KIYOTA HIDEO 清田英夫

… Alternative Names

KIYOTA Hideo 清田英夫

清田英夫キヨタヒデオ

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Researcher Number	80269109
Other IDs
Affiliation (Current)	2025: 東海大学, 文理融合学部, 教授
Affiliation (based on the past Project Information) *help	2011 – 2012: 東海大学, 産業工学部, 教授 2010: 東海大学, 産業工学部, 准教授 2000 – 2001: 九州東海大学, 工学部, 講師
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / Electronic materials/Electric materials
Keywords	Principal Investigator 液相合成 / 低誘電率 / 組成分析 / 低誘電率材料 / 大面積化 / low-k / 層間絶縁膜 / 窒化カーボン / 電子材料 / 電気分解 … More / 非晶質炭素 / 窒化炭素 / 電解放出 / DLC / アモルファスカーボン / ダイヤモンドライクカーボン Less

Liquid-phase deposition of carbon nitride using electrochemical procedure and feasibility to low-k insulating filmsPrincipal Investigator
- Principal Investigator
  
  KIYOTA Hideo
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Tokai University
液相中でのダイヤモンドライクカーボン薄膜の堆積と不純物制御Principal Investigator
- Principal Investigator
  
  清田英夫
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Kyushu Tokai University

All 2012 2011 2010 Other

All Journal Article Presentation

[Journal Article] Electrical Properties of Magnesium Carbon Co-Sputtered Thin Films Applied Post Hydroxylation Treatment2012
- Author(s)
  M.Chiba, D.Endo, M.Maizono, M.Higashi, H.Kiyota
- Journal Title
  
  MRS proceedings
  
  Volume: 1406
- DOI
  10.1557/opl.2012.68
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560303, KAKENHI-PROJECT-22656076
[Journal Article] アクリロニトリルを用いた液相堆積により成長させた窒化炭素膜の組成に関する堆積パラメータの影響2011
- Author(s)
  東幹晃, 清田英夫, 黒須楯生, 千葉雅史
- Journal Title
  
  東海大学紀要産業工学部
  
  Volume: 3 Pages: 35-40
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560303
[Journal Article] Composition, Bonding state, and Electrical Properties of Carbon Nitride Films Formed by Electrochemical Deposition Technique2011
- Author(s)
  Mikiteru Higashi, Hideo Kiyota, Masafumi Chiba, Tateki Kurosu
- Journal Title
  
  Mater.ial Research Society Symposium Proceeding
  
  Volume: 1282
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560303
[Journal Article] Liquid Phase Deposition of Carbon Nitride Films for Application as Low-k Insulating Materials2011
- Author(s)
  M.Higashi, H.Kiyota, T.Kurosu and M.Chiba
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 50 Pages: 61502-61502
- NAID
  40018868696
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560303
[Journal Article] Liquid Phase Deposition of Carbon Nitride Films for Application as Low-k Insulating Materials2011
- Author(s)
  Mikiteru Higashi, Hideo Kiyota, Masafumi Chiba, Tateki Kurosu
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 50(in press)
- NAID
  40018868696
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560303
[Journal Article] Composition, Bonding state, and Electrical Properties of Carbon Nitride Films Formed by Electrochemical Deposition Technique2011
- Author(s)
  H.Kiyota, M.Higashi, T.Kurosu,and M.Chiba
- Journal Title
  
  MRS Symposium Proceeding
  
  Volume: 1282
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560303
[Journal Article] Liquid Phase Deposition of Carbon Nitride Films for Application as Low-k Insulating Materials2011
- Author(s)
  M.Higashi, H.Kiyota, T.Kurosu, M.Chiba
- Journal Title
  
  Jpn.J.App.Phys.
  
  Volume: 50 Issue: 6R Pages: 061502-061502
- DOI
  10.1143/jjap.50.061502
- NAID
  40018868696
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560303, KAKENHI-PROJECT-22656076
[Presentation] SiおよびAl上に液相合成法を用いて堆積させた窒化炭素膜の組成評価2012
- Author(s)
  東幹晃、清田英夫、黒須楯生、千葉雅史
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学,東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Al 基板に窒化炭素膜を液相合成する際の電圧印加極性の影響2012
- Author(s)
  東幹晃,清田英夫,黒須楯生,千葉雅史
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学、愛媛
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Si 基板に窒化炭素膜を液相合成する際の電圧印加極性の影響2012
- Author(s)
  東幹晃,清田英夫,黒須楯生,千葉雅史
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学、愛媛
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Low-voltage Electrochemical Synthesis of Low-k Carbon Nitride Films on Large-scale Substrates2012
- Author(s)
  H.Kiyota, M.Higashi, M.Chiba, and M. Gamo
- Organizer
  MRS 2012 Fall meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2012-11-26
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] SiおよびAl上に液相合成法を用いて堆積させた窒化炭素膜の組成評価2012
- Author(s)
  東幹晃、清田英夫、黒須楯生、千葉雅史
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学(東京都)
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Correlation of Film Density and Dielectric Constant of Liquid Phase Synthesized Carbon Nitride2012
- Author(s)
  M.Higashi, H.Kiyota, T.Kurosu, and M.Chiba
- Organizer
  MRS 2012 Fall meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2012-11-28
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 液相中で堆積した窒化炭素膜の電気的特性の評価[II]2011
- Author(s)
  東幹晃, 清田英夫, 黒須楯生, 千葉雅史
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-27
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] アクリロニトリル中で金属基板上に堆積した窒化炭素膜の組成評価2011
- Author(s)
  東幹晃、千葉雅史、清田英夫、黒須楯生
- Organizer
  日本金属学会2011年秋期(第149回)講演大会
- Place of Presentation
  沖縄コンベンションセンター
- Year and Date
  2011-11-07
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 液相堆積法を用いた窒化炭素膜の大面積成膜2011
- Author(s)
  東幹晃、清田英夫、黒須楯生、千葉雅史
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Large Area Deposition of Carbon Nitride Films by Newly Liquid Phase Technique2011
- Author(s)
  M.Higashi, H.Kiyota, T.Kurosu, and M.Chiba
- Organizer
  MRS 2011 Fall Meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2011-11-30
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Fabrication of Low-k Carbon Nitride Films by Liquid Phase Deposition2011
- Author(s)
  M.Higashi, H.Kiyota, T.Kurosu, M.Chiba
- Organizer
  International Conference on New Diamond and Nano Carbons 2011
- Place of Presentation
  Kunibiki Messe , Shimane, Japan
- Year and Date
  2011-05-19
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Fabrication of Low-k Carbon Nitride Films by Liqulid Phase Deposition2011
- Author(s)
  M.Higashi, H.Kiyota, T.Kurosu, M.Chiba
- Organizer
  5th International Conference on New Diamond and Nano Carbons 2011
- Place of Presentation
  Kunibiki Messe (Shimane, Japan)
- Year and Date
  2011-05-19
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Large Area Deposition of Carbon Nitride Films by Newly Liquid Phase Technique2011
- Author(s)
  M.Higashi, H.Kiyota, T.Kurosu, M.Chiba
- Organizer
  2011 MRS Fall Meeting and Exhibit
- Place of Presentation
  Hynes Convention Center (Boston, USA)
- Year and Date
  2011-11-30
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 液相堆積法を用いた窒化炭素膜の大面積成膜2011
- Author(s)
  東幹晃,清田英夫,黒須楯生,千葉雅史
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学,山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 金属基板上への窒化炭素膜の液相堆積[II]2011
- Author(s)
  東幹晃、清田英夫、黒須楯生、千葉雅史
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-02
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 金属基板上への窒化炭素膜の液相堆積 [II]2011
- Author(s)
  東幹晃,清田英夫,黒須楯生,千葉雅史
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学,山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] アクリロニトリル中で金属基板上に堆積した窒化炭素膜の組成評価2011
- Author(s)
  東幹晃,清田英夫,黒須楯生,千葉雅史
- Organizer
  日本金属学会2011年秋期講演大会
- Place of Presentation
  沖縄コンベンションセンター,宜野湾市
- Year and Date
  2011-11-17
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Liquid-Phese Deposition of Low-k Carbon Nitridse Films2011
- Author(s)
  H.Kiyota, M.Higashi, T.Kurosu, M.Chiba
- Organizer
  International Conference on Metallurgical Coating and Thins Films 2011
- Place of Presentation
  Town and Country Hotel and Convention Center (San Diego, USA)
- Year and Date
  2011-05-05
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Scalability for Liquid-Phase Synthesis to Deposit Low-k Carbon Nitride Films on Large-Scale Substrates2011
- Author(s)
  H.Kiyota, M.Higashi, and M.Chiba
- Organizer
  MRS 2011 Fall Meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2011-11-30
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 液相中で堆積した窒化炭素膜の電気的特性の評価 [II]2011
- Author(s)
  東幹晃,清田英夫,黒須楯生,千葉雅史
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大,厚木
- Year and Date
  2011-03-27
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 液相中で堆積した窒化炭素膜の電気的特性の評価[III]2011
- Author(s)
  東幹晃、清田英夫、黒須楯生、千葉雅史
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 液相成長技術を用いた窒化炭素膜の大面積堆積2011
- Author(s)
  東幹晃、清田英夫、黒須楯生、千葉雅史
- Organizer
  第31回表面科学学術講演会
- Place of Presentation
  タワーホール船堀(東京都)
- Year and Date
  2011-12-15
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Liquid-Phese Deposition of Low-k Carbon Nitridse Films2011
- Author(s)
  H.Kiyota, M.Higashi, T.Kurosu, M.Chiba
- Organizer
  International Conference on Metallurgical Coating and Thins Films2011
- Place of Presentation
  San Diego, USA
- Year and Date
  2011-05-05
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 液相中で堆積した窒化炭素膜の電気的特性の評価 [III]2011
- Author(s)
  東幹晃,清田英夫,黒須楯生,千葉雅史
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学,山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Scalability for Liquid-Phase Synthesis to Deposit Low-k Carbon Nitride Films on Large-Scale Substrates2011
- Author(s)
  H.Kiyota, M.Higashi, M.Chiba
- Organizer
  2011 MRS Fall Meeting and Exhibit
- Place of Presentation
  Hynes Convention Center (Boston, USA)
- Year and Date
  2011-11-30
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Electrical Properties of Carbon Nitride Films Deposited in Acrylonitrile Using Liquid Phase Deposition Technique2011
- Author(s)
  M.Higashi, H.Kiyota, T.Kurosu, and M.Chiba
- Organizer
  The 6th International Symposium on Surface Science
- Place of Presentation
  Tower Hall Funabori, Tokyo
- Year and Date
  2011-12-12
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Electrical Properties of Carbon Nitride Films Deposited in Acrylonitrile Using Liquid Phase Deposition Technique2011
- Author(s)
  M.Higashi, H.Kiyota, T.Kurosu, M.Chiba
- Organizer
  6th International Symposium on Surface Science
- Place of Presentation
  Tower Hall Funabori (Tokyo, Japan)
- Year and Date
  2011-12-12
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 液相成長技術を用いた窒化炭素膜の大面積堆積2011
- Author(s)
  東幹晃,清田英夫,黒須楯生,千葉雅史
- Organizer
  第31回表面科学学術講演会
- Place of Presentation
  タワーホール船堀,東京
- Year and Date
  2011-12-15
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 液相堆積した窒化炭素膜の結合状態および電気的特性の評価2010
- Author(s)
  東幹晃, 清田英夫,黒須楯生,千葉雅史
- Organizer
  第30回表面科学学術講演会
- Place of Presentation
  大阪大学,大阪
- Year and Date
  2010-11-04
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 液相堆積した窒化炭素膜の結合状態および電気的特性の評価2010
- Author(s)
  東幹晃, 清田英夫, 黒須楯生, 千葉雅史
- Organizer
  第30回表面科学学術講演会
- Place of Presentation
  大阪大学
- Year and Date
  2010-11-04
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Composition, Bonding state, and Electrical Properties of Carbon Nitride Films Formed by Electrochemical Deposition Technique2010
- Author(s)
  Hideo Kiyota, Mikiteru Higashi, Tateki Kurosu, Masafumi Chiba
- Organizer
  Materials Research Society 2010 Fall meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2010-11-29
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Electrical Properties of Liquid-Phase Deposited Carbon Nitride Films2010
- Author(s)
  M.Higashi, H.Kiyota, and T.Kurosu
- Organizer
  International Conference on Metallurgical Coating and Thins Films 2010
- Place of Presentation
  San Diego, USA
- Year and Date
  2010-04-29
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 金属基板上への窒化炭素膜の液相堆積[I]2010
- Author(s)
  東幹晃,清田英夫,黒須楯生,千葉雅史
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学,長崎
- Year and Date
  2010-09-16
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] 金属基板上への窒化炭素膜の液相堆積[I]2010
- Author(s)
  東幹晃, 清田英夫, 黒須楯生, 千葉雅史
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-16
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Composition and Electrical Properties of Liquid-Phase Deposited Carbon Nitride Films2010
- Author(s)
  M.Higashi, H.Kiyota,T.Kurosu, M. Chiba
- Organizer
  International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
- Place of Presentation
  Toyama Univ,Toyama
- Year and Date
  2010-06-24
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Electrical Properties of Liquid-Phase Deposited Carbon Nitride Films2010
- Author(s)
  M.Higashi, H.Kiyota, T.Kurosu
- Organizer
  ICMCTF 2010
- Place of Presentation
  San Diego, USA
- Year and Date
  2010-04-29
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Composition, Bonding state, and Electrical Properties of Carbon Nitride Films Formed by Electrochemical Deposition Technique"2010
- Author(s)
  H.Kiyota, M.Higashi, T.Kurosu, and M.Chiba
- Organizer
  MRS 2010 Fall meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2010-11-29
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Composition and Electrical Properties of Liquid-Phase Deposited Carbon Nitride Films2010
- Author(s)
  Mikiteru Higashi, Hideo Kiyota, Tateki Kurosu, Masafumi Chiba
- Organizer
  International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
- Place of Presentation
  富山大学
- Year and Date
  2010-06-24
- Data Source
  KAKENHI-PROJECT-22560303
[Presentation] Low-voltage Electrochemical Synthesis of Low-k Carbon Nitride Films on Large-scale Substrates
- Author(s)
  H.Kiyota
- Organizer
  Materials Research Society 2012 Fall meeting
- Place of Presentation
  Boston, USA
- Data Source
  KAKENHI-PROJECT-22560303

1. GAMO Mika (00323270)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
2. ANDO Toshihiro (80343846)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

KIYOTA HIDEO 清田 英夫

KIYOTA Hideo 清田 英夫

清田 英夫 キヨタ ヒデオ

Research Projects

Research Products

Co-Researchers

Liquid-phase deposition of carbon nitride using electrochemical procedure and feasibility to low-k insulating filmsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

液相中でのダイヤモンドライクカーボン薄膜の堆積と不純物制御Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Electrical Properties of Magnesium Carbon Co-Sputtered Thin Films Applied Post Hydroxylation Treatment2012

Author(s)

Journal Title

DOI

Data Source

[Journal Article] アクリロニトリルを用いた液相堆積により成長させた窒化炭素膜の組成に関する堆積パラメータの影響2011

Author(s)

Journal Title

Data Source

[Journal Article] Composition, Bonding state, and Electrical Properties of Carbon Nitride Films Formed by Electrochemical Deposition Technique2011

Author(s)

Journal Title

Data Source

[Journal Article] Liquid Phase Deposition of Carbon Nitride Films for Application as Low-k Insulating Materials2011

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Liquid Phase Deposition of Carbon Nitride Films for Application as Low-k Insulating Materials2011

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Composition, Bonding state, and Electrical Properties of Carbon Nitride Films Formed by Electrochemical Deposition Technique2011

Author(s)

Journal Title

Data Source

[Journal Article] Liquid Phase Deposition of Carbon Nitride Films for Application as Low-k Insulating Materials2011

Author(s)

Journal Title

DOI

NAID

Data Source

[Presentation] SiおよびAl上に液相合成法を用いて堆積させた窒化炭素膜の組成評価2012

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] Al 基板に窒化炭素膜を液相合成する際の電圧印加極性の影響2012

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] Si 基板に窒化炭素膜を液相合成する際の電圧印加極性の影響2012

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] Low-voltage Electrochemical Synthesis of Low-k Carbon Nitride Films on Large-scale Substrates2012

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] SiおよびAl上に液相合成法を用いて堆積させた窒化炭素膜の組成評価2012

Author(s)

Organizer

Place of Presentation

Year and Date

KIYOTA HIDEO 清田英夫

KIYOTA Hideo 清田英夫

清田英夫キヨタヒデオ