TAGAWA Seiichi 田川精一

… Alternative Names

Researcher Number	80011203
External Links
Affiliation (based on the past Project Information) *help	2011: 大阪大学, 産業科学研究所, 特任教授 1993 – 2008: 大阪大学, 産業科学研究所, 教授 1999: 大阪大学・産業科学研究所 1992: 東京大学, 原子力研究総合センター, 助教授 1989: 東京大学, 原子力研究総合センター, 助教授 … More
Review Section/Research Field	Principal Investigator Nuclear engineering / Nuclear engineering Except Principal Investigator Nuclear engineering / エネルギー学一般・原子力学 / Nuclear engineering / Nuclear engineering / 物理化学一般
Keywords	Principal Investigator パルスラジオリシス / 過渡吸収 / ピロール / ラジカル重合反応 / ラジカルカチオン / フェニルアセチレン / ラジカルアニオン / ポリシラン / ポリアセチレン / 放射線 … More Except Principal Investigator パルスラジオリシス / イオンビーム / ポリシラン / 陽電子 / Geminate Ion Recombination / アルカン / SiC / Alkane / ジェミネートイオン再結合 / Cation Radical / 放射線分解初期過程 / 陽電子寿命 / 放射線化学 / ピコ秒パルスラジオリシス / スモルコフスキー方程式 / Smoluchowski equation / Polysilane / 電子 / Primary Processes / Picosecond Pulse Radiolysis / Electron / カチオンラジカル / 波動関数 / Sバラメーター / RADIATION EFFECTS / 電子ライナツク / 超高速結晶化 / 高エネルギーイオンビーム / Ultrafast measurement / double-decker electron beams / 希ガス固体 / Electron linear accelerator / time-resolved spectroscopy / 高分子薄膜 / イオン反応過程 / 高速中性子源炉 / 熱分析 / Ion Beam / 初期イオン化・励起過程 / Synchronization / 結晶性 / attosecond electron beam / 両親媒性 / 両親媒性物質 / 放射線照射効果 / アレイ電極 / ダブルデッカー電子加速器 / Sパラメーター / リモデレーター / 高速中性子テレビジョン / Radiation Chemistry / 高エネルギービーム / レーザー同期 / 生体高分子 / Single Event / 電子反応過程 / free water / 高分子 / 網目構造 / 金属還元 / 表面・界面反応 / Ion Track / 励起原子分子反応過程 / swelling proccess / 液体アルゴン泡箱 / 放出粒子 / positron / フェムト秒電子パルス / ultrafast reactions / Positronium / 過渡吸収スペクトル / diffrerncial scanning calorimetry / 発光スペクトル / Nanowire / ナノ材料 / solid rare gas / 生体軟組織 / POLYMER THIN FILM / ポジトロニウム / femtosecond electron beam / 計測工学 / 国際共同研究 / 高密度励起 / 高感度テレビカメラ / 過冷却溶融層 / 陽電子寿命測定法 / ナノワイヤー / Nanostructure / 生体組織 / 放射線化学初期過程 / ナノ空間構造 / 欠陥反応 / イオン励起発光 / Photoconductivity / サブフェムト秒電子線励起時間分解吸収分光 / サブフェムト秒電子パルス / Sパラメータ / アト秒電子パルス / 光電子増倍管 / 吸収線量 / free volume hole radius / 紫外吸収スペクトル / ラジカル反応過程 / Langmuir-Blodgett Film / 自由体積空孔半径 / 培養マトリクス / photocathode rf gun / Pulsed positron beam / 動径分布関数 / アト秒電子線励起時間分解吸収分光 / 自己捕獲励起子 / パルスビーム / 量子ビーム / イオントラック / crystalline / 自由水 / 高速中性子ラジオグラフィ / ダブルデッカー電子ビーム / アト秒電子線連記時間分解吸収分光 / Positron / ナノ粒子 / biopolymer gel / 拡散距離 / ゼラチン / positron annihilation lifetime spectroscopy / 結合水 / 膨潤過程 / Multiple irradiation / 超低エネルギーEB / 電子線励起時間分解吸収分光 / ナノ加工 / Amphiphile / 両親媒性ポリシラン / Amphiphilic Polysilane / PMPS / フェムト秒レーザー / 照射効果 / ヘテロエピタキシャル成長 / POLYSILANE / positron lifetime / フォトカソードRF電子銃加速器 / 光伝導性 / シングルイベント / HIGH ENERGY ION BEAM / コラーゲン / molecular dynamics simulation / 電子励起 / ヘリックス構造 / ナノチューブ / 特異反応 / 電荷移動反応 / 複合照射 / フォトカソードRF電子銃 / ナノ構造 / ダブルテッカー電子加速器 / remoderator / 蛍光コンバーター / 高励起 / helix dtructure / ラングミュア・ブロジェット膜 / ゲル化 / イオンビーム照射 / リモデレータ / 自由体積 / 超微細構造体 / bound water / 量子線プロセス / 時間分解呼吸分光 / 超高速反応解析 / 分子動力学 / UV Spectrum / Nanotube / EMISSION SPECTRA / Charge Transfer Reaction / 生体高分子ゲル / 表面構造変化 / 高品質電子ビーム / プラズマ / 架橋 / LB膜 / レーザー照射 / マイクロアレイ / 陽電子消滅法 / S-parameter / pulse radiolysis / F中心 / free volume Less

Fabrication of Multi Nano-array Electrodes with High Aspect Ratio Using Quantum Beam Irradiation
- Principal Investigator
  
  OSHIMA Akihiro
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Nuclear engineering
- Research Institution
  Osaka University
Femtosecond Pulse Radiolysis Study on Nanoscale Time Space Reaction ProcessPrincipal Investigator
- Principal Investigator
  
  TAGAWA Seiichi
- Project Period (FY)
  2005 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Nuclear engineering
- Research Institution
  Osaka University
Sub-femtosecond/attosecond pulse radiolysis study
- Principal Investigator
  
  YOSHIDA Youichi
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Nuclear engineering
- Research Institution
  Osaka University
Femtosecond pulse radiolysis study on reaction mechanism induced in nanostructuresPrincipal Investigator
- Principal Investigator
  
  TAGAWA Seiichi
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Nuclear engineering
- Research Institution
  Osaka University
Nano-structural Analysis of Biopolymer Gels Using Positron Annihilation Lifetime Spectroscopy
- Principal Investigator
  
  NISHIJIMA Sigehiro
- Project Period (FY)
  2002 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Nuclear engineering
- Research Institution
  Osaka University
Nanowire Formation by High Energy Particles in Conjugated Polymer Materials
- Principal Investigator
  
  SEKI Shuhei
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Nuclear engineering
- Research Institution
  Osaka University
主鎖・側鎖にヘテロ元素を有する非炭素骨格高分子の電子物性Principal Investigator
- Principal Investigator
  
  田川精一
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Osaka University
Study on primary processes of radiation chemistry in aqueous solutions using femtosecond quantum multibeamsPrincipal Investigator
- Principal Investigator
  
  TAGAWA Seiichi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Nuclear engineering
- Research Institution
  Osaka University
Investigation of free volume in polymer by using synchronized irradiation technique of pulsed positron beam and laser
- Principal Investigator
  
  HONDA Yoshihide
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nuclear engineering
- Research Institution
  Osaka University
低温固相重合反応におけるトンネル効果の研究Principal Investigator
- Principal Investigator
  
  田川精一
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Osaka University
主鎖・側鎖にヘテロ元素を有する非炭素骨格高分子の電子物性Principal Investigator
- Principal Investigator
  
  田川精一
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Osaka University
Development of positron remoderator with solid rare-gas
- Principal Investigator
  
  NISHIJIMA Shigehiro
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nuclear engineering
- Research Institution
  Osaka University
低温固相重合反応におけるトンネル効果の研究Principal Investigator
- Principal Investigator
  
  田川精一
- Project Period (FY)
  1997
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Osaka University
主鎖・側鎖にヘテロ元素を有する非炭素骨格高分子の電子物質Principal Investigator
- Principal Investigator
  
  田川精一
- Project Period (FY)
  1997
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Osaka University
Study of Primary Processes of Radiation Chemistry by using Laser-Synchronized Pulse Radiolysis
- Principal Investigator
  
  YOSHIDA Yoichi
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  エネルギー学一般・原子力学
- Research Institution
  Osaka University
低温固相重合反応におけるトンネル効果の研究Principal Investigator
- Principal Investigator
  
  田川精一
- Project Period (FY)
  1996
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Osaka University
Primary Decomposition Processes of Liquid Alkanes Studied by Picosecond Pulse Radiolysis
- Principal Investigator
  
  YOSHIDA Yoichi
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  エネルギー学一般・原子力学
- Research Institution
  Osaka University
STUDY OF CHEMICAL REACTION MECHANISM OF INSIDE AND SURFACE OF SOLID BY ION-BEAM IRRADIALATION
- Principal Investigator
  
  SHIBATA Hiromi
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  エネルギー学一般・原子力学
- Research Institution
  THE UNIVERSITY OF TOKYO
Molecular Structure Modification and Characterization of Langmuir-Blodgett Films made of Amphiphilic Polysilane through Ionizing Radiation
- Principal Investigator
  
  ASAI Keisuke
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  エネルギー学一般・原子力学
- Research Institution
  The University of Tokyo
高速中性子テレビジョン用蛍光コンバーターの開発研究
- Principal Investigator
  
  吉井康司
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Nuclear engineering
- Research Institution
  The University of Tokyo
放射線化学基礎過程研究の新展開
- Principal Investigator
  
  旗野嘉彦
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Co-operative Research (B)
- Research Field
  
  物理化学一般
- Research Institution
  Tokyo Institute of Technology
高エネルギービームの照射効果の基礎と応用
- Principal Investigator
  
  田畑米穂
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Co-operative Research (B)
- Research Field
  
  Nuclear engineering
- Research Institution
  The University of Tokyo
イオン衝撃による有機固体材料励起の研究Principal Investigator
- Principal Investigator
  
  田川精一
- Project Period (FY)
  1986
- Research Category
  
  Grant-in-Aid for Special Project Research
- Research Institution
  The University of Tokyo
イオン衝撃による有機固体材料励起の研究Principal Investigator
- Principal Investigator
  
  田川精一
- Project Period (FY)
  1985
- Research Category
  
  Grant-in-Aid for Special Project Research
- Research Institution
  The University of Tokyo
イオン衝突による固体励起の電子的過程の研究
- Principal Investigator
  
  升田公三
- Project Period (FY)
  1985 – 1987
- Research Category
  
  Grant-in-Aid for Special Project Research
- Research Institution
  University of Tsukuba

All 2012 2011 2010 2009 2008 2007 2006 2005 2004 2003 Other

All Journal Article Presentation

[Journal Article] Nano-and micro-fabrication of perfluorinated polymers using quantum beam technology、Radiat2011
- Author(s)
  N. Miyoshi、A. Oshima、T. Urakawa、N. Fukutake、H. Nagai、T. Gowa、Y. Takasawa、T. Takahashi、Y. Numata、T. Katoh、E. Katoh、S. Tagawa、M. Washio
- Journal Title
  
  Phys. Chem
  
  Volume: 80 Pages: 230-235
- DOI
  10.1016/j.radphyschem.2010.07.037
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21686087
[Journal Article] Nanofabrication of Sulfonated Polystyrene-g-FEP with Silver Ion(Ag+) using Ion Beam Direct Etching and Reduction2011
- Author(s)
  H. Tsubokura、A. Oshima、T. G. Oyama、H. Yamamoto、T. Murakami、S. Tagawa、M. Washio
- Journal Title
  
  J. Photopolym. Sci. Technol.
  
  Volume: 24 Pages: 513-516
- URL
  http://www.jstage.jst.go.jp/article/photopolymer/24/5/513/_pdf
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21686087
[Journal Article] Nanofabrication of Sulfonated Polystyrene-g-FEP with Silver Ion (Ag^+) using Ion Beam Direct Etching and Reduction2011
- Author(s)
  H.Tsubokura, A.Oshima, T.G.Oyama, H.Yamamoto, T.Murakami, S.Tagawa, M.Washio
- Journal Title
  
  Journal of Photopolymer Science and Technology
  
  Volume: 24 Pages: 513-516
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21686087
[Journal Article] Nano- and micro-fabrication of perfluorinated polymers using quantum beam technology2011
- Author(s)
  Nozomi Miyoshi, Akihiro Oshima, Tatsuya Urakawa, Naoyuki Fukutake, Hiroyuki Nagai, Tomoko Gowa, Yuya Takasawa, Tomohiro Takahashi, Yukari Numata, Takanori Katoh, Etsuko Katoh, Seiichi Tagawa, Masakazu Washio
- Journal Title
  
  RadiationPhysicsandChemistry
  
  Volume: 80 Pages: 230-235
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21686087
[Journal Article] X-ray reflectivity study on depth profile of acid generator distribution in chemically amplified resists2008
- Author(s)
  T. Fukuyama, T. Kozawa, S. Tagawa, R. Takasu, H. Yukawa, M. Sato, J. Onodera, I. Hirosawa, T. Koganesawa, K. Horie
- Journal Title
  
  Appl. Phys. Express 1
  
  Pages: 65004-65004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Resolution degradation caused by multispur effect in chemically amplified extreme ultraviolet resists2008
- Author(s)
  T. Kozawa, S. Tagawa, M. Shell
- Journal Title
  
  J. Appl. Phys.
  
  Volume: 103 Pages: 84306-84306
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Enhancement of Acid Production in Chemically Amplified Resist for Extreme Ultraviolet Lithography2008
- Author(s)
  H. Yamamoto, T. Kozawa, S. Tagawa, H. Yukawa, M. Sato, J. Onodera
- Journal Title
  
  Appl. Phys. Express 1
  
  Pages: 47001-47001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Latent image formation in chemically amplified extreme ultraviolet resists with low activation energy for deprotection reaction2008
- Author(s)
  T. Kozawa, S. Tagawa J. J. Santillan, T. Itani
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 26 Pages: 2257-2260
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Difference between Acid Generation Mechanisms in Poly(hydroxystyrene)- and Polyacrylate-Based Chemically Amplified Resists upon Exposure to Extreme Ultraviolet Radiation2008
- Author(s)
  R. Hirose, T. Kozawa, S. Tagawa, D. Shimizu, T. Kai, T. Shimokawa
- Journal Title
  
  Jpn. J. Appl. Phys. 47
  
  Pages: 7125-7127
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Difference in Reaction Schemes in Photolysis of Triphenylsulfonium Salts between 248 nm and Dry/Wet 193 nm Resists2008
- Author(s)
  Y. Matsui, H. Sugawara, S. Seki, T. Kozawa, S. Tagawa, T. Itani
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 1 Pages: 36001-36001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Feasibility Study of Chemically Amplified Extreme Ultraviolet Resists for 22 nm Fabrication2008
- Author(s)
  T. Kozawa, S. Tagawa, J. J. Santillan, M. Toriumi, T. Itani
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 47 Pages: 4465-4468
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Formation of Intramolecular Poly(4-hydroxystyrene) Dimer Radical Cation2008
- Author(s)
  K. Okamoto, T. Kozawa, K. Natsuda, S. Seki, and S. Tagawa
- Journal Title
  
  J. Phys. Chem B 112
  
  Pages: 9275-9280
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Dependence of Acid Generation Efficiency on Molecular Structures of Acid Generators upon Exposure to Extreme Ultraviolet Radiation2008
- Author(s)
  R. Hirose, T. Kozawa, S. Tagawa, T. Kai, T. Shimokawa
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 1 Pages: 27004-27004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Effects of Rate Constant for Deprotection on Latent Image Formation in Chemically Amplified Extreme Ultraviolet Resists2008
- Author(s)
  T. Kozawa, S. Tagawa, J. J. Santillan, M. Toriumi, T. Itani
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 47 Pages: 4926-4931
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Study of the Reaction of Acid Generators with Epithermal and Thermalized Electrons2008
- Author(s)
  K. Natsuda, T. Kozawa, A. Saeki, S. Tagawa, T. Kai, T. Shimokawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 47 Pages: 4932-4935
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Polymer structure dependence of acid generation in chemically amplified extreme ultraviolet resists2007
- Author(s)
  H. Yamamoto, T. Kozawa, S. Tagawa, H. B. Cao, H. Deng, M. J. Leeson
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 46
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Point Spread Function for the Calculation of Acid Distribution in Chemically Amplified Resists Used for Electron-Beam Lithography2007
- Author(s)
  T. Kozawa, S. Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 46
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Stroboscopic picosecond pulse radiolysis using near-ultraviolet-enhanced femtosecond continuum generated by CaF_22007
- Author(s)
  A. Saeki, T. Kozawa, K. Okamoto, and S. Tagawa,
- Journal Title
  
  Jpn. J. Appl. Phys. 46
  
  Pages: 407-411
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Stroboscopic picosecond pulse radiolysis using near-ultraviolet-enhanced femtosecond continuum generated by CaF22007
- Author(s)
  A. Saeki, T. Kozawa, K. Okamoto, and S. Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys 46
  
  Pages: 407-411
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Reactivity between Biphenyl and Precursor of Solvated Electrons in Tetrahydrofuran Measured by Picosecond Pulse Radiolysis in Near-ultraviolet, Visible, and Infrared2007
- Author(s)
  A. Saeki, T. Kozawa, Y. Ohnishi, and S. Tagawa
- Journal Title
  
  Reactivity between Biphenyl and Precursor of Solvated Electrons in Tetrahydrofuran Measured by Picosecond Pulse Radiolysis in Near-ultraviolet, Visible, and Infrared A 111
  
  Pages: 1229-1235
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Effect of Acid Diffusion and Polymer Structure on Line Edge Roughness2007
- Author(s)
  H. Yamamoto, T. Kozawa, A. Saeki, K. Okamoto, S. Tagawa, K. Ohmori, M. Sato, and H. Komano,
- Journal Title
  
  Jpn. J. Appl. Phys. 46
  
  Pages: 6187-6190
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Study of Acid-Base Equilibrium in Chemically Amplified Resist2007
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto, S. Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 46 Pages: 7285-7289
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Subpicosecond pulse radiolysis in liquid methyl-substituted benzene derivatives2007
- Author(s)
  K. Okamoto, T. Kozawa, A. Saeki, Y. Yoshida, and S. Tagawa
- Journal Title
  
  Radiat. Phys. Chem. 76
  
  Pages: 818-826
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Acid distribution in chemically amplified extreme ultraviolet resist2007
- Author(s)
  T. Kozawa, S. Tagawa, H. B. Cao, H. Deng, M. J. Leeson
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 25 Pages: 2481-2485
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Dependence of Absorption Coefficient and Acid Generation Efficiency on Acid Generator Concentration in Chemically Amplified Resist for Extreme Ultraviolet Lithography2007
- Author(s)
  R. Hirose, T. Kozawa, S. Tagawa, T. Kai, T. Shimokawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 46
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Theoretical Study on Relationship between Acid Generation Efficiency and Acid Generator Concentration in Chemically Amplified Extreme Ultraviolet Resists2007
- Author(s)
  T. Kozawa, S. Tagawa, M. Shell
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 46
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Single-Component Chemically Amplified Resist Based on Dehalogenation of Polymer2007
- Author(s)
  H. Yamamoto, T. Kozawa, S. Tagawa, K. Ohmori, M. Sato, and H. Komano,
- Journal Title
  
  Jpn. J. Appl. Phys. 46
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Image contrast slope and line edge roughness of chemically amplified resists for postoptical lithography2007
- Author(s)
  T. Kozawa, S. Tagawa, J. J. Santillan, M. Toriumi, T. Itani
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 25 Pages: 2295-2300
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Subpicosecond pulse radiolysis in liquid methyl-substituted benzene derivatives, Radiat2007
- Author(s)
  K. Okamoto, T. Kozawa, A. Saeki, Y. Yoshida, and S. Tagawa
- Journal Title
  
  Phys. Chem 76
  
  Pages: 818-826
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Reactivity between Biphenyl and Precursor of Solvated Electrons in Tetrahydrofuran Measured by Picosecond Pulse Radiolysis in Near-ultraviolet, Visible, and Infrared2007
- Author(s)
  A. Saeki, T. Kozawa, Y. Ohnishi, and S. Tagawa
- Journal Title
  
  J. Phys. Chem. A 111
  
  Pages: 1229-1235
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Sensitization Distance and Acid Generation Efficiency in a Model System of Chemically Amplified Electron Beam Resist with Methacrylate Backbone Polymer2007
- Author(s)
  T. Kozawa, S. Tagawa, T. Kai, and T. Shimokawa
- Journal Title
  
  J. Photopolym. Sci. Technol. 20
  
  Pages: 577-583
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Resolution blur of latent acid image and acid generation efficiency of chemically amplified resists for electron beam lithography2006
- Author(s)
  T.Kozawa, S.Tagawa
- Journal Title
  
  J. Appl. Phys. 99
  
  Pages: 54509-54509
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Line edge roughness of a latent image in post-optical lithography2006
- Author(s)
  A. Saeki, T. Kozawa, S. Tagawa, H. B. Cao
- Journal Title
  
  Nanotechnology
  
  Volume: 17 Pages: 1543-1546
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Dependence of Acid Yield on Chemically Amplified Electron Beam Resist Thickness2006
- Author(s)
  T.Shigaki, K.Okamoto, T.Kozawa, H.Yamamoto, S.Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys. 45
  
  Pages: 5445-5449
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Reactivity of Acid Generators for Chemically Amplified Resists with Low-Energy Electrons2006
- Author(s)
  A. Nakano, T. Kozawa, S. Tagawa, T. Szreder, J. F. Wishart, T. Kai, T. Shimokawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 45
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Picosecond pulse radiolysis using femtosecond white light with a high S/N spectrum acquisition system in one beam shot2006
- Author(s)
  A.Saeki, T.Kozawa, S.Tagawa
- Journal Title
  
  Nucl. Instrum. Meth. A 556
  
  Pages: 391-396
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Femtosecond single electron bunch generation by rotating longitudinal bunch phase space in magnetic field2006
- Author(s)
  J. Yang, T. Kondoh, K. Kan, T. Kozawa, Y. Yoshida, S. Tagawa
- Journal Title
  
  Nucl. Instrum. Meth. A
  
  Volume: 556 Pages: 52-56
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Femtosecond single electron bunch generation by rotating longitudinal bunch phase space in magnetic field2006
- Author(s)
  J.Yang, T.Kondoh, K.Kan, T.Kozawa, Y.Yoshida, S.Tagawa
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research A 556
  
  Pages: 52-56
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Equivalent Velocity Spectroscopy for Femtosecond Pulse Radiolysis2006
- Author(s)
  T.Kondoh, J.Yang, T.Kozawa, S.Tagawa, Y.Yoshida
- Journal Title
  
  Japanese Journal of Applied Physics (in press)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Protonation sites in chemically amplified resists for electron beam lithography Jpn2006
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto and S. Tagawa
- Journal Title
  
  J. Appl. Phys 45
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Correlation between proton dynamics and line edge roughness in chemically amplified resist for post-optical lithography2006
- Author(s)
  A. Saeki, T. Kozawa, S. Tagawa, H. B. Cao
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 24 Pages: 3066-3072
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Acid generation efficiency in a model system of chemically amplified extreme ultraviolet resist2006
- Author(s)
  T. Kozawa, S. Tagawa, H. Oizumi, I. Nishiyama
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 24
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Analysis of Acid Yield Generated in Chemically Amplified Electron Beam Resist2006
- Author(s)
  T. Kozawa, T. Shigaki, K. Okamoto, A. Saeki, S. Tagawa, T. Kai, T. Shimokawa
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 24 Pages: 3055-3060
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Acid Generation Mechanism of Poly (4-hydroxystyrene) -Based Chemically Amplified Resists for Post-Optical Lithography : Acid Yield and Deprotonation Behavior of Poly (4-hydroxystyrene) and Poly (4-methoxystyrene)2006
- Author(s)
  A. Nakano, T. Kozawa, K. Okamoto, S. Tagawa, T. Kai, T. Shimokawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 45 Pages: 6866-6871
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Pulse radiolysis of polystyrene in cyclohexane -Effect of carbon tetrachloride on kinetic dynamics of dimer radical cation-2006
- Author(s)
  K.Okamoto, T.Kozawa, M.Miki, Y.Yoshida, S.Tagawa
- Journal Title
  
  Chem. Phys. Lett. 426
  
  Pages: 306-310
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Relationship between Acid Generator Concentration and Acid Yield in Chemically Amplified Electron Beam Resist2006
- Author(s)
  T. Shigaki, K. Okamoto, T. Kozawa, H. Yamamoto, S. Tagawa, T. Kai, T. Shimokawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 45 Pages: 5735-5737
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Resolution blur of latent acid image and acid generation efficiency of chemically amplified resists for electron beam lithography2006
- Author(s)
  T. Kozawa and S. Tagawa
- Journal Title
  
  J. Appl. Phys 99
  
  Pages: 54509-54509
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Picosecond pulse radiolysis using femtosecond white light with a high S/N spectrum acquisition system in one beam shot, Nucl2006
- Author(s)
  A. Saeki, T. Kozawa, and S. Tagawa
- Journal Title
  
  Instrum. Meth A 556
  
  Pages: 391-396
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Protonation sites in chemically amplified resists for electron beam lithography2006
- Author(s)
  K.Natsuda, T.Kozawa, K.Okamoto, S.Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys. 45
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Pulse radiolysis based on a femtosecond electron beam and a femtosecond laser light with double-pulse injection technique2006
- Author(s)
  J.Yang, T.Kondoh, T.Kozawa, Y.Yoshida, S.Tagawa
- Journal Title
  
  Radiation Physics and Chemistry (in press)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Effects of Low Energy Electrons on Pattern Formation in Chemically Amplified Resist2006
- Author(s)
  T.Kozawa, H.Yamamoto, A.Saeki, S.Tagawa
- Journal Title
  
  J. Photopolym. Sci. Technol. 19
  
  Pages: 361-366
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Reaction mechanism of fluorinated chemically amplified resists2006
- Author(s)
  H. Yamamoto, T. Kozawa, K. Okamoto, A. Saeki, S. Tagawa, T. Ando, M. Sato, H. Komano
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 24 Pages: 1833-1836
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Femtosecond single electron bunch generation by rotating longitudinal bunch phase space in magnetic field2006
- Author(s)
  J.Yang, T.Kondoh, K.Kan, T.Kozawa, Y.Yoshida, S.Tagawa
- Journal Title
  
  Nucl.Instr.and Meth.A 556
  
  Pages: 52-56
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Equivalent Velocity Spectroscopy for Femtosecond Pulse Radiolysis2006
- Author(s)
  T.Kondoh, J.Yang, T.Kozawa, S.Tagawa, Y.Yoshida
- Journal Title
  
  Japanese Journal of Applied Physics (In press)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Pulse radiolysis based on a femtosecond electron beam and a femtosecond laser light with double-pulse injection technique2006
- Author(s)
  J. Yang, T. Kondoh, T. Kozawa, Y. Yoshida, S. Tagawa
- Journal Title
  
  Radiat. Phys. Chem.
  
  Volume: 75 Pages: 1034-1040
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Proton and anion distribution and line edge roughness of chemically amplified electron beam resist2005
- Author(s)
  T.Kozawa, H.Yamamoto, A.Saeki, S.Tagawa
- Journal Title
  
  J.Vac.Sci.Technol.B 23
  
  Pages: 2716-2720
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Application of Positron to the Polymer Electrolyte Membrane Fuel Cell2005
- Author(s)
  Y.Honda, N.Kimura, G.Isoyama, S.Tagawa, S.Nishijima, S.Takeda
- Journal Title
  
  Int.Sympo.of 21^<st> Century COE "Towards Creating New Industries Based on Inter-Nanoscience"
  
  Pages: 114-114
- Data Source
  KAKENHI-PROJECT-14380235
[Journal Article] Nanopatterning of polyfluorene derivative using electron-beam lithography2005
- Author(s)
  Y.Doi, A.Saeki, T.Kozawa, S.Tagawa et al.
- Journal Title
  
  J.Vac.Sci.Technol. B23
  
  Pages: 2051-2055
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Reaction Mechanisms of Brominated Chemically Amplified Resists2005
- Author(s)
  H. Yamamoto, T. Kozawa, A. Nakano, S. Tagawa, T. Ando, M. Sato, H. Komano
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 44
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Experimental Studies of Transverse and Longitudinal Beam Dynamics in Photoinjector2005
- Author(s)
  J.Yang, T.Kondoh, Y.Yoshida, S.Tagawa
- Journal Title
  
  Japanese Journal of Applied Physics 44
  
  Pages: 8702-8707
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Basic Aspects of Acid Generation Process in Chemically Amplified Electron Beam Resist2005
- Author(s)
  T.Kozawa, S.Tagawa
- Journal Title
  
  Journal of Photopolymer Science and Technology., 18
  
  Pages: 471-474
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Basic Aspects of Acid Generation Process in Chemically Amplified Electron Beam Resist2005
- Author(s)
  T.Kozawa, S.Tagawa
- Journal Title
  
  Journal of Photopolymer Science and Technology 18
  
  Pages: 471-474
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Resist Thickness Effect on Acid Concentration Generated in Poly(4-hydroxystyrene) Film upon Exposure to 75 keV Electron Beam2005
- Author(s)
  T.Shigaki, K.Okamoto, T.Kozawa, H.Yamamoto, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 44
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Dependence of Acid Yield on Acid Generator in Chemically Amplified Resist for Post-Optical Lithography2005
- Author(s)
  A. Nakano, K. Okamoto, Y. Yamamoto, T. Kozawa, S. Tagawa, T. Kai, H. Nemoto
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 44 Pages: 5832-5835
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Synchronization of femtosecond UV-IR laser with electron beam for pulse radiolysis studies2005
- Author(s)
  A.Saeki, T.Kozawa, S.Tagawa et al.
- Journal Title
  
  Nucl.Instrum.Meth. A546
  
  Pages: 627-633
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Basic Aspects of Acid Generation Process in Chemically Amplified Electron Beam Resist2005
- Author(s)
  T.Kozawa, Seiichi Tagawa
- Journal Title
  
  J.Photopolym.Sci.Technol. 18
  
  Pages: 471-474
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Multi spur effect on decay kinetics of geminate ion recombination using Monte Carlo technique2005
- Author(s)
  A.Saeki, T.Kozawa, Y.Yoshida, S.Tagawa
- Journal Title
  
  Nucl.Instrum.Meth. B234
  
  Pages: 285-290
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Study on acid generation from polymer2005
- Author(s)
  H. Yamamoto, T. Kozawa, A. Nakano, K. Okamoto, S. Tagawa, T. Ando, M. Sato, H. Komano
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 23 Pages: 2728-2732
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Proton and anion distribution and line edge roughness of chemically amplified electron beam resist2005
- Author(s)
  T. Kozawa, H. Yamamoto, A. Saeki, and S. Tagawa
- Journal Title
  
  J. Vac. Sci. Technol B23
  
  Pages: 2716-2720
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Correlation between Edge Roughness of Nanostructures and Backbone Configuration of Polymer Materials2005
- Author(s)
  S.Seki, S.Tsukuda, S.Tagawa, M.Sugimoto
- Journal Title
  
  Journal of Photopolymer Science and Technology., 18
  
  Pages: 449-450
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Effects of Dielectric Constant on Acid Generation in Chemically Amplified Resists for Post-Optical Lithography2005
- Author(s)
  T.Kozawa, K.Okamoto, A.Saeki, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 44
  
  Pages: 3908-3912
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Experimental Studies of Transverse and Longitudinal Beam Dynamics in Photoinjector2005
- Author(s)
  J.Yang, T.Kondoh, Y.Yoshida, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 44
  
  Pages: 8702-8707
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Potential Cause of Inhomogeneous Acid Distribution in Chemically Amplified Resists for Post Optical Lithography2005
- Author(s)
  H. Yamamoto, T. Kozawa, A. Nakano, K. Okamoto, S. Tagawa, T. Ando, M. Sato, H. Komano
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 44 Pages: 5836-5838
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Requirements for Laser-Induced Desorption/Ionization on Submicrometer Structures2005
- Author(s)
  S. Okuno, R. Arakawa, K. Okamoto, Y. Matsui, S. Seki, T. Kozawa, S. Tagawa, Y. Wada
- Journal Title
  
  Anal. Chem.
  
  Volume: 77 Pages: 5364-5369
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Proton and anion distribution and line edge roughness of chemically amplified electron beam resist2005
- Author(s)
  T.Kozawa, H., Yamamoto, A.Saeki, S.Tagawa
- Journal Title
  
  J.Vac.Sci.Technol. B23
  
  Pages: 2716-2720
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Synchronization of femtosecond UV-IR laser with electron beam for pulse radiolysis studies2005
- Author(s)
  A.Saeki, T.Kozawa, S.Kashiwagi, K.Okamoto, G.Isoyama, Y.Yoshida, S.Tagawa
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research A 546
  
  Pages: 627-633
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Correlation between Edge Roughness of Nanostructures and Backbone Configuration of Polymer Materials2005
- Author(s)
  S.Seki, S.Tsukuda, S.Tagawa, M.Sugimoto
- Journal Title
  
  Journal of Photopolymer Science and Technology. 18
  
  Pages: 449-450
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Correlation between Edge Roughness of Nanostructures and Backbone Configuration of Polymer Materials2005
- Author(s)
  S.Seki, S.Tsukuda, S.Tagawa, M.Sugimoto
- Journal Title
  
  J.Photopolym.Sci.Technol. 18
  
  Pages: 449-450
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Proton and anion distribution and line edge roughness of chemically amplified electron beam resist2005
- Author(s)
  T.Kozawa, H.Yamamoto, A.Saeki, S.Tagawa
- Journal Title
  
  Journal of Vacuum Science Technology B 23
  
  Pages: 2716-2720
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Synchronization of femtosecond UV-IR laser with electron beam for pulse radiolysis studies2005
- Author(s)
  A.Saeki, T.Kozawa, S.Kashiwagi, K.Okamoto, G.Isoyama, Y.Yoshida, S.Tagawa
- Journal Title
  
  Nucl.Instrum.Meth.A 546
  
  Pages: 627-633
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Precise Control of Nanowire Formation Based on Polysilane for Photoelectronic Device Application2004
- Author(s)
  S.Tsukuda, S.Seki, A.Saeki, T.Kozawa, S.Tagawa et al.
- Journal Title
  
  Japanese Journal of Applied Physics 43
  
  Pages: 3810-3814
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Adjacent Effect on Positive Charge Transfer from Radical Cation of n-Dodecane to Scavenger Studied by Picosecond Pulse Radioly sis, Statistical Model, and Monte Carlo Simulation2004
- Author(s)
  A.Saeki, T.Kozawa, Y.Yoshida, S.Tagawa
- Journal Title
  
  Journal of Physics and Chemistry A 108
  
  Pages: 1475-1481
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Polymer Screening Method for Chemically Amplified Electron Beam and X-Ray Resists2004
- Author(s)
  H.Yamamoto, A.Nakano, K.Okamoto, T.Kozawa, S.Tagawa
- Journal Title
  
  Japanese Journal of Applied Physics 43
  
  Pages: 3971-3973
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Modeling and simulation of chemically amplified electron beam, x-ray, and EUV resist processes2004
- Author(s)
  T.Kozawa, A.Saeki, S.Tagawa
- Journal Title
  
  J.Vac.Sci.Technol. B22
  
  Pages: 3489-3492
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Polymer Screening Method for Chemically Amplified Electron Beam and X-Ray Resists2004
- Author(s)
  H.Yamamoto, A.Nakano, K.Okamoto, T.Kozawa, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 3971-3973
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Polymer Screening Method for Chemically Amplified Electron Beam and X-Ray Resists2004
- Author(s)
  H.Yamamoto, A.Nakano, K.Okamo to, T.Kozawa, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 3971-3973
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Effects of Ester Groups on Proton Generation and Diffusion in Polymethacrylate Matrices2004
- Author(s)
  A.Nakano, K.Okamoto, T.Kozawa, S.Tagawa
- Journal Title
  
  Japanese Journal of Applied Physics 43
  
  Pages: 3981-3983
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Effects of Ester Groups on Proton Generation and Diffusion in Polymethacrylate Matrices2004
- Author(s)
  A.Nakano, K.Okamoto, T.Kozawa, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 3981-3983
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Pulse Radiolysis Study on Proton and Charge Transfer Reactions in Solid Poly(methyl methacrylate)2004
- Author(s)
  A.Nakano, K.Okamoto, T.Kozawa, S.Tagawa
- Journal Title
  
  Japanese Journal of Applied Physics 43
  
  Pages: 4363-4367
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Pulse radiolysis study on proton and charge transfer reactions in solid poly(methyl methacrylate).2004
- Author(s)
  A.Nakano, K.Okamoto, T.Kozawa, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 4363-4367
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Adjacent Effect on Positive Charge Transfer from Radical Cation of n-Dodecane to Scavenger Studied by Picosecond Pulse Radiolysis, Statistical Model, and Monte Carlo Simulation2004
- Author(s)
  A.Saeki, T.Kozawa, Y.Yoshida, S.Tagawa
- Journal Title
  
  J.Phys.Chem. A108
  
  Pages: 1475-1481
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Precise Control of Nanowire Formation Based on Polysilane for Photoelectronic Device Application2004
- Author(s)
  S.Tsukuda, S.Seki, A.Saeki, T.Kozawa, S.Tagawa et al.
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 3810-3814
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Adjacent Effect on Positive Charge Transfer from Radical Cation of n-Dodecane to Scavenger Studied by Picosecond Pulse Radiolysis, Statistical Model, and Monte Carlo Simulation2004
- Author(s)
  A.Saeki, T.Kozawa, Y.Yoshida, S.Tagawa
- Journal Title
  
  J.Phys.Chem. A108
  
  Pages: 1475-1481
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Adjacent effect on positive charge transfer from radical cation of n-dodecane to scavenger studied by picosecond pulse radiolysis, statistical model, and Monte Carlo simulation.2004
- Author(s)
  A.Saeki, T.Kozawa, Y.Yoshida, S.Tagawa
- Journal Title
  
  J.Phys.Chem., A 108
  
  Pages: 1475-1481
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Adjacent Effect on Positive Charge Transfer from Radical Cation of n-Dodecane to Scavenger Studied by Picosecond Pulse Radiolysis, Statistical Model, and Monte Carlo Simulation2004
- Author(s)
  A.Saeki, T.Kozawa, Y.Yoshida S.Tagawa
- Journal Title
  
  J.Phys.Chem. A108
  
  Pages: 1475-1481
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Modeling and simulation of chemically amplified electron beam, x-ray, and EUV resist processes2004
- Author(s)
  T.Kozawa, A.Saeki, S.Tagawa
- Journal Title
  
  J.Vac.Sci.Technol. B22
  
  Pages: 3489-3492
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Polymer screening method for chemically amplified electron beam and X-ray resists2004
- Author(s)
  H.Yamamoto, A.Nakano, K.Okamoto, T.Kozawa, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 3971-3973
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Precise control of nanowire formation based on polysilane for photoelectronic device application2004
- Author(s)
  S.Tsukuda, S.Seki, A.Saeki, T.Kozawa, S.Tagawa, M.Sugimoto, A.Idesaki, S.Tanaka
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 3810-3814
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Effects of ester groups on proton generation and diffusion in polymethacrylate matrices.2004
- Author(s)
  A.Nakano, K.Okamoto, T.Kozawa, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 3981-3983
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Precise Control of Nanowire Formation Based on Polysilane for Photoelectronic Device Application2004
- Author(s)
  S.Tsukuda, S.Seki, A.Saeki, T.Kozawa, S.Tagawa et al.
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 3810-3814
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Pulse Radiolysis Study on Proton and Charge Transfer Reactions in Solid Poly(methyl methacrylate)2004
- Author(s)
  A.Nakano, K.Okamoto, T.Kozawa, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 43
  
  Pages: 4363-4367
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Modeling and simulation of chemically amplified electron beam, x-ray, and EUV resist processes2004
- Author(s)
  T.Kozawa, A.Saeki, S.Tagawa
- Journal Title
  
  Journal of Vacuum Science Technology B 22
  
  Pages: 3489-3492
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Precise Control of Nanowire Formation Based on Polysilane for Photoelectronic Device Application2004
- Author(s)
  S.Tsukuda, S.Seki, A.Saeki, T.Kozawa, S.Tagawa
- Journal Title
  
  Japanese Journal of Applied Physics 43
  
  Pages: 3810-3814
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Modeling and simulation of chemically amplified electron beam, x-ray, and EUV resist processes.2004
- Author(s)
  T.Kozawa, A.Saeki, S.Tagawa
- Journal Title
  
  J.Vac.Sci.Technol., B 22
  
  Pages: 3489-3492
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14208060
[Journal Article] Adjacent Effect on Positive Charge Transfer from Radical Cation of n-Dodecane to Scavenger Studied by Picosecond Pulse Radiolysis, Statistical Model, and Monte Carlo Simulation2003
- Author(s)
  A.Saeki, T.Kozawa, Y.Yoshida, S.Tagawa
- Journal Title
  
  Journal of Physics and Chemistry A 108
  
  Pages: 1475-1481
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Journal Article] Subpicosecond Pulse Radiolysis Study of Geminate Ion Recombination in Liquid Benzene2003
- Author(s)
  K.Okamoto, A.Saeki, T.Kozawa, Y.Yoshida, S.Tagawa
- Journal Title
  
  Chemical Letters 32
  
  Pages: 834-835
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206109
[Presentation] Study on Fabrication of Functionalized Polymer with Patterned Nano-scale Silver Metal using Radiation Reduction Technique2012
- Author(s)
  H.Tsubokura, R.Tsuchida, T.Tatsumi, T.G.Oyama, T.Murakami, A.Oshima, S.Tagawa, M.Washio
- Organizer
  33 the Australian Polymer Symposium (33-APS)
- Place of Presentation
  Hobart (Australia Tasmania)
- Year and Date
  2012-02-13
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Study on Fabrication of Functionalized Polymer with Patterned Nano-scale Silver Metal using Radiation Reduction Technique2012
- Author(s)
  H. Tsubokura、R. Tsuchida、T. Tatsumi、T. G. Oyama、T. Murakami、A. Oshima、Tagawa、M. Washio
- Organizer
  33 the Australian Polymer Symposium(33-APS)
- Place of Presentation
  West Point Convention Centre(Hobart・Australia)
- Year and Date
  2012-02-13
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Nanofabrication of Sulfonated Styrene-g-FEP Silver Ion using Focused Ion Beam Direct Etching and Reduction2011
- Author(s)
  A.Oshima, H.Tsubokura, T.G.Oyama, H.Yamamoto, M.Washio, Seichi Tagawa
- Organizer
  28th International Conference of Photopolymer Science and Technology
- Place of Presentation
  千葉大学(日本千葉)(招待講演)
- Year and Date
  2011-06-23
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Arプラズマを用いたFEPの表面改質～ラジカル生成とグラフト重合～2011
- Author(s)
  坪倉英裕、吉川妙子、大山(五輪)智子、大島明博、田川精一、鷲尾方一
- Organizer
  第54回放射線化学討論会
- Place of Presentation
  大阪大学(大阪府)
- Year and Date
  2011-09-29
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Arプラズマを用いたFEPの表面改質～ラジカル生成とグラフト重合～2011
- Author(s)
  坪倉英裕, 吉川妙子, 大山(五輪)智子, 大島明博, 田川精一, 鷲尾方一
- Organizer
  第54回放射線化学討論会
- Place of Presentation
  大阪大学(日本大阪)
- Year and Date
  2011-09-29
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] 機能性フッ素樹脂を用いた各種プラズマ暴露による金属還元に関する研究2011
- Author(s)
  坪倉英裕、高橋朋宏, 藤田創、大山(五輪)智子、山本洋揮, 大島明博、田川精一、鷲尾方一
- Organizer
  日本化学会第91春季年会
- Place of Presentation
  神奈川大学(神奈川県)
- Year and Date
  2011-03-27
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] 機能性フッ素樹脂を用いた各種プラズマ暴露による金属還元に関する研究2011
- Author(s)
  坪倉英裕, 高橋朋宏, 藤田創, 大山(五輪)智子, 山本洋揮, 大島明博, 田川精一, 鷲尾方一
- Organizer
  日本化学会第91春季年会
- Place of Presentation
  神奈川大学(横浜)
- Year and Date
  2011-03-27
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Nanofabrication of Sulfonated Styrene-g-FEP Silver Ion using Focused Ion Beam Direct Etching and Reduction2011
- Author(s)
  A. Oshima、H. Tsubokura、T. G. Oyama、H. Yamamoto、M. Washio、Seichi Tagawa
- Organizer
  28th International Conference of Photopolymer Science and Technology
- Place of Presentation
  千葉大学(千葉県)
- Year and Date
  2011-06-23
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Study on Reduction of Metal Ions in Functionalized Fluorinated-Polymers by Means of Plasma Exposure2010
- Author(s)
  H.Tsubokura, T.Takahashi, H.Fujita, T.(Gowa) Oyama, H.Yamamoto, A.Oshima, S.Tagawa, M.Washio
- Organizer
  2010 Internatinal Chemical Congress of Pacific Basin Societies (Pacifichem 2010)
- Place of Presentation
  Hawaii(USA)
- Year and Date
  2010-12-17
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Ag+含有高分子の量子ビーム照射による直接還元に関する研究2010
- Author(s)
  坪倉英裕、高澤侑也、高橋朋宏、白木文也、藤田創、五輪智子、佐々木隆、山本洋揮、大島明博、田川精一、鷲尾方一
- Organizer
  第47回アイソトープ学会
- Place of Presentation
  科学未来館(東京都)
- Year and Date
  2010-07-07
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Nano-Scale fabrication of Perfluorinated Polymers using Focused Ion Beams2010
- Author(s)
  A. Oshima、T. Takahashi、S. Okubo、N. Fukutake、Y. Takasawa、T. Gowa、M. Washio、S. Tagawa
- Organizer
  2010 Internatinal Chemical Congress of Pacific Basin Societies(Pacifichem 2010)
- Place of Presentation
  Hawaii Convention Center(Hawaii・USA)
- Year and Date
  2010-12-16
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Study on Reduction of Metal Ions in Functionalized Fluorinated-Polymers by Means of Plasma Exposure2010
- Author(s)
  H. Tsubokura、T. Takahashi、H. Fujita、T. G. Oyama、H. Yamamoto、A. Oshima、S. Tagawa、M. Washio
- Organizer
  2010 Internatinal Chemical Congress of Pacific Basin Societies(Pacifichem 2010)
- Place of Presentation
  Hawaii Convention Center(Hawaii・USA)
- Year and Date
  2010-12-17
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] 機能性微細パターン作製のための金属担持高分子に対する集束イオンビーム加工に関する研究2010
- Author(s)
  坪倉英裕, 高澤侑也, 高橋朋宏, 大久保聡, 大山(五輪)智子, 山本洋揮, 大島明博, 田川精一, 鷲尾方一
- Organizer
  第53回放射線化学討論会
- Place of Presentation
  名古屋大学(名古屋)
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Ag^<+>含有高分子の量子ビーム照射による直接還元に関する研究2010
- Author(s)
  坪倉英裕, 高澤侑也, 高橋朋宏, 白木文也, 藤田創, 五輪智子, 佐々木隆, 山本洋揮, 大島明博, 田川精一, 鷲尾方一
- Organizer
  第47回アイソトープ学会
- Place of Presentation
  科学未来館(東京)
- Year and Date
  2010-07-07
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Nano-Scale fabrication of Perfluorinated Polymers using Focused Ion Beams2010
- Author(s)
  Akihiro Oshima, Tomohiro Takahashi, Satoshi Okubo, Naoyuki Fukutake, Yuya Takasawa, Tomoko Gowa, Masakazu Washio, Seiichi Tagawa
- Organizer
  2010 Internatinal Chemical Congress of Pacific Basin Societies (Pacifichem 2010)
- Place of Presentation
  Hawaii(USA)
- Year and Date
  2010-12-16
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Sensitization mechanisms of chemically amplified resists and resist design for 22 nm node2009
- Author(s)
  T. Kozawa and S. Tagawa
- Organizer
  2009 International Workshop on EUV Lithography
- Place of Presentation
  Oahu, Hawaii, USA
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] 量子ビームによるフッ素系高分子の微細加工2009
- Author(s)
  大島明博、福武直之、高澤侑也、五輪智子、裏川達也、白木文也、岡壽崇、工藤久明、村上健、濱義昌、鷲尾方一、田川精一
- Organizer
  第52回放射線化学討論会
- Place of Presentation
  福井工業大学(福井県)
- Year and Date
  2009-09-24
- Data Source
  KAKENHI-PROJECT-21686087
[Presentation] Horie, Effect of acid generator structure on its depth distribution in chemically amplified resist films2008
- Author(s)
  T. Fukuyama, T. Kozawa, K. Okamoto, S. Tagawa, M. Irie, T. Mimura, T. Iwai, J. Onodera, I. Hirosawa, T. Koganesawa, and K
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Dynamics of Radical Cations of Resist Model Compounds2008
- Author(s)
  K. Okamoto, M. Tanaka, T. Kozawa, S. Tagawa
- Organizer
  2nd Asia-Pacific Symposium on Radiation Chemistry
- Place of Presentation
  Waseda University
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Study on Reactivity of Halogenated Resist Polymer with Low-Energy Electrons2008
- Author(s)
  H. Yamamoto, T. Kozawa, A. Saeki, S. Tagawa, T. Mimura, H. Yukawa, and J. Onodera
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Effect of molecular structures of acid generators on acid generation in chemically amplified resists upon exposure to 75 keV electron beam2008
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto, and S. Tagawa
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Effect of acid generator structure on its depth distribution in chemically amplified resist films2008
- Author(s)
  T. Fukuyama, T. Kozawa, K. Okamoto, S. Tagawa, M. Irie, T. Mimura, T. Iwai, J. Onodera, I. Hirosawa, T. Koganesawa, K. Horie
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Dependence of Acid Generation Efficiency on Molecular Structure and Concentration of Acid Generator in Chemically Amplified EUV Resist, SPIE Advanced Lithography2008
- Author(s)
  R. Hirose, T. Kozawa, S. Tagawa, T. Kai, and T. Shimokawa
- Organizer
  San Jose
- Place of Presentation
  California, USA
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Acid-base equilibrium in chemically amplified resist, SPIE Advanced Lithography2008
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto, and S. Tagawa
- Organizer
  San Jose
- Place of Presentation
  California, USA
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Dynamics of Radical Cation of Poly(4-Hydroxystyrene)and its Copolymer2008
- Author(s)
  K. Okamoto, M. Tanaka, T. Kozawa, S. Tagawa
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Study on acid generation of acid generators in chemically amplified resists for electron beam2008
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto, and S. Tagawa
- Organizer
  International Workshop on Molecular Information and Dynamics 2008
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Pico-and subpico-second pulse radiolysis based on L-band linac with femtosecond white light continuum2007
- Author(s)
  A. Saeki, T. Kozawa, and S. Tagawa (invited)
- Organizer
  The 7th International Symposium on Advanced Science Research
- Place of Presentation
  Tokai, Ibaraki, Japan
- Year and Date
  2007-12-01
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Nanoscale Distribution of Intermediates in Resist Materials for Next Generation Lithography
- Author(s)
  T. Kozawa, and S. Tagawa
- Organizer
  ASR Symposium
- Place of Presentation
  Ibaraki, Japan
- Year and Date
  2007-11-06 – 2007-11-09
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Analysis of Acid Yield Generated in Chemically Amplified Electron Beam Resist
- Author(s)
  T. Kozawa, T. Shigaki, K. Okamoto, A. Saeki and S. Tagawa
- Organizer
  50th EIPBN
- Place of Presentation
  Baltimore, Maryland, USA
- Year and Date
  2006-05-30 – 2006-06-02
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] High precision measurement of higher diffraction-order contamination in monochromatized soft X-ray by using a compact transmission-grating spectrometer
- Author(s)
  K. Fukui, T. Sakai, T. Hatsui, N. Kosugi, Y. Hamamura, K. Okamoto, Y. Matsui, T. Kozawa, S. Seki, S. Tagawa
- Organizer
  International Conference on Vacuum Ultraviolet Radiation Physics 15th
- Place of Presentation
  Berlin, Germany
- Year and Date
  2007-06-29 – 2007-07-03
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Line edge roughness in chemically amplified resist of electron beam lithography
- Author(s)
  A. Saeki, T. Kozawa, S. Tagawa and H. B. Cao
- Organizer
  50th EIPBN
- Place of Presentation
  Baltimore, Maryland, USA
- Year and Date
  2006-05-30 – 2006-06-02
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Study on dynamics of radical ions of polystyrenes by pulse radiolysis
- Author(s)
  K. Okamoto, M. Tanaka, S. Seki, T. Kozawa, S. Tagawa
- Organizer
  13th International Congress of Radiation Research
- Place of Presentation
  San Francisco, California, USA
- Year and Date
  2007-06-07 – 2007-06-13
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Acid distribution in chemically amplified extreme ultraviolet resist
- Author(s)
  T. Kozawa, S. Tagawa, H. B. Cao, H. Deng, M. J. Leeson
- Organizer
  The fifty-first international conference on electron, ion, and photon beam technology and nanofabrication (51st EIPBN)
- Place of Presentation
  Denver, Colorado, USA
- Year and Date
  2007-05-29 – 2007-06-01
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Single-Component Chemically Amplified Resist Based on Dehalogenation of Polymer
- Author(s)
  H. Yamamoto, T. Kozawa, S. Tagawa, K. Ohmori, M. Sato, H. Komano
- Organizer
  SPIE Advanced Microlithography
- Place of Presentation
  San Jose, California, USA
- Year and Date
  2007-02-25 – 2007-03-02
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Proton Dynamics and Amines in Chemically Amplified Resist
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto, S. Tagawa
- Organizer
  Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Kamakura, Japan
- Year and Date
  2006-10-25 – 2006-10-27
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Difference between initial distributions of proton and counter anion in chemically amplified electron-beam resist
- Author(s)
  T. Kozawa, H. Yamamoto, A. Saeki and S. Tagawa
- Organizer
  31st Int. Symp. Microlithography
- Place of Presentation
  San Jose, California, USA
- Year and Date
  2006-02-19 – 2006-02-24
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Effects of rate constant for deprotection reaction on latent image formation in chemically amplified EUV resists
- Author(s)
  T. Kozawa, S. Tagawa, J. J. Santillan, M. Toriumi, and T. Itani
- Organizer
  Microprocess and Nanotechnology Conference
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-11-05 – 2007-11-08
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Dependence of Absorption Coefficient and Acid Generation Efficiency on Acid Generator Concentration in Chemically Amplified EUV Resist
- Author(s)
  R. Hirose, T. Kozawa, S. Tagawa, T. Kai and T. Shimokawa
- Organizer
  Microprocess and Nanotechnology Conference
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-11-05 – 2007-11-08
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Depth profile of acid generator distribution in chemically amplified resists
- Author(s)
  T. Fukuyama, T. Kozawa, S. Tagawa, R. Takasu, H. Yukawa, M. Sato, J. Onodera, I. Hirosawa, T. Koganesawa, K. Horie
- Organizer
  Microprocess and Nanotechnology Conference
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-11-05 – 2007-11-08
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Effect of Acid Diffusion and Polymer Structure on Line Edge Roughness
- Author(s)
  H. Yamamoto, T. Kozawa, A. Saeki, K. Okamoto, S. Tagawa, K. Ohmori, M. Sato, H. Komano
- Organizer
  Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Kamakura, Japan
- Year and Date
  2006-10-25 – 2006-10-27
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Study on photochemical analysis system for EUV lithography
- Author(s)
  A. Sekiguchi, Y. Kono, M. Kadoi, Y. Minami, T. Kozawa, S. Tagawa, D. Gustafson, P. Plackborow
- Organizer
  SPIE Advanced Microlithography
- Place of Presentation
  San Jose, California, USA
- Year and Date
  2007-02-25 – 2007-03-02
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Image Contrast Slope and Line Edge Roughness of Chemically Amplified Resists for Post-Optical Lithography
- Author(s)
  T. Kozawa, S. Tagawa, J. J. Santillan, M. Toriumi, T. Itani
- Organizer
  The fifty-first international conference on electron, ion, and photon beam technology and nanofabrication (51st EIPBN)
- Place of Presentation
  Denver, Colorado, USA
- Year and Date
  2007-05-29 – 2007-06-01
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Study on the Reaction of Acid Generators with Epithermal Electrons
- Author(s)
  K. Natsuda, T. Kozawa, A. Saeki, S. Tagawa, T. Kai, T. Shimokawa
- Organizer
  Microprocess and Nanotechnology Conference
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-11-05 – 2007-11-08
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Effect of Fluorine Atom on Acid Generation in Chemically Amplified EUV Resist
- Author(s)
  H. Yamamoto, T. Kozawa, S. Tagawa, H. Yukawa, M. Sato, J. Onodera
- Organizer
  Microprocess and Nanotechnology Conference
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-11-05 – 2007-11-08
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Effect of Fluorine Atom on Acid Generation in Chemically Amplified EUV Resist
- Author(s)
  H. Yamamoto, T. Kozawa, S. Tagawa H. Yukawa, M. Sato, H. Komano
- Organizer
  2007 International EUVL Symposium
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2007-10-28 – 2007-10-31
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Pulse radiolysis of polystyrene and derivatives
- Author(s)
  K. Okamoto, M. Tanaka, T. Kozawa, S. Seki, S. Tagawa
- Organizer
  13th International Congress of Radiation Research
- Place of Presentation
  San Francisco, California, USA
- Year and Date
  2007-07-07 – 2007-07-13
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Development and performance of quasi-free standing transmission-grating for soft X-ray emission spectrometer
- Author(s)
  T. Hatsui, K. Okamoto, Y. Matsui, T. Kozawa, S. Seki, S. Tagawa, Y. Hamamura, N. Kosugi
- Organizer
  International Conference on Vacuum Ultraviolet Radiation Physics 15th
- Place of Presentation
  Berlin, Germany
- Year and Date
  2007-06-29 – 2007-07-03
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Effects of activation energy for deprotection reaction on latent image contrast
- Author(s)
  T. Kozawa, A. Saeki, S. Tagawa, J. J. Santillan, M. Toriumi, T. Itani
- Organizer
  2007 International EUVL Symposium
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2007-10-28 – 2007-10-31
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] The reaction mechanism of poly[4-hydroxystyrene-co-4-(1, 1, 1, 3, 3, 3-hexafluoro-2- hydroxypropyl)-styrene]
- Author(s)
  H. Yamamoto, T. Kozawa, K. Okamoto, S. Tagawa, T. Ando, M. Sato, H. Komano
- Organizer
  31st Int. Symp. Microlithography
- Place of Presentation
  San Jose, California, USA
- Year and Date
  2006-02-19 – 2006-02-24
- Data Source
  KAKENHI-PROJECT-17106014

1. YOSHIDA Yoichi (50210729)

# of Collaborated Projects: 11 results

# of Collaborated Products: 16 results
2. SEKI Shuhei (30273709)

# of Collaborated Projects: 11 results

# of Collaborated Products: 16 results
3. HONDA Yoshihide (40209333)

# of Collaborated Projects: 7 results

# of Collaborated Products: 1 results
4. YAMAMOTO Yukio (10029902)

# of Collaborated Projects: 7 results

# of Collaborated Products: 0 results
5. MIKI Miyako (10167661)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
6. KOZAWA Takahiro (20251374)

# of Collaborated Projects: 5 results

# of Collaborated Products: 129 results
7. NISHIJIMA Shigehiro (00156069)

# of Collaborated Projects: 3 results

# of Collaborated Products: 1 results
8. SAEKI Akinori (10362625)

# of Collaborated Projects: 3 results

# of Collaborated Products: 36 results
9. 旗野嘉彦 (90016121)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. 河内宣之 (50161873)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
11. OKAMOTO Kazumasa (10437353)

# of Collaborated Projects: 1 results

# of Collaborated Products: 36 results
12. YAMAMOTO Hiroki (00516958)

# of Collaborated Projects: 1 results

# of Collaborated Products: 22 results
13. OSHIMA Akihiro (80398924)

# of Collaborated Projects: 1 results

# of Collaborated Products: 20 results
14. WASHIO Masakazu (70158608)

# of Collaborated Projects: 1 results

# of Collaborated Products: 20 results
15. SHIBATA Hiromi (30216014)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. ASAI Keisuke (60231859)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. HIROISHI Daisuke (20199110)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. KATSUMURA Yousuke (70111466)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. ISHIGURE Kenkichi (90010975)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. KIMURA Norio (80195370)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. KOBAYASHI Kazuo (30116032)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. OKUDA Shuichi (00142175)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. IZUMI Yoshinobu (60252582)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. YANG Jinfeng (90362631)

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
25. 嶋森洋 (80139815)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. 新坂恭士 (50016135)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
27. 田中健一郎 (90106162)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. 吉井康司 (00210641)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. 上坂充 (30232739)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. 小林久夫 (10062605)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
31. 宮健三 (30011191)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
32. 小林仁 (80133099)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
33. 升田公三 (90029405)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
34. 並木章 (40126941)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
35. 豊沢豊 (50013454)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
36. 道家忠義 (60063369)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
37. 伊藤憲昭 (90022996)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
38. 田畑米穂 (40010730)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
39. 山岡仁史 (80026004)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
40. 吉田宏 (20027410)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
41. 高椋節夫 (50029849)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
42. SUGIMOTO Masaki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

TAGAWA Seiichi 田川 精一

田川 精一 タカ゛ワ セイイチ

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Femtosecond Pulse Radiolysis Study on Nanoscale Time Space Reaction ProcessPrincipal Investigator

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Femtosecond pulse radiolysis study on reaction mechanism induced in nanostructuresPrincipal Investigator

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主鎖・側鎖にヘテロ元素を有する非炭素骨格高分子の電子物性Principal Investigator

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Study on primary processes of radiation chemistry in aqueous solutions using femtosecond quantum multibeamsPrincipal Investigator

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低温固相重合反応におけるトンネル効果の研究Principal Investigator

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主鎖・側鎖にヘテロ元素を有する非炭素骨格高分子の電子物性Principal Investigator

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低温固相重合反応におけるトンネル効果の研究Principal Investigator

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主鎖・側鎖にヘテロ元素を有する非炭素骨格高分子の電子物質Principal Investigator

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TAGAWA Seiichi 田川精一

田川精一タカ゛ワセイイチ