Katto Masahito 甲藤正人

… Alternative Names

KATTO Masahito 甲藤正人

甲藤正人カットウマサヒト

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Researcher Number	80268466
Other IDs
External Links
Affiliation (Current)	2025: 宮崎大学, 研究・産学地域連携推進機構, 准教授
Affiliation (based on the past Project Information) *help	2019 – 2021: 宮崎大学, 産学・地域連携センター, 准教授 2008: 宮崎大学, 産学連携センター, 准教授 2007: 宮崎大学, 産業連携センター, 准教授 2006: University of Miyazaki, Corporative Research Center, Associate Professor, 産学連携支援センター, 助教授 2005: 宮崎大学, 地域共同研究センター, 助教授 … More 2003: University of Miyazaki, Cooperative Research Center, Associate Professor, 地域共同研究センター, 助教授 2000 – 2002: 近畿大学, 理工学部, 講師 1995: 近畿大学, 理工学部, 助手 Less
Review Section/Research Field	Principal Investigator Basic Section 26050:Material processing and microstructure control-related / 電子デバイス・機器工学 Except Principal Investigator Material processing/treatments / Electronic materials/Electric materials / Applied optics/Quantum optical engineering / 水工水理学
Keywords	Principal Investigator スライス加工 / 半導体 / レーザー加工 / 変成 / レーザープロセッシング / 短パルスレーザー / 強度記録 / 紫外光 / イメージングプレート / 輝尽性蛍光体 … More Except Principal Investigator … More 真空紫外光 / エキシマランプ / 表面改質 / 光電界電離 / 希ガスエキシマ / photo-chemical vapor deposition / insulator / Via hole / system LSI / vacuum ultraviolet / 光CVD / 積層型システムLSI / 光CVD法 / 絶縁膜 / 貫通電極 / システムLSI / Surface alteration / Coherent vacuum ultraviolet emission / Vacuum ultraviolet lamp / Optical field induced ionization / Photo-induced cleaning / Photo-chemical process / Vacuum ultraviolet / Rare gas excimers / 光還元 / ドライプロセス / 表面反応 / 光化学反応 / コヒーレント真空紫外光 / 真空紫外ランプ / 光洗浄 / 光量子プロセス / Alumina / Ceramics / Titanium / Hydroxyapatite / Biocompatible materials / Surface modification / LALA method / Laser ablation / レーザー照射 / アルミナ / セラミックス / チタン / ハイドロキシアパタイト / 生体親和性材料 / LALA法 / レーザーアブレーション / 短波長光源技術 / 光プロセス / 高強度レーザー / 卓上型レーザー / 真空紫外 / 光物質プロセス / 超短パルス高強度レーザー / 中空ファイバー / ホログラフィ / LIV / シリンドリカル・レンズ / PIV / PTV / ホログラム・レーザー・ビーム / 秒のビデオカメラ / 100万枚 Less

Development of novel processing method for slicing of semiconductor waferPrincipal Investigator
- Principal Investigator
  
  Katto Masahito
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 26050:Material processing and microstructure control-related
- Research Institution
  University of Miyazaki
Development of a compact vacuum ultraviolet laser using a hollow fiber for plasma regulation and applications to photo-materials processing
- Principal Investigator
  
  KUBODERA Shoichi
- Project Period (FY)
  2006 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  University of Miyazaki
Development of insulator film for penetrating electrodes of layered system LSIs for the next generation
- Principal Investigator
  
  YOKOTANI Atsushi
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  University of Miyazaki
Development of implant biomaterials for human body by a new method using two excimer lasers
- Principal Investigator
  
  NAKAYAMA Takeyoshi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Kinki University
Development of vacuum-ultraviolet photo-induced cleaning device by use of a rare-gas excimer lamp
- Principal Investigator
  
  KUBODERA Shoichi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  University of Miyazaki
レーザー・マーキングPTVの開発
- Principal Investigator
  
  江藤剛治
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  水工水理学
- Research Institution
  Kinki University
輝尽性蛍光体の紫外からの可視域光強度記録への応用Principal Investigator
- Principal Investigator
  
  甲藤正人
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  Kinki University

All 2022 2021 2020 2009 2008 2007 2006 2005

All Journal Article Presentation Patent

[Journal Article] フェムト秒レーザーによるSi表面の相変化2020
- Author(s)
  甲藤正人，横谷篤至，加来昌典，大久保友雅，塚本雅裕
- Journal Title
  
  レーザー学会第546回研究会報告
  
  Volume: No. RTM-20-06～11 Pages: 1-6
- Data Source
  KAKENHI-PROJECT-19K05081
[Journal Article] OFI rare-gas excimer amplifier for high-intensity VUV pulse generation2009
- Author(s)
  M. Katto, M. Kaku, K. Oda, T. Kamikihara, A. Yokotani, S. Kubodera, N. Miyanaga, and K. Mima
- Journal Title
  
  Proc. SPIE vol.7196
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] Harmonics generation in VUV spectral region driven by a NIR Ti : sapphire laser in rare gases2009
- Author(s)
  Masahito Katto, et al.
- Journal Title
  
  Proceedings of SPIE (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] Harmonics generation in VUV spectral region driven by a NIR Ti : sapphire laser in rare gases2009
- Author(s)
  M. Katto, K. Oda, M. Kaku, S. Kubodera, A.Yokotani, N. Miyanaga, and K. Mima
- Journal Title
  
  Proceedings of SPIE vol.7131
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] OFI argon excimer amplifier for intense subpicosecond VUV pulse generation2009
- Author(s)
  M. Kaku, S. Kubodera, K. Oda, M. Katto, A. Yokotani, N. Miyanaga, and K. Mima
- Journal Title
  
  Proc. SPIE vol.7131
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] OFI rare-gas excimer amplifier for high-intensity VUV pulse generation2009
- Author(s)
  Masahito Katto, et al.
- Journal Title
  
  Proceedings of SPIE 7196
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] High-intensity subpicosecond vacuum ultraviolet laser system2008
- Author(s)
  S. Kubodera, M. Kaku, Y. Taniguchi, M. Katto, A. Yokotani, N. Miyanaga, and K. Mima
- Journal Title
  
  Proc. SPIE vol.6874
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] 紫外・真空紫外光源の開発と光プロセスへの応用2008
- Author(s)
  甲藤正人ら
- Journal Title
  
  レーザー学会第381回研究会報告「短波長光の発生とその応用」 RTM-08-42
  
  Pages: 5-10
- NAID
  10023995831
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] 高輝度真空紫外コヒーレント光源の開発2007
- Author(s)
  甲藤正人, ら
- Journal Title
  
  レーザー学会第368回研究会報告「短波長光の発生とその応用」 RTM-07-47
  
  Pages: 13-18
- NAID
  10020028971
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] 真空紫外光で拓く環境調和型プロセス-真空紫外領域における光源の開発とその応用技術の開発2007
- Author(s)
  甲藤正人
- Journal Title
  
  ケミカルエンジニアリング 52・1
  
  Pages: 66-71
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560288
[Journal Article] Effect of laser fluence on poly-crystallization of hydroxyapatite film coated by PLD method2007
- Author(s)
  Masahito Katto, et. al.
- Journal Title
  
  Journal of Laser Micro/Nanoengineering 2
  
  Pages: 152-155
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] Vacuum ultraviolet argon excimer laser initiated by optical-field-induced ionization electrons2007
- Author(s)
  S. Kubodera, Y. Taniguchi, T. Higashiguchi, and M. Katto
- Journal Title
  
  Proc. SPIE vol.6346
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] Subpicosecond vacuum ultraviolet laser system for advanced materials processing2007
- Author(s)
  S. Kubodera, Y. Taniguchi, A. Hosotani, M. Katto, A. Yokotani, N. Miyanaga, and K. Mima
- Journal Title
  
  Proc. SPIE vol.6452
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] 真空紫外光で拓く環境調和型プロセス -高輝度真空紫外コヒーレント光源の開発とその応用技術の開発-2006
- Author(s)
  甲藤正人, 他
- Journal Title
  
  レーザー学会第352回研究会報告 RTM-6-27-34
  
  Pages: 1-5
- NAID
  10020611464
- Data Source
  KAKENHI-PROJECT-18360040
[Journal Article] Poly-crystallized hydroxyapatite coating deposited by pulsed laser deposition method at room temperature2005
- Author(s)
  M.Katto
- Journal Title
  
  Applied Surface Science 248・1
  
  Pages: 365-368
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560288
[Journal Article] Poly-crystalized hydroxyapatite coating deposited by pulsed laser deposition method at room temperature2005
- Author(s)
  M.Katto
- Journal Title
  
  Applied Surface Science 248
  
  Pages: 365-368
- Data Source
  KAKENHI-PROJECT-17560288
[Journal Article] Poly-crystallized hydroxyapatite coating deposited by pulsed laser deposition method at room temperature2005
- Author(s)
  M.Katto
- Journal Title
  
  Applied Surface Science 248-1
  
  Pages: 365-368
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560288
[Patent] 異物検出方法2006
- Inventor(s)
  甲藤正人, 黒澤宏, 亀山勝人
- Industrial Property Rights Holder
  宮崎大学
- Industrial Property Number
  2006-144427
- Filing Date
  2006-05-24
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560288
[Patent] 水溶液あるいは微粒子懸濁液を用いた被膜生成手法(被膜生成方法および被膜生成装置)2006
- Inventor(s)
  甲藤正人, 東口武史, 窪寺昌一, 横谷篤至
- Industrial Property Rights Holder
  宮崎大学
- Industrial Property Number
  2006-143925
- Filing Date
  2006-05-24
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560288
[Patent] 異物検出方法2006
- Inventor(s)
  甲藤正人, 黒澤宏, 穐山勝人
- Industrial Property Rights Holder
  宮崎大学
- Industrial Property Number
  2006-144427
- Filing Date
  2006-05-24
- Data Source
  KAKENHI-PROJECT-17560288
[Patent] レーザーを用いたカラーソーター(異物混入判別装置および異物混入判別方法)2006
- Inventor(s)
  甲藤正人, 黒澤崇
- Industrial Property Rights Holder
  宮崎大学
- Industrial Property Number
  2006-105595
- Filing Date
  2006-04-06
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560288
[Presentation] Early stage of Si surface processing by femto-second Ti:sapphire laser pulses2022
- Author(s)
  Masahito Katto, Masanori Kaku, Masahiro Tsukamoto, Yuji Sato and Atsushi Yokotani
- Organizer
  International Photonics Conference 2022, The 4th Smart Laser Processing Conference 2022 (SLPC2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05081
[Presentation] フェムト秒レーザーによるSi表面の相変化2021
- Author(s)
  甲藤正人，横谷篤至，加来昌典，大久保友雅，塚本雅裕
- Organizer
  レーザー学会第546回研究会「フォトニクス・ワークショップ in 九州」
- Data Source
  KAKENHI-PROJECT-19K05081
[Presentation] フェムト秒レーザーによるSi表面の相変化2020
- Author(s)
  甲藤正人，横谷篤至，加来昌典，大久保友雅，塚本雅裕
- Organizer
  レーザー学会第546回研究会「フォトニクス・ワークショップ in 九州」
- Data Source
  KAKENHI-PROJECT-19K05081
[Presentation] OFI rare-gas excimer amplifier for high-intensity VUV pulse generation2009
- Author(s)
  S. Kubodera, M. Kaku, K. Oda, T. Kamikihara, M. Katto, A. Yokotani, N. Miyanaga, and K. Mima
- Organizer
  Photonics West 2009 (SPIE Meeting)
- Place of Presentation
  San Jose (USA)
- Data Source
  KAKENHI-PROJECT-18360040
[Presentation] Harmonics generation in VUV spectral region driven by a NIRTi : sapphire laser in rare gases2008
- Author(s)
  Masahito Katto, et al.
- Organizer
  XVII International Symposium on Gas Flow and Chemical Lasers & High Power Lasers(GCL-HPL 2008)
- Place of Presentation
  Lisbon, Portugal
- Year and Date
  2008-09-16
- Data Source
  KAKENHI-PROJECT-18360040
[Presentation] 紫外・真空紫外光源の開発と光プロセスへの応用2008
- Author(s)
  甲藤正人ら
- Organizer
  レーザー学会第381回研究会「短波長光の発生とその応用」
- Place of Presentation
  九州大学
- Year and Date
  2008-12-10
- Data Source
  KAKENHI-PROJECT-18360040
[Presentation] Optical amplification of the OFI rare-gas excimers in the vacuum ultraviolet2008
- Author(s)
  M. Kaku, S. Harano, S. Touge, M. Katto, A. Yokotani, S. Kubodera, N. Miyanaga, and K. Mima
- Organizer
  The 21st Annual Meeting of the IEEE Lasers & Electro-Optics Society (IEEE/LEOS 2008)
- Place of Presentation
  Newport Beach (USA)
- Data Source
  KAKENHI-PROJECT-18360040
[Presentation] 高輝度真空紫外コヒーレント光源の開発2007
- Author(s)
  甲藤正人, ら
- Organizer
  レーザー学会第368回研究会「短波長光の発生とその応用」
- Place of Presentation
  宇都宮大学
- Year and Date
  2007-12-05
- Data Source
  KAKENHI-PROJECT-18360040
[Presentation] 真空紫外光源とその応用2007
- Author(s)
  窪寺昌一、甲藤正人、横谷篤至
- Organizer
  レーザー学会学術講演会第27回年次大会
- Place of Presentation
  宮崎
- Data Source
  KAKENHI-PROJECT-18360040
[Presentation] 真空紫外光で拓く環境調和型プロセスに向けて~高輝度真空紫外コヒーレント光の発生とその応用技術の開発~2006
- Author(s)
  甲藤正人、横谷篤至、窪寺昌一、宮永憲明、三間圀興
- Organizer
  第67回応用物理学会学術講演会
- Place of Presentation
  立命館大学
- Data Source
  KAKENHI-PROJECT-18360040

1. YOKOTANI Atsushi (00183989)

# of Collaborated Projects: 3 results

# of Collaborated Products: 9 results
2. KUBODERA Shoichi (00264359)

# of Collaborated Projects: 2 results

# of Collaborated Products: 10 results
3. KAWANAKA Junji (50264362)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. KAKU Masanori (10425621)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
5. NAKAYAMA Takeyoshi (60023313)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. HASHISHIN Yuichi (90156266)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. NAKATA Junichi (80122076)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. HIGASHIGUCHI Takeshi (80336289)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. KAMEYAMA Akihiro (00264367)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. KUROSAWA Kou (80109892)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 江藤剛治 (20088412)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 沖中知雄 (90298985)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 竹原幸生 (50216933)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 佐々木亘 (30081300)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Katto Masahito 甲藤 正人

KATTO Masahito 甲藤 正人

甲藤 正人 カットウ マサヒト

Research Projects

Research Products

Co-Researchers

Development of novel processing method for slicing of semiconductor waferPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of a compact vacuum ultraviolet laser using a hollow fiber for plasma regulation and applications to photo-materials processing

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of insulator film for penetrating electrodes of layered system LSIs for the next generation

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of implant biomaterials for human body by a new method using two excimer lasers

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of vacuum-ultraviolet photo-induced cleaning device by use of a rare-gas excimer lamp

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

レーザー・マーキングPTVの開発

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

輝尽性蛍光体の紫外からの可視域光強度記録への応用Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] フェムト秒レーザーによるSi表面の相変化2020

Author(s)

Journal Title

Data Source

[Journal Article] OFI rare-gas excimer amplifier for high-intensity VUV pulse generation2009

Author(s)

Journal Title

Data Source

[Journal Article] Harmonics generation in VUV spectral region driven by a NIR Ti : sapphire laser in rare gases2009

Author(s)

Journal Title

Data Source

[Journal Article] Harmonics generation in VUV spectral region driven by a NIR Ti : sapphire laser in rare gases2009

Author(s)

Journal Title

Data Source

[Journal Article] OFI argon excimer amplifier for intense subpicosecond VUV pulse generation2009

Author(s)

Journal Title

Data Source

[Journal Article] OFI rare-gas excimer amplifier for high-intensity VUV pulse generation2009

Author(s)

Journal Title

Data Source

[Journal Article] High-intensity subpicosecond vacuum ultraviolet laser system2008

Author(s)

Journal Title

Data Source

[Journal Article] 紫外・真空紫外光源の開発と光プロセスへの応用2008

Author(s)

Journal Title

NAID

Katto Masahito 甲藤正人

KATTO Masahito 甲藤正人

甲藤正人カットウマサヒト