BABA Shigeru 馬場茂

Researcher Number	80114619
Other IDs
External Links
Affiliation (based on the past Project Information) *help	2009 – 2011: Seikei University, 理工学部, 教授 1993 – 1994: 成蹊大学, 工学部, 教授 1987 – 1989: 東京大学, 工学部, 講師
Review Section/Research Field	Principal Investigator Applied physics, general / Applied physics, general Except Principal Investigator Applied materials
Keywords	Principal Investigator SCRATCH TEST / X-RAY PHOTOELECTRON SPECTROSCOPY / FILM ADHESION / FRACTO-EMISSION / EXOELECTRON / 密着性 / 薄膜 / スクラッチ / X線光電子スペクトル / 付着力 … More / フラクトエミッション / エキソ電子 / 窒化物薄膜 / 酸窒化物 / モード遷移 / 高純度金属窒化物 / 大電力パルススパッタ / 高純度窒化物薄膜 / パルススパッタリング / 窒化チタン / 反応性スパッタリング … More Except Principal Investigator RHEED / ADHESION / INTERNAL STRESS / SPUTTERING / THIN FILM / 反射高速電子線回折(RHEED) / 表面超構造 / 鉛 / 摩擦係数 / 銀 / 島状膜 / スパッタリング / 付着力 / 内部応力 / スパタリング / 薄膜 Less

Reactive Sputtering of Oxygen-Free Metal Nitride Films : Oxygen Incorporation and Effect on Electrical PropertiesPrincipal Investigator
- Principal Investigator
  
  BABA Shigeru
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied physics, general
- Research Institution
  Seikei University
Detection of Exo-Electrons From a Scratch Damage of Thin FilmsPrincipal Investigator
- Principal Investigator
  
  BABA Shigeru
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Applied physics, general
- Research Institution
  Seikei University
Electronic Structures and the Mechanical Stability of Ultra-thin Metal Films on the Semiconductor Surface and the Effect of Internal Stress on Them
- Principal Investigator
  
  KINBARA Akira
- Project Period (FY)
  1987 – 1989
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Applied materials
- Research Institution
  The University of Tokyo

All 2012 2011 2010 2009

All Journal Article Presentation Book

[Book] 異種材料界面の測定と評価技術第13章2節付着の測定法と評価2012
- Author(s)
  馬場茂(分担)
- Data Source
  KAKENHI-PROJECT-21560054
[Book] 異種材料界面の測定と評価技術(監修:石井淑夫)第13章2節付着の測定法と評価2012
- Author(s)
  馬場茂(分担執筆)
- Publisher
  テクノシステム(東京)
- Data Source
  KAKENHI-PROJECT-21560054
[Book] 薄膜工学第2版第3章3節力学的・機械的性質の評価2011
- Author(s)
  馬場茂(分担)
- Publisher
  丸善出版
- Data Source
  KAKENHI-PROJECT-21560054
[Book] 薄膜工学第2版(監修:金原粲)第3章3節力学的・機械的性質の評価2011
- Author(s)
  馬場茂(分担執筆)
- Publisher
  丸善出版(東京)
- Data Source
  KAKENHI-PROJECT-21560054
[Book] 剥離対策と接着・密着性の向上,第5章1節付着試験に伴う薄膜の応力場2010
- Author(s)
  馬場茂(分担)
- Publisher
  サイエンサイエンス & テクノロジーテクノロジーテクノロジー
- Data Source
  KAKENHI-PROJECT-21560054
[Book] 剥離対策と接着・密着性の向上-第5章1節付着試験に伴う薄膜の応力場2010
- Author(s)
  馬場茂 (分担執筆)
- Publisher
  サイエンス&テクノロジー
- Data Source
  KAKENHI-PROJECT-21560054
[Book] 実用薄膜プロセス-機能創生・応用展開-,第7章力学薄膜の物性と構造2009
- Author(s)
  馬場茂(分担)
- Publisher
  技術教育出版
- Data Source
  KAKENHI-PROJECT-21560054
[Journal Article] Effects of target voltage during pulse-off period in pulsed magnetron sputtering on afterglow plasma and de-posited film structure2012
- Author(s)
  T. Nakano, N. Hirukawa, S. Saeki, S. Baba
- Journal Title
  
  Vacuum
  
  Volume: vol.86(in press)
- URL
  http://dx.doi.org/10.1016/j.vacuum.2012.03.010
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21560054
[Journal Article] Structural and optical properties of reactive-sputtered films of V_2O_5 : Measurement of optical bandgap and roughness correction2012
- Author(s)
  K.Maki, T.Fukuda, H.Momose, T.Nakano, S.Baba
- Journal Title
  
  成蹊大学理工学研究報告
  
  Volume: 49巻1号(in press)
- Data Source
  KAKENHI-PROJECT-21560054
[Journal Article] Structural and optical properties of reactive-sputtered films of V2O5 : Meas-urement of optical bandgap and roughness correction2012
- Author(s)
  K. Maki, T. Fukuda, T. Nakano, S. Baba
- Journal Title
  
  成蹊大学理工学研究報告
  
  Volume: 49巻 Pages: 41-44
- URL
  http://hdl.handle.net/10928/
- Data Source
  KAKENHI-PROJECT-21560054
[Journal Article] Effects of target voltage during pulse-off period in pulsed magnetron sputtering on afterglow plasma and deposited film structure2012
- Author(s)
  T.Nakano, N.Hirukawa, S.Saeki, S.Baba
- Journal Title
  
  Vacuum
  
  Volume: 86(in press) Pages: 109-113
- DOI
  10.1016/j.vacuum.2012.03.010
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21560054
[Journal Article] Structural Properties of Island Films of Indium on Si(111) and the Sputter-Etching Profile2011
- Author(s)
  S.Baba, M.Iozaki, S.Sato, T.Nakano
- Journal Title
  
  成蹊大学理工学研究報告
  
  Volume: 48巻1号 Pages: 1-8
- NAID
  120005614688
- Data Source
  KAKENHI-PROJECT-21560054
[Journal Article] Structural Properties of Island Films of Indium on Si(111) and the Sputter-Etching Profile2011
- Author(s)
  S. Baba, M. Iozaki, S. Sato, T. Nakano
- Journal Title
  
  成蹊大学理工学研究報告
  
  Volume: 48巻 Pages: 1-8
- NAID
  120005614688
- URL
  http://hdl.handle.net/10928/90
- Data Source
  KAKENHI-PROJECT-21560054
[Journal Article] Effect of the target bias voltage during off-pulse period on the impulse magnetron sputtering2010
- Author(s)
  T.Nakano, C.Murata, S.Baba
- Journal Title
  
  Vacuum(DOI : 10.1016.2010.01.014) (in press)
  
  Pages: 4-4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21560054
[Journal Article] Effect of the target bias voltage during off-pulse period on the impulse magnetron sputtering2010
- Author(s)
  T. Nakano, C. Murata, S. Baba
- Journal Title
  
  Vacuum
  
  Volume: vol.84 Pages: 1368-1371
- URL
  http://dx.doi.org/10.1016/j.vacuum.2010.01.014
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21560054
[Journal Article] Effect of the target bias voltage during off-pulse period on the impulsemagnetron sputtering2010
- Author(s)
  T.Nakano, C.Murata, S.Baba
- Journal Title
  
  Vacuum
  
  Volume: 84 Pages: 4-4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21560054
[Journal Article]2009
- Author(s)
  馬場茂(分担執筆)
- Journal Title
  
  実用薄膜プロセス-機能創生・応用展開- 第7章力学薄膜の物性と構造(技術教育出版)
  
  Pages: 219-235
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Application of high power impulse sputtering to reactive deposition of titanium nitride to suppress oxygen impurity from environment2011
- Author(s)
  T.Sekiya, H.Ishida, T.Nakano, S.Baba
- Organizer
  11th International Symposium on Sputtering & Plasma Processes, SP P-10
- Place of Presentation
  京都リサーチパーク,京都
- Year and Date
  2011-07-07
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Diagnostics of impulse magnetron sputtering plasma with modified target bias voltage during pulse-off period2011
- Author(s)
  T. Nakano, N. Hirukawa, S. Saeki, S. Baba
- Organizer
  11th International Symposium on Sput-tering & Plasma Processes
- Place of Presentation
  京都
- Year and Date
  2011-07-07
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Electrical breakdown characteristics of MgO films deposited by RF magnetron dputtering and its dependence on process gas pressure2011
- Author(s)
  R.Kosone, Y.Nakagawa, K.Arai, T.Nakano, S.Baba
- Organizer
  15th Internation Conference on Thin Films, P-S17-05
- Place of Presentation
  京都テルサ,京都
- Year and Date
  2011-11-10
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Structural and optical properties of V2O5 thin films prepared by reactive magnetron sputtering : preparation and annealing behavior2011
- Author(s)
  K. Maki, T. Fukuda, T. Nakano, S. Baba
- Organizer
  15th International Conference on Thin Films
- Place of Presentation
  京都
- Year and Date
  2011-11-08
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Structural and optical properties of V_2O_5 thin films prepared by reactive magnetron sputtering : preparation and snnealing behavior2011
- Author(s)
  K.Maki, T.Fukuda, T.Nakano, S.Baba
- Organizer
  15th Internation Conference on Thin Films, P-S1-02
- Place of Presentation
  京都テルサ,京都
- Year and Date
  2011-11-08
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] パルスoff期のターゲット電位を変化させた高電力パルスマグネトロンスパッタにおけるプラズマ診断2011
- Author(s)
  中野武雄, 日留川紀彦, 佐伯修平, 馬場茂
- Organizer
  第58回応用物理関係連合講演会
- Place of Presentation
  神奈川
- Year and Date
  2011-03-27
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Growth of target race track profile during magnetron sputtering2011
- Author(s)
  M. Ueda, T. Nakano, S. Baba
- Organizer
  11th Interna-tional Symposium on Sputtering & Plasma Processes
- Place of Presentation
  京都
- Year and Date
  2011-07-07
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Diagnostics of impulse magnetron sputtering plasma with modified target bias voltage during pulse-off period2011
- Author(s)
  Nakano, N.Hirukawa, S.Saeki, S.Baba
- Organizer
  11th International Symposium on Sputtering & Plasma Processes, SP 1-4
- Place of Presentation
  京都リサーチパーク,京都
- Year and Date
  2011-07-07
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Growth of target race track profile during magnetron sputtering2011
- Author(s)
  M.Ueda, T.Nakano, S.Baba
- Organizer
  11th International Symposium on Sputtering & Plasma Processes, SP P-9
- Place of Presentation
  京都リサーチパーク,京都
- Year and Date
  2011-07-07
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Application of high power impulse sputtering to reactive deposition of titanium nitride to suppress oxygen im-purity from environment2011
- Author(s)
  T. Sekiya, H. Ishida, T. Nakano, S. Baba
- Organizer
  11th Inter-national Symposium on Sputtering & Plasma Processes
- Place of Presentation
  京都
- Year and Date
  2011-07-07
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] パルスoff期のターゲット電位を変化させた高電力パルスマグネトロンスパッタにおけるプラズマ診断2011
- Author(s)
  中野武雄, 日留川紀彦, 佐伯修平, 馬場茂
- Organizer
  第56回応用物理関係連合講演会19p-ZB-5
- Place of Presentation
  東海大,神奈川
- Year and Date
  2011-03-27
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Electrical breakdown characteristics of MgO films deposited by RF magnetron sputtering and its dependence on process gas pressure2011
- Author(s)
  R. Kosone, Y. Nakagawa, K. Arai, T. Nakano, S. Baba
- Organizer
  15th Interna-tional Conference on Thin Films
- Place of Presentation
  京都
- Year and Date
  2011-11-10
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Structure modification of films de-posited by HiPIMS with target bias voltage during pulse-off period2010
- Author(s)
  N. Hirukawa, R. Hara, T. Nakano, S. Baba
- Organizer
  18th Interna-tional Vacuum Congress
- Place of Presentation
  Beijing,中国
- Year and Date
  2010-08-24
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] パルスoff時のターゲット電位を制御した高電力パルススパッタにおけるプラズマ分析2010
- Author(s)
  日留川紀彦, 中野武雄, 馬場茂
- Organizer
  第51回真空に関する連合講演会
- Place of Presentation
  大阪
- Year and Date
  2010-11-04
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] 低付着性の炭素系薄膜の力学特性および界面エネルギー2010
- Author(s)
  丸山淳, 中野武雄, 馬場茂
- Organizer
  第122回表面技術講演大会
- Place of Presentation
  仙台
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] マグネトロンスパッタリングにおけるターゲットエロージョンの時間発展2010
- Author(s)
  植田麻理子, 中野武雄, 馬場茂
- Organizer
  第51回真空に関する連合講演会
- Place of Presentation
  大阪
- Year and Date
  2010-11-05
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] マグネトロンスパッタリングにおけるターゲットエロージョンの時間発展2010
- Author(s)
  植田麻理子, 中野武雄, 馬場茂
- Organizer
  第51回真空に関する連合講演会 5P-045
- Place of Presentation
  大阪大学(吹田),大阪
- Year and Date
  2010-11-05
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Secondary electron emission and elec-trical breakdown properties of sputtered MgO films at low gas pressures2010
- Author(s)
  K. Arai, T. Sekiya, T. Nakano, S. Baba
- Organizer
  18th International Vacuum Congress
- Place of Presentation
  Beijing,中国
- Year and Date
  2010-08-26
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] パルスoff時のターゲット電位を制御した高電力パルススパッタにおけるプラズマ分析2010
- Author(s)
  日留川紀彦, 中野武雄, 馬場茂
- Organizer
  第51回真空に関する連合講演会 4Ba-04
- Place of Presentation
  大阪大学(吹田),大阪
- Year and Date
  2010-11-04
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Structure modification of films deposited by HiPIMS with target bias voltage during pulse-off period2010
- Author(s)
  N.Hirukawa, R.Hara, T.Nakano, S.Baba
- Organizer
  18th International Vacuum Congress, P1-Tf1-546266a94-6
- Place of Presentation
  Beijing, 中国
- Year and Date
  2010-08-24
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] 低付着性の炭素系薄膜の力学特性および界面エネルギー2010
- Author(s)
  丸山淳, 中野武雄, 馬場茂
- Organizer
  第122回表面技術講演大会 7D-16
- Place of Presentation
  東北大学(川内北), 仙台
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Secondary electron emission and electrical breakdown properties of sputtered MgO films at low gas pressures2010
- Author(s)
  K Arai, T.Sekiya, T.Nakano, S.Baba
- Organizer
  18th International Vacuum Congress, P3 TF1-4 17ff6e2d-e
- Place of Presentation
  Beijing, 中国
- Year and Date
  2010-08-26
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] パルス off 期のターゲット電位を変化させたパルスマグネトロンスパッタによる薄膜構造制御2010
- Author(s)
  中野武雄, 原良輔, 日留川紀彦, 馬場茂
- Organizer
  第56回応用物理関係連合講演会 19p-ZB-5
- Place of Presentation
  東海大, 神奈川
- Year and Date
  2010-03-19
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] パルスoff期のターゲット電位を変化させたパルスマグネトロンスパッタによる薄膜構造制御2010
- Author(s)
  中野武雄, 原良輔, 日留川紀彦, 馬場茂
- Organizer
  第57回応用物理関係連合講演会
- Place of Presentation
  神奈川
- Year and Date
  2010-03-19
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Effects of vacuum environment on oxygen impurity during the reactive sputtering deposition of metal nitrides2009
- Author(s)
  Hirukawa, Nakamura, Suzuki, Nakano, Baba
- Organizer
  10th International Symposium on Sputtering & Plasma Processes(日本真空協会)SP P2-5
- Place of Presentation
  金沢国際ホテル, 石川
- Year and Date
  2009-07-09
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] MgOスパッタ膜の電子放出特性と絶縁破壊特性の製膜時圧力依存性2009
- Author(s)
  新井完, 関谷賢明, 中野武雄, 馬場茂
- Organizer
  第50回真空に関する連合講演会
- Place of Presentation
  東京
- Year and Date
  2009-11-04
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] PTFE・フラーレン重ね蒸着薄膜の摩擦・摩耗特性2009
- Author(s)
  丸山淳, 塚本英貴, 中野武雄, 馬場茂
- Organizer
  表面技術協会第120回講演大会
- Place of Presentation
  千葉
- Year and Date
  2009-09-18
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Effects of vacuum environment on oxygen impurity during the reactive sputtering deposition of metal nitrides2009
- Author(s)
  N. Hirukawa, A. Suzuki, T. Nakano, S. Baba
- Organizer
  10th International Symposium on Sput-tering & Plasma Processes
- Place of Presentation
  石川
- Year and Date
  2009-07-09
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Effect of the bias voltage during off-pulse period on the impulse magnetron sput-tering2009
- Author(s)
  T. Nakano, C. Murata, S. Baba
- Organizer
  10th International Symposium on Sputtering & Plasma Processes
- Place of Presentation
  石川
- Year and Date
  2009-07-09
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] Effect of the bias voltage during off-pulse period on the impulse magnetron sputtering2009
- Author(s)
  T.Nakano, C.Murata, S.Baba
- Organizer
  10th International Symposium on Sputtering & Plasma Processes(日本真空協会)SP 3-2
- Place of Presentation
  金沢国際ホテル, 石川
- Year and Date
  2009-07-09
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] PTFE・フラーレン(C60)重ね蒸着薄膜の摩擦・摩耗特性2009
- Author(s)
  丸山淳, 塚本英貴, 中野武雄, 馬場茂
- Organizer
  表面技術協会第120回講演大会 18D-02
- Place of Presentation
  幕張メッセ, 千葉
- Year and Date
  2009-09-18
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] MgOスパッタ膜の電子放出特性と絶縁破壊特性の製膜時圧力依存性2009
- Author(s)
  新井完, 関谷賢明, 中野武雄, 馬場茂
- Organizer
  第50回真空に関する連合講演会 4Ba-2
- Place of Presentation
  学習院大, 東京
- Year and Date
  2009-11-04
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] パルスoff時のバイアス電位を制御したパルスマグネトロンスパッタの特性(2)2009
- Author(s)
  中野武雄, 新井完, 馬場茂
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-21560054
[Presentation] パルス off 時のバイアス電位を制御したパルスマグネトロンスパッタの特性(2)2009
- Author(s)
  中野武雄, 新井完, 馬場茂
- Organizer
  第70回応用物理学会学術講演会 9a-N-5
- Place of Presentation
  富山大, 富山
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-21560054

1. NAKANO Takeo (40237342)

# of Collaborated Projects: 2 results

# of Collaborated Products: 43 results
2. KINBARA Akira (90010719)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

BABA Shigeru 馬場 茂

Research Projects

Research Products

Co-Researchers

Reactive Sputtering of Oxygen-Free Metal Nitride Films : Oxygen Incorporation and Effect on Electrical PropertiesPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Detection of Exo-Electrons From a Scratch Damage of Thin FilmsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Electronic Structures and the Mechanical Stability of Ultra-thin Metal Films on the Semiconductor Surface and the Effect of Internal Stress on Them

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Book] 異種材料界面の測定と評価技術第13章2節付着の測定法と評価2012

Author(s)

Data Source

[Book] 異種材料界面の測定と評価技術(監修:石井淑夫)第13章2節付着の測定法と評価2012

Author(s)

Publisher

Data Source

[Book] 薄膜工学第2版第3章3節力学的・機械的性質の評価2011

Author(s)

Publisher

Data Source

[Book] 薄膜工学第2版(監修:金原粲)第3章3節力学的・機械的性質の評価2011

Author(s)

Publisher

Data Source

[Book] 剥離対策と接着・密着性の向上,第5章1節付着試験に伴う薄膜の応力場2010

Author(s)

Publisher

Data Source

[Book] 剥離対策と接着・密着性の向上-第5章1節 付着試験に伴う薄膜の応力場2010

Author(s)

Publisher

Data Source

[Book] 実用薄膜プロセス-機能創生・応用展開-,第7章力学薄膜の物性と構造2009

Author(s)

Publisher

Data Source

[Journal Article] Effects of target voltage during pulse-off period in pulsed magnetron sputtering on afterglow plasma and de-posited film structure2012

Author(s)

Journal Title

URL

Data Source

[Journal Article] Structural and optical properties of reactive-sputtered films of V_2O_5 : Measurement of optical bandgap and roughness correction2012

Author(s)

Journal Title

Data Source

[Journal Article] Structural and optical properties of reactive-sputtered films of V2O5 : Meas-urement of optical bandgap and roughness correction2012

Author(s)

Journal Title

URL

Data Source

[Journal Article] Effects of target voltage during pulse-off period in pulsed magnetron sputtering on afterglow plasma and deposited film structure2012

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Structural Properties of Island Films of Indium on Si(111) and the Sputter-Etching Profile2011

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Structural Properties of Island Films of Indium on Si(111) and the Sputter-Etching Profile2011

Author(s)

Journal Title

NAID

URL

Data Source

[Journal Article] Effect of the target bias voltage during off-pulse period on the impulse magnetron sputtering2010

BABA Shigeru 馬場茂

[Book] 剥離対策と接着・密着性の向上-第5章1節付着試験に伴う薄膜の応力場2010