Yamane Daisuke 山根大輔

… Alternative Names

YAMANE Daisuke 山根大輔

Less

Researcher Number	70634096
Other IDs	https://orcid.org/0000-0002-9262-4704
Affiliation (Current)	2024: 立命館大学, 理工学部, 准教授
Affiliation (based on the past Project Information) *help	2020 – 2024: 立命館大学, 理工学部, 准教授 2019: 東京工業大学, 科学技術創成研究院, 助教 2016 – 2017: 東京工業大学, 科学技術創成研究院, 助教 2012 – 2015: 東京工業大学, 精密工学研究所, 助教
Review Section/Research Field	Principal Investigator Basic Section 28050:Nano/micro-systems-related / Electron device/Electronic equipment / Nano/Microsystems Except Principal Investigator Medium-sized Section 21:Electrical and electronic engineering and related fields / Biomedical engineering/Biomaterial science and engineering
Keywords	Principal Investigator MEMS / 電解めっき / 金合金 / 金めっき / 光ミキサ / エレクトレット / 静電 / 振動 / エナジーハーベスタ / ハードウェア … More / セキュリティ / セキュアIoTデバイス / 機械特性 / 疲労破壊 / ＭＥＭＳ / セキュア / 自壊 / IoT / 可動配線 / 合金 / パルス金めっき / 電解金めっき / カンチレバー / ノイズ / 加速度センサ / ナノ結晶 / 結晶 / 金 / ナノマイクロセンサ / 加速度 / ナノG / 微細電極 / 無電解金めっき / ナノデバイス / 静電容量型センサ / テラヘルツ波 / Casimir効果 / ナノエレクトロニクス / ナノギャップ / マイクロ・ナノデバイス / GaAs / めっき / CMOS / NEMS / テラヘルツ … More Except Principal Investigator ライダー / 分布計測 / 防災技術 / 非線形光学 / ブリルアン散乱 / 光ファイバセンサ / 計測システム / 白血病治療 / 造血幹細胞移植 / 時価造血幹細胞移植 / 分析化学 / マイクロ流体 / ハイスループット / 自家造血幹細胞移植 / 白血病 / レーザー / マイクロ流体工学 / フローサイトメトリー Less

Charge-Free Electrostatic MEMS Vibration Energy Harvester for Sensor/LSI IntegrationPrincipal Investigator
- Principal Investigator
  
  山根大輔
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Ritsumeikan University
光ファイバ型相関領域反射計による歪・温度の高速分布測定：極限性能の追究と実用化
- Principal Investigator
  
  水野洋輔
- Project Period (FY)
  2021 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 21:Electrical and electronic engineering and related fields
- Research Institution
  Yokohama National University
Development of MEMS Self-Destruction Design Technology for Secure IoT DevicesPrincipal Investigator
- Principal Investigator
  
  Yamane Daisuke
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Ritsumeikan University
  Tokyo Institute of Technology
Development of Nano-G Detection Method using Electroplated Au-Alloy with Controlled Crystal StructurePrincipal Investigator
- Principal Investigator
  
  Yamane Daisuke
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tokyo Institute of Technology
High-throughput decontamination technology for autologous hematopoietic stem-cell transplantation
- Principal Investigator
  
  GODA Keisuke
- Project Period (FY)
  2013 – 2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Biomedical engineering/Biomaterial science and engineering
- Research Institution
  The University of Tokyo
A study on NEMS-Casimir multifunction sensorsPrincipal Investigator
- Principal Investigator
  
  YAMANE Daisuke
- Project Period (FY)
  2013 – 2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tokyo Institute of Technology
CMOSとMEMS／NEMSの融合による超小型・高光度テラヘルツ連続波光源の研究Principal Investigator
- Principal Investigator
  
  山根大輔
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Research Activity Start-up
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tokyo Institute of Technology

All 2022 2021 2020 2019 2018 2017 2016 2015 2014 Other

All Journal Article Presentation Book Patent

[Book] Advances in Microelectronics: Reviews, Vol. 1, "Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors"2018
- Author(s)
  Tso-Fu Mark Chang, Chun-Yi Chen, Hao-Chun Tang, Masaharu Yoshiba, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Total Pages
  534
- Publisher
  IFSA Publishing
- ISBN
  9788469786338
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] Effect of current density on micro-mechanical property of electrodeposited gold film evaluated by micro-compression2022
- Author(s)
  Omura Taro、Chen Chun-Yi、Chang Tso-Fu Mark、Yamane Daisuke、Ito Hiroyuki、Machida Katsuyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  Surface and Coatings Technology
  
  Volume: 436 Pages: 128315-128315
- DOI
  10.1016/j.surfcoat.2022.128315
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05232, KAKENHI-PROJECT-23K21050
[Journal Article] IoT電源への期待　環境振動発電素子の小型化・高出力化とEMC2022
- Author(s)
  山根大輔，田中有弥
- Journal Title
  
  科学情報出版　月刊EMC
  
  Volume: -
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] 荷電処理不要の静電型ＭＥＭＳ振動発電素子2022
- Author(s)
  山根大輔，田中有弥
- Journal Title
  
  日本工業出版　クリーンエネルギー
  
  Volume: 31 Pages: 35-40
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Bandwidth Broadening of MEMS Vibration Energy Harvesters by Voltage-Boost Rectifier Circuit2022
- Author(s)
  Yukiya Tohyama, Hiroaki Honma, Hiroshi Toshiyoshi, and Daisuke Yamane
- Journal Title
  
  Sensors and Materials
  
  Volume: -
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency2021
- Author(s)
  Watanabe Hitomi、Chang Tso-Fu Mark、Schneider Michael、Schmid Ulrich、Chen Chun-Yi、Iida Shinichi、Yamane Daisuke、Ito Hiroyuki、Machida Katsuyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  Electrochem
  
  Volume: 2 Issue: 2 Pages: 216-223
- DOI
  10.3390/electrochem2020015
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Energy Harvesting from Non-Stationary Vibrations Using a Low-Threshold Voltage-Boost Rectifier Circuit2021
- Author(s)
  Tohyama Yukiya、Honma Hiroaki、Sekiya Hidehiko、Toshiyoshi Hiroshi、Yamane Daisuke
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 141 Issue: 7 Pages: 228-232
- DOI
  10.1541/ieejsmas.141.228
- NAID
  130008060170
- ISSN
  1341-8939, 1347-5525
- Year and Date
  2021-07-01
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05232, KAKENHI-PROJECT-20J14049
[Journal Article] MEMS post-processed self-assembled electret for vibratory energy harvesters2021
- Author(s)
  Yamane Daisuke、Kayaguchi Hideyuki、Kawashima Kosuke、Ishii Hisao、Tanaka Yuya
- Journal Title
  
  Applied Physics Letters
  
  Volume: 119 Issue: 25 Pages: 254102-254102
- DOI
  10.1063/5.0072596
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05232, KAKENHI-PROJECT-20H02810, KAKENHI-PROJECT-21K05208
[Journal Article] Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test2020
- Author(s)
  Suzuki Kosuke、Chang Tso-Fu Mark、Hashigata Ken、Asano Keisuke、Chen Chun-Yi、Nagoshi Takashi、Yamane Daisuke、Ito Hiroyuki、Machida Katsuyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  MRS Communications
  
  Volume: 10 Issue: 3 Pages: 434-438
- DOI
  10.1557/mrc.2020.38
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Co-Electrodeposition of Au?TiO2 Nanocomposite and the Micro-Mechanical Properties2020
- Author(s)
  Chien Yu-An、Chang Tso-Fu Mark、Chen Chun-Yi、Yamane Daisuke、Ito Hiroyuki、Machida Katsuyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  Electrochem
  
  Volume: 1 Issue: 4 Pages: 388-393
- DOI
  10.3390/electrochem1040025
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers2020
- Author(s)
  Nitta Kyotaro、Chang Tso-Fu Mark、Tang Haochun、Chen Chun-Yi、Iida Shinichi、Yamane Daisuke、Machida Katsuyuki、Ito Hiroyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  Journal of The Electrochemical Society
  
  Volume: 167 Issue: 8 Pages: 082503-082503
- DOI
  10.1149/1945-7111/ab8805
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Electrodeposition of Ni-Co Alloys and Their Mechanical Properties by Micro-Vickers Hardness Test2020
- Author(s)
  Jiang Yiming、Chen Chun-Yi、Chang Tso-Fu Mark、Luo Xun、Yamane Daisuke、Sone Masato
- Journal Title
  
  Electrochem
  
  Volume: 2 Issue: 1 Pages: 1-9
- DOI
  10.3390/electrochem2010001
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] (Invited) CMOS-MEMS Based Microgravity Sensor and Its Application2020
- Author(s)
  Masu Kazuya、Machida Katsuyuki、Yamane Daisuke、Ito Hiroyuki、Ishihara Noboru、Chang Tso-Fu Mark、Sone Masato、Shigeyama Ryo、Ogata Taiki、Miyake Yoshihiro
- Journal Title
  
  ECS Transactions
  
  Volume: 97 Issue: 5 Pages: 91-108
- DOI
  10.1149/09705.0091ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test2019
- Author(s)
  Kyotaro Nitta, Tso-Fu Mark Chang, Koichiro Tachibana, Hao-chun Tang, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 215 Pages: 111001-111001
- DOI
  10.1016/j.mee.2019.111001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Five-fold sensitivity enhancement in a capacitive tactile sensor by reducing material and structural rigidity2019
- Author(s)
  Yu-Hong Gao, Yu-Hao Jen, Rongshun Chen, Daisuke Yamane, Cheng-Yao Lo
- Journal Title
  
  Sensors & Actuators: A. Physical
  
  Volume: 293 Pages: 167-177
- DOI
  10.1016/j.sna.2019.04.043
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices2019
- Author(s)
  Ken Hashigata, Haochun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 213 Pages: 13-17
- DOI
  10.1016/j.mee.2019.04.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-19K05232
[Journal Article] A MEMS Accelerometer for Sub-mG Sensing2019
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu
- Journal Title
  
  Sensors and Materials
  
  Volume: 31 Issue: 9 Pages: 2883
- DOI
  10.18494/SAM.2019.2122
- ISSN
  0914-4935, 2435-0869
- Year and Date
  2019-09-20
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K05232, KAKENHI-PROJECT-18H01490
[Journal Article] High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components2019
- Author(s)
  Keisuke Asano, Tso-Fu Mark Chang, Haochun Tang, Takashi Nagoshi, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  ECS Journal of Solid State Science and Technology
  
  Volume: 8 Issue: 8 Pages: 412-415
- DOI
  10.1149/2.0151908jss
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect2019
- Author(s)
  Haochun Tang, Tso-Fu Mark Chang, Yaw-Wang Chai, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Metals
  
  Volume: 9 Issue: 9 Pages: 987-987
- DOI
  10.3390/met9090987
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K05232
[Journal Article] Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide2018
- Author(s)
  Hao-Chun Tang, Ken Hashigata, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Elsevier Surface and Coatings Technology
  
  Volume: 印刷中 Pages: 1065-1070
- DOI
  10.1016/j.surfcoat.2018.02.041
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K17453, KAKENHI-PROJECT-26220907
[Journal Article] A 0.18-µm CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers2018
- Author(s)
  Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu
- Journal Title
  
  IEICE Electron. Express
  
  Volume: 15 Issue: 2 Pages: 20171227-20171227
- DOI
  10.1587/elex.15.20171227
- NAID
  130006320958
- ISSN
  1349-2543
- Language
  English
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices2018
- Author(s)
  Tang Haochun、Chen Chun-Yi、Chang Tso-Fu Mark、Nagoshi Takashi、Yamane Daisuke、Konishi Toshifumi、Machida Katsuyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  Journal of The Electrochemical Society
  
  Volume: 165 Issue: 2 Pages: D58-D63
- DOI
  10.1149/2.0441802jes
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer2018
- Author(s)
  Motohiro Takayasu, Ippei Tsuji, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu
- Journal Title
  
  Sensors and Materials
  
  Volume: 印刷中
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] Enhancement in Structure Stability of Gold Micro-Cantilever by Constraints at the Fixed-End for Applications as Movable Structures of MEMS2018
- Author(s)
  Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Journal Title
  
  Microelectronics Engineering
  
  Volume: 187-188 Pages: 105-109
- DOI
  10.1016/j.mee.2017.11.015
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K17453, KAKENHI-PROJECT-26220907
[Journal Article] High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices2017
- Author(s)
  Hao-Chun Tang, Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  J. Electrochemical Society
  
  Volume: なし Issue: 4 Pages: 244-247
- DOI
  10.1149/2.141704jes
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Micro-bending testing of electrodeposited gold for applications as movable components in MEMS devices2017
- Author(s)
  Asano Keisuke、Tang Hao-Chun、Chen Chun-Yi、Nagoshi Takashi、Chang Tso-Fu Mark、Yamane Daisuke、Machida Katsuyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 180 Pages: 15-19
- DOI
  10.1016/j.mee.2017.05.044
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Deformation behavior of electroplated gold composed of nano-columnar grains embedded in micro-columnar textures2017
- Author(s)
  Yoshiba Masaharu、Chen Chun-Yi、Chang Tso-Fu Mark、Nagoshi Takashi、Yamane Daisuke、Machida Katsuyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  Materials Letters
  
  Volume: 202 Pages: 82-85
- DOI
  10.1016/j.matlet.2017.05.066
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Tensile Tests of Micro-Specimens Made of Electroplated Gold2017
- Author(s)
  Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Microelectronics Engineering
  
  Volume: 174 Pages: 6-10
- DOI
  10.1016/j.mee.2016.12.004
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] A 1-mG MEMS Sensor2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Journal Title
  
  ECS Transactions
  
  Volume: 72 Issue: 3 Pages: 7-14
- DOI
  10.1149/07203.0007ecst
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide2016
- Author(s)
  Hao-chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Electrochemistry Communications
  
  Volume: 72 Pages: 126-130
- DOI
  10.1016/j.elecom.2016.09.019
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression2016
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  MATERIALS TRANSACTIONS
  
  Volume: 57 Issue: 8 Pages: 1257-1260
- DOI
  10.2320/matertrans.MG201612
- NAID
  130005165710
- ISSN
  1345-9678, 1347-5320
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers2016
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone,
- Journal Title
  
  Microelectronics Engineering
  
  Volume: 153 Pages: 90-93
- DOI
  10.1016/j.mee.2016.02.054
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength2016
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Electrochemistry Communications
  
  Volume: 67 Pages: 51-54
- DOI
  10.1016/j.elecom.2016.03.017
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu and Katsuyuki Machida
- Journal Title
  
  Microelectronics Reliability
  
  Volume: 66 Pages: 78-84
- DOI
  10.1016/j.microrel.2016.09.018
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16H02337, KAKENHI-PROJECT-15K17453
[Journal Article] A Sub-1G MEMS Sensor2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Journal Title
  
  ECS Transactions
  
  Volume: 66
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25630138
[Journal Article] A Sub-1G MEMS Sensor2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Journal Title
  
  ECS Transactions
  
  Volume: 66 Issue: 5 Pages: 131-138
- DOI
  10.1149/06605.0131ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors2015
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 亀井将太, 益一哉, 町田克之
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 135 Issue: 4 Pages: 142-143
- DOI
  10.1541/ieejsmas.135.142
- NAID
  130005061970
- ISSN
  1341-8939, 1347-5525
- Language
  Japanese
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25630138
[Journal Article] A 0.1G-to-20G Integrated MEMS Inertial Sensor2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 54 Issue: 8 Pages: 1-4
- DOI
  10.7567/jjap.54.087202
- NAID
  210000145523
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] A dual-axis MEMS capacitive inertial sensor with high-density proof mass2015
- Author(s)
  Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Journal Title
  
  Microsystem Technologies
  
  Volume: 印刷中 Issue: 3 Pages: 459-464
- DOI
  10.1007/s00542-015-2539-y
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25630138, KAKENHI-PROJECT-15K17453
[Journal Article] Integrated CMOS-MEMS Technology and Its Applications2014
- Author(s)
  Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu
- Journal Title
  
  ECS Transactions
  
  Volume: 61 Issue: 6 Pages: 21-39
- DOI
  10.1149/06106.0021ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25630138
[Patent] 自壊素子が組み込まれたデバイス及び自壊素子の設計方法2020
- Inventor(s)
  山根大輔
- Industrial Property Rights Holder
  山根大輔
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2020-189992
- Filing Date
  2020
- Data Source
  KAKENHI-PROJECT-19K05232
[Patent] 微細素子の製造方法及び微細素子2020
- Inventor(s)
  山根大輔，田中有弥
- Industrial Property Rights Holder
  山根大輔，田中有弥
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2020-132954
- Filing Date
  2020
- Data Source
  KAKENHI-PROJECT-19K05232
[Patent] 微細素子とその製造方法2017
- Inventor(s)
  小西敏文, 佐布晃昭, 町田克之, 山根大輔, 益　一哉
- Industrial Property Rights Holder
  小西敏文, 佐布晃昭, 町田克之, 山根大輔, 益　一哉
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2017-055732
- Filing Date
  2017-03-22
- Data Source
  KAKENHI-PROJECT-15K17453
[Patent] 微細素子およびその製造方法2017
- Inventor(s)
  小西,佐布,町田,曽根,Chang,Chen,山根,益
- Industrial Property Rights Holder
  小西,佐布,町田,曽根,Chang,Chen,山根,益
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2017-055730
- Filing Date
  2017-03-22
- Data Source
  KAKENHI-PROJECT-15K17453
[Patent] "微細素子およびその製造方法2015
- Inventor(s)
  小西敏文，佐布晃昭，町田克之，益　一哉，伊藤浩之，山根大輔
- Industrial Property Rights Holder
  小西敏文，佐布晃昭，町田克之，益　一哉，伊藤浩之，山根大輔
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-256285
- Filing Date
  2015-12-28
- Data Source
  KAKENHI-PROJECT-15K17453
[Patent] 半導体素子の構造解析装置および解析プログラム2015
- Inventor(s)
  小西敏文，佐布晃昭，町田克之，益　一哉，山根大輔
- Industrial Property Rights Holder
  小西敏文，佐布晃昭，町田克之，益　一哉，山根大輔
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-186382
- Filing Date
  2015-09-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMSデバイスへの応用に向けた金ニッケル合金の微小機械的特性の評価2022
- Author(s)
  秋山拓海，簡佑安，陳君怡，Tso Fu Mark Chang，山根大輔，伊藤浩之，町田克之，三宅美博，曽根正人
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 電気回路シミュレータを用いたSAE-MEMSエナジーハーベスタ解析環境の検討2022
- Author(s)
  永縄卓大，川島康介，栢口英之，石井久夫，田中有弥，山根大輔
- Organizer
  応用物理学会集積化MEMS技術研究会　第12回集積化MEMS技術研究ワークショップ
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 金めっき材料における機械的特性の電流密度依存性2022
- Author(s)
  大村太郎，Chun-Yi Chen，Tso Fu Mark Chang，山根大輔，伊藤浩之，町田克之，三宅美博，曽根正人
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 自己組織化エレクトレットを用いたMEMS振動発電素子の検討2022
- Author(s)
  杉本澪貴, 川島康介, 栢口英之, 石井久夫, 田中有弥, 山根大輔
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 電気二重層エレクトレットを用いた非接触型面外振動発電の検討2022
- Author(s)
  野田圭吾, 田村健太郎, 三輪一元, 小野新平, 山根大輔
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Demonstration of Non-Contact Type Vibrational Energy Harvester with Electric Double Layer Electrets2021
- Author(s)
  Kentaro Tamura, Keigo Nota, Kazumoto Miwa, Shimpei Ono, and Daisuke Yamane
- Organizer
  The 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Micro-Mechanical Characterization of Electrodeposited Ni-Co Alloys toward Design of MEMS Components2021
- Author(s)
  Yiming Jiang, Chun-Yi Chen, Tso-Fu Mark Chang, Xun Luo, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, and Masato Sone
- Organizer
  Micro and Nano Engineering Conference 2021 (MNE2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 集積化MEMS振動発電素子に関する研究2021
- Author(s)
  山根大輔
- Organizer
  電気学会センサ・マイクロマシン部門マイクロマシン・センサシステム／バイオ・マイクロシステム合同研究会
- Invited
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 医用MEMSデバイス応用に向けた微小貴金属めっき材料の機械的特性評価2021
- Author(s)
  曽根正人, Tso-Fu Mark Chang, 名越貴志, 町田克之, 山根大輔, 伊藤浩之, 益一哉
- Organizer
  日本金属学会 2021年春季講演大会
- Invited
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components2021
- Author(s)
  Takumi Akiyama, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone
- Organizer
  Micro and Nano Engineering Conference 2021 (MNE2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 面内振動型Au-MEMS素子のばね構造の検討2021
- Author(s)
  端山航平, 川島康介, 澤田宗興, 田村健太郎, 山根大輔
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test2021
- Author(s)
  Taro Omura, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone
- Organizer
  Micro and Nano Engineering Conference 2021 (MNE2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 金単結晶微小カンチレバーの機械的特性とサンプル形状効果2021
- Author(s)
  藤田一矢, 鈴木康介, Chun-Yi Chen, Tso-Fu Mark Chang, 伊藤浩之, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect2021
- Author(s)
  Kazuya Fujita, Kosuke Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone
- Organizer
  Micro and Nano Engineering Conference 2021 (MNE2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Electrodeposited High Strength Au-TiO2 Nano Composite Film for MEMS Devices2020
- Author(s)
  Yu-an Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] A 100-nG/√Hz-Level Single Au Proof-Mass 3-axis MEMS Accelerometer with Pillar-Shaped Electrodes2020
- Author(s)
  Takashi Ichikawa, Ken Atsumi, Tatsuya Koga, Daisuke Yamane, Shin-ichi Iida, Hiroyuki Ito, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu
- Organizer
  Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing2020
- Author(s)
  Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Noboru Ishihara, Hiroyuki Ito, Katsuyuki Machida, and Kazuya Masu
- Organizer
  The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 外付エレクトレット型MEMSエナジーハーベスタの小型化の検討2020
- Author(s)
  川島康介, 澤田宗興, 田村健太郎, 端山航平, 山根大輔
- Organizer
  令和２年電気学会センサ・マイクロマシン部門総合研究会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated By Micro-Bending Test2020
- Author(s)
  Kosuke Suzuki, Yu-An Chien, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu and Masato Sone
- Organizer
  PRiME 2020 (ECS, ECSJ, & KECS Joint Meeting)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討2020
- Author(s)
  渥美賢, 古賀達也, 市川崇志, 山根大輔, 飯田慎一, 伊藤浩之, 石原昇, 町田克之, 益一哉
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討2020
- Author(s)
  市川崇志, 渥美賢, 古賀達也, 山根大輔, 飯田慎一, 伊藤浩之, 石原昇, 町田克之, 益一哉
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Electrodeposition of Au-Cu Alloys and the Micro-Mechanical Properties2020
- Author(s)
  Tso-Fu Mark Chang, Hao-Chun Tang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  237th ECS Meeting with the 18th International Meeting on Chemical Sensors (IMCS 2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Au-Pd合金膜の電気メッキとその機械的特性2020
- Author(s)
  入谷友樹, 新田京太朗, Yu-An Chien, Tso-Fu Mark Chang, 山根大輔, 伊藤浩之, 町田克之, 益一哉, 曽根正人
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method2019
- Author(s)
  Kyotaro Nitta, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone
- Organizer
  MRS Fall Meeting 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test2019
- Author(s)
  Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Extensive Sensitivity Enhancement in Stacked Capacitive Tactile Sensors2019
- Author(s)
  Yu-Hao Jen, Chia-Tso Mo, Kean Aw, Daisuke Yamane, Cheng-Yao Lo
- Organizer
  IEEE Sensors 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 3Dピラー型Au錘MEMS加速度センサ2019
- Author(s)
  市川崇志, 乙部翔太, 渥美賢, 古賀達也, 山根大輔, 飯田慎一, 伊藤浩之, 石原昇, 曽根正人, 町田克之, 益一哉
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討2019
- Author(s)
  古賀達也, 市川崇志, 田中直登, 緒方大樹, 大良宏樹, 山根大輔, 石原昇, 伊藤浩之, 曽根正人, 町田克之, 三宅美博, 益一哉
- Organizer
  第11回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 積層メタル技術で作製したMEMS加速度センサの衝撃特性評価2019
- Author(s)
  市川崇志, 古賀達也, 山根大輔, 飯田慎一, 石原昇, 伊藤浩之, Chang Tso-Fu Mark, 曽根正人, 町田克之, 益一哉
- Organizer
  第11回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Shock Characteristics of MEMS Inertial Sensors Developed by Ti/Au Multi-Layer Metal Technology2019
- Author(s)
  Takashi Ichikawa, Tatsuya Koga, Daisuke Yamane, Shinichi Iida, Noboru Ishihara, Hiroyuki Ito, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu
- Organizer
  32nd International Microprocesses and Nanotechnology Conference (MNC2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS Applications2019
- Author(s)
  Hitomi Watanabe, Chun-Yi Chen, Tso-Fu Mark Chang, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  45th International Conference on Micro & Nano Engineering (MNE2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test2019
- Author(s)
  Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  45th International Conference on Micro & Nano Engineering (MNE2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Mechanical properties of electrodeposited gold-copper alloy by micro-compression test2019
- Author(s)
  Masato Sone, Hao-Chun Tang, Masaharu Yoshiba, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu
- Organizer
  The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds2019
- Author(s)
  Tatsuya Koga, Takashi Ichikawa, Naoto Tanaka, Taiki Ogata, Hiroki Ora, Daisuke Yamane, Noboru Ishihara, Hiroyuki Ito, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, Kazuya Masu
- Organizer
  IEEE Biomedical Circuits and Systems Conference 2019 (BioCAS2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers2019
- Author(s)
  Ken Atsumi, Shota Otobe, Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu
- Organizer
  Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability2019
- Author(s)
  Kyotaro Nitta, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone
- Organizer
  IEEE Sensors 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence2019
- Author(s)
  Hitomi Watanabe, Takuma Suzuki, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone
- Organizer
  The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Au Film for MEMS Applications2019
- Author(s)
  Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  45th International Conference on Micro & Nano Engineering (MNE2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)2019
- Author(s)
  市川崇志, 乙部翔太, 渥美賢, 古賀達也, 山根大輔, 飯田慎一, 伊藤浩之, 石原昇, 町田克之, 曽根正人, 益一哉
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Electroplating of Au-Pd Alloy Films and the Mechanical Properties2019
- Author(s)
  Tomoki Iriya, Kyotaro Nitta, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  International Thin Films Conference (TACT 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film2019
- Author(s)
  Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  MRS Fall Meeting 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] High-Sensitivity Capacitive Tactile Sensor with Vertically Stacked Hollow Structures2019
- Author(s)
  Cheng-Yao Lo, Daisuke Yamane
- Organizer
  The 4th International Symposium on Biomedical Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 3軸Au錘MEMS加速度センサにおける検出電極構造の検討2019
- Author(s)
  市川崇志, 新島宏文, 古賀達也, 山根大輔, 飯田慎一, 伊藤浩之, 石原昇, 曽根正人, 町田克之, 益一哉
- Organizer
  令和元年電気学会センサ・マイクロマシン部門総合研究会
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable Components2019
- Author(s)
  Kyotaro Nitta, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone
- Organizer
  45th International Conference on Micro & Nano Engineering (MNE2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05232
[Presentation] 電解めっき法によるMEMS用金銅合金の作製及び機械的特性評価2018
- Author(s)
  唐浩峻, Chen Chun-Yi, Chang Tso-Fu Mark, 山根大輔, 小西敏文, 町田克之, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 電解めっき法によるTi/Au微小カンチレバーのヤング率評価2018
- Author(s)
  中島英亮, Tso-Fu Mark Chang, Chun-Yi Chen, 山根大輔, 小西敏文, 町田克之, 年吉洋, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 電析制御による微小金カンチレバーの曲げ特性の改善2018
- Author(s)
  浅野啓介, 唐浩峻, Chun-Yi Chen, 名越貴志, Tso-Fu Mark Chang, 山根大輔, 小西敏文, 町田克之, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices2018
- Author(s)
  Kyoutarou Nitta, Koichiro Tachibana, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu
- Organizer
  233rd ECS Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology2018
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Shin-ichi Iida, Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu
- Organizer
  13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever For MEMS Accelerometers2018
- Author(s)
  Ken Hashigata, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 長期振動試験によるAu-Cu合金微小カンチレバーの構造安定性2018
- Author(s)
  新田京太朗, 橘航一朗, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, 山根大輔, 小西敏文, 町田克之, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film2018
- Author(s)
  Ken Hashigata, Hao-Chun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  22nd Topical Meeting of the International Society of Electrochemistry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)2018
- Author(s)
  古賀達也, 高安基大, 山根大輔, 伊藤浩之, 小西敏文, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性2018
- Author(s)
  小西敏文, 山根大輔, 佐布晃昭, 陳君怡, Chang Tso-Fu Mark, 伊藤浩之, 道正志郎, 石原昇, 曽根正人, 町田克之, 益一哉, 飯田慎一
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Study on Tri-Axis Fully-Differential Electrodes for MEMS Accelerometer With Segmented Capacitance Detection2018
- Author(s)
  Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
- Organizer
  Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 集積化CMOS-MEMS技術による高感度慣性センサと応用システム2018
- Author(s)
  伊藤浩之, 山根大輔, 小西敏文, 道正志郎, 石原昇, 町田克之, 曽根正人, 三宅美博, 益一哉
- Organizer
  第64回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 単一Au錘3軸差動MEMS加速度センサの検討2018
- Author(s)
  新島宏文, 乙部翔太, 高安基大, 山根大輔, 伊藤浩之, 佐布晃昭, 小西敏文, 道正志郎, 飯田慎一, 石原昇, 町田克之, 益一哉
- Organizer
  平成30年電気学会全国大会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 傾斜を用いた1mG MEMS加速度センサの分解能評価の検討2018
- Author(s)
  高安基大, 古賀達也, 辻一平, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 飯田慎一, 石原昇, 町田克之, 益一哉
- Organizer
  平成30年電気学会全国大会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 高感度MEMS加速度センサのBrownian Noise評価に関する検討2018
- Author(s)
  新島宏文, 乙部翔太, 高安基大, 山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 年吉洋, 町田克之, 益一哉
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys2018
- Author(s)
  Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  22nd Topical Meeting of the International Society of Electrochemistry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS加速度センサ用高分解能容量検出回路2017
- Author(s)
  高安基大, 道正志郎, 伊藤浩之, 山根大輔, 小西敏文, 町田克之, 石原昇, 益一哉
- Organizer
  第78応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO22017
- Author(s)
  Tso-Fu Mark Chang, Haochun Tang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)2017
- Author(s)
  新島宏文, 高安基大, 山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 年吉洋, 町田克之, 益一哉
- Organizer
  第34回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Micro-Mechanical Property Evaluation of Electroplated Au/Cu Alloys toward Applications in MEMS Accelerometers2017
- Author(s)
  Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  21th International Conference on Solid State Ionics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions2017
- Author(s)
  Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes2017
- Author(s)
  Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
- Organizer
  2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications2017
- Author(s)
  Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  RACI National Centenary Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests2017
- Author(s)
  Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  2017 MRS Fall Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 金めっきで形成したMEMS加速度センサの長期振動特性に関する検討2017
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 橘航一朗, 寺西美波, 陳君怡, Tso-Fu Mark Chang, 曽根正人, 町田克之, 益一哉
- Organizer
  第78応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS慣性センサ用弛張発振型容量検出回路2017
- Author(s)
  高安基大, 道正志郎, 伊藤浩之, 山根大輔, 小西敏文, 町田克之, 石原昇, 益一哉
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討2017
- Author(s)
  小西敏文, 山根大輔, 佐布晃昭, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever2017
- Author(s)
  Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition2017
- Author(s)
  Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価2017
- Author(s)
  曽根正人, Tso-Fu Mark Chang, Chun-Yi Chen, 山根大輔, 小西敏文, 町田克之, 益一哉
- Organizer
  第63回国立大学共同利用・共同研究拠点知の拠点セミナー
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology2017
- Author(s)
  Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
- Organizer
  2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating2017
- Author(s)
  Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu, Shinichi Iida
- Organizer
  The 30th International Microprocesses and Nanotechnology Conference (MNC 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components2017
- Author(s)
  Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  TACT2017 International Thin Films Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS 加速度センサ用高分解能容量検出回路の評価2017
- Author(s)
  高安基大, 道正志郎, 伊藤浩之, 山根大輔, 小西敏文, 町田克之, 石原昇, 益一哉
- Organizer
  第8回集積化MEMS技術研究ワークショップ
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test2017
- Author(s)
  Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  43rd Micro and Nano Engineering (MNE2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討2017
- Author(s)
  橘航一朗, Tso-Fu Mark Chang, Chun-Yi Chen, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Strategies of Mechanical Strengthening in Electroplated Au Materials2017
- Author(s)
  Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるTi/Auめっき構造体のヤング率評価（２）2017
- Author(s)
  中島英亮, Tso-Fu Mark Chang, Chun-Yi Chen, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術による3軸MEMS加速度センサのばね定数設計方法2017
- Author(s)
  佐布晃昭, 小西敏文, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1mG Inertial Sensors by Multi-layer Metal Technology2017
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers2017
- Author(s)
  Masato Sone, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討2017
- Author(s)
  乙部翔太, 高安基大, 山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第34回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer2017
- Author(s)
  Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
- Organizer
  21st Topical Meeting of the International Society of Electrochemistry
- Place of Presentation
  Szeged, Hungary
- Year and Date
  2017-04-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors2017
- Author(s)
  Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu
- Organizer
  2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices2017
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  21th International Conference on Solid State Ionics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technolog2017
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu
- Organizer
  The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
- Place of Presentation
  Kaohsiung Exhibition Center, Kaohsiung, Taiwan
- Year and Date
  2017-06-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology2017
- Author(s)
  Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  2017 MRS Fall Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer2017
- Author(s)
  Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  21st Topical Meeting of the International Society of Electrochemistry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討2017
- Author(s)
  古賀達也, 辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討2017
- Author(s)
  折原恒祐, 高安基大, 道正志郎, 伊藤浩之, 山根大輔, 小西敏文, 石原昇, 町田克之, 益一哉
- Organizer
  第34回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices2017
- Author(s)
  Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Masato Sone, Kazuya Masu
- Organizer
  12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components2017
- Author(s)
  Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタルMEMS慣性センサの長期振動特性評価2017
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 橘航一朗, 寺西美波, 陳君怡, Tso-Fu Mark Chang, 曽根正人, 町田克之, 益一哉
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End2017
- Author(s)
  Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  43rd Micro and Nano Engineering (MNE2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 移動体制御による慣性センサ評価系の構築2017
- Author(s)
  權田惇晟, 高安基大, 山根大輔, 伊藤浩之, 小西敏文, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes2017
- Author(s)
  Hirofumi Niijima, Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
- Organizer
  The 30th International Microprocesses and Nanotechnology Conference (MNC 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討2017
- Author(s)
  小西敏文, 山根大輔, 佐布晃昭, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology2017
- Author(s)
  Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  2017 MRS Fall Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるMEMS慣性センサの傾斜時感度特性の検討2017
- Author(s)
  古賀達也, 辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS inertial sensors for biomedical applications2017
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, Kazuya Masu
- Organizer
  12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test2017
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  43rd Micro and Nano Engineering (MNE2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）2017
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 中島英亮, 寺西美波, 陳君怡, Tso-Fu Mark Chang, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components2017
- Author(s)
  Chun-Yi Chen, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  21th International Conference on Solid State Ionics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology2017
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu
- Organizer
  The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討2017
- Author(s)
  辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討2017
- Author(s)
  辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉
- Organizer
  第78応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討2017
- Author(s)
  鈴木拓真, Tso-Fu Mark Chang, Chun-Yi Chen, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術で作製したMEMS慣性センサのモジュール化の検討2017
- Author(s)
  高安基大, 權田惇晟, 山根大輔, 伊藤浩之, 小西敏文, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices2017
- Author(s)
  Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  43rd Micro and Nano Engineering (MNE2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いた高感度MEMS 傾斜計の検討2017
- Author(s)
  辻一平, 高安基大, 伊藤浩之, 山根大輔, 小西敏文, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第8回集積化MEMS技術研究ワークショップ
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide2016
- Author(s)
  Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
- Year and Date
  2016-09-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices2016
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討2016
- Author(s)
  小西敏文, 山根大輔, 佐布晃昭, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 微小引張試験片を用いたMEMS 用金めっき材料の機械的特性の評価2016
- Author(s)
  柳田佐理, Chang Tso-Fu Mark, Chen Chu-Yi, 名越貴志, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第33回センサ・マイクロマシンと応用シンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide2016
- Author(s)
  Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte2016
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] CMOS-MEMS慣性センサにおける機械的ノイズの解析手法2016
- Author(s)
  小西敏文, 山根大輔, 伊藤浩之, 道正志郎, 石原昇, 年吉洋, 益一哉, 町田克之
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 1mG以下検出へ向けた積層メタルMEMS加速度センサの基礎検討2016
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討2016
- Author(s)
  山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之
- Organizer
  電子情報通信学会2016年総合大会
- Place of Presentation
  九州大学伊都キャンパス、福岡県福岡市
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer2016
- Author(s)
  Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
- Year and Date
  2016-09-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 微小電子機械システムのための超臨界流体を用いた金属皮膜形成技術2016
- Author(s)
  曽根正人, Tso-Fu Mark Chang, Chun-yi Chen, 山根大輔, 益一哉, 町田克之
- Organizer
  第6回CSJ化学フェスタ
- Place of Presentation
  タワーホール船堀, 東京
- Invited
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Study of Railroad Vehicle Control by Inertial Sensors2016
- Author(s)
  Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Masakazu Sonobe, Takumi Kobayashi, Yamato Fukuta, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, Katsuyuki Machida
- Organizer
  11th World Congress on Railway Research
- Place of Presentation
  Milan, Italy
- Year and Date
  2016-05-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価2016
- Author(s)
  浅野啓介, 唐浩峻, Chen Chun-Yi, Chang Tso-Fu Mark, 名越貴志, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第33回センサ・マイクロマシンと応用シンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] RC発振器型高感度容量検出回路2016
- Author(s)
  高安基大, 道正志郎, 伊藤浩之, 石原昇, 山根大輔, 小西敏文, 町田克之, 益一哉
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるMEMS加速度センサのばね定数設計方法2016
- Author(s)
  佐布晃昭, 小西敏文, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 高感度MEMS 加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価2016
- Author(s)
  葭葉将治, Chen Chun-Yi, 名越貴志, Chang Tso-Fu Mark, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第33回センサ・マイクロマシンと応用シンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マイクロ曲げ試験による電析金薄膜の機械的特性評価2016
- Author(s)
  浅野啓介, 唐浩峻, Chen Chun-Yi, Chang Tso-Fu Mark, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer2016
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
- Year and Date
  2016-09-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル差動型MEMS加速度センサの基礎検討2016
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 道正志郎, 石原昇, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] RC発振器型容量検出回路の高感度化の検討2016
- Author(s)
  高安基大, 道正志郎, 伊藤浩之, 石原昇, 山根大輔, 益一哉
- Organizer
  電子情報通信学会ソサイエティ大会
- Place of Presentation
  北海道大学札幌キャンパス, 北海道
- Year and Date
  2016-09-20
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure2016
- Author(s)
  Yota Ishizuka, Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 差動型積層メタルMEMS加速度センサの検討2016
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications2016
- Author(s)
  Masato Sone, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu
- Organizer
  Integrative Biology-2016
- Place of Presentation
  Berlin, Germany
- Year and Date
  2016-07-18
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Design of Spring Constant Arranged for MEMS Accelerometer by Multi-layer Metal Technology2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida
- Organizer
  IEEE NEMS 2016
- Place of Presentation
  Matsushima Bay and Sendai, Miyagi, Japan
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 電解金めっきで作製した Ti/Au 微小カンチレバーの構造安定性2016
- Author(s)
  寺西美波, Chang Tso-Fu Mark, Chen Chun-Yi, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System2016
- Author(s)
  Toshifumi Konishi,Daisuke Yamane, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)
- Place of Presentation
  Tsukuba International Congress Center, Tsukuba, Japan
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer2016
- Author(s)
  Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  The 15th Symposium on Development of Supercritical Fluid Technology and Application and The 2nd International Workshop on Supercritical Fluid Dyeing Technology
- Place of Presentation
  Kaohsiung, Taiwan
- Year and Date
  2016-09-08
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法2016
- Author(s)
  小西敏文, 山根大輔, 伊藤浩之, 道正志郎, 石原昇, 年吉洋, 益一哉, 町田克之
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 小型高感度MEMS慣性センサモジュールの試作評価2016
- Author(s)
  高安基大, 權田惇晟, 山根大輔, 小西敏文, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  LSIとシステムのワークショップ
- Place of Presentation
  東京大学生産技術研究所総合研究実験棟(An棟) 2階コンベンションホール
- Year and Date
  2016-05-16
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マイクロ圧縮試験による MEMS 用金電気めっきの機械的特性の評価2016
- Author(s)
  葭葉将治, Chen Chun-Yi, Chang Tso-Fu Mark, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications2016
- Author(s)
  Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating2016
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices2016
- Author(s)
  Haochun Tang,Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価2016
- Author(s)
  曽根正人, Tso-Fu Mark Chang, 陳君怡, 山根大輔, 益一哉, 町田克之
- Organizer
  日本学術振興会・第172委員会
- Place of Presentation
  物質・材料研究機構, 茨城県つくば市
- Invited
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるMEMS加速度センサを用いた慣性センサモジュールの検討2016
- Author(s)
  權田惇晟, 高安基大, 山根大輔, 小西敏文, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1mG検出へ向けた積層メタルMEMS慣性センサ2016
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討2016
- Author(s)
  山根大輔, 小西敏文, 伊藤浩之, 年吉洋, 益一哉, 町田克之
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating2016
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  The 2016 PRiME Meeting
- Place of Presentation
  Hawaii, USA
- Year and Date
  2016-10-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A 1-mG MEMS Sensor2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  229th ECS Meeting
- Place of Presentation
  San Diego, CA, USA
- Year and Date
  2016-05-29
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology2016
- Author(s)
  Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  IEEE Sensors 2016
- Place of Presentation
  Orland, FL, USA
- Year and Date
  2016-10-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Hiroshi Toshiyohi, Kazuya Masu, Katsuyuki Machida
- Organizer
  Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016)
- Place of Presentation
  Kanazawa, Japan
- Year and Date
  2016-06-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida
- Organizer
  2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)
- Place of Presentation
  Tsukuba International Congress Center, Tsukuba, Japan
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）2016
- Author(s)
  佐布晃昭, 小西敏文, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マイクロ圧縮試験による金 / チタン積層構造の機械的特性評価2016
- Author(s)
  石塚陽大, 柳田佐理, Chang Tso-Fu Mark, Chen Chun-Yi, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices2016
- Author(s)
  Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
- Year and Date
  2016-09-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hideaki Nakajima, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  29th International Microprocesses and Nanotechnology Conference (MNC 2016)
- Place of Presentation
  ANA Crowne Plaza Kyoto, Kyoto, Japan
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  IEEE Inertial Sensors 2016
- Place of Presentation
  Laguna Beach, California, USA
- Year and Date
  2016-02-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Pulse Electroplating of Au Films with Ultra High Strength2016
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  229th ECS Meeting
- Place of Presentation
  San Diego, CA, USA
- Year and Date
  2016-05-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease2016
- Author(s)
  Kazuya Masu, Daisuke Yamane, Katsuyuki Machida, Masato Sone, Yoshihiro Miyake
- Organizer
  the 46th European Solid-State Device Re-search Conference (ESSDERC)
- Place of Presentation
  Swisstech Convention Centre, Lausanne, Switzerland
- Year and Date
  2016-09-12
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] CMOS低雑音オペアンプ設計法の検討2016
- Author(s)
  劉安琪, 小西敏文, 山根大輔, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  電子情報通信学会2016年総合大会
- Place of Presentation
  九州大学伊都キャンパス、福岡県福岡市
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers2016
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
- Organizer
  2nd International Conference and Expo on Separation Techniques
- Place of Presentation
  Valencia, Spain
- Year and Date
  2016-09-26
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Struct2016
- Author(s)
  Yota Ishizuka, Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価2016
- Author(s)
  寺西美波, Chang Tso-Fu Mark, Chen Chun-Yi, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人
- Organizer
  第33回センサ・マイクロマシンと応用シンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating2015
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  41st Micro and Nano Engineering (MNE2015)
- Place of Presentation
  Hague, Netherlands
- Year and Date
  2015-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 電解金めっきで作製した微小カンチレバーの形状安定性評価2015
- Author(s)
  寺西美波, Chang Tso-Fu Mark, 山根大輔, 小西敏文, 松島隆明, 伊藤浩之, 年吉洋, 町田克之, 益一哉, 曽根正人
- Organizer
  平成27年電気学会センサ・マイクロマシン部門総合研究会
- Place of Presentation
  九州大学医学部百年講堂、福岡県福岡市
- Year and Date
  2015-07-02
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] ゲイン制御型CMOS-MEMS加速度センサ回路の検討2015
- Author(s)
  小西敏文, 山根大輔, 高安基大, 伊藤浩之, 道正志郎, 石原昇, 益一哉, 年吉洋, 町田克之
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場愛知県名古屋市
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Compression Deformation of Micro-components Fabricated by FIB from Gold Electrodeposited Films2015
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  International Symposium for Advanced Materials Research (ISAMR 2015)
- Place of Presentation
  Sun Moon Lake, Taiwan
- Year and Date
  2015-08-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Micro-Mechanical Properties of Electrodeposited Gold Thin Films2015
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  TACT 2015 International Thin Films Conference
- Place of Presentation
  Tainan, Taiwan
- Year and Date
  2015-11-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1G～20G集積化MEMS加速度センサの基本評価2015
- Author(s)
  山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場愛知県名古屋市
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Sub-1G MEMS Inertial Sensor2015
- Author(s)
  Daisuke Yamane, Kazuya Masu, Katsuyuki Machida
- Organizer
  International Symposium for Advanced Materials Research (ISAMR 2015)
- Place of Presentation
  Sun Moon Lake, Taiwan
- Year and Date
  2015-08-16
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1G～20G集積化MEMS慣性センサ2015
- Author(s)
  山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之
- Organizer
  第7回集積化MEMSシンポジウム
- Place of Presentation
  新潟コンベンションセンター（朱鷺メッセ）、新潟県新潟市
- Year and Date
  2015-10-28
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Sub-1G MEMS Sensor2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  the 227th ECS Meeting
- Place of Presentation
  Chicago, Illinois, USA
- Year and Date
  2015-05-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 電解金めっきで作製したMEMSデバイスにおける動作構造安定性2015
- Author(s)
  寺西美波, Chang Tso-Fu Mark, 小西敏文, 松島隆明, 町田克之, 年吉洋, 山根大輔, 伊藤浩之, 益一哉, 曽根正人
- Organizer
  第6回集積化MEMS技術研究ワークショップ
- Place of Presentation
  NHK放送技術研究所、東京都世田谷区
- Year and Date
  2015-07-31
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Sub-1G CMOS-MEMS Accelerometer2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  IEEE Sensors 2015
- Place of Presentation
  Busan, South Korea
- Year and Date
  2015-11-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Nano-G metrology system and its biomedical applications by CMOS-MEMS technology2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu
- Organizer
  3rd International Conference on Integrative Biology
- Place of Presentation
  Valencia, Spain
- Year and Date
  2015-08-04
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-2015
- Author(s)
  Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu
- Organizer
  2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-04-14
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Study on Ti/Au Two-Layered Cantilevers with Different Aspect Ratio for MEMS Devices2015
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  2015 International Conference on Solid State Devices and Materials (SSDM 2015)
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2015-09-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test2015
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tsu-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  41st Micro and Nano Engineering (MNE2015)
- Place of Presentation
  Hague, Netherlands
- Year and Date
  2015-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer2015
- Author(s)
  Toshifumi Konishi, Daisuke Yamane, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, Hiroshi Toshiyoshi, Katsuyuki Machida
- Organizer
  2015 International Conference on Solid State Devices and Materials (SSDM 2015)
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2015-09-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida
- Organizer
  2015 International Conference on Solid State Devices and Materials (SSDM 2015)
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2015-09-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS加速度センサのための金属構造体の密着力評価2015
- Author(s)
  佐布晃昭, 小西敏文, 松島隆明, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場愛知県名古屋市
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Stability of Movable Structure Formed by Au Electroplating for MEMS Devices2015
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Hiroyuki Ito, Kazuya Masu, Tatsuo Sato, Masato Sone
- Organizer
  8th Int. Conf. on Materials for Advanced Technologies (ICMAT 2015)
- Place of Presentation
  SUNTEC, Singapore
- Year and Date
  2015-06-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討2015
- Author(s)
  小西敏文, 山根大輔, 高安基大, 伊藤浩之, 道正志郎, 石原昇, 益一哉, 年吉洋, 町田克之
- Organizer
  第7回集積化MEMSシンポジウム
- Place of Presentation
  新潟コンベンションセンター（朱鷺メッセ）、新潟県新潟市
- Year and Date
  2015-10-28
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Mechanical Properties of Electrodeposited Gold for MEMS Device2015
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  2015 International Conference on Solid State Devices and Materials (SSDM 2015)
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2015-09-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  41st Micro and Nano Engineering (MNE2015)
- Place of Presentation
  Hague, Netherlands
- Year and Date
  2015-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, Katsuyuki Machida
- Organizer
  5th Advanced Metallization Conference Asian Session (ADMETAplus2015)
- Place of Presentation
  Seoul, Korea
- Year and Date
  2015-09-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers2015
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  41st Micro and Nano Engineering (MNE2015)
- Place of Presentation
  Hague, Netherlands
- Year and Date
  2015-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, Katsuyuki Machida
- Organizer
  32nd Advanced Metallization Conference (AMC2015)
- Place of Presentation
  Austin, Texas, US
- Year and Date
  2015-09-09
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS加速度センサのための金属構造体の密着力評価2015
- Author(s)
  佐布晃昭, 小西敏文, 松島隆明, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第7回集積化MEMSシンポジウム
- Place of Presentation
  新潟コンベンションセンター（朱鷺メッセ）、新潟県新潟市
- Year and Date
  2015-10-28
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS for sensing sub-1G2014
- Author(s)
  Daisuke Yamane, Katsuyuki Machida, Kazuya Masu
- Organizer
  The First Joint Workshop on Electrical Engineering between Tokyo Tech & KAIST
- Place of Presentation
  KAIST, Daejeon（韓国）
- Year and Date
  2014-11-21
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] 積層メタルによる静電容量型3軸加速度センサの基礎検討2014
- Author(s)
  松島隆明, 小西敏文, 山根大輔, 亀井将太, 年吉洋, 益一哉, 町田克之
- Organizer
  応用物理学会集積化MEMS技術研究会　第5回集積化MEMS技術研究ワークショップ
- Place of Presentation
  豊橋技術科学大学（愛知県豊橋市）
- Year and Date
  2014-07-11
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] 集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ2014
- Author(s)
  山根大輔, 亀井将太, 小西敏文, 松島隆明, 年吉洋, 益一哉, 町田克之
- Organizer
  応用物理学会集積化MEMS技術研究会　第5回集積化MEMS技術研究ワークショップ
- Place of Presentation
  豊橋技術科学大学（愛知県豊橋市）
- Year and Date
  2014-07-11
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 年吉洋, 町田克之, 益一哉
- Organizer
  第62回応用物理学会春季学術講演会、分科企画シンポジウム
- Place of Presentation
  東海大学湘南キャンパス（神奈川県平塚市）
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] Au積層形成技術による3軸MEMS加速度センサの検討
- Author(s)
  松島隆明, 山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之
- Organizer
  応用物理学会集積化MEMS技術研究会　第6回集積化MEMSシンポジウム
- Place of Presentation
  くにびきメッセ（島根県松江市）
- Year and Date
  2014-10-20 – 2014-10-22
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] A Sub-1G MEMS Sensor
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  the 227th ECS Meeting
- Place of Presentation
  Chicago, Illinois（米国）
- Year and Date
  2015-05-24 – 2015-05-28
- Invited
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] 1mG-to-20G Integrated MEMS Inertial Sensor
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  IEEE SENSORS 2014
- Place of Presentation
  Valencia Conference Center, Valencia（スペイン）
- Year and Date
  2014-11-02 – 2014-11-05
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
- Organizer
  2014 IEEE International Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC 2014)
- Place of Presentation
  San Jose, CA（米国）
- Year and Date
  2014-05-20 – 2014-05-23
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  Int. Conf. on Solid-State Devices and Materials (SSDM 2014)
- Place of Presentation
  Tsukuba International Congress Center（茨城県つくば市）
- Year and Date
  2014-09-08 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] 集積化CMOS-MEMS技術によるSub-1G加速度センサの基礎検討
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 年吉洋, 益一哉, 町田克之
- Organizer
  応用物理学会集積化MEMS技術研究会　第6回集積化MEMSシンポジウム
- Place of Presentation
  くにびきメッセ（島根県松江市）
- Year and Date
  2014-10-20 – 2014-10-22
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer
- Author(s)
  Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
- Organizer
  Symp. on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014)
- Place of Presentation
  Cannes, Cote d'Azur（フランス）
- Year and Date
  2014-04-01 – 2014-04-04
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
- Organizer
  7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014)
- Place of Presentation
  EXCO, Daegu（韓国）
- Year and Date
  2014-06-29 – 2014-07-02
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] 集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討
- Author(s)
  山根大輔, 松島隆明, 小西敏文, 年吉洋, 町田克之, 益一哉
- Organizer
  平成26年電気学会センサ・マイクロマシン部門総合研究会
- Place of Presentation
  東京大学生産技術研究所（東京都目黒区）
- Year and Date
  2014-05-27 – 2014-05-28
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-
- Author(s)
  Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu
- Organizer
  2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015)
- Place of Presentation
  Kyoto Terrsa, Kyoto（日本）
- Year and Date
  2015-04-14 – 2015-04-17
- Invited
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] 積層メタル構造による３軸加速度センサの検討
- Author(s)
  松島隆明, 小西敏文, 山根大輔, 年吉洋, 益一哉, 町田克之
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス（北海道札幌市）
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] 高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 亀井将太, 益一哉, 町田克之
- Organizer
  応用物理学会集積化MEMS技術研究会　第6回集積化MEMSシンポジウム
- Place of Presentation
  くにびきメッセ（島根県松江市）
- Year and Date
  2014-10-20 – 2014-10-22
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] Sub-1G検出可能な3軸MEMS加速度センサの基礎検討
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 年吉洋, 町田克之, 益一哉
- Organizer
  平成27年電気学会全国大会
- Place of Presentation
  東京都市大学世田谷キャンパス（東京都世田谷区）
- Year and Date
  2015-03-24 – 2015-03-26
- Data Source
  KAKENHI-PROJECT-25630138
[Presentation] 集積化CMOS－MEMS加速度センサへ向けたsub-1G静電容量型センサの検討
- Author(s)
  亀井将太, 山根大輔, 小西敏文, 松島隆明, 年吉洋, 町田克之, 益一哉
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス（北海道札幌市）
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-25630138

1. GODA Keisuke (70518696)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
2. MASU Kazuya (20157192)

# of Collaborated Projects: 1 results

# of Collaborated Products: 157 results
3. MACHIDA Katsuyuki (90597676)

# of Collaborated Projects: 1 results

# of Collaborated Products: 154 results
4. SONE Masato (30323752)

# of Collaborated Projects: 1 results

# of Collaborated Products: 112 results
5. 水野洋輔 (30630818)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 李ひよん (30870787)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 市毛弘一 (10313470)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 田中有弥 (90780065)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. CHANG tsu-fu mark

# of Collaborated Projects: 0 results

# of Collaborated Products: 9 results

Yamane Daisuke 山根 大輔

YAMANE Daisuke 山根 大輔

Research Projects

Research Products

Co-Researchers

Charge-Free Electrostatic MEMS Vibration Energy Harvester for Sensor/LSI IntegrationPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

光ファイバ型相関領域反射計による歪・温度の高速分布測定：極限性能の追究と実用化

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of MEMS Self-Destruction Design Technology for Secure IoT DevicesPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of Nano-G Detection Method using Electroplated Au-Alloy with Controlled Crystal StructurePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

High-throughput decontamination technology for autologous hematopoietic stem-cell transplantation

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

A study on NEMS-Casimir multifunction sensorsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

CMOSとMEMS／NEMSの融合による超小型・高光度テラヘルツ連続波光源の研究Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Book] Advances in Microelectronics: Reviews, Vol. 1, "Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors"2018

Author(s)

Total Pages

Publisher

ISBN

Data Source

[Journal Article] Effect of current density on micro-mechanical property of electrodeposited gold film evaluated by micro-compression2022

Author(s)

Journal Title

DOI

Data Source

[Journal Article] IoT電源への期待 環境振動発電素子の小型化・高出力化とEMC2022

Author(s)

Journal Title

Data Source

[Journal Article] 荷電処理不要の静電型ＭＥＭＳ振動発電素子2022

Author(s)

Journal Title

Data Source

[Journal Article] Bandwidth Broadening of MEMS Vibration Energy Harvesters by Voltage-Boost Rectifier Circuit2022

Author(s)

Journal Title

Data Source

[Journal Article] Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency2021

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Energy Harvesting from Non-Stationary Vibrations Using a Low-Threshold Voltage-Boost Rectifier Circuit2021

Author(s)

Journal Title

DOI

NAID

Yamane Daisuke 山根大輔

YAMANE Daisuke 山根大輔

[Journal Article] IoT電源への期待　環境振動発電素子の小型化・高出力化とEMC2022