KAMBARA Makoto 神原淳

… Alternative Names

Kambara Makoto 神原淳

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Researcher Number	80359661
Other IDs
External Links
Affiliation (Current)	2026: 大阪大学, 大学院工学研究科, 教授
Affiliation (based on the past Project Information) *help	2022 – 2025: 大阪大学, 大学院工学研究科, 教授 2016 – 2017: 東京大学, 大学院工学系研究科(工学部), 准教授 2014 – 2015: 東京大学, 工学(系)研究科(研究院), 准教授 2012: 東京大学, 大学院・工学系研究科, 准教授 2011: The University of Tokyo, 工学(系)研究科(研究院), 准教授 … More 2009 – 2010: The University of Tokyo, 大学院・工学系研究科, 准教授 2007 – 2008: The University of Tokyo, 大学院・工学系研究科, 講師 2006: 東京大学, 大学院工学系研究科, 講師 2005: 東京大学, 大学院・工学系研究科, 講師 2003: THE UNIVERSITY OF TOKYO, GRADUATE SCHOOL OF ENGINEERING, RESEARCH ASSOCIATE, 大学院・工学系研究科, 助手 Less
Review Section/Research Field	Principal Investigator Material processing/treatments / Basic Section 26050:Material processing and microstructure control-related / Material processing/Microstructural control engineering / Plasma electronics Except Principal Investigator Broad Section C / Material processing/treatments / Thermal engineering / Material processing/treatments
Keywords	Principal Investigator シリコン / メゾプラズマ / プラズマスプレー / ナノ粒子 / リチウムイオン電池 / プラズマ / エピタキシャル成長 / ナノクラスター / エピタキシー / 全固体リチウムイオン電池 … More / 全固体電池 / 表面自由エネルギー / 徐酸化 / silicon / battery / surface free energy / nanoparticle / plasma spray / プラズマ加工 / ナノ材料 / 材料加工･処理 / シリコンナノ粒子 / プラズマプロセス / SiC / エピタキシ－ / 太陽電池 / キャビティリングダウン / 横方向成長 / 薄膜プロセス / プラズマエッチング / ヘテロエピタキシー / X線散乱その場計測 / メゾプラズマCVD / その場計測 / X線散乱 / chemical vapor deposition … More Except Principal Investigator エピタキシー / シリコン / スケールフリー性 / エントロピー / 情報学 / 熱力学 / 産業用プラズマ / BORON NITRIDE NANO ARRAY / RECTIFICATION CHARACTERISTICS / VISCO-ELASTICITY / WIDE BANDGAP SEMICONDUCTOR / N TYPE DOPINGS / HIGH TEMPERATURE ELECTRONICS / ELECTRONIC PROPERTIES / CUBIC BORON NITRIDE THIN FILMS / 臨界損傷 / イオンインプランテーション / スパッタリング / ブラズマCVD / 半導体特性 / ワイドギャップ / ドーピング / BNナノアレイ / 整流特性 / 粘弾性 / ワイドギャップ半導体 / n型ドーピング / 高温半導体 / 電子物性 / cBN薄膜 / ナノクラスター / CVD / ナノクラスター / Chemical Vapor Deposition / 分子動力学法 / 収率 / シーメンス / プラズマ加工 / 単結晶シリコン / クラスター / シーメンス法 / 太陽電池 / エピタキシャル成長 / メゾプラズマ Less

Design of highly stable and high-density anodes for all-solid-state Li-ion batteries based on heterogeneous interfacial energy matchingPrincipal Investigator
- Principal Investigator
  
  Kambara Makoto
- Project Period (FY)
  2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 26050:Material processing and microstructure control-related
- Research Institution
  Osaka University
Overall Understanding of Diverse Multidimensional Distributions in Plasma Processes for Functional Outputs
- Principal Investigator
  
  酒井道
- Project Period (FY)
  2024 – 2028
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Review Section
  
  Broad Section C
- Research Institution
  The University of Shiga Prefecture
Development of composite nanoparticles for negative electrode of next generation lithium ion batteriesPrincipal Investigator
- Principal Investigator
  
  Kambara Makoto
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/Microstructural control engineering
- Research Institution
  The University of Tokyo
Nanocluster assisted fast rate SiC epitaxyPrincipal Investigator
- Principal Investigator
  
  Kambara Makoto
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Plasma electronics
- Research Institution
  The University of Tokyo
Molecular dynamics study of epitaxial growth of silicon thin film via a plasma CVD
- Principal Investigator
  
  SHIBUTA Yasushi
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Thermal engineering
- Research Institution
  The University of Tokyo
プラズマスプレーPVDによる次世代Liイオン電池SiーOーC系ナノ複合負極開発Principal Investigator
- Principal Investigator
  
  神原淳
- Project Period (FY)
  2011
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
Next generation mesoplasma SIEMENS technology for direct production of wafer-equivalent thin film solar cells
- Principal Investigator
  
  YOSHIDA Toyonobu
- Project Period (FY)
  2009 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
Mesoplasma lateral epitaxy for next generation giant electronicsPrincipal Investigator
- Principal Investigator
  
  KAMBARA Makoto
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
次世代低温・超高速エピタキシーを可能とするナノクラスター制御メゾプラズマ技術開発Principal Investigator
- Principal Investigator
  
  神原淳
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Material processing/treatments
- Research Institution
  The University of Tokyo
DEVELOPMENT OF NANO-CBN THIN FILM DEVICES WORKING AT HIGH-TEMPERATURES UNDER SEVERE CONDITIONS
- Principal Investigator
  
  YOSHIDA Toyonobu
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Material processing/treatments
- Research Institution
  THE UNIVERSITY OF TOKYO

[Book] Encyclopedia of Plasma Technology: Powders: Plasma Spray PVD for High-Throughput Production2017
- Author(s)
  M. Kambara, T. Hideshima, M. Kaga, T. Yoshida
- Publisher
  Taylor and Francis
- Data Source
  KAKENHI-PROJECT-15H04152
[Book] ナノコーティング(第1章2.2担当)((財)ファインセラミックスセンター編)2010
- Author(s)
  神原淳
- Publisher
  技報堂出版
- Data Source
  KAKENHI-PROJECT-20686049
[Journal Article] Lowering temperature of Cu sinter bonding under low-pressure in ambient air by is-situ generation and reduction of Cu2O nanoparticles2025
- Author(s)
  Miwa Oba, Tomoki Matsuda, Masashi Dougakiuchi, Shio Okubo and Makoto Kambara
- Journal Title
  
  Journal of Material Science: Materials in Electronics
  
  Volume: 36 Issue: 4 Pages: 291-291
- DOI
  10.1007/s10854-025-14352-7
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24H00036, KAKENHI-PROJECT-23K23100
[Journal Article] Evaluation of thermal anisotropic evolution in the sinter structure of direct sinter joining to silicon via coupled microstructural characterizations2025
- Author(s)
  Tomoki Matsuda, Ryotaro Seo, Akihisa Takeuchi, Kentaro Uesugi, Masahiro Yasutake, Makoto Kambara and Akio Hirose
- Journal Title
  
  Materials Science and Engineering A
  
  Volume: 923 Pages: 147692-147692
- DOI
  10.1016/j.msea.2024.147692
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24H00036, KAKENHI-PROJECT-23K23100
[Journal Article] Current-assisted low-temperature silver sinter bonding to silicon carbide by utilizing ion migration2025
- Author(s)
  Tetsuhiro Matsuda, Tomoki Matsuda, Makoto Kambara and Akio Hirose
- Journal Title
  
  Materials and Design
  
  Volume: 252 Pages: 113780-113780
- DOI
  10.1016/j.matdes.2025.113780
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24H00036, KAKENHI-PROJECT-23K23100
[Journal Article] Influence of structural characteristics of a Si nanoparticulate anode on all-solid-state Li-ion batteries2024
- Author(s)
  Ohta Ryoshi、Hiraoka Takeo、Shibano Yuki、Kawamura Hiroaki、Kawamoto Koji、Tanaka Toshimi、Takeuchi Akira、Dougakiuchi Masashi、Fukuda Kenichi、Kambara Makoto
- Journal Title
  
  Journal of Physics D: Applied Physics
  
  Volume: 57 Issue: 25 Pages: 255501-255501
- DOI
  10.1088/1361-6463/ad3145
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K23096
[Journal Article] プラズマスプレーによる次世代高密度リチウムイオン電池向け構造ナノ材料の高スループット生成2024
- Author(s)
  神原　淳，太田　遼至
- Journal Title
  
  スマートプロセス学会誌
  
  Volume: 13 Pages: 4-12
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K23096
[Journal Article] Cluster-assisted mesoplasma chemical vapor deposition for fast epitaxial growth of SiGe/Si heterostructures: A molecular dynamics simulation study2024
- Author(s)
  Wen-bo Wang, Wenfang Li, Ryoshi Ohta, Makoto Kambara
- Journal Title
  
  Materials
  
  Volume: 17 Issue: 10 Pages: 2448-2448
- DOI
  10.3390/ma17102448
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24H00036, KAKENHI-PROJECT-23K23096
[Journal Article] Feasibility Study of in-situ Axial Cyclone Classification in Si Nanoparticle Production using RF Plasma Spraying2024
- Author(s)
  道垣内将司、田中暁巳、竹内啓、福田健一、神原淳
- Journal Title
  
  Journal of Japan Thermal Spray Society
  
  Volume: 61 Issue: 1 Pages: 2-9
- DOI
  10.11330/jtss.61.2
- ISSN
  0916-6076, 2186-1080
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K23096
[Journal Article] Advances in Development of Silicon Nanomaterials by Plasma Spraying2023
- Author(s)
  神原淳、王文博、田中翔斗、太田遼至、田中暁巳、道垣内将司
- Journal Title
  
  Journal of Japan Thermal Spray Society
  
  Volume: 60 Issue: 3 Pages: 175-180
- DOI
  10.11330/jtss.60.175
- ISSN
  0916-6076, 2186-1080
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K23096
[Journal Article] カーボンニュートラル社会実現に貢献するプラズマスプレー法の進展2023
- Author(s)
  神原　淳
- Journal Title
  
  生産と技術
  
  Volume: 75 Pages: 73-76
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K23096
[Journal Article] シリコンと熱プラズマプロセスの未来2022
- Author(s)
  神原淳
- Journal Title
  
  日本学術振興会第153委員会第161回研究会資料
  
  Volume: 161 Pages: 25-33
- Data Source
  KAKENHI-PROJECT-23K23096
[Journal Article] Effect of PS-PVD production throughput on Si nanoparticles for negative electrode of lithium ion batteries2018
- Author(s)
  R. Ohta, K. Fukada, T. Tashiro, M. Dougakiuchi, M. Kambara
- Journal Title
  
  J. Phys. D: Appl. Phys.
  
  Volume: 51 Issue: 10 Pages: 105501-105501
- DOI
  10.1088/1361-6463/aaab37
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H04152
[Journal Article] Enhanced Cycle Capacity of Lithium Ion Batteries with Nanocomposite Si Anodes Produced By Rapid Co-Condensation in Plasma Spray PVD2017
- Author(s)
  K. Fukada, R. Ohta, M. Kambara
- Journal Title
  
  ECS Trans.
  
  Volume: 77 Issue: 3 Pages: 41-47
- DOI
  10.1149/07703.0041ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H04152
[Journal Article] シリコンのナノクラスター支援メゾプラズマ高速エピタキシ－2016
- Author(s)
  神原淳
- Journal Title
  
  日本学術振興会第131委員会　第279回研究会紀要
  
  Volume: 279 Pages: 1-6
- Data Source
  KAKENHI-PROJECT-15H04152
[Journal Article] プラズマスプレーPVDによる次世代高密度リチウム2次電池向けSi系ナノ複合負極開発2016
- Author(s)
  神原淳
- Journal Title
  
  日本学術振興会第153委員会　第129回研究会紀要
  
  Volume: 129 Pages: 1-6
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H04152
[Journal Article] Plasma Spray PVD: High throughput production of nanoparticles2016
- Author(s)
  M. Kambara, T. Hideshima, M. Kaga, T. Yoshida
- Journal Title
  
  Encyclopedia Plasma Process
  
  Volume: 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H04152
[Journal Article] Instantaneous formation of SiOx nanocomposite for high capacity lithium ion batteries by enhanced disproportionation reaction during plasma spray physical vapor deposition2016
- Author(s)
  T. Tashiro, M. Dogakiuchi, M. Kambara
- Journal Title
  
  Sci. Technol. Adv. Mater.
  
  Volume: 17 Issue: 1 Pages: 744-752
- DOI
  10.1080/14686996.2016.1240574
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H04152
[Journal Article] In-situ annealing and fast rate silicon epitaxy on porous silicon by mesoplasma chemical vapor deposition2016
- Author(s)
  S. Zhang, Z. Lu, J. Sheng, P. Gao, X. Yang, S. Wu, J. Ye, M. Kambara
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 印刷中
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600125
[Journal Article] Improved production yield in silicon epitaxy by reducing pressure in mesoplasma chemical vapor deposition2014
- Author(s)
  Sudong Wu, Taiki Iguchi, Makoto Kambara and Toyonobu Yoshida
- Journal Title
  
  Applied Physics Express
  
  Volume: 7 Issue: 8 Pages: 086201-086201
- DOI
  10.7567/apex.7.086201
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26600125
[Journal Article] Cavity ring down spectroscopy measurement of H(n=2) density in Mesoplasma for high rate silicon epitaxy2013
- Author(s)
  S.D.Wu,H.Inoue,M.Kambara,and T.Yoshida
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: (in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21226017
[Journal Article] Nanocluster dynamics in fast rate epitaxy under mesoplasma condition2013
- Author(s)
  L. W. Chen, Y. Shibuta, M. Kambara, and T. Yoshida
- Journal Title
  
  Chem. Phys. Lett.
  
  Volume: 564 Pages: 47-53
- DOI
  10.1016/j.cplett.2013.02.005
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21226017, KAKENHI-PROJECT-23656143
[Journal Article] Super high-Rate Epitaxial Silicon Thick Film Deposition from Trichlorosilane by Mesoplasma Chemical Vapor Deposition2013
- Author(s)
  S.D.Wu,M.Kambara,T.Yoshida
- Journal Title
  
  Plasma Chem Plasma Process
  
  Volume: 33 Pages: 433-451
- URL
  http://dx.doi.org/10.1007/s11090-013-9439-7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21226017
[Journal Article] Nanocluster dynamics in fast rate epitaxy under mesoplasma condition2013
- Author(s)
  L.W.Chen,Y.Shibuta,M.Kambara,and T.Yoshida
- Journal Title
  
  Chem.Phys.Lett.
  
  Volume: 564 Pages: 47-53
- URL
  http://dx.doi.org/10.1016/j.cplett.2013.02.005
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21226017
[Journal Article] Molecular dynamics simulation of Si nanoclusters in hihg rate and low temperature epitaxy2012
- Author(s)
  L. W. Chen, Y. Shibuta, M. Kambara, and T. Yoshida
- Journal Title
  
  J. Appl. Phys.
  
  Volume: 111 Issue: 12 Pages: 123301-6
- DOI
  10.1063/1.4729057
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21226017, KAKENHI-PROJECT-23656143
[Journal Article] Molecular dynamics simulation of Si nanoclusters in high rate and low temperature epitaxy2012
- Author(s)
  L.W.Chen,Y.Shibuta,M.Kambara,and T.Yoshida
- Journal Title
  
  J.Appl.Phys.
  
  Volume: 111 Pages: 123301-123306
- URL
  http://dx.doi.org/10.1063/1.4729057
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21226017
[Journal Article] Low temperature silicon epitaxy from trichlorosilane via mesoplasma chemical vapor deposition2011
- Author(s)
  J.Fukuda,M.Kambara,and T.Yoshida
- Journal Title
  
  Thin Solid Films
  
  Volume: 519 Pages: 6759-6762
- URL
  http://dx.doi.org/10.1016/j.tsf.2011.01.216
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21226017
[Journal Article] Low temperature silicon epitaxy from trichlorosilane via mesoplasma chemical vapor deposition2011
- Author(s)
  J.Fukuda, M.Kambara, T.Yoshida
- Journal Title
  
  Thin Solid Films in press.
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686049
[Journal Article] Low temperature silicon epitaxy from trichlorosilane via mesoplasma chemical vapor deposition2011
- Author(s)
  J.Fukuda, M.Kambara, T.Yoshida
- Journal Title
  
  Thin Solid Films
  
  Volume: (印刷中(掲載確定))
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686049
[Journal Article] Evolution of Surface Morphology With Hydrogen Dilution During Silicon Epitaxy by Mesoplasma CVD2009
- Author(s)
  J.M.A.Diaz, M.Kambara, T.Yoshida
- Journal Title
  
  IEEE TRANSACTIONS ON PLASMA SCIENCE 37
  
  Pages: 1723-1729
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686049
[Journal Article] Instantaneous cleaning of silicon substrates for high-rate and low-temperature mesoplasma epitaxy2009
- Author(s)
  J.M.A. Diaz, M. Yoshioka, M. Kambara, T. Yoshida
- Journal Title
  
  Thin Solid Films (In print)(掲載確定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686049
[Journal Article] Instantaneous cleaning of silicon substrates for high-rate and low-temperature mesoplasma epitaxy2009
- Author(s)
  J.M.A.Diaz, M.Yoshioka, M.Kambara, T.Yoshida
- Journal Title
  
  Thin Solid Films 518
  
  Pages: 976-980
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686049
[Journal Article] Evolution of Surface Morphology With Hydrogen Dilution During Silicon Epitaxy by Mesoplasma CVD2009
- Author(s)
  J.M.A.Diaz, M.Kambara, T.Yoshida
- Journal Title
  
  IEEE Transactions Plasma Sci. 37
  
  Pages: 1723-1729
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686049
[Journal Article] Evolution of Surface Morphology With Hydrogen Dilution During Silicon Epitaxy by Mesoplasma CVD2009
- Author(s)
  J.M.A.Diaz, M.Kambara, T.Yoshida
- Journal Title
  
  IEEE TRANSACTIONS ON PLASMA SCIENCE 37
  
  Pages: 1723-1729
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21226017
[Journal Article] メゾプラズマCVDによる高速低温堆積技術応用2009
- Author(s)
  神原淳
- Journal Title
  
  J.Plasma Fusion Res.,(解説) 85[5]
  
  Pages: 88-93
- NAID
  110007115128
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20686049
[Journal Article] Evolution of surface morphology with hydrogen dilution during silicon epitaxy by mesoplasma CVD2009
- Author(s)
  J.M.A.Diaz,M.Kambara,and T.Yoshida
- Journal Title
  
  IEEE Transactions on Plasma Science
  
  Volume: 37 Issue: 9 Pages: 1723-1729
- DOI
  10.1109/tps.2009.2024780
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21226017
[Journal Article] Fabrication of heteroepitaxial Si films on sapphire substrates using mesoplasma CVD2007
- Author(s)
  M.Sawayanagi, J.M.A.Diaz, M.Kambara, T.Yoshida
- Journal Title
  
  Surf.Coat.Technol. 201
  
  Pages: 5592-5592
- Data Source
  KAKENHI-PROJECT-17686062
[Journal Article] Nano cluster assisted high rate epitaxy of silicon by meso Plasma CVD2007
- Author(s)
  M. Kambara, Y. Hamai, H. Yagi and T. Yoshida
- Journal Title
  
  Surf. Coat. Technol. 201
  
  Pages: 5529-5532
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17686062
[Journal Article] Super high rate deposition of homo- and hetero-epitaxial Si thick films by mesoplasma CVD2007
- Author(s)
  T.Yoshida, M.Kambara
- Journal Title
  
  J.High Temp.Mater.Process 11
  
  Pages: 103-103
- Data Source
  KAKENHI-PROJECT-17686062
[Journal Article] High rate epitaxy of silicon thick films by medium pressure plasma chemical, vap or deposition2007
- Author(s)
  J. M. A. Diaz, M. Sawayanagi, M. Kambara and T. Yoshida
- Journal Title
  
  Jpn. J. Appl. Phys 99
  
  Pages: 5315-5317
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17686062
[Journal Article] Nano cluster assisted high rate epitaxy of silicon by mesoplasma CVD2007
- Author(s)
  M.Kambara, Y.Hamai, H.Yagi, T.Yoshida
- Journal Title
  
  Surf.Coat.Technol 201
  
  Pages: 5529-5529
- Data Source
  KAKENHI-PROJECT-17686062
[Journal Article] 次世代プラズマコーティング技術2006
- Author(s)
  神原淳, 吉田豊信
- Journal Title
  
  応用物理 75
  
  Pages: 412-412
- NAID
  10017540873
- Data Source
  KAKENHI-PROJECT-17686062
[Journal Article] High rate epitaxy of silicon thick films by medium pressure plasma chemical vapor deposition2006
- Author(s)
  M.Kambara, H.Yagi, M.Sawayanagi, T.Yoshida
- Journal Title
  
  J.Appl.Phys. 99
  
  Pages: 74901-74901
- Data Source
  KAKENHI-PROJECT-17686062
[Journal Article] High rate epitaxy of silicon thick films by medium pressure plasma chemical vapor deposition
- Author(s)
  M.Kambara, H.Yagi, M.Sawayanagi, T.Yoshida
- Journal Title
  
  J.Appl.Phys. (印刷中)
- Data Source
  KAKENHI-PROJECT-17686062
[Patent] 賦活方法2025
- Inventor(s)
  神原淳，河内啓太，杉田侃音
- Industrial Property Rights Holder
  神原淳，河内啓太，杉田侃音
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2025-026182
- Filing Date
  2025
- Data Source
  KAKENHI-PROJECT-23K23096
[Patent] 負極活物質層及びその製造方法、並びに電池2025
- Inventor(s)
  古屋遼介，吉田淳，神原淳，久徳空，萩原翼
- Industrial Property Rights Holder
  古屋遼介，吉田淳，神原淳，久徳空，萩原翼
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2025-033296
- Filing Date
  2025
- Data Source
  KAKENHI-PROJECT-23K23096
[Patent] ナノ粒子製造装置及びナノ粒子製造方法2022
- Inventor(s)
  神原淳，太田遼至，田中暁巳，竹内啓，道垣内将司，福田健一
- Industrial Property Rights Holder
  神原淳，太田遼至，田中暁巳，竹内啓，道垣内将司，福田健一
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2022-194904
- Filing Date
  2022
- Data Source
  KAKENHI-PROJECT-23K23096
[Patent] リチウムイオン二次電池用負極の製造方法、負極、及び負極活物質2017
- Inventor(s)
  神原淳，東原智秋，太田遼至
- Industrial Property Rights Holder
  神原淳，東原智秋，太田遼至
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2017-106031
- Filing Date
  2017
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] 次世代全固体LiB向けSiナノ粒子粒状電極の実装要件のSFE視座検討2025
- Author(s)
  神原淳，久徳空，萩原翼
- Organizer
  応用物理学会春季講演会
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Structurally-controlled NbC nanoparticles production with plasma spray chemical vapor deposition2025
- Author(s)
  Shunsuke Nishi, Toshimi Tanaka, Akira Takeuchi, Masashi Dougakiuchi, Kenichi Fukuda, Xinliang Yang, Hari Nadendla and Makoto Kambara
- Organizer
  17th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2025 and IC-PLANTS2025)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24H00036
[Presentation] カーボンニュートラル実現に貢献するプラズマスプレー技術2025
- Author(s)
  神原淳
- Organizer
  グリーンDXプラズマコンソーシアム講習会
- Invited
- Data Source
  KAKENHI-PROJECT-24H00036
[Presentation] カーボンニュートラル実現に貢献するプラズマスプレー技術2025
- Author(s)
  神原淳
- Organizer
  グリーンDXプラズマコンソーシアム講習会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Structurally-controlled NbC nanoparticle production with plasma spray chemical vapor deposition2025
- Author(s)
  S. Nishi, T. Tanaka, M. Dougakiuchi, K. Fukuda, X. Yang, H. Nadendla and M.Kambara
- Organizer
  ISPlasma2025/IC-Plants2025
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Feasibility of in-reactor axial cyclone plasma flow rectification for improvement in uniformity of Si nanoparticle production2024
- Author(s)
  Masashi Dougakiuchi, Mizuki Yamanaka, Toshimi Tanaka, Akira Takeuchi, Kenichi Fukuda and Makoto Kambara
- Organizer
  The 13th Asian Thermal Spray Conference 2024
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24H00036
[Presentation] Rectification of plasma flow for homogeneous formation of Si nanoparticles and its effect on lithium-ion battery performance2024
- Author(s)
  Makoto Kambara, Mizuki Yamanaka, Toshimi Tanaka, Masashi Dougakiuchi and Kenichi Fukuda
- Organizer
  MRS Fall Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-24H00036
[Presentation] ナノ粒子表面制御とLiBデバイスへの実装2024
- Author(s)
  神原　淳
- Organizer
  応用物理学会春季講演会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] 表面自由エネルギー整合に基づく高安定ナノ複合電極の構造化2024
- Author(s)
  久徳空，本間光, 神原淳
- Organizer
  応用物理学会春季講演会
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] 全固体LiB電池のSi活物質粒径と電極膨張収集挙動の時空間的均質性の相関2024
- Author(s)
  神原淳，萩原翼，太田遼至
- Organizer
  第34回MRS年次大会
- Data Source
  KAKENHI-PROJECT-24H00036
[Presentation] プラズマスプレー技術の社会実装2024
- Author(s)
  神原淳
- Organizer
  Innovation Leaders Summit (iLS)2024
- Invited
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Rectification of plasma flow for homogeneous formation of Si nanoparticles and its effect on lithium-ion battery (LiB) performance2024
- Author(s)
  M. Kambara, M. Yamanaka, T. Tanaka, M. Dougakiuchi, K. Fukuda
- Organizer
  MRS Fall Meeting 2024
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Correlation between Si particulate active material size and spatiotemporal homogeneity of the electrode’s electrochemical behavior for all-solid-state LiB2024
- Author(s)
  M. Kambara, T. Hagiwara, R. Ohta
- Organizer
  MRS-J
- Invited
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Plasma spray for future materials engineering2024
- Author(s)
  M. Kambara
- Organizer
  26th Annual Academic Exchange Seminar SJTU and OU
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Feasibility of in-reactor axial cyclone plasma flow rectification for improvement in uniformity of Si nanoparticle productionATSC20242024
- Author(s)
  M. Dougakiuchi, M. Yamanaka, T. Tanaka, A. Takeuchi, K. Fukuda, M. Kambara
- Organizer
  Asia Thermal Spray Conference (ATSC) 2024
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Recent development of nanomaterials for batteries and dielectric capacitors for energy storage in Japan2024
- Author(s)
  Y. Tanaka, M. Kambara, M. Osada, S. Okabe, A. Kumada
- Organizer
  CIGRE 2024
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] オペランド圧力変位計測に基づく全固体LIBナノ粒状Si負極の構造評価2024
- Author(s)
  萩原翼，中島弘貴，太田遼至，神原淳
- Organizer
  電池討論会2024
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] 次世代LiB特性向上に資するSiナノ粒子生成最適化のためのプラズマスプレー整流性指標の検討2024
- Author(s)
  道垣内将司，山中瑞貴，田中暁巳，竹内啓，福田健一，神原淳
- Organizer
  応用物理学会秋期講演会
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] プラズマスプレーにおけるナノ粒子構造化過程の検討2024
- Author(s)
  神原　淳
- Organizer
  東北大学電気通信研究所共同プロジェクト研究会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Evaluation of particle size controllability by the rectification effect of in-chamber axial cyclone in the production of Si nanoparticles using RF plasma spraying2024
- Author(s)
  M. Dougakiuchi, M. Yamanaka, T. Tanaka, A. Takeuchi, K. Fukuda, M. Kambara
- Organizer
  MRS-J
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] 次世代LiB特性向上に資するSiナノ粒子生成最適化のためのプラズマスプレー整流性指標の検討2024
- Author(s)
  道垣内将司，山中瑞貴，田中暁巳，竹内啓，福田健一，神原淳
- Organizer
  第85回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-24H00036
[Presentation] プラズマスプレー法を利用したシリコンナノ材料開発の進展2024
- Author(s)
  神原淳
- Organizer
  第119回溶射学会　全国講演大会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Parametric approach to predict the optimal plasma spheroidization condition for high-throughput production of hydride-dehydride titanium powders2023
- Author(s)
  M. Kambara, M. Fukuda, T. Tanaka, A. Takeuchi, M. Dougakiuchi, K. Fukuda
- Organizer
  MRM2023/IUMRS-ICA2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] プラズマスプレーの応用：機能性ナノ粒子生成とLiイオン電池応用2023
- Author(s)
  神原　淳
- Organizer
  2023 PME/NEXTA Forum
- Invited
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Surface controlled silicon nanoparticles production and their effects on high capacity and high cyclability of all-solid-state lithium-ion batteries2023
- Author(s)
  M. Kambara, R. Ohta, T. Hiraoka, M. Dougakiuchi
- Organizer
  2023 ECS
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Controlled oxidation of silicon nanoparticles during PS-PVD for enhancement in cycle capacity of all-solid-state lithium-ion storage2023
- Author(s)
  M. Kambara, R. Ohta, T. Hiraoka, K. Hori, T. Tanaka, A. Takeuchi, M. Dougakiuchi, K. Fukuda
- Organizer
  ICDDPS-4
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] High throughput Ti spherical particle production using iverter type 100kW class high frequency plasma system2023
- Author(s)
  A. Takeuchi, T. Tanaka, M. Dougakiuchi, K. Fukuda, M. Kambara
- Organizer
  MRM2023/IUMRS-ICA2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Formation of composite nanoparticles via rapid co-condensation during plasma spray and its feasibility for all-solid-state battery anodes2023
- Author(s)
  H. Nakashima, R. Ohta, T. Tohara, K. Murata, M. Kambara
- Organizer
  3rd NGRC (Nucleation & Growth Research Conference)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] オペランド圧力変位計測に基づく全固体LiBナノ粒状Si負極の構造特徴2023
- Author(s)
  萩原　翼，太田　遼至，神原　淳
- Organizer
  第65回電池討論会
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Size control of Si nanoparticles by in-reactor axial flow cyclone in RF plasma spraying2023
- Author(s)
  M. Dougakiuchi, T. Tanaka, A. Takeuchi, K. Fukuda, M. Kambara
- Organizer
  MRM2023/IUMRS-ICA2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] High throughput production of composite nanoparticles by plasma spray PVD for next generation all-solid-state lithium-ion batteries2023
- Author(s)
  M. Kambara
- Organizer
  Thermec2023
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Advances in plasma sprayed silicon nanoparticles for next generation lithium-ion batteries2023
- Author(s)
  M. Kambara, R. Miki, T. Hiraoka, R. Ohta, T. Tanaka, A. Takeuchi, M. Dougakiuchi, K. Fukuda
- Organizer
  ISPC25
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] プラズマスプレー法によるナノ粒子構造化と全固体リチウムイオン電池負極への適用可能性2022
- Author(s)
  神原淳
- Organizer
  第92回マテリアルズテーラリング研究会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] プラズマスプレー共凝縮による Si-Fe 系ナノ粒子の構造特徴とリチウムイオン電池特性への影響2022
- Author(s)
  三木理太郎，太田遼至，道垣内将司，福田健一，神原淳
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] プラズマスプレー共凝縮による Si 系ナノ複合粒子単膜電極を用いた全固体 LiB 特性2022
- Author(s)
  太田遼至，平岡健央，柴野佑紀，川村博昭，川本浩二，田中暁巳，竹内啓，道垣内将司，福田健一，神原淳
- Organizer
  第63回電池討論会
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Control of Si Nanoparticle Structures by Plasma Spraying Physical Vapor Deposition for All- Solid-State Lithium-Ion Batteries with High Capacity and High Cyclability2022
- Author(s)
  R. Ohta, T. Hiraoka, Y. Shibano, H. Kawamura, K. Kawamoto, T. Tanaka, A. Takeuchi, M. Dougakiuchi, K. Fukuda, M. Kambara
- Organizer
  32nd MRS-J
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Li-Si Composite Nanoparticle Produced by Plasma Flash Evaporation for Anode of Lithium Ion Batteries2022
- Author(s)
  R. Ohta, R. Kusumoto, K. Nishino, M. Dougakiuchi, M. Kambara
- Organizer
  Internatilnal Vacuum Conference 22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] シリコンと熱プラズマプロセスの未来2022
- Author(s)
  神原淳
- Organizer
  第161回日本学術振興会第153委員会研究会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] プラズマスプレー共凝縮を利用した構造化ナノ粒子の生成とリチウムイオン電池電池負極への応用2022
- Author(s)
  神原淳
- Organizer
  第139回マイクロ接合研究委員会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] 全固体LiB特性の高容量と高サイクル性を両立するSiナノ粒子の最適構造2022
- Author(s)
  平岡健央，太田遼至，田中暁巳，竹内啓，道垣内将司，福田健一，神原淳
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] Design of Composite Nanoparticles by Plasma Spraying for Solid-State Lithium-Ion Batteries (LiB) with High Densities and High Cyclabilities2022
- Author(s)
  M. Kambara
- Organizer
  2022 MRS Fall Meeting
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23096
[Presentation] PS-PVDナノSi:Sn粒子を用いた負極複合化によるLiB特性向上2018
- Author(s)
  東原智秋，太田遼至，道垣内将司，神原淳
- Organizer
  第65回応用物理学会
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] 高スループットPS-PVDによるSiナノ粒子の構造変調とLiイオン電池特性2018
- Author(s)
  太田遼至，道垣内将司，神原淳
- Organizer
  第65回応用物理学会
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Nanocluster assited mesoplasma epitaxial bridging2017
- Author(s)
  M. Kambara, R. Yamada, S. Wu
- Organizer
  ICMCTF2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Enhanced cycle capacity of lithium ion batteries with nanocomposite Si anodes produced by rapid co-condensation in plasma spray PVD2017
- Author(s)
  M. Kambara, K. Fukada, R. Ohta, T. Tohara, N. Gerile
- Organizer
  ECS2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Enhancement in capacity of lithium ion batteries with composite Si:Sn nanoparticulate anode produced through co-condensation in PS-PVD2017
- Author(s)
  Makoto Kambara, Tomoaki Tohara, Ryoshi Ohta
- Organizer
  MRS-J
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Nanocomposite Si particle production by plasma spray PVD for next generation high energy density lithium ion batteries2017
- Author(s)
  M. Kambara
- Organizer
  The 22nd Korea-Japan Workshop
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] 熱プラズマスプレーPVDによるLiイオン電池負極向けSi系ナノ複合粒子開発2017
- Author(s)
  神原淳，田代亘
- Organizer
  日本物理学会　第72回年次大会
- Place of Presentation
  大阪大学，大阪
- Year and Date
  2017-03-27
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] メゾプラズマナノクラスターを利用したエピタキシャルブリッジング2017
- Author(s)
  神原淳
- Organizer
  Plasma conference 2018
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] 新たな材料プロセッシングに向けた熱プラズマスプレーの挑戦2017
- Author(s)
  神原淳
- Organizer
  日本学術振興会第153委員会　30周年記念講演会
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Enhanced cyclability with plasma sprayed Si-M nanocomposite anodes for lithium ion batteries2017
- Author(s)
  M. Kambara, T. Tohara, R. Ohta
- Organizer
  AEPSE2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] プラズマスプレーPVDによるLiイオン二次電池用Si-Ni複合ナノ負極の特性向上2016
- Author(s)
  深田航平，太田遼至，神原淳
- Organizer
  第77回応用物理学会秋期学術講演会
- Place of Presentation
  朱鷺メッセ，新潟
- Year and Date
  2016-09-13
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] ナノクラスター支援メゾプラズマ高速沿面エピタキシャルオーバー成長2016
- Author(s)
  神原淳
- Organizer
  第74回マテリアルズテーラリング研究会
- Place of Presentation
  加藤山崎教育基金軽井沢研修所，長野
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Production of SiO nanoparticles with reduced oxygen content by pulse-modulated plasma spray PVD for an increase in capacity of LiBS2016
- Author(s)
  S. Hamazaki, N. Kodama, K. Kita, Y Ishisaka, Y. Tanaka，M. Kambara
- Organizer
  26th MRS-J
- Place of Presentation
  Yokohama Port Opening Plaza, Kanagawa
- Year and Date
  2016-12-19
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] シリコンのメゾプラズマ超高速エピタキシー2016
- Author(s)
  神原淳
- Organizer
  日本学術振興会　薄膜第１３１委員会・第279回研究会
- Place of Presentation
  東京都立産業技術研究センター，東京
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] プラズマスプレーPVDによるリチウム2次電池負極用Si系ナノ複合粒子開発2016
- Author(s)
  神原淳
- Organizer
  神奈川大オープンラボ第17回講演会
- Place of Presentation
  神奈川大学，神奈川県横浜市
- Year and Date
  2016-01-21
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Nanocomposite Si-M particles produced by plasma spray PVD for high-density lithium ion batteries2016
- Author(s)
  M. Kambara, Naren Gerile, M. Kaga
- Organizer
  ICMCTF 2016
- Place of Presentation
  San Diego, USA
- Year and Date
  2016-04-25
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Enhanced cycle capacity of lithium ion batteries with Ni-epitaxially-attached Si nanoparticles as anode produced by plasma spray physical vapor deposition2016
- Author(s)
  M. Kambara
- Organizer
  26th MRS-J
- Place of Presentation
  Yokohama Port Opening Plaza, Kanagawa
- Year and Date
  2016-12-19
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] プラズマスプレーPVDによるLiイオン二次電池用Si-Ni複合ナノ負極の特性向上2016
- Author(s)
  深田航平，太田遼至，神原淳
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学，東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Plasma spray PVD for nanocparticulate Si composite anodes of high density lithium ion batteries2016
- Author(s)
  M. Kambara
- Organizer
  NTI-UTokyo Joint Conference
- Place of Presentation
  National Taiwan University, Taipei, Taiwan
- Year and Date
  2016-11-30
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Lateral epitaxial overgrowth of silicon thick films during nanocluster assisted mesoplasma CVD2016
- Author(s)
  M. Kambara, T. Koyano, Y. Imamura, T. Yoshida
- Organizer
  69th Annual Gaseous Electronics
- Place of Presentation
  Ruhr University Bochum, Bochum, Germany
- Year and Date
  2016-10-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] プラズマスプレー技術による高速・高品質ナノ粒子製造2016
- Author(s)
  神原淳
- Organizer
  ナノ粒子製造システム研究会
- Place of Presentation
  島根県産業技術センター，松江，島根
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] プラズマスプレーPVDによるリチウム2次電池負極向けSi系ナノ粒子の高速複合化2016
- Author(s)
  神原淳
- Organizer
  第158回日本金属学会
- Place of Presentation
  東京理科大学，東京都葛飾区
- Year and Date
  2016-03-23
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] プラズマスプレーPVDによる次世代高密度リチウム2次電池向けSi系ナノ複合負極開発2016
- Author(s)
  神原淳
- Organizer
  日本学術振興会　プラズマ材料科学第153委員会・第129回研究会
- Place of Presentation
  島根県産業技術センター，松江，島根
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] High rate and high yield silicon epitaxy by plasma spray CVD under mesoplasma condition2015
- Author(s)
  M. Kambara
- Organizer
  International workshop on advanced synthesis and processing technology for films and coatings
- Place of Presentation
  Wuhan, China
- Year and Date
  2015-05-22
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600125
[Presentation] Fast-rate and high-efficiency cluster assisted epitaxy by mesoplasma CVD2015
- Author(s)
  M. Kambara, S. Wu, L.W. Chen, K. Sawada, T. Ichimaru, T. Yoshida
- Organizer
  ICMCTF 2015
- Place of Presentation
  San Diego, USA
- Year and Date
  2015-04-20
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600125
[Presentation] Deposition of thick SiC film by cluster-assisted mesoplasma chemical vapor deposition2015
- Author(s)
  T. Akiyama, S. Atsumi, M. Kambara
- Organizer
  AEPSE2015
- Place of Presentation
  Jeju, Korea
- Year and Date
  2015-09-20
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600125
[Presentation] Fast rate and wide area Si epitaxy with improved yield by mesoplasma chemical vapor deposition2015
- Author(s)
  M. Kambara
- Organizer
  The 5th Asia-Africa sustainable energy forum, 7th International workshop on Sahara Solar Breeder
- Place of Presentation
  筑波大学，茨城県つくば市
- Year and Date
  2015-05-10
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600125
[Presentation] Production of composite Si nano particles by plasma spray PVD and CH4 annealing for negative electrodes of lithium ion batteries2015
- Author(s)
  R. Ohta, R. Yutaro, T. Tashiro, M. Kambara
- Organizer
  68tjGEC/ICRP-9
- Place of Presentation
  Hawaii Convention Center, Honolulu, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] プラズマスプレーPVDによるリチウムイオン電池向けSi系複合ナノ粒子製造2015
- Author(s)
  神原淳
- Organizer
  次世代マイクロ化学チップ第33回研究会
- Place of Presentation
  東京大学，東京都文京区
- Year and Date
  2015-10-19
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] プラズマスプレーPVDによるリチウムイオン電池向けSi系複合ナノ粒子の開発2015
- Author(s)
  神原淳
- Organizer
  技術情報協会セミナー
- Place of Presentation
  東京日幸五反田ビル，東京都品川区
- Year and Date
  2015-12-04
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] プラズマスプレーPVDによるリチウムイオン電池用SiO系ナノ複合負極創製2015
- Author(s)
  本間啓一郎，神原淳
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場，愛知県名古屋市
- Year and Date
  2015-09-13
- Invited
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] Nanocomposite Si/SiOx particle formation through enhanced disproportionation reaction during plasma spray PVD2015
- Author(s)
  T. Tashiro, M. Kambara
- Organizer
  MRS-J
- Place of Presentation
  横浜開港記念会館，神奈川県横浜市
- Year and Date
  2015-12-08
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04152
[Presentation] メゾプラズマCVDによる高速大面積エピタキシ－2014
- Author(s)
  神原淳，W. Sudong，市丸智憲，澤田賢人，山本貴規，吉田豊信
- Organizer
  MRS-J
- Place of Presentation
  横浜市開港記念会館
- Year and Date
  2014-12-11
- Invited
- Data Source
  KAKENHI-PROJECT-26600125
[Presentation] Lateral epitaxial overgrowth of silicon on SiO2 patterned substrate by mesoplasma chemical vapor deposition2013
- Author(s)
  Y. Imamura, L.W. Chen, M. Kambara, T. Yoshida
- Organizer
  IC-Plants 2013
- Place of Presentation
  Gifu,Gero Synergy Center
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Nano-cluster assisted high rate and high yield Si epitaxy2013
- Author(s)
  M. Kambara, L.W.Chen, S.D. Wu, T. Yoshida, (Invited)
- Organizer
  Asia Core program UT-UT-SNU symposium
- Place of Presentation
  Tokyo,TOKYO DOME HOTEL
- Invited
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Enhanced materials yield of epitaxial Si film deposition from SiHCl3 by H2 in mesoplasma CVD2013
- Author(s)
  S.D. Wu, M. Kambara, T. Yoshida
- Organizer
  日本金属学会春季大会
- Place of Presentation
  東京・東京理科大学神楽坂キャンパス
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] メゾプラズマによるウエハ等価エピタキシャル厚膜高速成長2012
- Author(s)
  神原淳、吉田豊信
- Organizer
  第62回マテリアルズテーラリング研究会 (招待講演)
- Place of Presentation
  軽井沢・（財）加藤科学振興会軽井沢研修所
- Invited
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] ナノクラスター支援メゾプラズマCVDによるパターン基板上高速単結晶Si厚膜堆積技術2012
- Author(s)
  L.W.Chen, M.Kambara, T.Yoshida
- Organizer
  応用物理学会春期大会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Improved material efficiency in the Si deposition from SiHCl3 under me soplasma condition2012
- Author(s)
  M.Kambara, S.D.Wu, T.Yoshida
- Organizer
  TMS 2012
- Place of Presentation
  Orland, USA
- Year and Date
  2012-03-13
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Nanocluster dynamic simulation during high rate epitaxial deposition under mesoplasma condition2012
- Author(s)
  L.-W. Chen, Y. Shibuta, M. Kambara, T. Yoshida
- Organizer
  11th APCPST + 25th SPSM
- Place of Presentation
  Kyoto,Japan.
- Data Source
  KAKENHI-PROJECT-23656143
[Presentation] Super High Rate Deposition of Epitaxial Si Films from TCS by Mesoplasma CVD2012
- Author(s)
  S.D.Wu, M.Kambara, T.Yoshida
- Organizer
  金属学会
- Place of Presentation
  横浜
- Year and Date
  2012-03-29
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Nano-cluster assisted high rate and high yield silicon epitaxy by mesoplasma CVD2012
- Author(s)
  M. Kambara, L.W.Chen, S.D. Wu, T. Yoshida
- Organizer
  Collaborative Conference on Crystal Growth (3CG) (Invited)
- Place of Presentation
  Orlando, USA
- Invited
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] メゾプラズマCVDによるエピタキシャル成長の高速･高収率化2012
- Author(s)
  神原淳、Wu Sudong、陳豊文、吉田豊信
- Organizer
  応用物理学会　秋季大会
- Place of Presentation
  愛媛・松山大学
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Nanocluster dynamic simulation during high rate epitaxial deposition under mesoplasma condition2012
- Author(s)
  L. W. Chen, Y. Shibuta, M. Kambara, and T. Yoshida
- Organizer
  11th APCPST&25th SPSM
- Place of Presentation
  Kyoto,Kyoto University ROHM plaza
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Mesoplasma CVD for fast rate and high yield Si Epitaxy (Plenary lecture)2012
- Author(s)
  M.Kambara,L.W.Chen,S.D.Wu,T.Yoshida
- Organizer
  IUMRS-ECEM 2012
- Place of Presentation
  Yokohama.
- Year and Date
  2012-09-26
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Nanocluster dynamic simulation during high rate epitaxial deposition under mesoplasma condition2012
- Author(s)
  L.-W. Chen, Y. Shibuta, M. Kambara, T. Yoshida
- Organizer
  11th APCPST + 25th SPSM
- Place of Presentation
  京都大学
- Data Source
  KAKENHI-PROJECT-23656143
[Presentation] Mesoplasma CVD for fast rate and high yield Si Epitaxy2012
- Author(s)
  M. Kambara, L.W.Chen, S.D. Wu, T. Yoshida
- Organizer
  IUMRS-ECEM 2012 (Plenary lecture)
- Place of Presentation
  Yokohama,PACIFICO YOKOHAMA
- Invited
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Molecular dynamics study of nanoclusters' role in mesoplasma epitaxy2011
- Author(s)
  L.-W. Chen, Y. Shibuta, M. Kambara, T. Yoshida
- Organizer
  IUMRS-ICA
- Place of Presentation
  Taipei.
- Data Source
  KAKENHI-PROJECT-23656143
[Presentation] Molecular dynamics study of nanoclusters' role in mesoplasma epitaxy2011
- Author(s)
  L.-W. Chen, Y. Shibuta, M. Kambara, T. Yoshida
- Organizer
  IUMRS-ICA 2011
- Place of Presentation
  Taipei, China
- Data Source
  KAKENHI-PROJECT-23656143
[Presentation] Molecular Dynamics Simulation of Si Nano-Clusters in Mesoplasma High Rate And Low Temperature Epitaxy2011
- Author(s)
  L.W.Chen, M.Kambara, T.Yoshida
- Organizer
  MRS Spring Meeting
- Place of Presentation
  San Francisco, USA
- Year and Date
  2011-04-25
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] High rate and high yield epitaxial silicon deposition from SiHCl3 under mesoplasma condition2011
- Author(s)
  S.D.Wu, M.Kambara, T.Yoshida
- Organizer
  ISPC-20
- Place of Presentation
  Philadelphia, USA
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Molecular Dynamics Study of Nanoclusters' Role in Mesoplasma Epitaxy2011
- Author(s)
  L.W.Chen, M.Kambara, T.Yoshida
- Organizer
  IUMRS 2011
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Cluster assisted mesoplasma CVD for high rate and high yield silicon epitaxy (invited)2011
- Author(s)
  M.Kambara,L.W.Chen,S.D.Wu,T.Yoshida
- Organizer
  Thermec 2011
- Place of Presentation
  Quebec,Canada.
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Mesoplasma processing for ultrahigh rate and high yield deposition of epitaxial Si thick film from SiHCl_32011
- Author(s)
  S.D.Wu, M.Kambara, T.Yoshida
- Organizer
  PE 25^<th>(プラズマエレクトロニクス)
- Place of Presentation
  名古屋
- Year and Date
  2011-10-22
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Low temperature silicon epitaxy from trichlorosilane via mesoplasma themical vapor deposition2010
- Author(s)
  J.Fukuda, M.Kambara, T.Yoshida
- Organizer
  APCPST2010 (Asia-pacific conference on Plasma Science Technology)
- Place of Presentation
  Busan (Korea)
- Year and Date
  2010-07-04
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] High rate and high yield silicon deposition under mesoplasma condition for a next generation Siemens technology2010
- Author(s)
  M.Kambara, J.Fukuda, S.Wu, L.W.Chen, T.Yoshida
- Organizer
  GEC-ICRP2010 (Gaseous Electronics Conference)
- Place of Presentation
  Paris, France
- Year and Date
  2010-11-04
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] High rate and high yield silicon deposition under mesoplasma condition for a next generation Siemens technology2010
- Author(s)
  M.Kambara, J.Fukuda , S.Wu, L.W.Chen, T.Yoshida
- Organizer
  GEC-ICRP2010 (Gaseous Electronics Conference)
- Place of Presentation
  Paris (France)
- Year and Date
  2010-11-04
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] High rate and high yield silicon mesoplasma epitaxy2010
- Author(s)
  M.Kambara
- Organizer
  7^<th> Plasma Frontier Research Meeting
- Place of Presentation
  Kanazawa(Invited)
- Year and Date
  2010-11-30
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Molecular dynamics simulation of Si nanoclusters in mesoplasma epitaxy2010
- Author(s)
  L.W.Chen, Y.Shibuta, M.Kambara, T.Yoshida
- Organizer
  第7回金属学会ヤングメタラジスト研究交流会
- Place of Presentation
  東京
- Year and Date
  2010-11-11
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] High rate and high yield silicon mesoplasma epitaxy2010
- Author(s)
  M.Kambara
- Organizer
  7^<th> Plasma Frontier Research Meeting(Invited)
- Place of Presentation
  Kanazawa
- Year and Date
  2010-11-30
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] High yield silicon deposition under mesoplasma condition for a next generation Siemens technology2010
- Author(s)
  M.Kambara, T.Yoshida
- Organizer
  SCSI (Silicon for the Chemical and Solar Industry)
- Place of Presentation
  Auslend, Norway
- Year and Date
  2010-06-28
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] プラズマスプレーによるナノコーティング技術の開発と応用2010
- Author(s)
  神原淳
- Organizer
  京浜ネットワーク支援活動技術セミナー「プラズマ利用で新たなものづくりを!(講師)
- Place of Presentation
  横浜
- Year and Date
  2010-02-04
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] プラズマスプレーによるナノコーティング技術の開発と応用(講師)2010
- Author(s)
  神原淳
- Organizer
  京浜ネットワーク支援活動技術セミナー「プラズマ利用で新たなものづくりを!」
- Place of Presentation
  横浜
- Year and Date
  2010-02-04
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] High yield silicon deposition under mesoplasma condition for a next generation Siemens technology2010
- Author(s)
  M.Kambara, T.Yoshida
- Organizer
  SCSI(Silicon for the Chemical and Solar Industry)
- Place of Presentation
  Auslend, Norway
- Year and Date
  2010-06-28
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] メゾプラズマ高速エピタキシー2010
- Author(s)
  神原淳
- Organizer
  第1回薄膜太陽電池セミナー(第36回アモルファスセミナー)
- Place of Presentation
  岐阜
- Year and Date
  2010-10-28
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] High rate and high yield silicon mesoplasma epitaxy2010
- Author(s)
  M.Kambara
- Organizer
  7th Plasma Frontier Research Meeting
- Place of Presentation
  Kanazawa(Invited)
- Year and Date
  2010-11-30
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] High yield silicon deposition under mesoplasma condition for a next generation Siemens technology2010
- Author(s)
  M.Kambara , T.Yoshida
- Organizer
  SCSI (Silicon for the Chemical and Solar Industry
- Place of Presentation
  Alesund (Norway)
- Year and Date
  2010-06-28
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] High yield silicon deposition under mesoplasma condition for a next generation Siemens technology (oral)2010
- Author(s)
  M.Kambara and T.Yoshida
- Organizer
  SCSI (Silicon for Chem.Solar Ind.)
- Place of Presentation
  Alesund, Norway.
- Year and Date
  2010-06-28
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] プラズマスプレー技術展開2009
- Author(s)
  神原淳
- Organizer
  ナノサーフェス研究会,東葛テクノプラザ(招待講演)
- Place of Presentation
  千葉
- Year and Date
  2009-03-06
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Effect of substrate transfer on silicon epitaxy during mesoplasma CVD2009
- Author(s)
  K.Iwamoto, M.Yoshioka, J.M.A.Diaz, M.Kambara, T.Yoshida
- Organizer
  International conference on plasma surface engineering(AEPSE 2009)
- Place of Presentation
  Busan
- Year and Date
  2009-09-24
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Effect of substrate transfer on silicon epitaxy during mesoplasma CVD2009
- Author(s)
  K.Iwamoto, M.Yoshioka, J.M.A.Diaz, M.Kambara, T.Yoshida
- Organizer
  International conference on plasma surface engineering (AEPSE 2009)
- Place of Presentation
  Busan
- Year and Date
  2009-09-24
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] high rate and low temperature silicon deposition via mesoplasma CVDメゾプラズマCVDによる高品質シリゴン膜の低温高速堆積2009
- Author(s)
  神原淳
- Organizer
  プラズマ科学シンポジウム2009(PSS)第26回プラズマプロセシング研究会
- Place of Presentation
  名古屋大学、愛知(招待講演)
- Year and Date
  2009-02-02
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] メゾプラズマ高速エピタキシー2009
- Author(s)
  神原淳
- Organizer
  第1回薄膜太陽電池セミナー(第36回アモルファスセミナー)(招待講演)
- Place of Presentation
  岐阜
- Year and Date
  2009-10-28
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Feasibility study of mesoplasma CVD for direct production of high pure Sithin films from trichlorosilane2009
- Author(s)
  M.Kambara, J.Fukuda, T.Yamamoto, T.Yoshida
- Organizer
  Materials Research Society Spring Meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2009-12-02
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Intermitted mesoplasma CVD for high rate and low temperature silicon epitaxy2009
- Author(s)
  J.M.A.Diaz, M.Yoshioka, Y.Iwamoto, K.Harima, M.Kambara, T.Yoshida
- Organizer
  Materials Research Society Spring Meeting
- Place of Presentation
  San Francisco, USA
- Year and Date
  2009-04-15
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] A NEW ROUTE FOR HIGH RATE AND LOW TEMPERATURE EPITAXY BY CLUSTER ASSISTED MESOPLASMA CVD(Invited)2009
- Author(s)
  M.Kambara, J.M.A.Diaz, T.Yoshida
- Organizer
  Thermec 2009
- Place of Presentation
  Berlin, Germany
- Year and Date
  2009-08-27
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] メゾプラズマ高速エピタキシー(招待講演)2009
- Author(s)
  神原淳
- Organizer
  第1回薄膜太陽電池セミナー(第36回アモルファスセミナー)
- Place of Presentation
  岐阜
- Year and Date
  2009-10-28
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] 微結晶Si薄膜超高速堆積用メゾプラズマ2009
- Author(s)
  神原淳
- Organizer
  プラズマ・核融合学会研究会
- Place of Presentation
  九州大学、福岡(招待講演)
- Year and Date
  2009-03-26
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] high rate and low temperature silicon deposition via mesoplasma CVDメゾプラズマCVDによる高品質シリコン膜の低温高速堆積2009
- Author(s)
  神原淳
- Organizer
  プラズマ科学シンポジウム2009(PSS)第26回プラズマプロセシング研究会(招待講演)
- Place of Presentation
  名古屋大学,愛知
- Year and Date
  2009-02-02
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] メゾプラズマ高速エピタキシー(招待講演)2009
- Author(s)
  神原淳
- Organizer
  第一回薄膜太陽電池セミナー
- Place of Presentation
  岐阜.
- Year and Date
  2009-10-28
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] A NEW ROUTE FOR HIGH RATE AND LOW TEMPERATURE EPITAXY BYCLUSTER ASSISTED MESOPLASMA CVD(Invited)2009
- Author(s)
  M.Kambara, J.M.A.Diaz, T.Yoshida
- Organizer
  Thermec 2009
- Place of Presentation
  Berlin, Germany
- Year and Date
  2009-08-27
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Feasibility study of mesoplasma lateral epitaxial overgrowth for high rate and lows temperature deposition of large gained crystalline Si thick films (oral)2009
- Author(s)
  M. Kambara, J.M.A. Diaz, M. Yoshioka, T. Yoshida
- Organizer
  Plasma Surface Engineering (PSE)
- Place of Presentation
  Garmisch-Partenkirchen, Germany
- Year and Date
  2009-09-17
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] 微結晶Si薄膜超高速堆積用メゾプラズマ2009
- Author(s)
  神原淳
- Organizer
  プラズマ・核融合学会研究会(招待講演)
- Place of Presentation
  九州大学,福岡
- Year and Date
  2009-03-26
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Feasibility study of mesoplasma CVD for direct production of high pure Si thin films from trichlorosilane2009
- Author(s)
  M.Kambara, J.Fukuda, T.Yamamoto, T.Yoshida
- Organizer
  Materials Research Society Spring Meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2009-12-02
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Effect of substrate transfer on silicon epitaxy during mesoplasma CVD2009
- Author(s)
  K.Iwamoto, M.Yoshioka, J.M.A.Diaz, M.Kambara, T.Yoshida
- Organizer
  International conference on plasma surface engineering(AEPSE2009)
- Place of Presentation
  Busan, KOREA
- Year and Date
  2009-09-24
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] Feasibility study of mesoplasma CVD for direct production of high pure Si thin films from trichlorosilane2009
- Author(s)
  M.Kambara, J.Fukuda, T.Yamamoto, T.Yoshida
- Organizer
  Materials Research Society Spring Meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2009-12-02
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] A new route for high rate and low temperature epitaxy by cluster assisted mesoplasma CVD2009
- Author(s)
  M.Kambara, J.M.A.Diaz, T.Yoshida
- Organizer
  Thermec 2009(Invited)
- Place of Presentation
  Berlin, Germany
- Year and Date
  2009-08-27
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] A new route for high rate and low temperature epitaxy by cluster assisted mesoplasma CVD (Invited)2009
- Author(s)
  M.Kambara,J.M.A.Diaz,T.Yoshida
- Organizer
  Thermec
- Place of Presentation
  Berlin,Germany.
- Year and Date
  2009-08-27
- Data Source
  KAKENHI-PROJECT-21226017
[Presentation] プラズマスプレー技術展開2009
- Author(s)
  神原淳
- Organizer
  ナノサーフェス研究会
- Place of Presentation
  東葛テクノブラザ、千葉(招待講演)
- Year and Date
  2009-03-06
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] In-situ detection of Si nanoclusters by small angle X-ray scattering during high rate and low temperature silicon epitaxy by mesoplasma CVD (oral)2008
- Author(s)
  M.Kambara, J.M.A.Diaz, T.Yoshida
- Organizer
  2008 Fall Meeting, Materials Research Society
- Place of Presentation
  Boston, USA
- Year and Date
  2008-12-04
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Instantaneous cleaning of silicon substrates for high-rate and low-temperature mesoplasma epitaxy (oral)2008
- Author(s)
  J.M.A. Diaz, M. Kambara, K. Harima, M. Yoshioka, T. Yoshida
- Organizer
  Asia-Pacific Conference, on Plasma Science Technology
- Place of Presentation
  Huang-shang, China
- Year and Date
  2008-10-08
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Instantaneous cleaning of silicon substrates for high-rate and low-temperature mesoplasma epitaxy (oral)2008
- Author(s)
  J.M.A.Diaz, M.Kambara, K.Harima, M.Yoshioka, T.Yoshida
- Organizer
  Asia-Pacific Conference on Plasma Science Technology (APCPST)
- Place of Presentation
  Huang-shang, China
- Year and Date
  2008-10-08
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] In-situ detection of Si nanoclusters by small angle X-ray scattering during highrate and low temperature silicon epitaxy by mesoplasma CVD (oral)2008
- Author(s)
  M. Kambara, J.M.A. Diaz, T. Yoshida
- Organizer
  2008 Fall Meeting, Materials Research Society
- Place of Presentation
  Boston, USA
- Year and Date
  2008-12-04
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] Feasibility study of mesoplasma lateral epitaxial overgrowth for high rate andlow temperature deposition of large gained crystalline Si thick films (oral)2008
- Author(s)
  M.Kambara, J.M.A.Diaz, M.Yoshioka, T.Yoshida
- Organizer
  Plasma Surface Engineering (PSE), Garmisch-Partenkirchen
- Place of Presentation
  Germany
- Year and Date
  2008-09-17
- Data Source
  KAKENHI-PROJECT-20686049
[Presentation] High rate and Low temperature Silicon epitaxy via unique cluster enhanced mesoplasma CVD2008
- Author(s)
  M.Kambara, J. M. A. Diaz, and T. Yoshida
- Organizer
  Materials Research Society, Spring Meeting
- Place of Presentation
  San Francisco, USA
- Year and Date
  2008-03-25
- Data Source
  KAKENHI-PROJECT-17686062
[Presentation] Insitu X-ray scattering studies during Si film deposition by mesoplasma CVD2007
- Author(s)
  J. M. A. Diaz, M. Kambara, and T. Yoshida
- Organizer
  International Symposium on Plasma Chemistry
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-08-26
- Data Source
  KAKENHI-PROJECT-17686062
[Presentation] Hydrogen effect on high rate and low temperature mesoplasma epitaxy2007
- Author(s)
  M. Kambara, T. Ichikura, J. M. A. Diaz, and T. Yoshida
- Organizer
  International Symposium on Plasma Chemistry
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-08-27
- Data Source
  KAKENHI-PROJECT-17686062
[Presentation] 固ー気マルチフェーズプラズマ：メゾプラズマ反応場の応用
- Author(s)
  M. Kambara
- Organizer
  Plasma Conference 2014
- Place of Presentation
  朱鷺メッセ新潟コンベンションセンター
- Year and Date
  2014-11-18 – 2014-11-19
- Invited
- Data Source
  KAKENHI-PROJECT-26600125
[Presentation] High rate and high yield silicon epitaxy during chemical vapor deposition from trichlorosilane
- Author(s)
  M. Kambara
- Organizer
  2015 Japan-Korea Joint Symposium on Advanced Solar Cells
- Place of Presentation
  TKP博多駅前博多駅前会議室
- Year and Date
  2015-01-09 – 2015-01-10
- Invited
- Data Source
  KAKENHI-PROJECT-26600125

1. YOSHIDA Toyonobu (00111477)

# of Collaborated Projects: 2 results

# of Collaborated Products: 35 results
2. SHIBUTA Yasushi (90401124)

# of Collaborated Projects: 2 results

# of Collaborated Products: 10 results
3. TANAKA Yasunori (90303263)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. YAMAMOTO Tsuyohisa (20220478)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. 酒井道 (30362445)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 村上朝之 (20323818)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 伊藤剛仁 (70452472)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 田中学 (10707152)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
9. 平山智士 (70759274)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

KAMBARA Makoto 神原 淳

Kambara Makoto 神原 淳

Research Projects

Research Products

Co-Researchers

Design of highly stable and high-density anodes for all-solid-state Li-ion batteries based on heterogeneous interfacial energy matchingPrincipal Investigator

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Overall Understanding of Diverse Multidimensional Distributions in Plasma Processes for Functional Outputs

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Development of composite nanoparticles for negative electrode of next generation lithium ion batteriesPrincipal Investigator

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Nanocluster assisted fast rate SiC epitaxyPrincipal Investigator

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Molecular dynamics study of epitaxial growth of silicon thin film via a plasma CVD

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プラズマスプレーPVDによる次世代Liイオン電池SiーOーC系ナノ複合負極開発Principal Investigator

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Next generation mesoplasma SIEMENS technology for direct production of wafer-equivalent thin film solar cells

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Mesoplasma lateral epitaxy for next generation giant electronicsPrincipal Investigator

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次世代低温・超高速エピタキシーを可能とするナノクラスター制御メゾプラズマ技術開発Principal Investigator

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DEVELOPMENT OF NANO-CBN THIN FILM DEVICES WORKING AT HIGH-TEMPERATURES UNDER SEVERE CONDITIONS

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[Book] Encyclopedia of Plasma Technology: Powders: Plasma Spray PVD for High-Throughput Production2017

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Data Source

[Book] ナノコーティング(第1章2.2担当)((財)ファインセラミックスセンター編)2010

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Publisher

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[Journal Article] Lowering temperature of Cu sinter bonding under low-pressure in ambient air by is-situ generation and reduction of Cu2O nanoparticles2025

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Journal Title

DOI

Data Source

[Journal Article] Evaluation of thermal anisotropic evolution in the sinter structure of direct sinter joining to silicon via coupled microstructural characterizations2025

Author(s)

KAMBARA Makoto 神原淳

Kambara Makoto 神原淳

[Journal Article] プラズマスプレーによる次世代高密度リチウムイオン電池向け構造ナノ材料の高スループット生成2024