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Baba Akiyoshi  馬場 昭好

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馬場 昭好  ババ アキヨシ

BABA Akiyoshi  馬場 昭好

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Researcher Number 80304872
Other IDs
External Links
Affiliation (Current) 2025: 九州工業大学, マイクロ化総合技術センター, 教授
Affiliation (based on the past Project Information) *help 2023: 九州工業大学, マイクロ化総合技術センター, 教授
2010 – 2017: 九州工業大学, マイクロ化総合技術センター, 准教授
1999 – 2005: 九州工業大学, マイクロ化総合技術センター, 助手
Review Section/Research Field
Principal Investigator
Basic Section 21030:Measurement engineering-related / 表面界面物性
Except Principal Investigator
Power engineering/Power conversion/Electric machinery / Science and Engineering / Thin film/Surface and interfacial physical properties / General applied physics / Production engineering/Processing studies / Applied physics, general / Microdevices/Nanodevices
Keywords
Principal Investigator
pH / 液中 / 電気化学反応 / 海中センサー / 半導体センサー / ホッピング伝導 / 三極構造 / 大面積化 / スタンプ法 / ポリイミド / イオンビーム改質 / 電界電子放出 / 微小電子源 … More
Except Principal Investigator
… More SOI / パワーSoC / 集積化電源 / MEMS / 金属誘起固相結晶化 / 固相結晶化 / 薄膜トランジスタ / 多結晶シリコン / 実装 / システム・イン・パッケージ / 集積回路 / 集積システム / 3次元IC / 3次元パワーSoC / ノイズ遮蔽 / 3次元構造 / 集積化 / スイッチング電源 / パワーSupply on Chip / パワーエレクトロニクス / 電力工学 / DCーDCコンバーター / 小型電源 / POL / DCーDCコンバータ / metal induced crystallization / laser annealing / excimer laser / single grain / thin film transistor / silicon / nanoimprint / システム・オン・パネル / 薄膜集積回路 / TFT / レーザー結晶化 / TFT回路 / 単一結晶粒トランジスタ / 結晶粒位置制御 / SO1 / レーザーアニール / エキシマレーザー / 疑似単結晶 / シリコン / ナノインプリント / 側面X線検出 / 直接変換型X線センサ / X線CT / 半導体デバイス / 低被曝線量 / トレンチ構造型フォトダイオード / X線センサー / 高温動作 / パワーMOSFET / パワーSOC / 集積化パワーシステム / DC-DCコンバータ / パワーIC / SOD / ウエハー接合技術 / SOD基板 / 抜熱 / 排熱 / Si on Diamond / 真直度測定 / 平面度測定 / 多点法 / 運動誤差計測 / 走査形状測定 / 加工計測 / 精密位置決め / カラー分離 / 側面照射 / 色分離 / カラーセンサ / カラーフィルタ無し / カラー撮影 / カラーフィルタなし / 側面光照射 / カラー撮像 / イメージセンサ / マイクロ・ナノデバイス / 金属シリサイド / ナノ細線 / 多結晶シリコン薄膜 / ナノ造形 / 固相成長 / 薄膜 / ニッケルシリサイド / 金属触媒 / 結晶細線 / 金属誘起横方向固相結晶化 / 歪みセンサー / 超音波接合 / フリップチップ / バンプ / チップ積層 / 高密度実装 / コンプライアント・バンプ / 三次元集積回路 / 積層半導体 / 歪センサー / マイクロバンプ / 微細接続 / 物理乱数機器 / 撮像素子 / ひずみセンサー / クリップチップ / グローバルインテグレーション Less
  • Research Projects

    (11 results)
  • Research Products

    (16 results)
  • Co-Researchers

    (13 People)
  •  液中高ロバスト性半導体型イオンセンサーの開発Principal Investigator

    • Principal Investigator
      馬場 昭好
    • Project Period (FY)
      2023 – 2025
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 21030:Measurement engineering-related
    • Research Institution
      Kyushu Institute of Technology
  •  Investigation of a substrate with both high heat exhausting and elctro magnetic noise sielding layer for power supply on chip applications

    • Principal Investigator
      Matsumoto Satoshi
    • Project Period (FY)
      2015 – 2017
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Power engineering/Power conversion/Electric machinery
    • Research Institution
      Kyushu Institute of Technology
  •  Research of high sensitivity X-ray sensor for low radiation dose X-ray CT using side X-ray irradiation method

    • Principal Investigator
      Ariyoshi Tetsuya
    • Project Period (FY)
      2014 – 2016
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      General applied physics
    • Research Institution
      Kyushu Institute of Technology
  •  Study on a substrate for ultra high density power supply on chip

    • Principal Investigator
      Matsumoto Satoshi
    • Project Period (FY)
      2012 – 2015
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Power engineering/Power conversion/Electric machinery
    • Research Institution
      Kyushu Institute of Technology
  •  Research on side-illuminated color photosensor

    • Principal Investigator
      ARIYOSHI Tetsuya
    • Project Period (FY)
      2010 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Applied physics, general
    • Research Institution
      Kyushu Institute of Technology
  •  Development of a micro probe unit for motion error measurement using three-point method and proof of an algorithm for reducing zero-adjustment error

    • Principal Investigator
      SHIMIZU Hiroki
    • Project Period (FY)
      2010 – 2012
    • Research Category
      Grant-in-Aid for Young Scientists (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Kyushu Institute of Technology
  •  金属触媒を利用したシリコン単結晶固相成長におけるナノ造形過程の研究

    • Principal Investigator
      浅野 種正
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Kyushu Institute of Technology
  •  Position and Orientation Control of Si Thin-Film Crystal Grain Using Nano-Imprint Technology

    • Principal Investigator
      ASANO Tanemasa
    • Project Period (FY)
      2003 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Thin film/Surface and interfacial physical properties
    • Research Institution
      Kyusyu Institute of Technology
  •  歪ダイナミクス計測に基づくチップ積層集積システム化技術の研究

    • Principal Investigator
      浅野 種正
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Kyushu Institute of Technology
  •  超音波によるチップ積層接合時に発生する歪ダイナミクスと回路素子への効果

    • Principal Investigator
      ASANO Tanemasa
    • Project Period (FY)
      2001
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas (A)
    • Review Section
      Science and Engineering
    • Research Institution
      Kyushu Institute of Technology
  •  イオンビーム改質したポリイミド薄膜からの電界電子放出現象と微小電子源への応用Principal Investigator

    • Principal Investigator
      馬場 昭好
    • Project Period (FY)
      1999 – 2000
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      表面界面物性
    • Research Institution
      Kyushu Institute of Technology

All 2017 2016 2015 2013 2012 2011 2005 2004

All Journal Article Presentation

  • [Journal Article] X-ray-to-current signal conversion characteristics of trench-structured photodiodes for direct-conversion-type silicon X-ray sensor2017

    • Author(s)
      T. Ariyoshi, S. Funaki, K. Sakamoto, A. Baba, and Y. Arima
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 4S Pages: 04CH06-04CH06

    • DOI

      10.7567/jjap.56.04ch06

    • NAID

      210000147620

    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-26390104
  • [Journal Article] Reduced operating temperature of active layer Si covered by nanocrystalline diamond film2017

    • Author(s)
      S.Duangchan, Y.Koishikawa, R. Shirahama, K. Oishi, A. Baba, S. Matsumoto and M.Hasegawa
    • Journal Title

      Journal of Material Science ; Materials in Electronics

      Volume: 28 Pages: 617-624

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H03965
  • [Journal Article] Side-Illuminated Color Photosensor2013

    • Author(s)
      T.Ariyoshi,A.Baba,Y.Arima
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52(2013) Issue: 4S Pages: 04CE10-04CE10

    • DOI

      10.7567/jjap.52.04ce10

    • NAID

      210000142040

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560053
  • [Journal Article] Effect of Plasma Gate Oxidation on Performance of Poly-Si TFT2005

    • Author(s)
      C.Shin, A.Baba, T.Asano
    • Journal Title

      Proc.2005 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices

      Pages: 155-158

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15360022
  • [Journal Article] Effect of Plasma Gate Oxidation on Performance of Poly-Si TFT2005

    • Author(s)
      C.Shin, A.Baba, T.Asano
    • Journal Title

      Proc. 2005 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices

      Pages: 155-158

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360022
  • [Journal Article] Reduction of the Gate-Oxide/pol-Si Interface Roughness by Microwave-Plasma Oxidation and Its Impact on TFT Performance2004

    • Author(s)
      Chihiro Shin, Akiyoshi Baba, Tanemasa Asano
    • Journal Title

      Dig.Technical Papers, Int.Workshop on Active-Matrix Liquid-Crystal Display

      Pages: 317-320

    • Data Source
      KAKENHI-PROJECT-15360022
  • [Journal Article] Reduction of the Gate -Oxidelpol-Si Interface Roughness by Microwave-Plasma Oxidation and Its Impact on TFT Performance2004

    • Author(s)
      C.Shin, A.Baba, T.Asano
    • Journal Title

      Dig.Technical.Papers, Int.Workshop on Active-Matrix Liquid-Crystal Display

      Pages: 317-320

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15360022
  • [Journal Article] Reduction of the Gate-Oxide/pol-Si Interface Roughness by Microwave-Plasma Oxidation and Its Impact on TFT Performance2004

    • Author(s)
      C.Shin, A.Baba, T.Asano
    • Journal Title

      Dig. Technical Papers, Int. Workshop on Active-Matrix Liquid-Crystal Display

      Pages: 317-320

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360022
  • [Presentation] Fabrication of Silicon on Diamond Structure with an Ultra-Thin SiO2 Bonding Layer by Sputter Etching Method2017

    • Author(s)
      M.Nagata, R.Shirahama, S.Duangchan, and Akiyoshi Baba
    • Organizer
      Digest of 30th International Microprocesses and Nanotechnology Conference
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H03965
  • [Presentation] The Influence of Plasma Conditions on Surface-Activation that Affect the Bonded Area2016

    • Author(s)
      S. Duangchan, R.Shirahama, T.Murayama, S.Hamada and A.Baba
    • Organizer
      Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H03965
  • [Presentation] Sensitivity Properties of a Direct Conversion Silicon X-ray Sensor with Trench-Structured Photodiodes2016

    • Author(s)
      T.Ariyoshi, S.Funaki, K.Sakamoto, A.Baba, and Y.Arima
    • Organizer
      2016 International Conference on Solid State Devices and Materials
    • Place of Presentation
      つくば国際会議場
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26390104
  • [Presentation] The Silicon on Diamond Structure by low temperature bonding technique2015

    • Author(s)
      S. Duangchan, U. Uchikawa, U. Koshikawa, A. baba, K. Nakagawa, S.Matsumoto, M.Hasagawa, and S.Nishizawa
    • Organizer
      IEEE Electric Components and Technology Conference 2015 (ECTC2015)
    • Place of Presentation
      San Diego, USA
    • Year and Date
      2015-05-26
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-24360111
  • [Presentation] “The Heat Performance Study of Nanocrystal Diamond Film Used in a Thin Film Device”,2015

    • Author(s)
      S. Duangchan, U. Koshikawa, R. Shirahama, K.Oishi, A. Baba, S. Matsumoto, and M.Hasagawa,
    • Organizer
      International Conference on Solid State Devices and Materials 2015
    • Place of Presentation
      Saporo, Japan
    • Year and Date
      2015-09-27
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-24360111
  • [Presentation] Side-Illuminated Color Photo Sensor2012

    • Author(s)
      T.Ariyoshi, A.Baba, Y.Arima
    • Organizer
      International Conference on Solid State Device and Materials
    • Place of Presentation
      京都国際会館(京都市)
    • Year and Date
      2012-09-26
    • Data Source
      KAKENHI-PROJECT-22560053
  • [Presentation] MEMS 技術を応用した多点法走査形状測定用マルチカンチレバーの開発(第2 報マルチカンチレバーデバイスの基本設計と試作)2012

    • Author(s)
      柳原慎也,水頭正一郎,清水浩貴,田丸雄摩,馬場昭好
    • Organizer
      2012年度精密工学会春季大会学術講演会
    • Place of Presentation
      首都大学東京(東京)
    • Year and Date
      2012-03-14
    • Data Source
      KAKENHI-PROJECT-22760099
  • [Presentation] MEMS技術を応用した多点法走査形状測定用マルチカンチレバーの開発(第2報)-マルチカンチレバーデバイスの基本設計と試作-2011

    • Author(s)
      柳原慎也, 水頭正一郎, 清水浩貴, 田丸雄摩, 馬場昭好
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      首都大学東京(東京都)
    • Year and Date
      2011-03-15
    • Data Source
      KAKENHI-PROJECT-22760099
  • 1.  ASANO Tanemasa (50126306)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 5 results
  • 2.  牧平 憲治 (10253569)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 0 results
  • 3.  NISHISAKA Mika (50336096)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 4.  ARIYOSHI Tetsuya (60432738)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 4 results
  • 5.  ARIMA Yutaka (10325582)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 4 results
  • 6.  Matsumoto Satoshi (10577282)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 3 results
  • 7.  SHINKAI Shinichi (90374785)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 8.  SHIMIZU Hiroki (50323043)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 9.  TAMARU Yuuma (30284590)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 10.  NISHIZAWA Shinichi (40267414)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results
  • 11.  WATANABE Naoya (10380734)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  長谷川 雅考 (20357776)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results
  • 13.  TAKEUCHI Shuuzou
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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