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Sato Naoyuki  佐藤 直幸

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… Alternative Names

NAOYUKI Sato  佐藤 直幸

SATO Naoyuki  佐藤 直幸

佐藤 直幸

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Researcher Number 80225979
Other IDs
External Links
Affiliation (Current) 2022: 茨城大学, 理工学研究科(工学野), 准教授
Affiliation (based on the past Project Information) *help 2007 – 2008: 茨城大学, 理工学研究科, 准教授
2005 – 2006: 茨城大学, 理工学研究科, 助教授
2004 – 2006: 茨城大学, 大学院・理工学研究科, 助教授
1998 – 2001: 茨城大学, 工学部, 助教授
1993 – 1995: 茨城大学, 工学部, 助手
1991: 茨城大学, 工学部, 助手
Review Section/Research Field
Principal Investigator
プラズマ理工学 / Material processing/treatments
Except Principal Investigator
プラズマ理工学 / Measurement engineering / エネルギー学一般・原子力学 / Thin film/Surface and interfacial physical properties
Keywords
Principal Investigator
イオンエネルギー / 低エネルギーイオン / 高周波(rf)放電プラズマ / パルス変調 / 空間電位 / 平均加速時間 / rfシース / 電子注入 / 動重力 / ECRプラズマ … More / シース電位 / 電子サイクロトロン運動 / 電子ラーモア半径 / 高周波電力密度 / 電子密度分布 / 動重力(ポンデロモーティブカ) / プラズマ非線形効果 / プラズマ電位 / プローブ測定 / 高周波(rf)電場 / プローブ駆動システム / FETプローブ / 高周波ネットワーク解析 / 動重力(ポンディロモーティブ力) / 高周波電場 / 酸化物材料プラズマ合成 / ECR低温プラズマ / 動重力(時間平均マックスウェル応力) / 組成比制御 / 運動量制御 / 配向性制御 / 酸素プラズマ / 低気圧PVD / 透明導電膜 / 亜鉛蒸発 / plasma processing / transparent conductive film / ponderomotive force / stoichiometry control / momentum control / orientation control / oxygen plasma / zinc vaporization … More
Except Principal Investigator
LD-TOFMS / プラズマ / アンジュレーター / 放射光 / 自由電子レーザー / 沿面放電 / レーザー / 相対論的電子ビーム / 干渉縞 / 計測システム / プラズマチャンバー / 異常放電 / 位置推定 / アンテナ / 到来方向推定 / 回転プラズマ / 同位体分離 / プラズマ遠心分離 / プラズマ加速 / プラズマ巨視不安定性 / プラズマ生成 / J×Bローレンツカ / 電磁力 / プラズマの巨視的不安定性 / ROTATING PLASMA / ISOTOPE SEPARATION / PLASMA CENTRIFUGE / PLASMA ACCELERATION / PLASMA MACRO INSTABILITY / PLASMA PRODUCTION / J*B LORENTZ FORCE / フラーレン / フラーレン-アルゴン混合磁化プラズマ / フラーレンイオン / イオンプレーティング / イオンエネルギー制御 / フラーレン膜の堅牢化 / フラグメンテーション / フラーレン・アルゴン混合磁化プラズマ / 捕集電極バイアス実験 / 電極バイアス実験 / レーザー脱離イオン化TOFMS / fullerenes / magnetized fullerenes / fullerene ion / ion plating / ion energy control / durable fullerene films / fragmentation / C_<60>フラーレン / クラスターイオン / TOF / C_<60> fullerene / cluster ion / Time of Flight Less
  • Research Projects

    (10 results)
  • Research Products

    (56 results)
  • Co-Researchers

    (10 People)
  •  Study on a real-time monitoring technique of electromagnetic discharge in a plasma chamber

    • Principal Investigator
      OBOTE Shigeki
    • Project Period (FY)
      2006 – 2008
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Measurement engineering
    • Research Institution
      Ibaraki University
  •  Development of a compact and low energy C_<60> cluster ion gun for high resolution depth profiling ob bio-samples

    • Principal Investigator
      INOUE Masahiko
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Thin film/Surface and interfacial physical properties
    • Research Institution
      Setsunan University
  •  Development of plasma synthesis technology for advanced complex compound materials based on mass-selective momentum controlPrincipal Investigator

    • Principal Investigator
      SATO Naoyuki
    • Project Period (FY)
      2004 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Material processing/treatments
    • Research Institution
      Ibaraki University
  •  動重力効果を用いたプラズマ電位の新しいプローブ測定法の開発Principal Investigator

    • Principal Investigator
      佐藤 直幸
    • Project Period (FY)
      2000 – 2001
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Ibaraki University
  •  Formation of durable fullerene films by using the specially controlled plasma

    • Principal Investigator
      MASE Hiroshi
    • Project Period (FY)
      1998 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      IBARAKI UNIVERSITY
  •  動力力を用いたプロセスプラズマ中シース電位の制御Principal Investigator

    • Principal Investigator
      佐藤 直幸
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Ibaraki University
  •  短波長・高輝度放射光用プラズママイクロアンジュレーターの原理検証実験

    • Principal Investigator
      MASE Hiroshi
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Ibaraki University
  •  高周波放電プラズマのパルス変調によるイオンの低エネルギー化Principal Investigator

    • Principal Investigator
      佐藤 直幸
    • Project Period (FY)
      1994
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Ibaraki University
  •  DEVELOPMENT OF CENTRIFUGAL SEPARATION METHOD OF ISOTOPES BY USE OF A J*B DRIVEN ROTATING PLASMA

    • Principal Investigator
      IKEHATA Takashi
    • Project Period (FY)
      1993 – 1995
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      エネルギー学一般・原子力学
    • Research Institution
      IBARAKI UNIVERSITY
  •  電子プラズマ波による周辺プラズマの電位制御Principal Investigator

    • Principal Investigator
      佐藤 直幸
    • Project Period (FY)
      1991
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Ibaraki University

All 2008 2007 2006 2005 2004 Other

All Journal Article Presentation

  • [Journal Article] The investigation of the ponderomotive force effect in ECR gas mixture plasma for mass-selective momentum control2008

    • Author(s)
      Naoyuki Sato, Yuji Yabuuchi, Souichi Sugaya, Takashi Ikehata, Satoshi Yamauchi and Jin Oonuki
    • Journal Title

      The 25th Symposium on Plasma Processing P1-27

      Pages: 161-162

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The synthesis of transparent conductive film in the zinc-oxygen mixture plasma for mass-selective momentum control2008

    • Author(s)
      Naoyuki Sato, Yoshihiro Komatsu, Takashi Ikehata, Satoshi Yamauchi, and Jin Oonuki
    • Journal Title

      The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology, IEE Japan PST-08-13

      Pages: 33-38

    • NAID

      10025666551

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] 質量選択的運動量制御に向けたECR各種混合プラズマ中の動重力効果の観察2008

    • Author(s)
      佐藤直幸・薮内祐二・菅谷聡一・池畑 隆・山内 智・大貫 仁
    • Journal Title

      第25回「プラズマプロセシング研究会」SPP-25プロシーディングス P1-27

      Pages: 161-162

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] 質量選択的運動量制御に向けた亜鉛・酸素混合プラズマ中の透明導電膜合成2008

    • Author(s)
      佐藤直幸・小松良寛・池畑 隆・山内 智・大貫 仁
    • Journal Title

      電気学会プラズマ研究会資料 PST-08-13

      Pages: 33-38

    • NAID

      10025666551

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] 質量選択的運動量制御に向けたECR酸素プラズマの低温部引き出しと動重力増強の観察2007

    • Author(s)
      藪内祐二・菅谷聡一・佐藤直幸・池畑 隆・山内 智・大貫 仁
    • Journal Title

      電気学会プラズマ研究会資料 PST-07-29

      Pages: 29-34

    • NAID

      10019514039

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The investigation of the ponderomotive force's enhancement accompanying with the extraction of lower energy lectrons from ECR oxygen plasma for mass-selective momentum control2007

    • Author(s)
      Yuji yabuuchi, Souichi Sugaya, Naoyuki Sato, Takashi Ikehata, Satoshi Yamauchi, and Jin Oonuki
    • Journal Title

      The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan PST-07-29

      Pages: 29-34

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006

    • Author(s)
      Y.Sato, K.Kinoshita, Y.Nakano, T.Ikehata, S.Yamauchi, J.Oonuki
    • Journal Title

      Proceeding of the 6th International Conference on Reactive plasmas and 23rd Symposium on Plasma Processing APO61201・P-1A-06

      Pages: 171-172

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux measurement of ions incident upon the substrate in ECR oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006

    • Author(s)
      Naoyuki, Sato・Kousuki, Kinoshita・Takashi, Ikehata・Satoshi, Yamauchi・Jin, Oonuki
    • Journal Title

      8th Asia-Paeific Conference on Plasma Science and Teehnelogy and 19th Symposium on Plasma Science for Materials, Cairns in Australia http://wwwrsphysse.anu.edu.au/~mdl112/apcpst/Abst

      Pages: 257-257

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Smooth surface DRY Etching of Diamond by Very High Frequency Inductively Coupled Plasma2006

    • Author(s)
      Hiromichi Yoshikawa, Shinichi Shikata, Naoji Fujimori, Naoyuki Sato and Takashi Ikehara
    • Journal Title

      New Diamond and Frontier Carbon Technology Vol.16, No.2

      Pages: 97-106

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux suppression of ion incident upon on the substrate in ECR oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006

    • Author(s)
      Kousuke Kinoshita and Naoyu kiSato
    • Journal Title

      Proceedings of the Second Intermational Student Conference at Ibaraki University 2006 (Proceedings)

      Pages: 122-127

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux suppression of ion incident upon on the substrate in ECR oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006

    • Author(s)
      Kousuke Kinoshita, Naoyuki Sato
    • Journal Title

      Proceedings of the Second International Student Conference at Ibarakil University (Proceedings)

      Pages: 122-127

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006

    • Author(s)
      N. Y. Sato, K. Kinoshita, Y. Nakano, T. Lkehata, S. Yamauchi and J. Oonuki
    • Journal Title

      Proceeding of the 6th International Conference on Reactive Plasmas and 23nd Symposium on Plasma Processing AP061201・P-1A-06

      Pages: 171-172

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Smooth Surface Dry Etching of Diamond by Very High Frequency Inductively Coupled Plasma2006

    • Author(s)
      Hiromichi, Yoshikawa・Shinichi, Shikata・Naoji, Fujimori・Naoyuki, Sato・Takashi, Ikehata
    • Journal Title

      New Diamond and Frontier Carbon Technology Vol.16,No.2

      Pages: 97-106

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux suppression of ion incident upon on the substrate in ECR oxygen plasma for ZnO film synthesis based on mass-selective momentrm control2006

    • Author(s)
      Kousuke, Kinoshita・Naoyuki, Sato
    • Journal Title

      Proceedings of the Second International Student Conference at Ibaraki University 2006 Proceedings 2006

      Pages: 122-127

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux measurement of ions incident upon on the substrate in ECR oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006

    • Author(s)
      Naoyuki Sato, Kousuke Kinoshita, Takashi Ikehata, Satoshi Yamauchi,and Jin Oonuki
    • Journal Title

      8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials, Cairnsin Australia http://wwwrshsse.anu.edu.au/~mdl112/apcpst/AbstractBook.pdf

      Pages: 257-257

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] 質量選択的運動量制御による複合化合物材料のプラズマ合成に向けた低気圧低温プラズマの生成2006

    • Author(s)
      佐藤直幸, 木下廣介, 池畑 隆, 山内 智, 大貫 仁
    • Journal Title

      第54回応用物理学関係連合講演会講演予稿集 1・29(P-C-8)

      Pages: 185-185

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux measurement of ion incident upon on the substrate in ECR oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006

    • Author(s)
      Naoyuki Sato, Kousuke Kinoshita, Takashi Ikehata, Satoshi Yamauchi, Jin Oonuki
    • Journal Title

      8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials, Cairns in Australia (AbstractBook.pdf)

      Pages: 257-257

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux control of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2006

    • Author(s)
      N.Y, Sato・K, Kinoshita・Y, Nakano・T, Ikehata・S, Yamauchi・J, Oonuki
    • Journal Title

      Proceeding of the 6^<th> International Conference on Reactive Plasmas and 23^<rd> Symposium on Plasma Processing AP061201・P-1A-06

      Pages: 171-172

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux suppression of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005

    • Author(s)
      N Y.Sato, K.Kinoshita, Y.Nakano, T.Ikehata, S.Yamauchi, J.Oonuki
    • Journal Title

      第18回プラズマ材料科学シンポジウム ISSN1342-7210

      Pages: 54-54

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Plasma synthesis of zinc-oxide thin film based on mass-selective momentum control2005

    • Author(s)
      Naoyuki Sato, Satoshi Yamauchi, Takashi Ikehata, Yasushi Nakano, Jin Oonuki
    • Journal Title

      プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-070

      Pages: 613-614

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Measurement of Oxygen Plasma for Diamond Etching Process2005

    • Author(s)
      H, Yoshikawa・Y, Nakano・K, Masumura・N, Sato・T, Ikehata
    • Journal Title

      プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P2-055

      Pages: 327-328

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Plasma synthesis of zinc-oxide thin film based on mass-selective momentum control2005

    • Author(s)
      Naoyuki Sato, Satoshi Yamauchi, Takashi Ikehata, Yasushi Nakano, and Jin Oonuki
    • Journal Title

      Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing 3-070

      Pages: 613-614

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux suppression of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005

    • Author(s)
      N. Y. Sato, K. Kinoshita, Y. Nakano, T. Ikehata, S. Yamauchi and J. Oonuki
    • Journal Title

      THE 18th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS ISSN 1342-7210

      Pages: 54-54

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] 質量選択的運動量制御による酸化物薄膜の合成に向けた磁場中酸素プラズマの電圧-電流特性2005

    • Author(s)
      中野恭嗣, 佐藤直幸, 池畑 隆, 山内 智, 大貫 仁
    • Journal Title

      第65回応用物理学会学術講演会講演予稿集 No.2・29a-E-1

      Pages: 1027-1027

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Plasma synthesis of zinc-oxide thin film based on mass-selective momentum control2005

    • Author(s)
      Haoyuki, Sato・Satoshi, Yamauchi・Takashi, Ikehata・Yasushi, Nakano・Jin, Oonuki
    • Journal Title

      プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-070

      Pages: 613-614

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux measurement of ions incident upon the substrate in zinc oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005

    • Author(s)
      K, Kinoshita・N.Y, Sato・Y, Nakano・T, Ikehata・S, Yamauchi・J, Oonuki
    • Journal Title

      第18回プラズマ材料科学シンポジウム ISSN1342-7210

      Pages: 55-55

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Characteristics of the magnetized rf oxygen plasma for ZnO film synthesis based on mass-selective momentrm control2005

    • Author(s)
      Yasushi, Nakano・Naoyuki, Sato・Takashi, Ikehata・Satoshi, Yamauchi・Jin Oonuki
    • Journal Title

      プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-072

      Pages: 617-618

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Production of zinc-oxide mixture plasma for ZnO film synthesis based on mass-selective momentum control2005

    • Author(s)
      Naoyuki, Sato・Satoshi, Yamauchi・Takashi, Ikehata・Yasushi, Nakano・Jin, Oonuki
    • Journal Title

      プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-071

      Pages: 615-616

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux suppression of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005

    • Author(s)
      K. Kinoshita, N. Y. Sato, Y. Nakano, T. Ikehata, S. Yamauchi and J. Oonuki
    • Journal Title

      THE 18th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS ISSN 1342-7210

      Pages: 55-55

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Measurement of Oxygen Plasma for Diamond Etching Process2005

    • Author(s)
      H. Yoshikawa, Y. Nakano, K. Masumura, N. Sato, T. Ikehata
    • Journal Title

      Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing 2-055

      Pages: 327-328

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Characteristics of the magnetized rf oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005

    • Author(s)
      Yasushi Nakano, Naoyuki Sato, Takashi Ikehata, Satoshi Yamauchi, Jin Oonuki
    • Journal Title

      プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-072

      Pages: 617-618

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux measurement of ions incident upon the substrate in zinc oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005

    • Author(s)
      K.Kinoshita, N.Y.Sato, Y.Nakano, T.Ikehata, S.Yamauchi, J.Oonuki
    • Journal Title

      第18回プラズマ材料科学シンポジウム ISSN1342-7210

      Pages: 55-55

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Production of zinc-oxide mixture plasma for ZnO film synthesis based on mass-selective momentum control2005

    • Author(s)
      Naoyuki Sato, Satoshi Yamauchi, Takashi Ikehata, Yasushi Nakano, and Jin Oonuki
    • Journal Title

      Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing P3-071

      Pages: 615-616

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] 質量選択的運動量制御・磁場中酸素プラズマを用いた酸化物薄膜の合成(シンポジウム招待講演30分)2005

    • Author(s)
      佐藤直幸, 中野恭嗣, 木下廣介, 池畑 隆, 山内 智, 大貫 仁
    • Journal Title

      第66回応用物理学会学術講演会講演予稿集 NO.0・8p-N-5

      Pages: 33-33

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] 質量選択的運動量制御によるZnO薄膜の合成に向けた磁場中酸素プラズマへの亜鉛蒸気導入2005

    • Author(s)
      佐藤直幸, 中野恭嗣, 池畑 隆, 山内 智, 大貫 仁
    • Journal Title

      第65回応用物理学会学術講演会講演予稿集 No.2・30a-E-6

      Pages: 1092-1092

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Characteristics of the magnetized rf oxygen plasma for ZnO film synthesis besed on mass-selective momentum control2005

    • Author(s)
      Yasushi Nakano, Naoyuki Sato, Takashi Ikehata, Satoshi Yamauchi and Jin Oonuki
    • Journal Title

      Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing P3-072

      Pages: 617-618

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] Production of zinc-oxide mixture plasma for ZnO film synthesis based on mass-selective momentum control2005

    • Author(s)
      Naoyuki Sato, Satoshi Yamauchi, Takashi Ikehata, Yasushi Nakano, Jin Oonuki
    • Journal Title

      プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会 P3-071

      Pages: 615-616

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The flux suppression of ion incident upon the substrate in oxygen plasma for ZnO film synthesis based on mass-selective momentrm control2005

    • Author(s)
      N.Y, Sato・K, Kinoshita・Y, Nakano・T, Ikehata・S, Yamauchi・J, Oonuki
    • Journal Title

      第18回プラズマ材料科学シンポジウム ISSN1342-7210

      Pages: 54-54

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] The preliminary experiment of the ZnO thin film synthesis by mass-selective momentum control based on the ponderomotive force on the magnetizedions2004

    • Author(s)
      Naoyuki Sato, Yasushi Nakano, Takashi Ikehata, Satoshi Yamauchi, Jin Oonuki
    • Journal Title

      The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan PST-04-28

      Pages: 91-96

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] 動重力効果を利用したイオンの選択的運動量制御によるZnO薄膜合成の実験準備2004

    • Author(s)
      佐藤直幸, 中野恭嗣, 池畑 隆, 山内 智, 大貫 仁
    • Journal Title

      電気学会プラズマ研究会資料 PST-04-28

      Pages: 91-96

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] 動重力効果を利用したイオンの選択的運動量制御によるZnO薄膜合成の実験準備2004

    • Author(s)
      佐藤直幸・中野恭嗣・池畑 隆・山内 智・大貫 仁
    • Journal Title

      電気学会プラズマ研究会資料 PST-04-28

      Pages: 91-96

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Journal Article] 複合化合物材料の合成に向けた選択的運動量制御型プラズマ成膜技術の開発2004

    • Author(s)
      佐藤直幸, 中野恭嗣, 池畑 隆, 山内 智, 大貫 仁
    • Journal Title

      第65回応用物理学会学術講演会 講演予稿集 No.1 1a-ZB-8

      Pages: 365-365

    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] 質量選択的運動量制御に向けたZnO薄膜プラズマ合成中の抵抗率測定2008

    • Author(s)
      小松良寛・佐藤直幸・池畑 隆・山内 智・大貫 仁
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      船橋市,日本大学理工学部
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] 質量選択的運動量制御による複合化合物材料のプラズマ合成に向けた低気圧低温プラズマの生成2006

    • Author(s)
      佐藤直幸・木下廣介・池畑 隆・山内 智・大貫 仁
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      相模原市,青山学院大学
    • Year and Date
      2006-03-29
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] 複合化合物材料の合成に向けた選択的運動量制御型プラズマ成膜技術の開発2005

    • Author(s)
      佐藤直幸・中野恭嗣・池畑 隆・山内 智・大貫 仁
    • Organizer
      第65回応用物理学会学術講演会
    • Place of Presentation
      仙台市,東北学院大学
    • Year and Date
      2005-09-01
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] VHF帯誘導結合プラズマ(VHF-ICP)を用いたダイヤモンドの加工2005

    • Author(s)
      吉川博道・中野恭嗣・佐藤直幸・池畑 隆
    • Organizer
      第52回応用物理学関係連合講演会
    • Place of Presentation
      さいたま市,埼玉大学
    • Year and Date
      2005-03-30
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] Voltage-current characteristics of the magnetized oxygen plasma for oxide film synthesis based on mass-selective momentum control2005

    • Author(s)
      Y. Nakano. N. Y. Sato. T. Ikehata, S. Yamauchi&J. Oonuki
    • Organizer
      Extended Abstracts(The 52nd Spring Meeting, 2005) The Japan Society of Applied Physics and Related Societies No.2 29a-E-1
    • Place of Presentation
      in Japanese
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] Plasma application of mass-selective momentum control to complex compound synthesis2005

    • Author(s)
      Naoyuki Sato, Yasushi Nakano, Takashi Ikehata, Satoshi Yamauchi, Jin Oonuki
    • Organizer
      Extended Abstracts(The 65th Autumn Meeting, 2005) The Japan Society of Applied Physics No.1 1a-ZB-8
    • Place of Presentation
      in Japanese
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] 質量選択的運動量制御によるZnO薄膜の合成に向けた磁場中酸素プラズマへの亜鉛蒸気導入2005

    • Author(s)
      佐藤直幸・中野恭嗣・池畑 隆・山内 智・大貫 仁
    • Organizer
      第52回応用物理学関係連合講演会
    • Place of Presentation
      さいたま市,埼玉大学
    • Year and Date
      2005-03-30
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] Introduction of zinc intot the magnetized oxygen plasma for ZnO film synthesis based on mass-selective momentum control2005

    • Author(s)
      N. Y. Sato, Y. Nakano, T. Ikehata, S. Yamauchi&J. Oonuki
    • Organizer
      Extended Abstracts(The 52nd Spring Meeting, 2005) The Japan Society of Applied Physics and Related Societies No.2 30a-E-6
    • Place of Presentation
      in Japanese
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] Fabrication of diamond single crystal by employing VHF-ICP plasma2005

    • Author(s)
      H. Yoshikawa, YNakano, N. Y. Sato&T. Ikehata
    • Organizer
      Extended Abstracts(The 52nd Spring Meeting, 2005) The Japan Society of Applied Physics and Related Societies No.2 30a-G-2
    • Place of Presentation
      in Japanese
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] 質量選択的運動量制御による酸化物薄膜の合成に向けた磁場中酸素プラズマの電圧-電流特性2005

    • Author(s)
      中野恭嗣・佐藤直幸・池畑 隆・山内 智・大貫 仁
    • Organizer
      第52回応用物理学関係連合講演会
    • Place of Presentation
      さいたま市,埼玉大学
    • Year and Date
      2005-03-29
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] 質量選択的運動量制御・磁場中酸素プラズマを用いた酸化物薄膜の合成(シンポジウム招待講演 30分)2005

    • Author(s)
      佐藤直幸・中野恭嗣・木下廣介・池畑 隆・山内 智・大貫 仁
    • Organizer
      第66回応用物理学会学術講演会
    • Place of Presentation
      徳島市,徳島大学
    • Year and Date
      2005-09-08
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] Oxide film synthesis in the magnetized oxygen plasma based on mass-selective momentum control(invited on 8 Sep.2005)

    • Author(s)
      N. Y. Sato, Y. Nakano, K. Kinoshita, T. Ikehata, S. Yamauchi&J. Oonuki
    • Organizer
      Extended Abstracts(The 66th Autumn Meeting, 2005) The Japan Society of Applied Physics No,0 8p-N-5
    • Place of Presentation
      in Japanese
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] The resistivity measurement in the plasma deposition of ZnO thin film for mass-selective momentum control

    • Author(s)
      Yoshihiro Komatsu, Naoyuki Sato, Takashi Ikehata, Satoshi Yamauchi, and Jin Oonuki
    • Organizer
      Extended Abstracts(The 55th Spring Meeting, 2008) The Japan Society of Applied Physics and Related Societies No,1 28p-ZJ-10
    • Place of Presentation
      in Japanese
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • [Presentation] Production of low temperature plasma under low pressure for complex compound synthesis by mass-selective momentum control

    • Author(s)
      Naoyuki Sato, Kousuke Kinoshita, Takashi Ikehata, Satoshi Yamauchi
    • Organizer
      Extended Abstracts(The 54th Autumn Spring 2006) The Japan Society of Applied Physics and Related Societies No.1 29p-C-8
    • Place of Presentation
      in Japanese
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360356
  • 1.  TAKACHI Ikehata (00159641)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 51 results
  • 2.  MASE Hiroshi (30007611)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 3.  OBOTE Shigeki (50323209)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 4.  KENICHI Kagoshima (70292472)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 5.  TANAKA Masatoshi (10250979)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 6.  YAMAUCHI Satoshi (30292478)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 47 results
  • 7.  ONUKI Jin (70315612)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 46 results
  • 8.  INOUE Masahiko (60191889)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  SHIMIZU Ryuichi (40029046)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  鈴木 康夫
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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