Takeuchi Masaya 竹内雅耶

… Alternative Names

竹内雅耶タケウチマサヤ

Less

Researcher Number	70889683
Other IDs
Affiliation (Current)	2026: 地方独立行政法人大阪産業技術研究所, 和泉センター, 研究員
Affiliation (based on the past Project Information) *help	2026: 兵庫県立大学, 工学研究科, 助教 2022 – 2024: 兵庫県立大学, 工学研究科, 助教
Review Section/Research Field	Principal Investigator Basic Section 34020:Analytical chemistry-related / Basic Section 18020:Manufacturing and production engineering-related Except Principal Investigator Basic Section 18020:Manufacturing and production engineering-related
Keywords	Principal Investigator 原子層エッチング / Ｘ線光電子顕微鏡 / X線光電子分光 / 液体セル / 光電子顕微鏡 / 窒化シリコン / ガスクラスターイオンビーム Except Principal Investigator 位置制御 / ガスクラスターイオン / 原子層エッチング / 高精度加工 / エッチング / クラスタービーム

固液界面解析に向けた放射光PEEMによるオペランド観察法の提案Principal Investigator
- Principal Investigator
  
  竹内雅耶
- Project Period (FY)
  2026 – 2028
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 34020:Analytical chemistry-related
- Research Institution
  University of Hyogo
Atomic Layer Etching with Position Controlled Cluster Beams for Ultrahigh-Precision Shape Engineering
- Principal Investigator
  
  Toyoda Noriaki
- Project Period (FY)
  2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  University of Hyogo
ジケトン分子吸着過程およびガスクラスターイオンビーム照射による表面反応過程の解明Principal Investigator
- Principal Investigator
  
  竹内雅耶
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  University of Hyogo

All 2025 2024 2023 2022

All Journal Article Presentation

[Journal Article] Surface stress modification of silicon nitride film via argon gas cluster ion beam2025
- Author(s)
  Takeuchi Masaya、Toyoda Noriaki
- Journal Title
  
  MRS Advances
  
  Volume: 10 Issue: 2 Pages: 229-233
- DOI
  10.1557/s43580-025-01176-0
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K22649, KAKENHI-PROJECT-23K13236
[Journal Article] Pressure resistance evaluation of an ultrathin SiNx membrane etched by a gas cluster ion beam2024
- Author(s)
  Takeuchi Masaya、Toyoda Noriaki
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  
  Volume: 550 Pages: 165317-165317
- DOI
  10.1016/j.nimb.2024.165317
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K22649, KAKENHI-PROJECT-23K13236
[Journal Article] Highly sensitive electron-beam-induced X-ray detection from liquid using SiNx membrane ultra-thinned by gas cluster ion beams2024
- Author(s)
  Takeuchi Masaya、Suzuki Satoru、Nakamura Masaki、Hata Takashi、Nishiuchi Yusuke、Tada Kaori、Toyoda Noriaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 63 Issue: 7 Pages: 07SP04-07SP04
- DOI
  10.35848/1347-4065/ad555f
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-23K22649, KAKENHI-PROJECT-22K04930, KAKENHI-PROJECT-23K13236
[Journal Article] High Sensitivity of Energy Dispersive X-Ray Spectroscopy Measurement Using Liquid Cell with Electron Transmittance Window Ultra-Thinned by a Gas Cluster Ion Beam2024
- Author(s)
  Takeuchi Masaya、Suzuki Satoru、Toyoda Noriaki
- Journal Title
  
  ECS Meeting Abstracts
  
  Volume: MA2024-02 Issue: 60 Pages: 4044-4044
- DOI
  10.1149/ma2024-02604044mtgabs
- Open Access
- Data Source
  KAKENHI-PROJECT-23K22649, KAKENHI-PROJECT-22K04930
[Journal Article] Atomic layer etching of silicon nitride film by oxygen gas cluster ion beam with acetylacetone2023
- Author(s)
  Takeuchi Masaya、Fujiwara Reki、Toyoda Noriaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 62 Issue: SG Pages: SG1051-SG1051
- DOI
  10.35848/1347-4065/acd065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K13236, KAKENHI-PROJECT-23K22649
[Journal Article] Surface preparation of metal films by gas cluster ion beams using organic acid vapor for Cu?Cu bonding2022
- Author(s)
  S. Hanahara、M. Takeuchi、N. Toyoda
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SF Pages: SF1004-SF1004
- DOI
  10.35848/1347-4065/ac5424
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 液体X-ray PEEM測定の高空間分解能化に向けた O2-GCIB照射による電子透過窓の応力制御2025
- Author(s)
  竹内雅耶, 豊田紀章
- Organizer
  第72回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K13236
[Presentation] GCIB を用いたクライオエッチングにおける反応性ガス供給法依存性2025
- Author(s)
  伊藤汰一、北中晴也、竹内雅耶、豊田紀章
- Organizer
  応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] X-ray PEEM測定用液体セルに向けたGCIB照射による極薄SiNxメンブレンの応力制御2024
- Author(s)
  竹内雅耶, 豊田亜里紗, 豊田紀章
- Organizer
  第85回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K13236
[Presentation] 反応性ガス吸着とGCIB照射を用いたエッチングにおける基板冷却効果2024
- Author(s)
  伊藤汰一,作田昂大,竹内雅耶,豊田紀章
- Organizer
  2024年応用物理学会春季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] GCIB照射で極薄化した電子線透過窓を用いた液体セルによるSEM/EDS検出の高感度化2024
- Author(s)
  竹内雅耶, 鈴木哲, 豊田紀章
- Organizer
  第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K13236
[Presentation] Cryogenic temperature dependence of SiO2 etching using gas cluster ion beam irradiation under a reactive gas atmospher2024
- Author(s)
  Taichi Ito, Masaya Takeuchi, Noriaki Toyoda
- Organizer
  VASSCAA-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 液体、気体、生物試料の真空中分析2024
- Author(s)
  三木悠平, 江口智己, 中村雅基, 竹内雅耶, 秦隆志, 西内悠祐, 多田佳織, 鈴木哲
- Organizer
  第84回分析化学討論会
- Data Source
  KAKENHI-PROJECT-23K13236
[Presentation] 反応性ガス雰囲気下GCIB照射によるエッチングのガス分圧および基板温度依存性2024
- Author(s)
  伊藤汰一、竹内雅耶、豊田紀章
- Organizer
  応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 中性ガスクラスタービームを用いたCu膜のドライALE2024
- Author(s)
  池田　圭佑, 田中　秀幸, 竹内　雅耶, 豊田　紀章
- Organizer
  2024年応用物理学会春季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] High Sensitivity of Energy Dispersive X-Ray Spectroscopy Measurement Using Liquid Cell with Electron Transmittance Window Ultra-Thinned by a Gas Cluster Ion Beam2024
- Author(s)
  Masaya Takeuchi, Satoru Suzuki, Noriaki Toyoda
- Organizer
  ECS meeting Prime2024
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K13236
[Presentation] Investigation of modification process of SiNx film by a gas cluster ion beam irradiation2024
- Author(s)
  Masaya Takeuchi, Noriaki Toyoda
- Organizer
  24th International Conference on Ion Implantation Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K13236
[Presentation] GCIB照射で極薄化した電子線透過窓を用いた液体セルによるSEM/EDS検出の高感度化2024
- Author(s)
  竹内雅耶，鈴木哲，豊田紀章
- Organizer
  2024年応用物理学会春季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] Imaging and spectroscopy of liquid-water using X-ray PEEM2023
- Author(s)
  Masaya Takeuchi, Noriaki Toyoda, Satoru Suzuki
- Organizer
  Frontier of Soft X-ray Spectroscopy for Chemical Processes in Solutions
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K13236
[Presentation] Reactive etching and pressure resistance evaluation of SiNx film by O2-GCIB for electron transmission window of liquid cell2023
- Author(s)
  Masaya Takeuchi, Satoru Suzuki, Masaki Nakamura, Takashi Hata, Yusuke Nishiuchi, Kaori Tada, Noriaki Toyoda
- Organizer
  MNC2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K13236
[Presentation] Evaluation of mechanical property of ultra-thin SiNx membranes irradiated by gas cluster ion beam2023
- Author(s)
  M. Takeuchi, N. Toyoda
- Organizer
  21st International Conference on Radiation Effects in Insulators
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K13236
[Presentation] Evaluation of mechanical property of ultra-thin SiNx membranes irradiated by gas cluster ion beam2023
- Author(s)
  M. Takeuchi, N. Toyoda
- Organizer
  Radiation Effects in Insulator 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] Surface Modification with Neutral Gas Cluster Beams and Its Application to Atomic Layer Etching2023
- Author(s)
  N. Toyoda, H. Tanaka, M. Takeuchi
- Organizer
  Atomic Layer Etching Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] GCIBを用いた電子透過窓極薄化による液中試料検出の高感度化2023
- Author(s)
  竹内雅耶，鈴木哲，豊田紀章
- Organizer
  2023年応用物理学会秋季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 反応性ガス吸着とO 2 -GCIBを用いたNiパターンエッチング2023
- Author(s)
  作田昂大、竹内雅耶、豊田紀章
- Organizer
  2023年第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 2023年中性クラスタービーム照射による金属膜のエッチング2023
- Author(s)
  田中秀幸、竹内雅耶、豊田紀章
- Organizer
  応用物理学会秋季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] GCIBを用いた電子透過窓極薄化による液中試料検出の高感度化2023
- Author(s)
  竹内雅耶, 鈴木哲, 豊田紀章
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K13236
[Presentation] 反応性ガス吸着とO2-GCIB照射を用いた金属エッチングの基板冷却効果2023
- Author(s)
  作田昂大、竹内雅耶、豊田紀章
- Organizer
  2023年応用物理学会秋季講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] Surface modification and etching of metal films by neutral cluster beam irradiation2023
- Author(s)
  H. Tanaka, M. Takeuchi, N.Toyoda
- Organizer
  Dry Process Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] Temperature dependence on metal etching using reactive gas adsorption and GCIB2023
- Author(s)
  K. Sakuta, M. Takeuchi, N. Toyoda
- Organizer
  Dry Process Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] O 2 -GCIBとアセチルアセトンによるSiNx膜原子層エッチングプロセスの反応機構の検討2023
- Author(s)
  竹内雅耶、藤原怜輝、山下大晴、豊田紀章
- Organizer
  2023年第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] Reactive etching and pressure resistance evaluation of SiNx film by O2-GCIB for electron transmission window of liquid cell2023
- Author(s)
  M. Takeuchi, S. Suzuki, M. Nakamura, T. Hata, N. Toyoda
- Organizer
  MNC 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] O2-GCIBとacac吸着によるNiパターンのエッチング2022
- Author(s)
  作田昂大、竹内雅耶、豊田紀章
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 位置制御とGCIB-ALEを用いた高精度形状加工技術の検討2022
- Author(s)
  藤原怜輝、竹内雅耶、豊田紀章
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 窒化シリコン膜へのGCIB照射による低損傷照射効果の検討2022
- Author(s)
  竹内雅耶、藤原怜輝、豊田紀章
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649
[Presentation] 窒化シリコン膜の低損傷かつ原子層制御を実現するGCIBエッチングプロセスの検討2022
- Author(s)
  竹内雅耶、藤原怜輝、豊田紀章
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22649

1. Toyoda Noriaki (00382276)

# of Collaborated Projects: 1 results

# of Collaborated Products: 25 results
2. 寺岡有殿 (10343922)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Takeuchi Masaya 竹内 雅耶

竹内 雅耶 タケウチ マサヤ

Research Projects

Research Products

Co-Researchers

固液界面解析に向けた放射光PEEMによるオペランド観察法の提案Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Atomic Layer Etching with Position Controlled Cluster Beams for Ultrahigh-Precision Shape Engineering

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

ジケトン分子吸着過程およびガスクラスターイオンビーム照射による表面反応過程の解明Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Journal Article] Surface stress modification of silicon nitride film via argon gas cluster ion beam2025

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Pressure resistance evaluation of an ultrathin SiNx membrane etched by a gas cluster ion beam2024

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Highly sensitive electron-beam-induced X-ray detection from liquid using SiNx membrane ultra-thinned by gas cluster ion beams2024

Author(s)

Journal Title

DOI

Data Source

[Journal Article] High Sensitivity of Energy Dispersive X-Ray Spectroscopy Measurement Using Liquid Cell with Electron Transmittance Window Ultra-Thinned by a Gas Cluster Ion Beam2024

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Atomic layer etching of silicon nitride film by oxygen gas cluster ion beam with acetylacetone2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Surface preparation of metal films by gas cluster ion beams using organic acid vapor for Cu?Cu bonding2022

Author(s)

Journal Title

DOI

Data Source

[Presentation] 液体X-ray PEEM測定の高空間分解能化に向けた O2-GCIB照射による電子透過窓の応力制御2025

Author(s)

Organizer

Data Source

[Presentation] GCIB を用いたクライオエッチングにおける反応性ガス供給法依存性2025

Author(s)

Organizer

Data Source

[Presentation] X-ray PEEM測定用液体セルに向けたGCIB照射による極 薄SiNxメンブレンの応力制御2024

Author(s)

Organizer

Data Source

[Presentation] 反応性ガス吸着とGCIB照射を用いたエッチングにおける基板冷却効果2024

Author(s)

Organizer

Data Source

[Presentation] GCIB照射で極薄化した電子線透過窓を用いた液体セルによるSEM/EDS検出の高感度化2024

Author(s)

Organizer

Data Source

[Presentation] Cryogenic temperature dependence of SiO2 etching using gas cluster ion beam irradiation under a reactive gas atmospher2024

Author(s)

Organizer

Data Source

[Presentation] 液体、気体、生物試料の真空中分析2024

Author(s)

Organizer

Takeuchi Masaya 竹内雅耶

竹内雅耶タケウチマサヤ

[Presentation] X-ray PEEM測定用液体セルに向けたGCIB照射による極薄SiNxメンブレンの応力制御2024

[Presentation] GCIB照射で極薄化した電子線透過窓を用いた液体セルによるSEM/EDS検出の高感度化2024

[Presentation] GCIBを用いた電子透過窓極薄化による液中試料検出の高感度化2023