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NAKAO Masashi  中尾 正史

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中尾 正史  ナカオ マサシ

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Researcher Number 80447177
Affiliation (Current) 2026: 東北大学, マイクロシステム融合研究開発センター, 非常勤講師
Affiliation (based on the past Project Information) *help 2008 – 2010: National Institute of Information and Communications Technology, 未来ICT研究センターナノICTグループ, 専攻研究員
Review Section/Research Field
Principal Investigator
Structural/Functional materials
Keywords
Principal Investigator
√<3>条件 / 周期構造評価 / 大面積ナノ構造 / SiCモールド / 1/3条件 / モールド作製 / メタルパタン / リフトオフ / UVインプリント / ナノ周期構造 … More / エキシマ洗浄 / √3条件 / 1 / 陽極酸化 / インプリントリソグラフィ / アルミナナノホール / 大面積ナノ周期構造 Less
  • Research Projects

    (1 results)
  • Research Products

    (22 results)
  •  Fabrication of large-scale nano-level super-periodic structures and their applicationPrincipal Investigator

    • Principal Investigator
      NAKAO Masashi
    • Project Period (FY)
      2008 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research on Innovative Areas (Research a proposed research project)
    • Research Field
      Structural/Functional materials
    • Research Institution
      National Institute of Information and Communications Technology

All 2011 2010 2009

All Journal Article Presentation

  • [Journal Article] Regeneration of imprint molds using vacuum ultraviolet light2011

    • Author(s)
      M.Nakao, M.Yamaguchi, S.Yabu
    • Journal Title

      Proc.of SPIE Advanced Lithography 2011 Vol.7972

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Journal Article] Regeneration of imprint molds using vacuum ultraviolet light2011

    • Author(s)
      M.Nakao
    • Journal Title

      Proceeding of Advances in Resist Materials and Processing Technology XXVIII

      Volume: 7972

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Journal Article] インプリントリソグラフィのフォトニクスへの応用~総論2010

    • Author(s)
      中尾正史
    • Journal Title

      月刊OPTRONICS 338

      Pages: 80-82

    • Data Source
      KAKENHI-PROJECT-20200028
  • [Journal Article] Imprint-Mold-Cleaning by Vacuum Ultraviolet Light2010

    • Author(s)
      M.Nakao, M.Yamaguchi, S.Yabu
    • Journal Title

      Journal of Nonlinear Optical Physics & Materials 19(4)

      Pages: 773-779

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Journal Article] UVインプリントによる各種基板上への回折格子形成技術2010

    • Author(s)
      中尾正史, 水野潤
    • Journal Title

      OPTRONICS Vol.29,No.2

      Pages: 93-99

    • Data Source
      KAKENHI-PROJECT-20200028
  • [Journal Article] UVインプリントによる各種基板上への回折格子形成技術2010

    • Author(s)
      中尾正史
    • Journal Title

      月刊OPTRONICS 338

      Pages: 93-99

    • Data Source
      KAKENHI-PROJECT-20200028
  • [Journal Article] インプリントリソグラフィのフォトニクスへの応用:総論2010

    • Author(s)
      中尾正史
    • Journal Title

      OPTRONICS Vol.29,No.2

      Pages: 80-82

    • Data Source
      KAKENHI-PROJECT-20200028
  • [Journal Article] Imprint-Mold-Cleaning by Vacuum Ultraviolet Light2010

    • Author(s)
      M.Nakao
    • Journal Title

      Journal of Nonlinear Optical Physics & Materials

      Volume: 19 Pages: 773-779

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Journal Article] Reduction of pitch of nanohole array by self-organizing anodic oxidation after nanoimprinting2010

    • Author(s)
      S.Shingubara, S.Maruo, T.Yamashita, M.Nakao, T.Shimizu
    • Journal Title

      Microelectro.Engineer. 87

      Pages: 1451-1454

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Journal Article] Grating Fabrication on Nitrides Grown by MOVPE for DFB Lasers2009

    • Author(s)
      M.Nakao, T.Kimura, Y.H.Liu, S.Y.Ji, T.Matsuoka
    • Journal Title

      phys.stat.sol.(c) Vol.6(S2)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Journal Article] MOVPE Growth of InN : A Comparison between a Horizontal and a Vertical Reactor2009

    • Author(s)
      Y.H.Liu, T.Kimura, T.Shimada, M.Hirata, M.Wakaba, M.Nakao, S.Y.Ji, T.Matsuoka
    • Journal Title

      phys.stat.sol.(c) Vol.6(S2)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] 窒素を導入したGaPナノワイヤの結晶成長及び光学特性2011

    • Author(s)
      中尾
    • Organizer
      第58回応用物理学関係連合講演会(24a-BQ9.)
    • Place of Presentation
      神奈川工科大学,神奈川
    • Year and Date
      2011-03-24
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] Regeneration of imprint molds using vacuum ultraviolet light2011

    • Author(s)
      M.Nakao
    • Organizer
      SPIE Advanced Lithography(7972-93)
    • Place of Presentation
      San Jose Convention Center, California, USA
    • Year and Date
      2011-02-28
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] Fast dry cleaning of resins by high-power vacuum ultraviolet light2011

    • Author(s)
      M.Nakao
    • Organizer
      SPIE Advanced Lithography(7972-49)
    • Place of Presentation
      San Jose Convention Center, California, USA
    • Year and Date
      2011-03-01
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] Fast dry cleaning of resins by high-power vacuum ultraviolet light2011

    • Author(s)
      M.Nakao
    • Organizer
      Symposium on SPIE Advanced Lithography
    • Place of Presentation
      San Jose Convention Center San Jose, California, USA
    • Year and Date
      2011-03-02
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] Regeneration of imprint molds using vacuum ultraviolet light2011

    • Author(s)
      M.Nakao
    • Organizer
      Symposium on SPIE Advanced Lithography
    • Place of Presentation
      San Jose Convention Center San Jose, California, USA
    • Year and Date
      2011-03-01
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] Imprint-Mold-Cleaning by Vacuum Ultraviolet Light2010

    • Author(s)
      M.Nakao
    • Organizer
      The International Conference on Nanophotonics
    • Place of Presentation
      Epocal Tsukuba, Tsukuba Ibaragi
    • Year and Date
      2010-05-31
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] Imprint-Mold-Cleaning by Vacuum Ultraviolet Light2010

    • Author(s)
      M.Nakao
    • Organizer
      The Int.Conf.on Nanophotonics 2010(O-01)
    • Place of Presentation
      Tsukuba International Congress Center, Ibaragi
    • Year and Date
      2010-05-03
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] Towards the Implementation of an Organic Inorganic Laser for Next Generation Optical Applications2010

    • Author(s)
      M.Nakao
    • Organizer
      CLEO 2010(ATuB4)
    • Place of Presentation
      San Jose Convention Center, California, USA
    • Year and Date
      2010-05-16
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] Fabrication of a Grating on Composite Semiconductors using UV Nanoimprint Lithography2009

    • Author(s)
      M.Nakao
    • Organizer
      26th Internat.Conference of Photopolymer Science and Technology(ICPST-26)(A7)
    • Place of Presentation
      Univ.Chiba,Chiba
    • Year and Date
      2009-06-30
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] Optoelectronic materials and components characterization for organic inorganic laser assembly2009

    • Author(s)
      M.Nakao
    • Organizer
      The 14th OptoElectronics and Communications Conference (OECC2009)(5222647)
    • Place of Presentation
      Hong Kong Convention Exhibition Centre, China
    • Year and Date
      2009-07-15
    • Data Source
      KAKENHI-PROJECT-20200028
  • [Presentation] Hybrid Organic Active Waveguide for C-band Applications2009

    • Author(s)
      M.Nakao
    • Organizer
      11th Int.Conference on Transparent Optical Network(pp.1-3.)
    • Place of Presentation
      Island of Sao Miguel, Azzores, Portugal
    • Year and Date
      2009-06-28
    • Data Source
      KAKENHI-PROJECT-20200028

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