting Tool Edge Profile with a Fluorescent Confocal Microscopy2016
- Author(s)
  Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya
- Journal Title
  
  Int. J. of Automation Technology
  
  Volume: 10 Pages: 106-113
- NAID
  130007674010
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13847
[Journal Article] Fundamental Study on Novel On-Machine Measurement Method of a Cutting Tool Edge Profile with a Fluorescent Confocal Microscopy2016
- Author(s)
  Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 10 Issue: 1 Pages: 106-113
- DOI
  10.20965/ijat.2016.p0106
- NAID
  130007674010
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2016-01-05
- Language
  English
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13847
[Journal Article] Wide-range Axial Position Measurement for Jumping Behavior of Optically Trapped Microsphere near Surface using Chromatic Confocal Sensor2015
- Author(s)
  Shin-ichi Ueda, Masaki Michihata, Terutake Hayashi and Yasuhiro Takaya
- Journal Title
  
  Int. J. of Optmechatronics
  
  Volume: 9 Issue: 2 Pages: 131-140
- DOI
  10.1080/15599612.2015.1034901
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24246028
[Journal Article] Measurement of stylus-probe sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery mode2014
- Author(s)
  Masaki Michihata, Ayano Fukui, Terutake Hayashi, Yasuhiro Takaya
- Journal Title
  
  CIRP Annals - Manufacturing Technology
  
  Volume: 55 Issue: 1 Pages: 469-472
- DOI
  10.1016/j.cirp.2014.02.002
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656102
[Journal Article] 蛍光偏光法を用いたナノ粒子粒径計測に関する研究（第１報）－蛍光DNAプローブを用いた回転拡散係数測定システムの開発－2014
- Author(s)
  石崎佑樹，林　照剛，道畑正岐，高谷裕浩
- Journal Title
  
  精密工学会誌
  
  Volume: 2 Pages: 214-219
- NAID
  130003394534
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656088
[Journal Article] 蛍光偏光法を用いたナノ粒子粒径計測に関する研究(第1報)-蛍光DNAプローブを用いた回転拡散係数測定システムの開発-2014
- Author(s)
  石崎佑樹,林照剛,道畑正岐,高谷裕浩
- Journal Title
  
  精密工学会誌
  
  Volume: VOl.80, No.3 Pages: 214-219
- NAID
  130003394534
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656088
[Journal Article] Measurement of stylus-probe sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery mode2014
- Author(s)
  M. Michihata, T. Hayashi, A. Adachi, Y. Takaya
- Journal Title
  
  CIRP Annals
  
  Volume: vol. 63, no. 1(in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656102
[Journal Article] ポリグリセロール修飾ナノダイヤモンドを用いた銅膜の平坦化加工に関する研究2014
- Author(s)
  村井亮太,高谷裕浩,林照剛,道畑正岐,小松直樹
- Journal Title
  
  砥粒加工学会誌
  
  Volume: Vol.58, No.2 Pages: 97-102
- NAID
  130004835699
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656104
[Journal Article] Surface analysis of the chemical polishing process using a fullerenol slurry by Raman spectroscopy under surface plasmon excitation2013
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Ryota Murai, Kazumasa Kano
- Journal Title
  
  Annals of the CIRP
  
  Volume: Vol.62, Issue 1 Issue: 1 Pages: 571-574
- DOI
  10.1016/j.cirp.2013.03.019
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656104
[Journal Article] Development of nanoparticle sizing system using fluorescence polarization2013
- Author(s)
  Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, and Kok Fonog Lee
- Journal Title
  
  ACTA IMEKO
  
  Volume: Vol. 2, No. 2 Pages: 67-72
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656088
[Journal Article] New technique for single-beam gradient-force optical trapping in air2013
- Author(s)
  M.Michihata, T.Yoshikane, T.Hayashi, Y.Takaya
- Journal Title
  
  International journal of Optomechatronics
  
  Volume: 7 Issue: 1 Pages: 46-59
- DOI
  10.1080/15599612.2012.760122
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656102
[Journal Article] Development of nanoparticle sizing system integrated with optical microscopy using fluorescence polarization2012
- Author(s)
  Terutake Hayashi, Yasuhiro Takaya and Masaki Michihata
- Journal Title
  
  International Journal of Nanomanufacturing
  
  Volume: Vol. 8, Nos. 1/2 Pages: 54-56
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656088
[Journal Article] Dimensional measurement of microform with high aspect ratio using an opticaly controlled particle with standing wave scale sensing2012
- Author(s)
  Yasuhiro Takaya, Michihata, Terutake Hayashi, Taisuke Washitani
- Journal Title
  
  Annals of the CIRP
  
  Volume: Vol.61, Issue 1 Pages: 479-482
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24246028
[Journal Article] Chemical mechanical polishing of patterend copper wafer surface using water-soluble fullerenol slurry2011
- Author(s)
  Yasuhiro Takaya, Hirotaka Kishida, Terutake Hayashi, Masaki Michihata
- Journal Title
  
  Annals of the CIRP
  
  Volume: Vol.60 Pages: 567-570
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360064
[Journal Article] Chemical mechanical polishing of patterned copper wafer surface using water-soluble fullerenol slurry2011
- Author(s)
  Yasuhiro Takaya, Hirotaka Kishida, Terutake Hayashi, Masaki Michihata, Ken Kokubo
- Journal Title
  
  CIRP Annals-Manufacturing Technology
  
  Volume: Vol.60, Issue1 Pages: 567-570
- Data Source
  KAKENHI-PROJECT-21360064
[Patent] 母型の製造方法2016
- Inventor(s)
  高橋哲，鈴木裕貴，鈴木邦和，道畑正岐，高増潔，田中大直，西村涼
- Industrial Property Rights Holder
  東京大学，JXエネルギー株式会社
- Industrial Property Rights Type
  特許
- Filing Date
  2016-08-17
- Overseas
- Data Source
  KAKENHI-PROJECT-15H02214
[Patent] レーザー加工装置，レーザー加工方法及び加工物の製造方法2014
- Inventor(s)
  林　照剛，高谷裕浩，道畑正岐
- Industrial Property Rights Holder
  林　照剛，高谷裕浩，道畑正岐
- Industrial Property Rights Type
  特許
- Filing Date
  2014
- Data Source
  KAKENHI-PROJECT-25289017
[Presentation] 過酷環境下にて動作する高安定アライメントモニターの開発(第2報) -偏波保持光学系による干渉計性能の改善2023
- Author(s)
  久米, 三部，道畑，高橋
- Organizer
  2023年度精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] 自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究（第11報）ー空間光位相変調による液相プローブ高感度検出ー2022
- Author(s)
  管一兆, 増井周造, 門屋祥太郎, 道畑正岐, 高橋哲
- Organizer
  2022年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-21K18668
[Presentation] Near-field Phase Analysis of Periodic Microgroove Structure for Metasurface Design based on FDTD Simulation2022
- Author(s)
  管一兆，増井周造，門屋祥太郎，道畑正岐，高橋哲，岩見健太郎，稲秀樹
- Organizer
  2022年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 光周波数コムを用いた高精度アライメントモニター(第8報) -試作光学モジュールの評価2022
- Author(s)
  久米, 三部，道畑，高橋
- Organizer
  2022年度精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第8報）ーストレプトアビジン，ビオチン相互作用を用いたマイクロ粒子接着ー2022
- Author(s)
  増井周造, 門屋祥太郎, 道畑正岐, 小阪高広, 山口哲志, 岡本晃充, 高橋哲
- Organizer
  2022年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19K21913
[Presentation] Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis2022
- Author(s)
  Y. Guan. S.Masui, S. Kadoya, M. Michihata and S. Takahashi
- Organizer
  Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 微細構造基板を利用した超解像イメージングに関する研究（第6報）-機械学習による画像再構成における最適教師データの検討-2022
- Author(s)
  門屋祥太郎，市川廉，増井周造，西川正俊，道畑正岐，高橋哲
- Organizer
  2022年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 過酷環境下にて動作する高安定アライメントモニターの開発-基準エタロンの自由スペクトル領域の評価と安定化2022
- Author(s)
  久米, 三部，道畑，高橋
- Organizer
  2022年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] Evaluation of a free spectral range of an etalon for a reference of an alignment monitor2022
- Author(s)
  T. Kume, T. Mibe, M. Michihata and S. Takahashi
- Organizer
  The 19th International Conference on Precision Engineering (ICPE 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] PROPOSAL AND FUNDAMENTAL VERIFICATION OF OPTICAL DEPTH MEASUREMENT FOR PERIODIC FINE STRUCTURES2022
- Author(s)
  Shotaro Kadoya, Yizhao Guan,Shiwei Ye, Yosho Kanda, Masaki Michihata, Satoru Takahashi
- Organizer
  the 2022 International Symposium on Flexible Automation, ISFA2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator2022
- Author(s)
  Yizhao Guan, Shuzo Masui, Shotaro Kadoya, Masaki Michihata and Satoru Takahashi
- Organizer
  The 11th Global Conference on Materials Science and Engineering (CMSE 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18668
[Presentation] コヒーレント結像型構造照明顕微法における機械学習を用いた画像再構成の基礎的検討2022
- Author(s)
  友藤康司，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2022年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] The FDTD analysis for diffraction limited microgroove structure with standing wave illumination for the realization of coherent structured illumination microscopy2021
- Author(s)
  Yizhao Guan, Masahiro Kume, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
- Organizer
  Optics and Photonics International Congress 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] Evaluation of the Free Spectral Range of an Etalon by Referring an Optical Frequency Comb2021
- Author(s)
  T. Kume, H. Yasuda, T. Mibe, M. Michihata and S. Takahashi
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Centure (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] Optical adhesion of photocurable emulsion droplets using laser trapping2021
- Author(s)
  Shuzo Masui, Wakana Endo, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
- Organizer
  SPIE Optics + Photonics 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K21913
[Presentation] Interferometer Adopting a Ball Lens Both As a Beam Collimator and a Reflector2021
- Author(s)
  T. Kume, H. Yasuda, T. Mibe, M. Michihata and S. Takahashi
- Organizer
  XXIII IMEKO World Congress “Measurement: sparking tomorrow’s smart revolution”, TC14-4-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] The FDTD analysis for dark field in-process depth measurements of fine microgrooves2021
- Author(s)
  Yizho Guan, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
- Organizer
  XXIII World Congress of the International Measurement Confederation
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] The FDTD analysis of near-field response for microgroove structure with standing wave illumination for the realization of coherent structured illumination microscopy2021
- Author(s)
  Yizhao Guan, Masahiro Kume, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi
- Organizer
  ASME 2021 16th International Manufacturing Science and Engineering Conference 60409
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] ファブリーペロー共振器を用いたマイクロCMMのプローブ径補正用ゲージの研究（第1報） -二平面間の距離測定-2021
- Author(s)
  加藤千聖，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-20H02040
[Presentation] WGM共振を利用した微小級の直径計測(第14報) -WGM光強度分布センシングのためのガラスプローブ先端形状の検討-2021
- Author(s)
  劉羽辛，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-20H02040
[Presentation] 光周波数コムを用いた高精度アライメントモニター(第6報) -ボールレンズを用いた干渉計2021
- Author(s)
  久米, 三部，安田，道畑，高橋
- Organizer
  2021年度精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] 定在波照明における微細開口の近接場光応答解析（第2報）The FDTD analysis of near-field response for microgroove structure with standing wave illumination ーThe relationship of microgroove depth and near-field phase responseー2021
- Author(s)
  管一兆, 久米大将, 門屋祥太郎, 道畑正岐, 高橋哲
- Organizer
  2021年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第7報）ーマイクロレジン液滴の硬化モニタリングー2021
- Author(s)
  増井周造, 門屋祥太郎, 道畑正岐, 高橋哲
- Organizer
  2021年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19K21913
[Presentation] 光周波数コムを用いた高精度アライメントモニター(第7報)-光周波数コムを基準としたエタロンFSRの評価2021
- Author(s)
  久米, 三部，道畑，高橋
- Organizer
  2021年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] 定在波照明を用いたマイクロ光ファイバのインプロセス直径計測(第3報) -サブマイクロ光ファイバの計測のための測定原理の拡張-2021
- Author(s)
  村上宗二朗，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-20H02040
[Presentation] 微細構造基板を利用した超解像イメージングに関する研究(第5報) ―アノード酸化Al基板による構造照明特性の解析―2021
- Author(s)
  市川廉，増井周造，久米大将，西川正俊，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021 年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 微細構造基板を利用した超解像イメージングに関する研究（第4報）ーディープラーニングによる再構成能力の評価ー2021
- Author(s)
  市川廉, 増井周造, 久米大将, 西川正俊, 門屋祥太郎, 道畑正岐, 高橋哲
- Organizer
  2021年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 半導体レーザと外部共振器機構を用いた高精度長さ計測（第1報） -計測手法提案-”2021
- Author(s)
  合田周平，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-20H02040
[Presentation] 定在波照明を用いたマイクロ光ファイバのインプロセス直径計測(第3報) -サブマイクロ光ファイバの計測のための測定原理の拡張-2020
- Author(s)
  村上宗二郎，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究(第4報) -ハイスピードカメラによる加工原理の検討-2020
- Author(s)
  代慶真，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-17H04900
[Presentation] Study on non-destructive optical depth measurement of periodic micro-structured surfaces beyond diffraction limit2020
- Author(s)
  Yosho Kanda, Hiromasa Kume, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  18th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] WGM共振を利用した微小球の直径計測(第13報) -光損失が共振波長に及ぼす影響の検討-2020
- Author(s)
  劉羽辛，門屋祥太郎，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度精密工学会学術講演会秋季大会
- Data Source
  KAKENHI-PROJECT-20H02040
[Presentation] コヒーレント結像型SIM実現を目指した微細構造表面のFDTD光学応答解析2020
- Author(s)
  管一兆, 久米大将, 門屋祥太郎, 道畑正岐, 高橋哲
- Organizer
  日本光学会年次学術講演会 Optics & Photonics Japan 2020
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 回折限界を超えた表面微細周期構造の光学式非破壊深さ計測手法2020
- Author(s)
  神田曜昭, 久米大将, 門屋祥太郎, 道畑正岐, 高橋哲
- Organizer
  第45回光学シンポジウム
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 微細構造基盤を利用した超解像イメージングに関する研究（第3報）ーディープラーニングによる再構成結果の空間周波数領域における評価ー2020
- Author(s)
  市川廉, 久米大将, 西川正俊, 門屋祥太郎, 道畑正岐, 髙橋哲
- Organizer
  2020年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 光周波数コムを用いた高精度アライメントモニター(第5報)- エタロンで圧縮された光周波数コムのパルス繰返し周波数の校正2020
- Author(s)
  久米, 三部，安田，道畑，高橋
- Organizer
  2020年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] Spatial-frequency-based evaluation of image reconstruction by structured-illumination microscopy with deep learning2020
- Author(s)
  Ren Ichikawa, Hiromasa Kume, Masatoshi Nishikawa, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  18th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] WGM共振を利用した微小球の直径計測(第13報) -光損失が共振波長に及ぼす影響の検討-2020
- Author(s)
  劉羽辛，門屋祥太郎，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度精密工学会学術講演会秋季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第6報) －光放射圧遠隔操作による一体化連結構造の創成－2020
- Author(s)
  圓道和奏，増井周造，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021年度春期精密工学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K21913
[Presentation] WGM共振を利用した微小級の直径計測(第14報) -WGM光強度分布センシングのためのガラスプローブ先端形状の検討-2020
- Author(s)
  劉羽辛，門屋祥太郎，道畑正岐，高橋哲
- Organizer
  2021年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Comparison for Pulse Interval Calibration of an Optical Frequency Comb Compressedby an Etalon2020
- Author(s)
  T. Kume, H. Yasuda, T. Mibe, M. Michihata and S. Takahashi
- Organizer
  The 18th International Conference on Precision Engineering (ICPE2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] 光周波数コムを用いた高精度アライメントモニター(第4報) -圧縮されたパルス間隔の基準干渉計を用いた校正2020
- Author(s)
  久米，三部，安田，道畑，高増
- Organizer
  2020年度精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究2020
- Author(s)
  道畑正岐，代慶真，門屋祥太郎，高増潔，高橋哲
- Organizer
  日本機械学会 2020年度年次大会
- Data Source
  KAKENHI-PROJECT-17H04900
[Presentation] 定在波照明を用いた表面微細加工構造の長作動距離超解像欠陥検査2019
- Author(s)
  久米大将，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] Fabrication of nano-and micro-structured surface using spatial beat of evanescent wave interference lithography2019
- Author(s)
  Shuzo Masui, Masaki, Michihata, Kiyoshi Takamasu, Satoru Takahash
- Organizer
  Proceedings of the 19th international conference of the european society for precision engineering and nanotechnology (euspen 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 微小球光共振を用いた形状標準のナノ精度計測2019
- Author(s)
  道畑正岐
- Organizer
  第153回微小光学研究会
- Invited
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] In-process measurement technique of micro-fiber diameter with interfered scattering pattern of two beam irradiation2019
- Author(s)
  Masaki Michihata, Zheng Zhao, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMTII2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 定在波照明を用いたマイクロ光ファイバのインプロセス直径計測(第2報) -計測精度改善の検討-2019
- Author(s)
  船岩大輝，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 微細構造基板を利用した超解像イメージングに関する研究（第2報）－ディープラーニングによる再構成能力の評価－2019
- Author(s)
  市川廉，久米大将，道畑正岐，高増潔，高橋哲，西川正俊
- Organizer
  2020年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] A novel optical super-resolution microscopy for coherent imaging system for micro-structured surface inspection2019
- Author(s)
  Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  19th international conference of the european society for precision engineering and nanotechnology (euspen 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究(第5報) －マイクロレジンの空間位置制御によるマイクロ粒子アセンブリ－2019
- Author(s)
  福井健太，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度春期精密工学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K21913
[Presentation] Pulse Interval Calibration of an Optical Frequency Comb Compressed by an Etalon2019
- Author(s)
  久米，三部，安田，道畑，高増
- Organizer
  The 8th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] Experimental investigation on laser additive processing method for nanostructures based on optical trapping potential2019
- Author(s)
  Yokei Makoto, Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  8th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN),
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H04900
[Presentation] Optical trapping of airborne droplet for laser fabrication of 3-dimensional structure based on optical trapping potential using radially polarized beam2019
- Author(s)
  Yokei Makoto, Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  Optical Technology and Measurement for Industrial Applications Conference(OPTM)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H04900
[Presentation] Pulse Interval of an Optical Frequency Comb Compressed by an Etalon2019
- Author(s)
  久米，三部，安田，道畑，高増
- Organizer
  The 14th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究(第2報) -ラジアル偏光ビームを用いた空気中ミスト粒子の光トラップ効率の向上-2019
- Author(s)
  代慶真，林政洋，道畑正岐，高増潔，高橋哲
- Organizer
  2019年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-17H04900
[Presentation] Sensing near-field light distribution for microsphere measurement based on whispering gallery mode2019
- Author(s)
  Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMTII2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 光共振損失を用いたSPMプローブチップ評価に関する研究2019
- Author(s)
  津田信道，儲博懐，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2020年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] System development for microsphere measurement based on whispering gallery mode resonance2019
- Author(s)
  Masaki Michihata, Yumeki Kobayashi, Bohuai Chu, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ISMQC2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究(第3報) -液滴を用いた構造化原理の実験的検討-2019
- Author(s)
  代慶真，林政洋，道畑正岐，高増潔，高橋哲
- Organizer
  2019年度精密工学会学術講演会秋季大会
- Data Source
  KAKENHI-PROJECT-17H04900
[Presentation] 光周波数コムを用いた高精度アライメントモニター(第3報) -リンギングを用いない光周波数コムパルス間隔の校正2019
- Author(s)
  久米，三部，安田，道畑，高増
- Organizer
  2019年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19H01930
[Presentation] 光共振を利用したマイクロ球形状のナノ精度計測2019
- Author(s)
  道畑正岐，小林夢輝，趙正，儲博懐，高増潔，高橋哲
- Organizer
  レーザー学会第39回年次大会
- Invited
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Coherent optical microscopy for micro-structured surface inspection beyond diffraction limit2019
- Author(s)
  Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02036
[Presentation] 2光束照明における光散乱検出に基づくマイクロ光ファイバー直径計測の基礎的研究2019
- Author(s)
  道畑正岐，趙正，高増潔，高橋哲
- Organizer
  日本機械学会 2019年度年次大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Fabrication of dual-periodic nanostructures with multi-exposure interference lithography using Lloyd’s mirror2019
- Author(s)
  S. Masui, M. Michihata, K. Takamasu, S. Takahashi
- Organizer
  8th International Conference of Asian Society for Precision Engineering and Nanotechnology(ASPEN2019）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Numerical analysis of near-field light intensity of whispering gallery mode on microsphere surface with SNOM probe2019
- Author(s)
  Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  OPTM2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 臨界角照明を用いたナノ光造形硬化樹脂のインプロセス計測（基本原理の検証）2018
- Author(s)
  道畑正岐，孔徳卿，高増潔，高橋哲
- Organizer
  日本機械学会 2018年度年次大会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Investigation of super-resolution microscopy by use of a nano-patterned substrate2018
- Author(s)
  Ryoko Sakuma, Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering （ICPE 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Measurement of a microsphere diameter with a picometer resolution using whispering gallery mode resonances2018
- Author(s)
  Masaki Michihata
- Organizer
  International Symposium on Optoelectronic Technology and Application (OTA 2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第 4 報）一定在波制御によるマイクロ粒子整列・搬送に関する研究一2018
- Author(s)
  藤原和，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2019年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Dielectric microsphere measurement using whispering gallery mode resonance2018
- Author(s)
  Masaki Michihata
- Organizer
  10th International Symposium on Precision Engineering Measurements and Instrument (ISPEMI 2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第 3 報）一FDTD 法によるマイクロ粒子の整理駆動現象の解明一2018
- Author(s)
  古谷成康，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] In-Process Measurement of Resin’s Curing Degree in Micro-Stereolithography Using Internal Reflection at Critical Angle2018
- Author(s)
  D. Kong, M. Michihata, K. Takamasu, S. Takahashi
- Organizer
  XXII World Congress of the International Measurement Confederation （IMEKO 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究 (第1報) -ベッセルビームによる加工原理検討に向けた装置開発-2018
- Author(s)
  林政洋，林晃平，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会学術講演会春季大会
- Data Source
  KAKENHI-PROJECT-17H04900
[Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製（第2 報）－サブ波長表面構造の造形と光学特性評価－，2018
- Author(s)
  増井周造，鈴木裕貴，道畑正岐，高増潔，高橋哲，柴沼俊彦，田中大直
- Organizer
  2018 年度精密工学会春季大会学術講演会，中央大学，2018，K08
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control2018
- Author(s)
  Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Whispering gallery mode 共振を用いたマイクロ球径計測－比較計測による計測精度評価－2018
- Author(s)
  道畑正岐，小林夢輝，儲博懐，高増潔，高橋哲
- Organizer
  第12回日本機械学会生産加工・工作機械部門講演会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Ultra high precision diameter measurement of a microsphere based on whispering gallery mode resonances2018
- Author(s)
  Masaki Michihata, Yumeki Kobayashi, Zheng Zhao, Bouhai Chu, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  The 1st JSPE affiliate workshop -Metrology and measurement
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Improvement of quantitative depth evaluation for diffraction-limited microgroove using LED light source2018
- Author(s)
  Ye Shiwei, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  XXII World Congress of the International Measurement Confederation （IMEKO 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] WGM共振を利用した微小球の直径計測(第11報) -共振波長解析に基づく半径モード番号の推定-2018
- Author(s)
  小林夢輝，趙正，儲博懐，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会学術講演会秋季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] Analyzing tapered fiber - microsphere coupling for diameter measurement of microsphere using whispering gallery mode resonance2018
- Author(s)
  Yumeki Kobayashi, Zheng Zhao, Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  International Conference on Precision Engineering (ICPE) 2018
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 光放射圧ポテンシャルによる局所化を用いた金属三次元微細構造創成 - 金属ナノ粒子局所化の確率解析 -2018
- Author(s)
  林晃平，林政洋，道畑正岐，高増潔，高橋哲
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17H04900
[Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control - Analysis on handling performance of microparticles based on near-surface light wave -2018
- Author(s)
  Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering （ICPE 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] WGM共振を利用した微小球の直径計測(第12報) -共振波長計測安定化に向けた測定装置の高度化-2018
- Author(s)
  小林夢輝，儲博懐，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会学術講演会秋季大会
- Data Source
  KAKENHI-PROJECT-18K18803
[Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究－ナノ粒子の２次元局所化性能の評価－2018
- Author(s)
  林政洋，道畑正岐，高増潔，高橋哲
- Organizer
  第12回日本機械学会生産加工・工作機械部門講演会
- Data Source
  KAKENHI-PROJECT-17H04900
[Presentation] Basic study on laser additive processing for nanostructures based on optical trapping potential2018
- Author(s)
  Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ICPE2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H04900
[Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製（第 3 報）一うなりによる干渉強度分布の変調特性検討一2018
- Author(s)
  増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第2 報）－界面近接光波の任意制御によるマイクロ粒子整理・搬送システムの検討－，2018
- Author(s)
  古谷成康，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018 年度精密工学会春季大会学術講演会，中央大学，2018，P33
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
- Organizer
  17th International Conference on Precision Engineering （ICPE 2018）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 局在光制御によるセルインマイクロファクトリに関する基礎的研究（第3報）－FDTD法によるマイクロ粒子の整理駆動現象の解明－2018
- Author(s)
  古谷成康，増井周造，道畑正岐，高増潔，高橋哲
- Organizer
  2018 年度精密工学会秋季大会学術講演会，函館，2018
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] エバネッセント光多方位干渉造形法による次世代表面機能構造の創製（第1 報）－RCWA 法を用いた光学特性解析－，2017
- Author(s)
  増井周造，鈴木裕貴，道畑正岐，高増潔，高橋哲
- Organizer
  －，2017 年度精密工学会秋季大会学術講演会，大阪大学，2017，L23
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  Conference on Lasers and Electro-Optics (CLEO2017)
- Place of Presentation
  San Jose, USA
- Year and Date
  2017-05-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第26報）ー多光束干渉によるミリオーダ領域のサブミクロン表面微細構造創製ー2017
- Author(s)
  鈴木裕貴，松本侑己，道畑正岐，高増潔，高橋哲
- Organizer
  2017年度精密工学会春季学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017
- Author(s)
  Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  CLEO2017, San Jose, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第27報）-エバネッセント光による面内形状制御性の解析-2017
- Author(s)
  松本侑己，鈴木裕貴，道畑正岐，高増潔，高橋哲，工藤宏人
- Organizer
  2017年度精密工学会春季学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Thoretical Analysis of Multi-Beam Interference Lithography Combining Evanescent and Propagation Light2017
- Author(s)
  Shuzo Masui, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] WGM 共振を利用した微小球の直径計測(第8報) -有限要素法を用いたWGM結合解析-2017
- Author(s)
  趙正，儲博懐，林晃平，道畑正岐，高増潔，高橋哲
- Organizer
  2017年度精密工学会学術講演会春季大会
- Place of Presentation
  慶應義塾大学（神奈川県）
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H05505
[Presentation] WGM 共振を利用した微小球の直径計測(第7報) -共振波長の精密計測-2017
- Author(s)
  儲博懐，道畑正岐，林晃平，高増潔，高橋哲
- Organizer
  2017年度精密工学会学術講演会春季大会
- Place of Presentation
  慶應義塾大学（神奈川県）
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H05505
[Presentation] Whispering gallery mode共振を利用したマイクロ球直径計測 -楕円体モデルの構築-2017
- Author(s)
  林晃平，儲博懐，趙正，道畑正岐，高増潔，高橋哲
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15H05505
[Presentation] 光触媒ナノ加工工具に関する基礎的研究（第9報）－ナノ粒子位置同定法の検討－2016
- Author(s)
  増井周造・堀田陽亮・道畑正岐・高増　潔・高橋　哲
- Organizer
  2016年度精密工学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] エバネッセント露光型ナノ光造形法に関する研究―エバネッセント露光用光硬化性樹脂の開発―2016
- Author(s)
  松本侑己，鈴木裕貴，道畑正岐，高増潔，高橋哲
- Organizer
  日本機械学会　第11回生産加工・工作機械部門講演会
- Place of Presentation
  愛知
- Year and Date
  2016-10-22
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] WGM 共振を利用した微小球の直径計測(第 6 報) -近似式を用いた屈折率推定法の検討-2016
- Author(s)
  儲博懐，道畑正岐，林晃平，高増潔
- Organizer
  2016年度精密工学会学術講演会秋季大会
- Place of Presentation
  茨城大学（茨城県）
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15H05505
[Presentation] エバネッセント露光型ナノ光造形法に関する研究（第25報）ー機能性評価に向けた表面微細構造創製装置の開発ー2016
- Author(s)
  鈴木裕貴，松本侑己，道畑正岐，高増潔，高橋哲
- Organizer
  2016年度精密工学会春秋学術講演会
- Place of Presentation
  茨城
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Improved back-focal-plane interferometry for monitoring nanoparticle position2016
- Author(s)
  Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  International Symposium on Optomechatronic Technology 2016
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2016-11-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 蛍光共焦点法による工具刃先形状の機上計測に関する研究 (第2報) 切削液からの蛍光の共焦点検出2016
- Author(s)
  丸野兼治，道畑正岐，高谷裕浩，水谷康弘
- Organizer
  2016年度精密工学会学術講演会春季大会
- Place of Presentation
  東京理科大学
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15K13847
[Presentation] 後側焦点面干渉法を用いた光触媒ナノ加工粒子変位計測の高感度化2016
- Author(s)
  増井周造・堀田陽亮・道畑正岐・高増　潔・高橋　哲
- Organizer
  日本機械学会2016年度年次大会
- Place of Presentation
  九州
- Year and Date
  2016-09-11
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Theoretical Analysis of Improved Back-Focal-Plane Interferometry for Monitoring Nanoparticle Position2016
- Author(s)
  Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  ASPE2016 Annual Meeting
- Place of Presentation
  Portland, USA
- Year and Date
  2016-10-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Whispering gallery mode共振を用いたマイクロ球径計測 -偏光に着目した屈折率校正法の提案-2016
- Author(s)
  道畑正岐，高増潔，高橋哲
- Organizer
  日本機械学会 2016 年度年次大会
- Place of Presentation
  九州大学（福岡県）
- Year and Date
  2016-09-11
- Data Source
  KAKENHI-PROJECT-15H05505
[Presentation] 全方位姿勢制御型光触媒ナノ加工工具に関する研究（第2報）－液相内における工具創製の実験的検討－2016
- Author(s)
  堀田陽亮・儲　博懐・増井周造・道畑正岐・高増　潔・高橋　哲
- Organizer
  2016年度精密工学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] WGM共振を利用した微小球の直径計測(第5報) -光ファイバによるWGM励起の最適化-2016
- Author(s)
  川嵜彬史，道畑正岐，高谷裕浩，水谷康弘
- Organizer
  2016年度精密工学会学術講演会春季大会
- Place of Presentation
  東京理科大学（東京都）
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H05505
[Presentation] Theoretical Analysis of Improved Back-Focal-Plane Interferometry for Monitoring Nanoparticle Position2016
- Author(s)
  Shuzo Masui, Yousuke Horita, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi
- Organizer
  31st Annual Meeting of the American Society for Precision Engineering
- Place of Presentation
  Portland, Oregon, USA
- Year and Date
  2016-10-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 光触媒ナノ工具に関する基礎的研究（第10報）－銀担持による工具チップ性能の向上－2016
- Author(s)
  儲　博懐・堀田陽亮・増井周造・道畑正岐・高増　潔・高橋　哲
- Organizer
  2016年度精密工学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 光放射圧プローブを用いた表面微細形状の評価技術に関する研究（第3報） ―レーザ捕捉微小球レンズの試料面近傍における位置制御―2016
- Author(s)
  山口悠希，道畑正岐，水谷康弘，高谷裕浩
- Organizer
  2016年度精密工学会学術講演会春季大会
- Place of Presentation
  東京理科大学　野田キャンパス（千葉県・野田市）
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 後側焦点面干渉法を用いた光触媒ナノ加工粒子変位計測の高感度化2016
- Author(s)
  増井周造，堀田陽亮，道畑正岐，高増潔，高橋哲
- Organizer
  日本機械学会年次大会2016
- Place of Presentation
  福岡
- Year and Date
  2016-09-12
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 切削液の蛍光共焦点検出を利用した工具刃先摩耗形状計測に関する基礎研究2016
- Author(s)
  高谷裕浩，丸野兼治，道畑正岐，水谷康弘
- Organizer
  日本機械学会 2016 年度年次大会
- Place of Presentation
  九州大学（福岡県）
- Year and Date
  2016-09-11
- Data Source
  KAKENHI-PROJECT-15K13847
[Presentation] 光放射圧プローブを用いた表面微細形状の評価技術に関する研究（第2報） ―レーザトラッピングされたマイクロ球によるイメージング―2016
- Author(s)
  金鐘剛，道畑正岐，高谷裕浩，水谷康弘
- Organizer
  2016年度精密工学会学術講演会春季大会
- Place of Presentation
  東京理科大学　野田キャンパス（千葉県・野田市）
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Calibration of refractive index in microsphere diameter measurement based on analysis of polarized whispering gallery mode2016
- Author(s)
  Bohuai Chu, Masaki Michihata, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi
- Organizer
  Proc. International Symposium on Optomechatronic Technologies (ISOT2016)
- Place of Presentation
  板橋市民会館（東京都）
- Year and Date
  2016-10-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05505
[Presentation] 光放射圧プローブによる表面微細形状計測に関する研究2015
- Author(s)
  金　鐘剛，道畑正岐，高谷裕浩
- Organizer
  精密工学会2015年度関西地方定期学術講演会
- Place of Presentation
  京都工芸繊維大学(京都府・京都市)
- Year and Date
  2015-06-23
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Accurate diameter measurement of microsphere based on analysis for polarization of whispering gallery mode resonance2015
- Author(s)
  Akifumi Kawasaki, Masaki Michihata, Atsushi Adachi, Yasuhiro Takaya
- Organizer
  12th International symposium of measurement technology and intelligent instruments (ISMTII)
- Place of Presentation
  台北（台湾）
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05505
[Presentation] 全方位姿勢制御型光触媒ナノ加工工具に関する研究（第1報）－姿勢制御ユニット創製に関する実験的検討－2015
- Author(s)
  堀田陽亮・儲　博懐・道畑正岐・高増　潔・高橋　哲
- Organizer
  2015年度精密工学会秋季学術講演会
- Place of Presentation
  東北
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] Experimental study on measurement the surface topography by laser trapping probe2015
- Author(s)
  Jonggang Kim, Masaki Michihata, Yasuhiro Takaya
- Organizer
  Asian Society for Precision Engineering and Nanotechnology
- Place of Presentation
  Harbin (China)
- Year and Date
  2015-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 蛍光共焦点法による工具刃先形状の機上計測に関する研究（第一報）水平面における切削液の油膜の基礎検討2015
- Author(s)
  丸野兼治，道畑正岐，水谷康弘，高谷裕浩
- Organizer
  2015年度精密工学会学術講演会秋季大会
- Place of Presentation
  東北大学
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15K13847
[Presentation] 表面テクスチャ観察に用いる光放射圧制御微小球レンズの運動解析2015
- Author(s)
  山口悠希，道畑正岐，高谷裕浩
- Organizer
  精密工学会2015年度関西地方定期学術講演会
- Place of Presentation
  京都工芸繊維大学(京都府・京都市)
- Year and Date
  2015-06-23
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Optically trapped microprobe for nano-profile measurement based on interpolation method of standing wave scale using chromatic system2015
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Shinichi Ueda
- Organizer
  XXII MEKO World Congress
- Place of Presentation
  Prague (Czech Republic)
- Year and Date
  2015-08-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Analysis of chemical reaction in Cu-CMP with reactive nanoparticles based on Raman spectra enhanced by surface plasmon2015
- Author(s)
  Masafumi ASAHI, Yasuhiro TAKAYA, Masaki MICHIHATA
- Organizer
  Leading Edge Manufacturing in 21st Century
- Place of Presentation
  京都リサーチパーク (京都府・京都市)
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630027
[Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定 (第5報)　―定在場スケール内挿によるスキャニング測定―2015
- Author(s)
  上田真一，高谷裕浩，道畑正岐
- Organizer
  2015年度精密工学会学術講演会春季大会
- Place of Presentation
  東洋大学 (東京都)
- Year and Date
  2015-03-17
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 超高精度 WGM 応用マイクロ球測定の新展開2015
- Author(s)
  道畑正岐，川嵜彬史，高谷裕浩
- Organizer
  2015年度精密工学会学術講演会秋季大会ユネスコ国際光年記念シンポジウム
- Place of Presentation
  東北大学（宮城県）
- Year and Date
  2015-09-04
- Invited
- Data Source
  KAKENHI-PROJECT-15H05505
[Presentation] Measurement of micro-sphere diameter based on whispering gallery mode2015
- Author(s)
  Masaki Michihata, Akifumi Kawasaki, Adachi Atsushi, Yasuhiro Takaya
- Organizer
  IMEKO XXI world congress
- Place of Presentation
  プラハ（チェコ）
- Year and Date
  2015-08-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H05505
[Presentation] On-machine measurement of cutting tool edge profile by detecting fluorescence from cutting fluid2015
- Author(s)
  Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya
- Organizer
  International Symposium on Optomechatronic Technologies (ISOT2015)
- Place of Presentation
  Neuchatel, Switzerland
- Year and Date
  2015-10-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13847
[Presentation] 表面テクスチャ観察に用いる微小球レンズの光放射圧運動制御に関する研究2015
- Author(s)
  山口悠希，高谷裕浩，道畑正岐
- Organizer
  2014年度日本機械学会関西学生会卒業研究発表講演会
- Place of Presentation
  京都大学 (京都市)
- Year and Date
  2015-03-14
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction2015
- Author(s)
  Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu and Satoru Takahashi
- Organizer
  The 6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015)
- Place of Presentation
  Harbin, China
- Year and Date
  2015-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02214
[Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究（第3 報）－DNA を用いたナノ粒子計測プローブの開発－2014
- Author(s)
  林　照剛，石崎佑樹，道畑正岐，高谷裕浩，田中慎一
- Organizer
  2014年度精密工学会春期全国大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] フェムトパルストレインによるコヒーレントフォノン励起加工に関する研究(第二報) -コヒーレントフォノン励起状態の時間分解計測-2014
- Author(s)
  林照剛, 大菊崇弘, 道畑正岐, 高谷裕浩
- Organizer
  精密工学会春期全国大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-25289017
[Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究（第二報）－粒径と蛍光DNAプローブの回転拡散係数の関係性についての検討－2014
- Author(s)
  石崎佑樹，林照剛，道畑正岐，高谷裕浩
- Organizer
  2014年度精密工学会春期全国大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] WGM共振を利用した微小球の直径計測 (第2報) -WGM波長スペクトルを用いた球径の推定方法-2014
- Author(s)
  道畑正岐，足立篤，林照剛，高谷裕浩
- Organizer
  2014年度精密工学会学術講演会春季大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] フェムトパルストレインによるコヒーレントフォノン励起加工に関する研究(第三報) -テラヘルツ帯域でのエネルギー伝達機構の検討-2014
- Author(s)
  林照剛, 大島玄喜, 道畑正岐, 高谷裕浩
- Organizer
  精密工学会春期全国大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-25289017
[Presentation] Measurement of axial position of a microsphere using chromatic confocal system for probe system based on the laser trapping with the standing wave scale2014
- Author(s)
  Shin-ichi Ueda, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
- Organizer
  International Symposium on Optomechatronic Technologies 2014
- Place of Presentation
  University of Washington (Seattle, USA)
- Year and Date
  2014-11-06
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] フォトニックナノジェットを利用した表面微細加工に関する研究2014
- Author(s)
  上野原努，道畑正岐，高谷裕浩，林照剛
- Organizer
  2014年度砥粒加工学会学術講演会 (ABTEC2014)
- Place of Presentation
  岩手大学(岩手市)
- Year and Date
  2014-09-11
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定(第 4 報) ～マイクロ球光軸方向位置の共焦点計測～2014
- Author(s)
  上野原努，道畑正岐，高谷裕浩，林照剛
- Organizer
  2014年度精密工学会学術講演会秋季大会
- Place of Presentation
  鳥取大学 (鳥取市)
- Year and Date
  2014-09-16
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 局在型表面プラズモン励起ラマン分光による水酸化フラーレンのCu-CMP加工特性解析2014
- Author(s)
  旭真史,高谷裕浩,林照剛,道畑正岐
- Organizer
  日本機械学会関西支部学生員卒業研究発表講演会
- Place of Presentation
  大阪府立大学(堺市)
- Year and Date
  2014-03-17
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] 表面プラズモン励起ラマン計測による水酸化フラーレン分子加工原理に関する研究2014
- Author(s)
  村井亮太,高谷裕浩,林照剛,道畑正岐
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京大学(東京都)
- Year and Date
  2014-03-20
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究(第二報)-粒径と蛍光DNAプローブの回転拡散係数の関係性についての検討-2014
- Author(s)
  石崎佑樹,林照剛,道畑正岐,高谷裕浩
- Organizer
  2014年度精密工学会学術講演会春季大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] WGM共振を利用した微小球の直径計測(第2報) -WGM波長スペクトルを用いた球径の推定方法-2014
- Author(s)
  道畑正岐,足立篤,林照剛,高谷裕浩
- Organizer
  2014年度精密工学会学術講演会春季大会講演論文集
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] 周波数領域蛍光法を用いたナノ粒子粒径評価に関する研究(第3報)-DNAを用いたナノ粒子計測プローブの開発-2014
- Author(s)
  林照剛,石崎佑樹,道畑正岐,高谷裕浩,田中慎一
- Organizer
  2014年度精密工学会学術講演会春季大会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] Study on material removal mechanism by reactive fullerenol molecules in Cu-CMP using high-sensitive Raman spectroscopy2013
- Author(s)
  Ryota Murai, Yasuhiro Yakaya, Terutake Hayashi and Masaki Michihata
- Organizer
  5th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Place of Presentation
  Taipei（Taiwan）
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] Study on material removal mechanism by reactive fullerenol molecules in Cu-CMP using high-sensitive Raman spectroscopy2013
- Author(s)
  Ryota Murai, Yasuhiro Yakaya, Terutake Hayashi and Masaki Michihata
- Organizer
  5^<th > International Conference of Asian Society for Precision Engineering and Nanotechnology
- Place of Presentation
  Taipei(Taiwan)Howard Civil International Centre
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] Development of nanoparticles sizing method based on fluorescence polarization2013
- Author(s)
  Yuki Ishizaki,Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
- Organizer
  ISMQC2013
- Place of Presentation
  University, Cracow, Poland (Best paper award)
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] Study on surface processing by using femto-second pulse train beam with excitation of coherent phonon2013
- Author(s)
  Terutake Hayashi, Yusuke Fukuta, Masaki Michihata, and Yasuhiro Takaya
- Organizer
  28th Annual Meeting of the American Society for Precision Engineering, (ASPE2013)
- Place of Presentation
  St. Paul, Minnesota, USA,
- Data Source
  KAKENHI-PROJECT-25289017
[Presentation] Optimization of coupling condition in distance between the sphere and the tapered fiber for diameter measurement of microsphere by using WGM resonance2013
- Author(s)
  Atsushi Adachi, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya
- Organizer
  International Symposium on Optomechatronic Technologies (ISOT2013)
- Place of Presentation
  Jeju island, South Korea
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定（第２報）―定在場中でのプローブ球の挙動解析―2013
- Author(s)
  鷲谷泰佑，道畑正岐，林照剛，高谷裕浩
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学（東京）
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] CMMによる高精度測定のための微小球共振を用いたプローブ球の直径測定2013
- Author(s)
  峨家諒介、道畑正岐、林照剛、高谷裕浩
- Organizer
  2013年度精密工学会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] WGモード解析に基づくマイクロプローブの直径計測原理に関する研究2013
- Author(s)
  足立篤,道畑正岐,林照剛,高谷裕浩
- Organizer
  2012年度日本機械学会関西学生会卒業研究発表講演会
- Place of Presentation
  大阪工業大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] Fundamental Study on Chemical Mechanical Polishing of Copper Wafer Surface using Water-soluble Fullerenol as a Functional Molecule2013
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi
- Organizer
  The collaborative conference on Materials Research (CCMR) 2013
- Place of Presentation
  Jeju Island（South Korea）
- Invited
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] WGM共振を利用した微小球の直径計測(第1報) -結合条件が共振ピークに与える影響-2013
- Author(s)
  足立篤,道畑正岐,林照剛,高谷裕浩
- Organizer
  2013年度精密工学会学術講演会秋季大会講演論文集
- Place of Presentation
  関西大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] 表面微細構造を用いた光放射圧プローブスタイラスの捕捉（第２報）―基板材料と表面離脱性の関係―2013
- Author(s)
  吉兼匡昭，道畑正岐，林照剛，高谷裕浩
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学（東京）
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Fundamental verification of diameter measurement of a micro-CMM probe by using whispering gallery mode resonance2013
- Author(s)
  M. Michihata, R. Gake, T. Hayashi, Y. Takaya
- Organizer
  Proc. the 11th international symposium on measurement technology and intelligent instruments
- Place of Presentation
  Aachen/Braunschweig, Germany
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] Fundamental Study on Chemical Mechanical Polishing of Copper Wafer Surface using Water-soluble Fullerenol as a Functional Molecule2013
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi
- Organizer
  The collaborative conference on Materials Research (CCMR) 2013
- Place of Presentation
  Jeju Island(South Korea)
- Invited
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] Micro-probing system for coordinate metrology using a particle controlled by optical radiation pressure based on standing wave scale sensing method2013
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi
- Organizer
  International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN) 2013
- Place of Presentation
  Singapore
- Invited
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定(第3報)～スケールの内挿誤差の検討～2013
- Author(s)
  上田真一，道畑正岐，林照剛，高谷裕浩
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学 (吹田市)
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Fundamental verification of diameter measurement of a micro-CMM probe by using whispering gallery mode resonance2013
- Author(s)
  Masaki Michihata, Ryosuke Gake, Terutake Hayashi, Yasuhiro Takaya
- Organizer
  The 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII)
- Place of Presentation
  Aachen
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] CMMによる高精度測定のための微小球共振を用いたプローブ球の直径測定2013
- Author(s)
  峨家諒介,道畑正岐,林照剛,高谷裕浩
- Organizer
  2013年度精密工学会学術講演会春季大会講演論文集
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] Fundamental verification of diameter measurement of a micro-CMM probe by using whispering gallery mode resonance2013
- Author(s)
  Masaki Michihata, Ryosuke Gake, Terutake Hayashi, Yasuhiro Takaya
- Organizer
  The 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII)
- Place of Presentation
  Aachen/Braunschweig, Germany
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] Development of nanoparticles sizing method based on fluorescence polarization2013
- Author(s)
  Yuki Ishizaki, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
- Organizer
  ISMQC2013
- Place of Presentation
  University, Cracow, Poland
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] Optimization of coupling condition in distance between the sphere and the tapered fiber for diameter measurement of microsphere by using WGM resonance2013
- Author(s)
  A. Adachi, M. Michihata, T. Hayashi, Y. Takaya
- Organizer
  International symposium on optomechatronic technologies
- Place of Presentation
  Jeju island, South Korea, M1C-3
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] 表面微細構造を用いた光放射圧プローブスタイラスの捕捉（第2報）~基板材質と表面離脱性の関係~2013
- Author(s)
  吉兼匡昭、道畑正岐、林照剛、高谷裕浩
- Organizer
  2013年度精密工学会学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] WGM共振を利用した微小球の直径計測 (第1報) -結合条件が共振ピークに与える影響-2013
- Author(s)
  足立篤，道畑正岐，林照剛，高谷裕浩
- Organizer
  2013年度精密工学会学術講演会秋季大会
- Place of Presentation
  関西大学
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] Mode selective probing method of micro trench structure using optically trapped probe2012
- Author(s)
  Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi and Taisuke Washitani
- Organizer
  ISOT’12 (International Symposium on Optomechatronic Technologies)
- Place of Presentation
  Paris (France)
- Invited
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] Development of Nano Particle Sizing System Using Fluorescence Polarization2012
- Author(s)
  Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya, and Kok Foong Lee
- Organizer
  XX IMEKO World Congress Metrology for Green Growth
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-24656088
[Presentation] Development of a Novel Surface Processing System Using Femtosecond Pulse Train2012
- Author(s)
  Yusuke Fukuta, Terutake Hayashi, Masaki Michihata and Yasuhiro Takaya,
- Organizer
  International Conference on Precision Engineering
- Place of Presentation
  To be published
- Data Source
  KAKENHI-PROJECT-21656041
[Presentation] Scanning measurement of step height and freeform surface by using optically trapped microsphere2012
- Author(s)
  Masaki Michihata, Yasuhiro Takaya, Taisuke Washitani, Terutake Hayashi
- Organizer
  The 12th euspen International Conference
- Place of Presentation
  Stockholm (Sweden)
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] 水酸化フラーレンを用いたCu-CMPにおける化学反応過程の解明(第一報)-In-situラマン分光分析装置の開発ー2012
- Author(s)
  鹿野和昌, 高谷裕浩, 林照剛, 道畑正岐, 小久保研
- Organizer
  精密工学会, 2012年度精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  首都大学東京
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] New technique of single-beam gradient-force laser trapping in air condition2012
- Author(s)
  Masaki MICHIHATA, Tadaaki YOSHIKANE, Terutake HAYASHI and Yasuhiro TAKAYA
- Organizer
  ISOT’12 (International Symposium on Optomechatronic Technologies)
- Place of Presentation
  Paris (France)
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] フェムトパルストレインによる表面原子加工システムの開発2012
- Author(s)
  福田悠介, 林照剛, 道畑正岐, 高谷裕浩
- Organizer
  2012年度精密工学会春季大会学術講演会(2012)
- Place of Presentation
  金沢大学
- Year and Date
  2012-09-22
- Data Source
  KAKENHI-PROJECT-21656041
[Presentation] In Situ Raman Analysis of Chemical Reaction for Copper CMP Using Water-soluble Fullerenol2011
- Author(s)
  Kazumasa Kano, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata and Ken Kokubo
- Organizer
  Asian Symposium for Precision Engineering and Nanotechnology 2011
- Place of Presentation
  China, Hong Kong
- Year and Date
  2011-11-17
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] WGM共振を用いたマイクロ粒子における真球度評価の基礎的研究2011
- Author(s)
  市川雄一, 林照剛, 高谷裕浩, 道畑正岐
- Organizer
  2010年度日本機械学会関西学生会卒業研究発表講演会
- Place of Presentation
  京都工芸繊維大学
- Year and Date
  2011-03-18
- Data Source
  KAKENHI-PROJECT-22860034
[Presentation] 水酸化フラーレンを用いたCu-CMP加工に関する研究(第3報)-パターンウエハの研磨特製の評価-2011
- Author(s)
  岸田裕貴, 高谷裕浩, 林照剛, 道畑正岐, 小久保研
- Organizer
  精密工学会春季大会学術講演会講演論文集
- Place of Presentation
  東洋大学
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] 微小球共振器を用いた位置検出マイクロプローブのための基礎的研究2011
- Author(s)
  峨家諒介, 林照剛, 高谷裕浩, 道畑正岐
- Organizer
  2010年度日本機械学会関西学生会卒業研究発表講演会
- Place of Presentation
  京都工芸繊維大学
- Year and Date
  2011-03-18
- Data Source
  KAKENHI-PROJECT-22860034
[Presentation] フェムトパルストレインによる表面原子加工技術の開発2011
- Author(s)
  福田悠介, 林照剛, 道畑正岐, 高谷裕浩
- Organizer
  2011年度精密工学会秋期大会学術講演会講演論文集
- Place of Presentation
  金沢大学
- Year and Date
  2011-09-22
- Data Source
  KAKENHI-PROJECT-21656041
[Presentation] 水酸化フラーレンを用いたCu-CMP加工における表面反応層の形成2010
- Author(s)
  岸田裕貴, 高谷裕浩, 林照剛, 道畑正岐, 小久保研
- Organizer
  2010年度精密工学会秋季大会学術講演会講演論文集(JSPE)
- Place of Presentation
  名古屋大学
- Year and Date
  2010-09-27
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] Weakly Copper-Fullerenol Layer on Chemical Mechanical Polishing Using Water Soluble Fullerenol, Proc2010
- Author(s)
  Hirotaka Kishida, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata, Ken Kokubo
- Organizer
  2010 American Society for Precision Engineering(ASPE)
- Place of Presentation
  Atlanta, USA
- Year and Date
  2010-11-02
- Data Source
  KAKENHI-PROJECT-21360064
[Presentation] Development of a Novel Surface Processing System Using Femtosecond Pulse Train
- Author(s)
  Yusuke Fukuta, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
- Organizer
  14th International Conference on Precision Engineering (ICPE 2012)
- Place of Presentation
  Awaji, Hyogo(2012年11月発表予定)
- Data Source
  KAKENHI-PROJECT-21656041
[Presentation] フェムトパルストレインによるコヒーレントフォノン励起加工に関する研究(第 2 報) -コヒーレントフォノンの時間分解計測システムの開発-
- Author(s)
  大菊崇弘, 林照剛, 道畑正岐, 高谷裕浩
- Organizer
  精密工学会春期全国大会
- Place of Presentation
  東洋大学
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-25289017
[Presentation] 局在型表面プラズモン励起ラマン分光による水酸化フラーレンのCu-CMP加工特性解析
- Author(s)
  旭真史，高谷裕浩，林照剛，道畑正岐
- Organizer
  日本機械学会関西支部学生員卒業研究発表講演会
- Place of Presentation
  大阪府立大学 (堺市)
- Data Source
  KAKENHI-PROJECT-24656104
[Presentation] Laser trapping and whispering gallery mode for micro-scale metrology
- Author(s)
  Masaki Michihata
- Organizer
  NPL seminar
- Place of Presentation
  National physical laboratory, Teddington, UK
- Invited
- Data Source
  KAKENHI-PROJECT-24656102
[Presentation] フォトニック・ナノジェットを利用した微細加工に関する基礎研究
- Author(s)
  上野原努，高谷裕浩，林照剛，道畑正岐
- Organizer
  日本機械学会関西支部学生員卒業研究発表講演会
- Place of Presentation
  大阪府立大学 (堺市)
- Data Source
  KAKENHI-PROJECT-24246028
[Presentation] フォトニック・ナノジェットの生成に関する研究 ―ベッセルビーム照明条件の検討―
- Author(s)
  大島玄喜，高谷裕浩，林照剛，道畑正岐
- Organizer
  2013年度精密工学会関西地方定期学術講演会
- Place of Presentation
  大阪工業大学(大阪市)
- Data Source
  KAKENHI-PROJECT-24246028

1. Takahashi Satoru (30283724)

# of Collaborated Projects: 9 results

# of Collaborated Products: 95 results
2. TAKAYA Yasuhiro (70243178)

# of Collaborated Projects: 8 results

# of Collaborated Products: 73 results
3. HAYASHI Terutake (00334011)

# of Collaborated Projects: 7 results

# of Collaborated Products: 66 results
4. 門屋祥太郎 (60880234)

# of Collaborated Projects: 6 results

# of Collaborated Products: 23 results
5. 高増潔 (70154896)

# of Collaborated Projects: 2 results

# of Collaborated Products: 43 results
6. 西川正俊 (30444516)

# of Collaborated Projects: 2 results

# of Collaborated Products: 6 results
7. 増井周造 (00909939)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. KOKUBO Ken (20304008)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
9. Mzutani Yasuhiro (40374152)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
10. KUME Tatsuya (40353362)

# of Collaborated Projects: 1 results

# of Collaborated Products: 14 results
11. 三部勉 (80536938)

# of Collaborated Projects: 1 results

# of Collaborated Products: 14 results

Michihata Masaki 道畑 正岐

MICHIHATA Masaki 道畑 正岐

Research Projects

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Co-Researchers

3次元空間座標基準モニタリングによる内面構造のナノスケール精度計測Principal Investigator

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破壊的干渉照明を用いた次世代極細光ファイバ直径のナノ精度計測原理の確立Principal Investigator

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質量標準トレーサビリティ体系のための超高精度・広範囲なシリコン球体計測Principal Investigator

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Measurement of 3-dimensional standard shape in micro-scale using whispering gallery mode resonancePrincipal Investigator

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Fabrication of 3-dimensional metal structure with sub-100 nm resolution using optical potentialPrincipal Investigator

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On machine measurement of cutting tool profile using fluorescent from cutting fluidPrincipal Investigator

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Measurement of a micro-sphere using whispering gallery mode resonancePrincipal Investigator

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Michihata Masaki 道畑正岐

MICHIHATA Masaki 道畑正岐