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KUBOTA Masanori  久保田 雅則

ORCIDConnect your ORCID iD *help
Researcher Number 80447424
Affiliation (based on the past Project Information) *help 2014: 東京大学, 大学院工学系研究科, 助教
2011 – 2013: 東京大学, 工学(系)研究科(研究院), 助教
2008 – 2012: 東京大学, 工学系研究科, 助教
Review Section/Research Field
Principal Investigator
Fluid engineering
Except Principal Investigator
Engineering / Science and Engineering / Electron device/Electronic equipment
Keywords
Principal Investigator
MEMS / 高アスペクト比トレンチ / ピラニーゲージ / 熱マイクロフォン / MEMSプローブ / ステルスダイシング / 集積化MEMS / 超臨界流体製膜 / 集積化ガスシステム / 極微細高アスペクト比トレンチ / 熱伝導圧力センサ … More
Except Principal Investigator
… More アダブティブ / 偏波制御 / ユニタリ変換 / 光波合成 / モノリシック / アダプティブ / 半導体 / 光集積回路 / 集積フォトニクス / MOVPEデジタル光回路 / 全光フリップフロツプ / 半導体光デバイス / デジタル光回路 / MOVPE / 全光処理 / 非相反光デバイス / 全光フリップフロップ / 全光論理ゲート / 半導体デバイス / 半導体光集積回路 / 光回路 / 光デバイス Less
  • Research Projects

    (3 results)
  • Research Products

    (20 results)
  • Co-Researchers

    (5 People)
  •  半導体モノリシック光波合成・任意ユニタリ変換光集積回路の創出

    • Principal Investigator
      中野 義昭
    • Project Period (FY)
      2014 – 2018
    • Research Category
      Grant-in-Aid for Specially Promoted Research
    • Review Section
      Science and Engineering
      Engineering
    • Research Institution
      The University of Tokyo
  •  Integrated Gas System Based on Molecular Flow in Ultra-Fine Silicon StructuresPrincipal Investigator

    • Principal Investigator
      KUBOTA Masanori
    • Project Period (FY)
      2011 – 2012
    • Research Category
      Grant-in-Aid for Young Scientists (B)
    • Research Field
      Fluid engineering
    • Research Institution
      The University of Tokyo
  •  Digital Photonics -Paradigm Shift in Optoelectronics

    • Principal Investigator
      NAKANO Yoshiaki
    • Project Period (FY)
      2008 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      The University of Tokyo

All 2014 2013 2012 2008

All Presentation

  • [Presentation] High precision measurement of on-wafer LED device by CMOS-MEMS probe card with electrical contact sensing function2014

    • Author(s)
      Kota Hosaka, Masanori Kubota, Yu-Tang Chen, and Yoshio Mita
    • Organizer
      第30回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      仙台国際センター(宮城)
    • Year and Date
      2014-11-05
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] A test structure of bypass diodes for on-chip high-voltage silicon photovoltaic cell array2014

    • Author(s)
      Isao Mori, Masanori Kubota, and Yoshio Mita
    • Organizer
      2014 IEEE Conference on Microelectronic Test Structures
    • Place of Presentation
      ウーディネ(イタリア)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] 非接触MEMS駆動を目指したマイクロ電磁界共鳴電力伝送回路に関する研究2014

    • Author(s)
      坂本直之 , 塩見英久 , 久保田雅則 , 岡村康行 , 三田吉郎
    • Organizer
      電子情報通信学会集積回路研究会
    • Place of Presentation
      京都大学時計台記念館(京都)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] EXPERIMENTAL EVALUATION OF HIGH VOLTAGE HOLD-OFF CAPABILITY OF POST-PROCESS MESA-ISOLATED SERIES STANDARD CMOS TRANSISTORS2013

    • Author(s)
      A. Hirakawa, S. Morishita, I. Mori, M. Kubota, and Y. Mita
    • Organizer
      The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      バルセロナ(スペイン)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] Evaluation of Silicon Fracture Strength Dependence on Stealth Dicing Layers for"Cleave-before-Use"MEMS Freestanding Cantilever Probes2013

    • Author(s)
      Masanori Kubota, Kota Hosaka, Masakazu Sugiyama, and Yoshio Mita
    • Organizer
      The 17^<th> International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      バルセロナ(スペイン)
    • Year and Date
      2013-06-16
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] Evaluation of Silicon Fracture Strength Dependence on Stealth Dicing ayers for "Cleave-before-Use" MEMS Freestanding Cantilever Probes2013

    • Author(s)
      Masanori Kubota, Kota Hosaka, Masakazu Sugiyama, and Yoshio Mita
    • Organizer
      The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      バルセロナ(スペイン)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] High precision measurement of on-wafer LED devices by CMOS-MEMS probe card with electrical contact sensing function2013

    • Author(s)
      Kota Hosaka, Masanori Kubota, Yu-Tang Chen, and Yoshio Mita
    • Organizer
      第30回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      仙台国際センター(宮城)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] MEMS技術を用いた音波の熱的な検知に関する研究2013

    • Author(s)
      施英漢,久保田雅則,三田吉郎
    • Organizer
      電気学会マイクロマシンセンサシステム研究会
    • Place of Presentation
      東京工科大学(東京)
    • Year and Date
      2013-08-08
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] Evaluation of Silicon Fracture Strength Dependence on Stealth Dicing Layers for “Cleave-before-Use” MEMS Freestanding Cantilever Probes2013

    • Author(s)
      M. Kubota, K. Hosaka, M. Sugiyama, and Y. Mita
    • Organizer
      The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      バルセロナ(スペイン)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] Experimental Evaluation of High Voltage Hold-Off Capability of Post-Process Mesa-Isolated Series Standard CMOS Transistors2013

    • Author(s)
      Atsushi Hirakawa, Satoshi Morishita, Isao Mori, Masanori Kubota, and Yoshio Mita
    • Organizer
      The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      バルセロナ(スペイン)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] An Integrated CMOS-MEMS Probe having Two-Tips per Cantilever for Individual Contact Sensing and Kelvin Measurement with Two Cantilevers2013

    • Author(s)
      Kota Hosaka, Satoshi Morishita, Isao Mori, Masanori Kubota, and Yoshio Mita
    • Organizer
      2013 IEEE International Conference on Microelectronic Test Structures
    • Place of Presentation
      大阪大学(大阪)
    • Year and Date
      2013-03-25
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] An Integrated CMOS-MEMS Probe having Two-Tips per Cantilever for Individual Contact Sensing and Kelvin Measurement with Two Cantilevers2013

    • Author(s)
      Kota Hosaka and Satoshi Morishita and Isao Mori and Masanori Kubota and Yoshio Mita
    • Organizer
      2013 IEEE International Conference on Microelectronic Test Structures
    • Place of Presentation
      大阪(大阪大学 中之島センター)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] ステルスダイシングを利用した埋め込み式予約素子分離法2012

    • Author(s)
      木原泰樹,久保田雅則,森下賢志,百瀬健,近藤愛子,霜垣幸浩,三田吉郎
    • Organizer
      電気学会マイクロマシンセンサシステム研究会
    • Place of Presentation
      京都大学(京都)
    • Year and Date
      2012-06-10
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] ステルスダイシングを利用した埋め込み式予約素子分離法2012

    • Author(s)
      木原泰樹,久保田雅則,森下賢志,百瀬健,近藤愛子,霜垣幸浩,三田吉郎
    • Organizer
      マイクロマシン・センサシステム研究会
    • Place of Presentation
      京都(京都大学 百周年時計台記念館)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] 環境にばらまくセンサネットワーク素子実現に関する一考察2012

    • Author(s)
      森 功,久保田 雅則,三田 吉郎
    • Organizer
      マイクロマシン・センサシステム研究会
    • Place of Presentation
      京都(京都大学 百周年時計台記念館)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] 高アスペクト比垂直ナノギャップを用いた高圧対応 MEMS ピラニーゲージ2012

    • Author(s)
      久保田 雅則
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] A 50 nm-Wide 5 μm-Deep Copper Vertical Gap Formation Method by A Gap-Narrowing Post-Process with Supercritical Fluid Deposition for Pirani Gauge Operating over Atmospheric Pressure2012

    • Author(s)
      久保田 雅則
    • Organizer
      The 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012)
    • Place of Presentation
      パリ(フランス)
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] 高アスペクト比垂直ナノギャップを用いた高圧対応MEMSピラニーゲージ2012

    • Author(s)
      久保田雅則,三田吉郎,百瀬健,近藤愛子,霜垣幸浩,中野義昭,杉山正和
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京)
    • Year and Date
      2012-03-16
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] A 50 nm-Wide 5μm-Deep Copper Vertical Gap Formation Method by A Gap-Narrowing Post-Process with Supercritical Fluid Deposition for Pirani Gauge Operating over Atmospheric Pressure2012

    • Author(s)
      Masanori Kubota, Yoshio Mita, Takeshi Momose, Aiko Kondo, Yoshihiro Shimogaki, Yoshiaki Nakano, Masakazu Sugiyama
    • Organizer
      The 25th International Conference on Micro Electro Mechanical Systems
    • Place of Presentation
      パリ(フランス)
    • Year and Date
      2012-02-02
    • Data Source
      KAKENHI-PROJECT-23760145
  • [Presentation] A novel etching-oxidation fabrication method for 3D nano structures on silicon and its application to SOI symmetric waveguid and 3D taper spot size converter2008

    • Author(s)
      Ling-Han Li, Akio Higo, Masanori Kubota, Masakazu Sugiyama, and Yoshiaki Nakano
    • Organizer
      Technical Digest, Topical Meeting on Optical MEMS and Nanophotonics, M3.4, pp. 27-28
    • Place of Presentation
      Freibourg, Germany
    • Year and Date
      2008-08-11
    • Data Source
      KAKENHI-PROJECT-20226008
  • 1.  NAKANO Yoshiaki (50183885)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 1 results
  • 2.  SUGIYAMA Masakazu (90323534)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 1 results
  • 3.  TANEMURA Takuo (90447425)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 4.  HIGO Akio (60451895)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 1 results
  • 5.  小関 泰之 (60437374)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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